Evaporation coating machine and coating baffle thereof

Abstract

The utility model relates to an evaporation coating machine and a coating baffle plate thereof. The coating baffle plate comprises a baffle plate, a connecting block and a supporting rod, a mounting hole is formed in the connecting block, one end of the supporting rod is detachably arranged in the mounting hole, the connecting block is provided with an inclined surface, the inclined surface of the connecting block is inclined relative to the supporting rod, and the separation blade is detachably arranged on the inclined surface of the connecting block, so that the separation blade is inclined relative to the supporting rod. The area of the cross section of the blocking piece is larger than the area of the inclined face of the connecting block. And the supporting rods of the coating baffle are detachably connected with the connecting blocks, so that the connecting blocks with different inclined planes can be conveniently replaced. The blocking pieces of the coating baffle are detachably connected with the connecting blocks, so that the blocking pieces with different sizes and areas can be replaced conveniently, and meanwhile, the blocking pieces can be detached and cleaned conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation coating, in particular to an evaporation coating machine and a coating baffle thereof. Background Art

[0002] Vacuum evaporation coating utilizes vacuum conditions to heat the raw materials for forming the thin film through an evaporation container in a vacuum chamber, causing the raw material molecules or atoms to escape from the surface, forming a vapor flow that adheres to the surface of the substrate and condenses into a solid film, thereby achieving the purpose of thin film manufacturing.

[0003] In the quartz crystal industry, the wafer coating process generally involves loading the quartz wafer into the corresponding coating fixture, and then placing the coating fixture into the coating machine for coating. In order to increase the number of coating fixtures placed, the coating fixture is generally placed at a certain tilt angle rather than horizontally, so there will be a height difference between the evaporation container of the coating machine and the top and bottom of the coating fixture, resulting in different coating thicknesses of the wafers at different positions on the coating fixture, causing frequency dispersion of the quartz wafer. The impact is more obvious on miniaturized and high-frequency crystals, resulting in a lower production qualification rate and increased production costs. Utility Model Content

[0004] Based on this, it is necessary to provide an evaporation coating machine and a coating baffle thereof.

[0005] The technical solution of the utility model for solving the above-mentioned technical problems is as follows: A coating baffle, comprising: a baffle, a connecting block and a support rod; the connecting block is provided with a mounting hole, one end of the support rod is detachably arranged in the mounting hole, the connecting block has an inclined surface, the inclined surface of the connecting block is inclined relative to the support rod, the baffle is detachably arranged on the inclined surface of the connecting block, so that the baffle is inclined relative to the support rod, and the cross-sectional area of the baffle is larger than the area of the inclined surface of the connecting block.

[0006] In one embodiment, the support rod is a telescopic rod.

[0007] In one embodiment, the angle between the support rod and the blocking piece ranges from 30° to 60°.

[0008] In one embodiment, a first thread is provided on the inner side wall of the mounting hole, and a second thread is provided at one end of the support rod. When one end of the support rod is arranged in the mounting hole, the first thread is threadedly connected with the second thread.

[0009] In one embodiment, the baffle is provided with a first screw hole, and the inclined surface of the connecting block is provided with a second screw hole. When the baffle is set on the connecting block, the first screw hole is aligned with and connected to the second screw hole. The baffle is fixed on the connecting block by using a bolt to pass through the first screw hole and the second screw hole in sequence and screwed into the second screw hole.

[0010] In one embodiment, the first screw hole is provided in a middle portion of the blocking piece, and the second screw hole is provided in a middle portion of the inclined surface of the connecting block.

[0011] In one embodiment, the cross-section of the connecting block is triangular.

[0012] In one embodiment, the thickness of the baffle is 1 mm.

[0013] An evaporation coating machine comprises the coating baffle described in any one of the above embodiments.

[0014] The beneficial effects of the present invention are as follows: the present invention provides a coating baffle, which is used to be arranged between the coating fixture and the evaporation container in an evaporation coating machine. The coating baffle acts as a barrier, helping to reduce the difference in coating thickness between quartz wafers at different locations. Specifically, during the coating process, the coating fixture rotates around the evaporation container, and the coating material forms a vapor flow through the evaporation container and adheres to the quartz wafer in the coating fixture. The closer the quartz wafer is to the evaporation container, the thicker the coating thickness will be. Therefore, by adding a coating baffle to the evaporation coating machine, each time the coating fixture rotates to the coating baffle position, the vapor flow near the bottom of the coating fixture will be blocked by the coating baffle, while the vapor flow above the coating fixture can normally adhere to the quartz wafer, thereby improving the difference in coating thickness caused by the height difference of the coating fixture and reducing the frequency dispersion of the wafer after coating. At the same time, the support rod of the coating baffle is detachably connected to the connecting block, which facilitates the replacement of connecting blocks with different slopes. The baffles of the coated baffle are detachably connected to the connecting block, which makes it easy to replace baffles of different sizes and areas, and also makes it easy to disassemble and clean the baffles. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0016] Figure 1 A schematic diagram of the three-dimensional structure of a coating baffle in one direction according to an embodiment;

[0017] Figure 2 A schematic diagram of a three-dimensional exploded structure of a coating baffle in one direction according to an embodiment;

[0018] Figure 3 A schematic diagram of a three-dimensional exploded structure of a coating baffle in another direction in one embodiment;

[0019] Figure 4 This is a structural schematic diagram of a coating baffle, a coating fixture, and an evaporation container in one direction inside an evaporation coating machine in one embodiment.

[0020] In the accompanying drawings, 10, coating baffle; 100, baffle; 110, first screw hole; 200, connecting block; 210, mounting hole; 211, first thread; 220, inclined surface; 230, second screw hole; 300, support rod; 310, second thread; 400, coating fixture; 500, evaporation container. DETAILED DESCRIPTION

[0021] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The following will further describe the technical solution of the present invention in conjunction with the drawings of the embodiments of the present invention, and the present invention is not limited to the following specific implementation methods.

[0022] It should be understood that the same or similar reference numerals in the drawings of the embodiments correspond to the same or similar components. In the description of the present invention, it should be understood that if there are terms such as "upper", "lower", "front", "back", "left", "right", "top", "bottom", etc. indicating an orientation or positional relationship, they are based on the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting this patent. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to the specific circumstances.

[0023] In one embodiment, Figure 1 、 Figure 2 and Figure 3As shown, a coating baffle 10 includes: a baffle 100, a connecting block 200 and a support rod 300; the connecting block 200 is provided with a mounting hole 210, one end of the support rod 300 is detachably disposed in the mounting hole 210, the connecting block 200 has an inclined surface 220, and the inclined surface 220 of the connecting block 200 is inclined relative to the support rod 300. The baffle 100 is detachably disposed on the inclined surface 220 of the connecting block 200, so that the baffle 100 is inclined relative to the support rod 300, and the cross-sectional area of the baffle 100 is larger than the area of the inclined surface 220 of the connecting block 200.

[0024] Specifically, the coating baffle 10 is used to be arranged between the coating fixture and the evaporation container in the evaporation coating machine. The coating baffle 10 plays a blocking role, helping to reduce the difference in coating thickness of quartz wafers at different positions. Specifically, during the coating process of the evaporation coating machine, the coating fixture will rotate around the evaporation container, and the coating material will form a vapor flow through the evaporation container and adhere to the quartz wafer of the coating fixture. The closer the quartz wafer is to the evaporation container, the thicker the coating thickness will be. Therefore, by adding the coating baffle 10 to the evaporation coating machine, each time the coating fixture rotates to the position of the coating baffle 10, the vapor flow near the bottom of the coating fixture will be blocked by the coating baffle 10, while the vapor flow on the upper part of the coating fixture can be normally attached to the quartz wafer, thereby improving the difference in coating thickness caused by the height difference of the coating fixture and reducing the frequency dispersion of the wafer after coating. The support rod 300 of the coating baffle 10 is detachably connected to the connecting block 200, which facilitates replacement of connecting blocks 200 with different slopes. The baffle 100 of the coating baffle 10 is detachably connected to the connecting block 200, which facilitates replacement of baffles 100 with different sizes and areas, and also facilitates disassembly and cleaning of the baffle 100.

[0025] In order to be able to adjust the height of the support rod 300, in one embodiment, the support rod 300 is a telescopic rod. Specifically, the support rod 300 includes a first rod and a second rod, a cavity is provided in the first rod, and one end of the second rod is slidably arranged in the cavity. At the same time, a clamping hole is provided on the side wall of the first rod, and the clamping hole is connected to the cavity. A clamping block is provided in the clamping hole, and the clamping block passes through the clamping hole and movably abuts against the second rod, and the second rod can be fixed in the cavity by the clamping block. Through the above arrangement, according to the actual needs of the user, the relative position of the second rod in the cavity can be adjusted first, so as to adjust the support rod 300 to an appropriate height, and then the second rod is fixed in the cavity of the first rod by the clamping block, thereby completing the height adjustment of the support rod 300.

[0026] In order to have a suitable angle for the baffle 100 to shield the quartz wafer in the coating fixture 400 during the evaporation process, in one embodiment, as shown in FIG. Figure 1 As shown, the angle between the support rod 300 and the baffle 100 ranges from 30° to 60°. Specifically, by replacing the connecting block 200 with different inclined surfaces 220, the baffle 100 can be tilted at an angle of 30° to 60° relative to the support rod 300. Based on actual needs, the user can select the connecting block 200 with an inclined surface having an angle of 30° to 60° relative to the support rod 300, that is, select the baffle 100 with an angle of 30° to 60° relative to the support rod 300. This allows the baffle 100 with the corresponding inclined angle to fully exert its shielding effect, allowing the quartz wafer on the coating fixture 400 to be coated more evenly.

[0027] In order to achieve the detachable connection between the support rod 300 and the connecting block 200, in one embodiment, as shown in FIG. Figure 2 and Figure 3 As shown, a first thread 211 is provided on the inner side wall of the mounting hole 210, and a second thread 310 is provided on one end of the support rod 300. When one end of the support rod 300 is placed in the mounting hole 210, the first thread 211 is threadedly engaged with the second thread 310. Specifically, by rotating and screwing one end of the support rod 300 into the mounting hole 210, the first thread 211 is threadedly engaged with the second thread 310, thereby achieving a stable connection between the support rod 300 and the connecting block 200.

[0028] In order to achieve the detachable connection between the blocking piece 100 and the connecting block 200, in one embodiment, as shown in FIG. Figure 2 and Figure 3 As shown, the blocking piece 100 is provided with a first screw hole 110, and the inclined surface 220 of the connecting block 200 is provided with a second screw hole 230. When the blocking piece 100 is placed on the connecting block 200, the first screw hole 110 and the second screw hole 230 are aligned and communicated with each other. By sequentially passing a bolt through the first screw hole 110 and the second screw hole 230 and screwing it into the second screw hole 230, the blocking piece 100 is fixed to the connecting block 200. Specifically, the blocking piece 100 is fixed to the connecting block 200 by aligning the first screw hole 110 of the blocking piece 100 with the second screw hole 230 of the connecting block 200, and then sequentially passing a bolt through the first screw hole 110 and the second screw hole 230 and screwing it into the second screw hole 230. With this arrangement, the blocking piece 100 and the connecting block 200 can be installed or removed by simply turning the bolt.

[0029] In order to quickly install or remove the blocking piece 100 and the connecting block 200, in one embodiment, as shown in FIG. Figure 1 and Figure 2 As shown, the first screw hole 110 is provided in the middle portion of the baffle 100, and the second screw hole 230 is provided in the middle portion of the inclined surface 220 of the connecting block 200. Specifically, with the above arrangement, only one first screw hole 110 needs to be provided in the middle portion of the baffle 100, and only one second screw hole 230 needs to be provided in the middle portion of the inclined surface 220 of the connecting block 200. A single bolt can then be passed through and screwed into the first screw hole 110 and the second screw hole 230 in sequence to complete the fixed connection between the baffle 100 and the connecting block 200. This eliminates the need for multiple bolts for fixation, thereby saving installation or disassembly time.

[0030] In one embodiment, Figure 2 and Figure 3 As shown, the cross-sectional shape of the connecting block 200 is triangular. Specifically, the cross-sectional shape of the connecting block 200 is a right triangle, and the hypotenuse of the right triangle is the inclined surface 220 of the connecting block 200. The right triangle has stability, so the connecting block 200 with a right triangle cross-sectional shape is more stable.

[0031] In one embodiment, the baffle 100 has a thickness of 1 mm. Specifically, the baffle 100 having a thickness of 1 mm can block the vapor of the coating, and using the baffle 100 having a thickness of 1 mm can save material.

[0032] In one embodiment, Figure 4As shown, an evaporation coating machine includes the coating baffle 10 described in any of the above embodiments. Specifically, the evaporation coating machine also includes a plurality of coating fixtures 400 and an evaporation container 500. The evaporation fixtures are used to fix the quartz wafers to be evaporated, and the evaporation container 500 is used to place the coating material. The coating fixtures 400 are arranged at equal intervals around the evaporation container 500, and the coating baffle 10 is arranged between the coating fixtures 400 and the evaporation container 500. When the evaporation coating machine is coating, the coating fixtures 400 will rotate around the evaporation container 500, and the coating material will form a vapor flow through the evaporation container 500 and adhere to the quartz wafer of the coating fixture 400. By setting the above-mentioned coating baffle 10 in the evaporation coating machine, each time the coating fixture 400 rotates to the position of the coating baffle 10, the steam flow near the bottom of the coating fixture 400 will be blocked by the coating baffle 10, and the steam flow on the upper part of the coating fixture 400 can be normally attached to the quartz chip, thereby improving the coating thickness difference caused by the height difference of the coating fixture 400 and reducing the frequency dispersion of the chip after coating.

[0033] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. A person skilled in the art will be able to make other variations or modifications based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A coated baffle, characterized in that: include: baffles, connecting blocks and support rods; The connecting block is provided with a mounting hole, one end of the support rod is detachably arranged in the mounting hole, the connecting block has an inclined surface, the inclined surface of the connecting block is inclined relative to the support rod, the baffle is detachably arranged on the inclined surface of the connecting block, so that the baffle is inclined relative to the support rod, and the cross-sectional area of the baffle is larger than the area of the inclined surface of the connecting block.

2. The coating baffle according to claim 1, characterized in that: The support rod is a telescopic rod.

3. The coating baffle according to claim 1, characterized in that: The included angle between the support rod and the blocking piece ranges from 30° to 60°.

4. The coating baffle according to claim 1, characterized in that: A first thread is provided on the inner side wall of the mounting hole, and a second thread is provided at one end of the support rod. When one end of the support rod is arranged in the mounting hole, the first thread is threadedly connected with the second thread.

5. The coating baffle according to claim 1, characterized in that: The blocking piece is provided with a first screw hole, and the inclined surface of the connecting block is provided with a second screw hole. When the blocking piece is set on the connecting block, the first screw hole is aligned with and connected to the second screw hole. The blocking piece is fixed on the connecting block by using a bolt to pass through the first screw hole and the second screw hole in sequence and screwed into the second screw hole.

6. The coating baffle according to claim 5, characterized in that: The first screw hole is provided in the middle portion of the blocking piece, and the second screw hole is provided in the middle portion of the inclined surface of the connecting block.

7. The coating baffle according to claim 1, characterized in that: The cross-section of the connecting block is triangular.

8. The coating baffle according to claim 1, characterized in that: The thickness of the baffle is 1 mm.

9. An evaporation coating machine, characterized in that: The coating baffle comprises the coating baffle according to any one of claims 1 to 8.

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