Fluidized bed horizontal rotary kiln used in CVD (Chemical Vapor Deposition) process

Abstract

The utility model discloses a fluidized bed horizontal rotary kiln for a CVD (Chemical Vapor Deposition) process, and mainly relates to the technical field of industrial kilns. Comprising a heating sleeve and a rotary cylinder, the rotary cylinder is rotationally installed in the heating sleeve, gas guide pipes at the first end and the second end of the rotary cylinder are detachably connected with rotary pipes of a first rotary connector and a second rotary connector respectively through connector pipes, the rotary cylinder is vacuumized multiple times through a vacuum pump, and then inert gas is input through the second rotary connector. The temperature in the rotary drum is increased through the heating sleeve, then the rotary drum is driven to rotate through the driving mechanism, reaction gas is introduced, and reacted gas is discharged, so that powder particles are overturned and fluidized in the rotary drum, and coating of the powder particles is achieved. The equipment disclosed by the utility model can realize rapid heating and cooling due to high-efficiency heat transfer capability, so that the equipment is widely applied to some heat treatment processes needing rapid treatment.

Description

Technical Field

[0001] The utility model relates to the technical field of industrial kilns, in particular to a fluidized bed horizontal rotary kiln used in a CVD process. Background Art

[0002] Industrial furnaces are constructed of refractory materials and used to calcine materials or burn products. Common industrial furnaces include circulating fluidized bed boilers (CFB boilers), cement kilns, dry quenching coke ovens, and waste incinerators. However, existing high-efficiency CFB boilers that burn low-calorific value fuels are prone to clogging during feed, making them less practical.

[0003] Fluidized beds and horizontal rotary kilns are both major types of heat treatment equipment, each with unique advantages and disadvantages. Fluidized bed equipment, due to its efficient heat transfer and ability to achieve rapid heating and cooling, has been widely used in heat treatment processes requiring rapid processing. It effectively addresses fundamental issues in thermodynamics, mechanics, and materials science, as well as engineering challenges such as expansion, wear, and overheating, becoming a leading technology in energy utilization. Summary of the Invention

[0004] The utility model applies the rotary kiln to the CVD process, giving full play to its high-efficiency heat transfer characteristics, and then combines it with the fluidized bed technology by adding a gas pipeline at the tail to give full play to the advantages of both. At the same time, the utility model designs the powder raw material loading and pouring structure of the rotary kiln, which is convenient for fluidizing and coating powder particles in the rotary kiln under a sealed state.

[0005] In response to the deficiencies in the prior art, the present application provides a fluidized bed horizontal rotary kiln for use in a CVD process, comprising a heating jacket and a rotary drum, wherein the heating jacket is sleeved outside the rotary drum, the first and second ends of the rotary drum are rotatably connected to the heating jacket and extend out of the heating jacket, the first / second ends of the rotary drum are respectively encapsulated with flange covers, an air guide pipe is centrally arranged on the flange cover, the air guide pipes at the first / second ends of the rotary drum are detachably connected to the rotating pipes of the first / second rotary joints through joint pipes, the fixed pipe of the first rotary joint is sequentially connected to a flow meter and a vacuum pump, the fixed pipe of the second rotary joint is sequentially connected to a flow meter and a precursor gas supply system, and ... respectively detachably connected to the rotating pipes of the first / second rotary joints through joint pipes. The heat sleeve is mounted on the bottom plate, and the bottom plate is configured so that a side of the bottom plate close to the first rotary joint is rotatably connected to the base, and a side of the bottom plate close to the second rotary joint is connected to the base through a telescopic mechanism. The telescopic mechanism is used to tilt the central axis of the rotary drum relative to the horizontal plane to facilitate loading and unloading of processed objects. The part of the second end of the rotary drum located outside the heating sleeve is driven to rotate by a driving device, and the driving device is mounted on the bottom plate. The first / second rotary joints can be slidably mounted on different slides, and the slide slidably connected to the second rotary joint is mounted on the bottom plate. When the bottom plate is located on a horizontal plane, the two slides are parallel to the horizontal plane and perpendicular to the central axis of the rotary drum.

[0006] Furthermore, the joint pipe includes a bellows, a clamp, and an annular gasket. The annular gasket is clamped between the two ends of the bellows and the air guide pipe and the rotating pipe respectively. The clamp is used to embrace and apply pressure to the bellows, the air guide pipe and the rotating pipe toward the annular gasket.

[0007] Furthermore, the first / second rotary joints both include a fixed tube and a rotating tube, one end of the fixed tube is provided with an inwardly concave tubular cavity, and the outer periphery of the rotating tube and the end extending into the tubular cavity is sheathed with an oil retaining ring, a bearing, and a retaining ring. The oil retaining ring, the bearing, and the retaining ring are arranged in sequence from the inside to the outside in the tubular cavity. The rotating tube is rotatably connected to the fixed tube through the bearing, and the retaining ring is fixedly connected to the tubular cavity and has a clearance fit with the rotating tube. An annular floating sealing ring is provided between the inner end of the tubular cavity and the rotating tube, and a spring is provided between the floating sealing ring and the tubular cavity of the fixed tube.

[0008] Furthermore, both ends of the rotary drum are connected to reducing pipes, which are rotatably connected to the heating jacket and extend out of the heating jacket. The ends of the two reducing pipes away from the rotary drum are respectively encapsulated with the flange covers.

[0009] Furthermore, the inner wall of the rotary drum is provided with lifting plates evenly along the axial direction, and the interior of the rotary drum is also provided with a spiral plate.

[0010] The beneficial effects of this utility model are: combining a fluidized bed with a horizontal rotary kiln achieves efficient heat treatment. The fluidized bed's efficient heat and mass transfer capabilities enable rapid heating and cooling, while the horizontal rotary kiln's high processing capacity enables large-scale production. By combining the fluidized bed and the horizontal rotary kiln, rapid heating, precise control, and large-scale production are achieved, resulting in high-quality, large-scale, shell-coated powders.

[0011] During use, when the rotary drum is in a horizontal state, the flange cover and the joint pipe at the first / second end of the rotary drum are removed, and the telescopic mechanism is used to tilt the rotary drum to a certain angle, so that the processed object to be coated can be loaded into the rotary drum; then the rotary drum is returned to a horizontal state, the flange cover and the joint pipe are installed at the first / second end of the rotary drum, the joint pipe is pivotally connected to the rotating tube of the first / second rotary joint, the rotary drum is evacuated multiple times by a vacuum pump, and then inert gas is input through the second rotary joint, the temperature in the rotary drum is increased by the heating jacket, and then the rotary drum is driven to rotate by the driving mechanism, and the reaction gas is introduced and the reacted gas is discharged at the same time, so that the powder particles are turned over and fluidized in the rotary drum, thereby achieving the coating of the powder particles.

[0012] After coating, the flange cover and the joint pipe at the first end of the rotary drum are removed, and the rotary drum is tilted at a certain angle by using the telescopic mechanism, so that the coated processed material can be poured out of the rotary drum;

[0013] The first and second rotary joints of the utility model can both move horizontally along the slideway without interfering with the loading and unloading of the processed objects from the rotary drum.

[0014] The connection between the bellows, rotating tube, and air duct in the joint pipe allows for eccentricity or angle between the rotating tube and the air duct. Therefore, even if they are not installed in a perfectly concentric position, the rotation of the rotary drum does not hinder the rotation of the rotating tube relative to the fixed tube. This structural design facilitates the loading and discharge of materials into the rotary drum. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 for Figure 1 An enlarged schematic diagram of the second rotary joint and the joint pipe at the second end of the middle rotary drum 3;

[0017] Figure 3 Schematic diagram of the structure of the inner wall of the rotary drum. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0019] Example 1

[0020] A fluidized bed horizontal rotary kiln used in CVD process, such as Figure 1 As shown, it includes a heating jacket 2 and a rotary drum 3. The heating jacket 2 is sleeved on the outside of the rotary drum 3. The first end of the rotary drum 3 ( Figure 1 The lower end) and the second end ( Figure 1 The upper end of the rotary drum is rotatably connected to the heating sleeve 2 and extends out of the heating sleeve 2. The first / second end of the rotary drum is respectively encapsulated with a flange cover 8, and an air guide pipe 9 is centrally arranged on the flange cover 8. The air guide pipe 9 at the first / second end of the rotary drum 3 is detachably connected to the rotating pipe 10 of the first / second rotary joint through a joint pipe.

[0021] like Figure 2 Shown Figure 1 An enlarged schematic diagram of the second rotary joint and the joint pipe at the second end of the central rotary drum 3. The joint pipe includes a bellows 6, a clamp 7, and an annular gasket 5. The annular gasket 5 is clamped between the two ends of the bellows 6 and the air duct 9 and the rotating tube 10, respectively. The clamp 7 is used to encircle and apply pressure toward the annular gasket 5 on the bellows 6, the air duct 9, and the rotating tube 10. The bellows 6 can be bent to compensate for the angles between the two ends of the bellows 6 and the air duct 9 and the rotating tube 10, respectively. The clamp 7 is a portable pipe docking device. For example, CN221817763U discloses a similar clamp structure, such as Figure 2 The inner circumference of the clamp 7 is constructed as an annular groove, and convex rings are provided at both ends of the bellows 6 and the ends of the air guide tube 9 and the rotating tube 10. The width of the annular groove is not greater than the sum of the width of the two convex rings and the thickness of the annular pad 5. The annular pad 5 is clamped between the two ends of the bellows 6 and the air guide tube 9 and the rotating tube 10 respectively. The end convex ring of the bellows 6 and the end convex ring of the air guide tube 9 or the rotating tube 10 are embedded in the annular groove on the inner circumference of the clamp 7. The annular groove applies pressure toward the annular pad 5 on the bellows 6, the air guide tube 9 and the rotating tube 10.

[0022] The first and second rotary joints each include a fixed tube 4 and a rotating tube 10. One end of the fixed tube 4 is provided with a concave tubular cavity. The outer periphery of the rotating tube 10 and the end extending into the tubular cavity is covered with an oil retaining ring 12, a bearing 11, and a retaining ring 14. The oil retaining ring 12, the bearing 11, and the retaining ring 14 are arranged in sequence from the inside to the outside of the tubular cavity. The rotating tube 10 is rotatably connected to the fixed tube 4 via the bearing 11. The retaining ring 14 is fixedly connected to the tubular cavity and has a clearance fit with the rotating tube 10. An annular floating sealing ring 13 is provided between the inner end of the tubular cavity and the rotating tube 10. A spring 15 is provided between the floating sealing ring 13 and the tubular cavity of the fixed tube 4. A rotary joint is a pipe with one end fixed and the other end rotatable. For example, CN103712009A discloses a rotary joint structure.

[0023] The first rotary joint has the same structure as the second rotary joint. Figure 1 The fixed pipe 4 of the first rotary joint is connected to the flow meter and the vacuum pump in sequence, the fixed pipe 4 of the second rotary joint is connected to the flow meter and the precursor gas supply system in sequence, the heating jacket 2 is mounted on the bottom plate 24, and the bottom plate 24 is configured so that the side of the bottom plate 24 close to the first rotary joint is rotatably connected to the base 21, and the side of the bottom plate 24 close to the second rotary joint is connected to the base 21 through a telescopic mechanism 22. The telescopic mechanism 22 is used to tilt the central axis of the rotary drum 3 relative to the horizontal plane to facilitate loading and unloading of the processed material. The part of the second end of the rotary drum 3 located outside the heating jacket 2 is driven to rotate by a driving device 25, and the driving device 25 is mounted on the bottom plate 24. The first / second rotary joints can be slidably mounted on the slide 20, and the slide 20 slidably connected to the second rotary joint is mounted on the bottom plate 24. When the bottom plate 24 is in a horizontal plane, the slides 20 are parallel to the horizontal plane and perpendicular to the central axis of the rotary drum 3.

[0024] Preferably, Figure 1 The two ends of the middle rotary drum 3 are connected to the reducing tube 16, which is rotatably connected to the heating jacket 2 and extends out of the heating jacket 2. The ends of the two reducing tubes 16 away from the rotary drum 3 are respectively encapsulated with flange covers 8. Figure 3 The figure shows the structure of the inner wall of the rotary drum 3 . The inner wall of the rotary drum 3 is provided with lifting plates 17 evenly along the axial direction. The inner wall of the rotary drum 3 is also provided with a spiral plate 18 .

[0025] When in use, when the rotary drum 3 is in a horizontal state, the flange cover 8 and the joint pipe at the first / second end of the rotary drum 3 are removed, and the telescopic mechanism 22 is used to tilt the rotary drum 3 to a certain angle, so that the processed object to be coated can be loaded into the rotary drum 3; then the rotary drum 3 is returned to a horizontal state, the flange cover 8 and the joint pipe are installed at the first / second end of the rotary drum 3, the joint pipe is pivotally connected to the rotating tube 10 of the first / second rotary joint, the rotary drum 3 is evacuated multiple times by a vacuum pump, and then an inert gas is introduced through the second rotary joint, the temperature in the rotary drum 3 is increased through the heating jacket 2, and then the rotary drum 3 is driven to rotate by the driving mechanism, and at the same time, the reaction gas is introduced (for example, the device of the present invention is used to coat the powder particles with a carbon layer, adopts a CVD process, and the reaction gas introduced is acetylene), and the reacted gas is discharged, so that the powder particles are turned over and fluidized in the rotary drum 3, thereby achieving the coating of the powder particles.

[0026] After coating, the flange cover 8 and the joint pipe at the first end of the rotary drum 3 are removed, and the rotary drum 3 is tilted to a certain angle by using the telescopic mechanism 22, so that the coated processed material can be poured out of the rotary drum 3;

[0027] The first and second rotary joints of the present invention can both translate along the slideway 20 without interfering with the loading and unloading of the processed objects from the rotary drum 3 .

[0028] The connection between the bellows 6, rotating tube 10, and air duct 9 in the joint pipe allows for eccentricity or an angle between the rotating tube 10 and the air duct 9. Therefore, even if they are not installed in a perfectly concentric state, the rotation of the rotary drum 3 does not hinder the rotation of the rotating tube 10 relative to the fixed tube 4. This structural design facilitates the loading and discharge of materials into and out of the rotary drum 3.

[0029] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A fluidized bed horizontal rotary kiln for use in a CVD process, characterized in that: The invention comprises a heating sleeve (2) and a rotary drum (3), wherein the heating sleeve (2) is sleeved on the outside of the rotary drum (3), the first and second ends of the rotary drum (3) are rotatably connected to the heating sleeve (2) and extend out of the heating sleeve (2), the first and second ends of the rotary drum (3) are respectively encapsulated with flange covers (8), an air guide pipe (9) is centrally arranged on the flange cover (8), the air guide pipe (9) at the first and second ends of the rotary drum (3) are detachably connected to the rotating pipe (10) of the first and second rotary joints respectively through joint pipes, the fixed pipe (4) of the first rotary joint is sequentially connected to the flow meter and the vacuum pump, the fixed pipe (4) of the second rotary joint is sequentially connected to the flow meter and the precursor gas supply system, the heating sleeve (2) is mounted on a bottom plate (24), and the bottom plate (24) is configured such that the bottom plate (24) is close to the bottom plate (24). The side near the first rotary joint is rotatably connected to the base (21), and the side of the bottom plate (24) near the second rotary joint is connected to the base (21) through a telescopic mechanism (22). The telescopic mechanism (22) is used to tilt the central axis of the rotary drum (3) relative to the horizontal plane to facilitate loading and unloading of the processed material. The second end of the rotary drum (3) located outside the heating sleeve (2) is driven to rotate by a driving device (25). The driving device (25) is installed on the bottom plate (24). The first and second rotary joints can be slidably installed on different slideways (20). The slideway (20) slidably connected to the second rotary joint is installed on the bottom plate (24). When the bottom plate (24) is located on the horizontal plane, the two slideways (20) are parallel to the horizontal plane and perpendicular to the central axis of the rotary drum (3).

2. The fluidized bed horizontal rotary kiln according to claim 1, characterized in that: The joint pipe comprises a bellows (6), a clamp (7), and an annular gasket (5). The annular gasket (5) is clamped between the two ends of the bellows (6) and the air guide pipe (9) and the rotating pipe (10), respectively. The clamp (7) is used to embrace and apply pressure to the bellows (6), the air guide pipe (9), and the rotating pipe (10) toward the annular gasket (5).

3. The fluidized bed horizontal rotary kiln according to claim 1, characterized in that: The first / second rotary joints each comprise a fixed tube (4) and a rotating tube (10). One end of the fixed tube (4) is provided with an inwardly concave tube cavity. The outer periphery of the rotating tube (10) and the end thereof extending into the tube cavity is sheathed with an oil retaining ring (12), a bearing (11), and a retaining ring (14). The oil retaining ring (12), the bearing (11), and the retaining ring (14) are sequentially arranged from the inside to the outside in the tube cavity. The rotating tube (10) is rotatably connected to the fixed tube (4) via the bearing (11). The retaining ring (14) is fixedly connected to the tube cavity and is clearance-matched with the rotating tube (10). An annular floating sealing ring (13) is provided between the inner end of the tube cavity and the rotating tube (10). A spring (15) is provided between the floating sealing ring (13) and the tube cavity of the fixed tube (4).

4. The fluidized bed horizontal rotary kiln according to claim 1, characterized in that: The two ends of the rotary drum (3) are connected to reducing tubes (16), the reducing tubes (16) are rotatably connected to the heating jacket (2) and extend out of the heating jacket (2), and the ends of the two reducing tubes (16) away from the rotary drum (3) are respectively encapsulated with the flange covers (8).

5. The fluidized bed horizontal rotary kiln according to claim 1, characterized in that: The inner wall of the rotary drum (3) is evenly provided with material lifting plates (17) along the axial direction, and the interior of the rotary drum (3) is also provided with a spiral plate (18).

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