Detachable double-side metallization sputtering clamp

Abstract

The utility model relates to a detachable double-side metallization sputtering clamp, which comprises a base, a lower cover plate, two side plates, an upper cover plate and a pressing block, the base is a horizontally arranged cuboid component, the upper surface of the base is provided with a through groove for arranging an attenuation slice along the length direction, the lower end of the base is provided with a first sputtering through hole communicated with the through groove; the lower cover plate is detachably arranged at the lower end of the base, a first limiting block matched and embedded with the first sputtering through hole is arranged at the upper end of the lower cover plate, the pressing block is arranged on the upper surface of the base, a second sputtering through hole matched with the through groove is formed in the pressing block in an up-down penetrating mode, and the upper cover plate is arranged at the upper end of the pressing block; the lower end of the upper cover plate is provided with a second limiting block matched and embedded with the second sputtering through hole, the two ends of the pressing block are detachably connected with the side plates respectively, and the two side plates are arranged at the two ends of the base respectively and detachably connected with the two ends of the base and the two ends of the pressing block respectively. The method has the advantages that metallization processing on the side surface of the device can be effectively assisted, and the operation is very convenient and rapid.

Description

Technical Field

[0001] The utility model relates to the technical field of processing products such as semiconductors, insulators and metals, and in particular to a detachable double-side metallization sputtering fixture. Background Art

[0002] Magnetron sputtering technology is a highly controllable method for producing semiconductors, insulators, and metal products, offering large coating areas and excellent adhesion. It achieves high-speed film formation, low-temperature operation, and minimal damage to the surface of the sputtered object. This technology introduces a magnetic field to the cathode surface of the target material, leveraging the magnetic field's ability to confine charged particles to increase plasma density and thus the sputtering rate.

[0003] For thin-film products, it is necessary to interconnect the upper and lower layers of circuit networks to achieve functions such as grounding. The general method is to laser-drill the product and then connect the upper and lower layers of circuits through metallized vias. However, for high-power devices, special materials, and size restrictions, metallized vias cannot meet the production needs of the product. For such cases, it is necessary to metallize the side of the device to achieve the same electrical connection effect as punching, and to improve its power capacity and reliability. For the double-side metallization process, it is generally necessary to sputter one side of the product first, then remove the product, reload it, and sputter the other side. The process is cumbersome, and the metal surface of the product may be scratched during the two loading processes, reducing the product qualification rate and increasing time costs.

[0004] Based on this, it is necessary to develop a detachable double-sided metallization sputtering fixture to overcome the above technical problems. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a detachable double-sided metallization sputtering fixture, which effectively overcomes the defects of the prior art.

[0006] The technical solution of the utility model to solve the above technical problems is as follows:

[0007] The cam is secured to a position adjacent to the top of the base and secured to a location adjacent to the top of the base for securing the cam.

[0008] On the basis of the above technical solution, the present invention can also be improved as follows.

[0009] Furthermore, the through groove is arranged in the middle area of the upper surface of the base.

[0010] Furthermore, the lower cover plate is a rectangular plate.

[0011] Furthermore, the first sputtering through hole is a waist-shaped hole, and the corresponding first limiting block is a component with a waist-shaped cross section.

[0012] Furthermore, the pressing block is a rectangular component, and the upper cover plate is a rectangular plate.

[0013] Furthermore, the second sputtering through hole is a waist-shaped hole, and the corresponding second limiting block is a component with a waist-shaped cross section.

[0014] Furthermore, the side panels are respectively provided with limiting tenons embedded in corresponding ends of the through slots.

[0015] Furthermore, it also includes accompanying plates. A plurality of attenuation plates are provided between the above-mentioned limiting tenons at both ends of the above-mentioned through groove. The above-mentioned accompanying plates are provided between the above-mentioned attenuation plates, or the above-mentioned accompanying plates are provided between two adjacent above-mentioned attenuation plates.

[0016] Furthermore, the side plates are connected to corresponding ends of the base via bolts passing through the side plates.

[0017] Furthermore, the side plates are connected to corresponding ends of the pressing blocks via bolts passing through the side plates.

[0018] The beneficial effects of the utility model are: simple and reasonable structural design, the ability to effectively assist in metallization treatment of the side surface of the device, and the very convenient and quick operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic structural diagram of a detachable double-sided metallization sputtering fixture of the present invention;

[0020] Figure 2 This is an exploded view of the structure of the detachable double-sided metallization sputtering fixture of the present invention.

[0021] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0022] 1. Base; 2. Lower cover; 3. Side panel; 4. Upper cover; 5. Pressing block; 11. Through slot; 21. First limiting block; 31. Limiting tenon; 41. Second limiting block. DETAILED DESCRIPTION

[0023] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0024] Example: Figure 1 and 2 As shown, the detachable double-sided metallized sputtering fixture of this embodiment includes a base 1, a lower cover plate 2, two side plates 3, an upper cover plate 4 and a pressing block 5. The above-mentioned base 1 is a horizontally arranged rectangular parallelepiped component, and a through groove 11 for installing a damping plate is opened on its upper surface along its length direction. The lower end of the above-mentioned base 1 is provided with a first sputtering through hole that passes through the through groove 11. The above-mentioned lower cover plate 2 is detachably arranged at the lower end of the above-mentioned base 1, and the upper end thereof is provided with a first limit block 21 that adapts and fits with the above-mentioned first sputtering through hole. The above-mentioned pressing block 5 is arranged on the upper surface of the above-mentioned base 1, and a second sputtering through-hole adapted to the above-mentioned through-groove 11 is provided through the above-mentioned pressing block 5 from top to bottom. The above-mentioned upper cover plate 4 is arranged at the upper end of the above-mentioned pressing block 5, and the lower end of the above-mentioned upper cover plate 4 is provided with a second limit block 41 adapted to and engaged with the above-mentioned second sputtering through-hole. The two ends of the above-mentioned pressing block 5 are respectively detachably connected to the above-mentioned side plates 3, and the two side plates 3 are respectively arranged at the two ends of the above-mentioned base 1, and are respectively detachably connected to the above-mentioned base 1 and the two ends of the pressing block 5.

[0025] The detachable double-sided metallization sputtering fixture of this embodiment is made of aluminum alloy. A through groove 11 and a first sputtering hole are respectively provided at the upper and lower ends of the base 1. The through groove 11 is narrow and is used to accommodate the attenuation plate. The wider first sputtering hole is the sputtering surface. The lower cover plate 2 is installed at the lower end of the base 1, and the two are connected to the base 1 by screws. At the same time, the first limit block 21 at the upper end of the lower cover plate 2 is embedded in the first sputtering hole, completely closing the back of the base 1 to prevent the product from sliding out; the two ends of the base 1 on both sides of the side plate 3 ensure that the two ends of the through groove 11 are closed, limiting the product to be sputtered (attenuation plate) from tipping to the two ends, ensuring that the product is always perpendicular to the sputtering direction; the through groove 11 at the upper end of the base 1 is restricted by the left and right side plates 3 and combined with the pressing block 5 to limit the product to the through groove 11 of the base 1; when the upper cover plate 4 is not set, the metal sputtering of one side of the product is completed. After the sputtering is completed on one side of the product, the upper cover plate 4 can be covered, and then the fixture is turned 180° as a whole, the lower cover plate 2 is removed, and the sputtering of the other side is completed. After the lower cover 2 and upper cover 4 on both sides are assembled, the product can be guaranteed not to be scattered or tipped over during transportation. After the attenuation sheet with double-sided metallization is completed, the upper and lower circuits are interconnected through the side metal.

[0026] It should be noted that during assembly, the fixture only needs to be tilted at a certain angle before placing the attenuation sheet. Due to the limiting effect of the through-slot 11, there is no need to worry about the substrate being scattered due to improper placement. Overall, the fixture structure is simple and rationally designed, effectively assisting in the metallization of the device side, and is very convenient and quick to operate.

[0027] In this embodiment, the through slot 11 is provided in the middle area of the upper surface of the base 1. The through slot 11 is a rectangular parallelepiped slot.

[0028] In this embodiment, the lower cover plate 2 is a rectangular plate, and its length and width are consistent with those of the base 1.

[0029] In this embodiment, the first sputtering through hole is a waist-shaped hole, and the corresponding first stopper 21 is a member with a waist-shaped cross section. After the first stopper 21 is inserted into the first sputtering through hole, the surface of the first stopper 21 is exactly flush with the bottom of the through groove 11.

[0030] In this embodiment, the pressing block 5 is a rectangular parallelepiped member, and the upper cover plate 4 is a rectangular plate. The shapes of the two are consistent with the shape of the base 1, and the length and width of the pressing block 5 and the upper cover plate 4 are consistent with the length and width of the base 1.

[0031] In this embodiment, the second sputtering through hole is a waist-shaped hole, and the corresponding second stopper 41 is a member with a waist-shaped cross-section. After the second stopper 41 is inserted into the second sputtering through hole, the surface of the second stopper 41 is exactly flush with the bottom of the through groove 11.

[0032] As a preferred embodiment, the side panels 3 are respectively provided with limiting latches 31 embedded in corresponding ends of the through slots 11 .

[0033] In the above embodiment, when assembling the attenuation sheets, a plurality of attenuation sheets are arranged in the through slot 11 and confined between the limiting latches 31 of the two side panels 3 to ensure that the attenuation sheets do not shake along the through slot 11 .

[0034] As a preferred embodiment, it also includes accompanying plates. A plurality of attenuation plates are provided between the above-mentioned limiting tenons 31 at both ends of the above-mentioned through groove 11, the above-mentioned accompanying plates are provided between the above-mentioned attenuation plates, or the above-mentioned accompanying plates are provided between two adjacent above-mentioned attenuation plates.

[0035] In the above embodiment, during operation, there is a situation where different numbers of attenuation plates are placed in the through groove 11. Therefore, when the number of attenuation plates is small, companion plates are added between the attenuation plates so that the attenuation plates and the companion plates are restricted between the limit latches 31 at both ends.

[0036] In addition, considering the thickness of the metal sputtering on the side, there may be two situations. The first situation is if the sputtering metal is gold and the sputtering thickness is 0.1um, then the products can be arranged normally. The second situation is if the side needs to be sputtered with metal copper and the thickness is greater than 1um. If it is directly sputtered at this time, then it may cause adjacent products to stick together through the side, resulting in the film layer tearing when the single product after sputtering is completed is removed. To avoid this situation, the second situation mentioned above recommends the use of companion sheets, which are placed along the products in sequence. Therefore, the companion sheets are staggered between the two attenuation sheets to prevent the side ends of the two adjacent attenuation sheets from sticking together.

[0037] In this embodiment, the side panels 3 are connected to the corresponding ends of the base 1 by bolts passing through the side panels 3. Generally, the side panels 3 are threadedly connected to the bolt holes at the corresponding ends of the base 1 by two bolts passing through the side panels 3.

[0038] In this embodiment, the side panels 3 are connected to the corresponding ends of the pressure blocks 5 by bolts passing through them. Generally, the side panels 3 are provided with an upwardly extending strip hole, through which the bolts pass and are threadedly connected to the bolt holes at the ends of the pressure blocks 5.

[0039] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0040] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this utility model, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0041] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0042] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0043] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0044] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are illustrative and cannot be understood as limitations on the present invention. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A detachable double-sided metallization sputtering fixture, characterized by: The invention comprises a base (1), a lower cover (2), two side plates (3), an upper cover (4) and a pressing block (5), wherein the base (1) is a horizontally arranged rectangular parallelepiped component, and a through groove (11) for installing a damping plate is provided on its upper surface along its length direction, and a first sputtering through hole is provided at the lower end of the base (1) and is communicated with the through groove (11), the lower cover (2) is detachably arranged at the lower end of the base (1), and a first limiting block (21) adapted to and embedded in the first sputtering through hole is provided at the upper end of the lower cover (2), and the pressing block (5) is arranged at the lower end of the lower cover (2). The upper surface of the base (1) is provided with a second sputtering through hole adapted to the through groove (11) running through the upper and lower parts of the pressing block (5); the upper cover plate (4) is provided at the upper end of the pressing block (5); the lower end of the upper cover plate (4) is provided with a second limit block (41) adapted to and engaged with the second sputtering through hole; the two ends of the pressing block (5) are respectively detachably connected to the side plates (3); the two side plates (3) are respectively provided at the two ends of the base (1), and are respectively detachably connected to the base (1) and the two ends of the pressing block (5).

2. The detachable double-sided metallization sputtering fixture according to claim 1, characterized in that: The through groove (11) is arranged in the middle area of the upper surface of the base (1).

3. The detachable double-sided metallization sputtering fixture according to claim 1, characterized in that: The lower cover plate (2) is a rectangular plate.

4. The detachable double-sided metallization sputtering fixture according to claim 3, characterized in that: The first sputtering through hole is a waist-shaped hole, and the corresponding first limiting block (21) is a component with a waist-shaped cross section.

5. The detachable double-sided metallization sputtering fixture according to claim 1, characterized in that: The pressing block (5) is a rectangular parallelepiped component, and the upper cover plate (4) is a rectangular plate.

6. The detachable double-sided metallization sputtering fixture according to claim 5, characterized in that: The second sputtering through hole is a waist-shaped hole, and the corresponding second limiting block (41) is a component with a waist-shaped cross section.

7. The detachable double-sided metallization sputtering fixture according to any one of claims 1 to 6, characterized in that: The side plates (3) are respectively provided with position limiting tenons (31) embedded in corresponding ends of the through slots (11).

8. The detachable double-sided metallization sputtering fixture according to claim 7, characterized in that: It also includes accompanying plates. A plurality of attenuation plates are provided between the limiting latches (31) at both ends of the through slot (11). The accompanying plates are provided between the attenuation plates, or the accompanying plates are provided between two adjacent attenuation plates.

9. The detachable double-sided metallization sputtering fixture according to any one of claims 1 to 6, characterized in that: The side plates (3) are connected to corresponding ends of the base (1) via bolts passing through the side plates (3).

10. The detachable double-sided metallization sputtering fixture according to claim 9, characterized in that: The side plates (3) are connected to corresponding ends of the pressing blocks (5) via bolts passing through the side plates (3).

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