Furnace cooling device and heating furnace

Abstract

The utility model is applicable to the technical field of semiconductor processing equipment, and provides a furnace cooling device and a heating furnace, the furnace cooling device comprises a first cooling block, a second cooling block, a main water inlet pipeline, a main water outlet pipeline, a branch water inlet pipe group and a branch water outlet pipe group. The first cooling block and the second cooling block are used for being arranged in different temperature zones, and the heating furnace comprises any furnace cooling device. Compared with a cooling device in the prior art, the temperature consistency of the first cooling block and the second cooling block can be guaranteed, and meanwhile the cooling rate of the first cooling block and the cooling rate of the second cooling block can be kept consistent. During use, the first cooling block and the second cooling block are respectively arranged in different temperature zones, so that the temperature consistency of the cooling devices in the different temperature zones on the heating furnace can be improved, and the consistency and the stability of product quality are further improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing equipment, in particular to a furnace cooling device and a heating furnace. Background Art

[0002] During the soldering process of chips or frames, a heating furnace is often used to heat the product to ensure uniform solder solidification, achieve a secure connection between the semiconductor component and the substrate, such as the circuit board, and improve product performance and reliability. To improve product heating efficiency, a heating furnace with multiple heating zones is typically used to heat the product. Cooling devices are also installed near the outlet of each zone to cool the product. However, most existing heating furnaces suffer from poor temperature consistency in the cooling devices across different zones, seriously impacting the consistency and stability of product quality. Utility Model Content

[0003] The purpose of the utility model is to provide a furnace cooling device and a heating furnace, aiming to solve the technical problem of poor temperature consistency of cooling devices in different temperature zones of a heating furnace in the prior art.

[0004] The utility model is implemented as follows: a furnace cooling device, the furnace cooling device includes a first cooling block, a second cooling block, a main water inlet pipe, a main water outlet pipe, a branch water inlet pipe group and a branch water outlet pipe group, the first cooling block and the second cooling block are used to be arranged in different temperature zones of the heating furnace, the first cooling block has a first cooling channel, the second cooling block has a second cooling channel, and the branch water inlet pipe group is used to connect the first cooling channel and the second cooling channel in parallel with the main water inlet pipe, and the branch water outlet pipe group is used to connect the first cooling channel and the second cooling channel in parallel with the main water outlet pipe.

[0005] In an optional embodiment, the branch water inlet pipe group includes a main water inlet pipe, a first water inlet branch pipe and a second water inlet branch pipe. The first end of the main water inlet pipe is connected to the main water inlet pipe, and the second end of the main water inlet pipe is connected to the first end of the first water inlet branch pipe and the first end of the second water inlet branch pipe at the same time. The second end of the first water inlet branch pipe is connected to the inlet of the first cooling channel, and the second end of the second water inlet branch pipe is connected to the inlet of the second cooling channel.

[0006] In an optional embodiment, the branch water outlet pipe group includes a main outlet pipe, a first outlet branch pipe and a second outlet branch pipe, the first end of the main outlet pipe is connected to the main water outlet pipe, the second end of the main outlet pipe is connected to the first end of the first outlet branch pipe and the first end of the second outlet branch pipe at the same time, and the second end of the first outlet branch pipe is connected to the outlet of the first cooling channel, and the second end of the second outlet branch pipe is connected to the outlet of the second cooling channel.

[0007] In an optional embodiment, the main water inlet pipe is located on the side of the first cooling block away from the second cooling block, the main water outlet pipe is located on the side of the first cooling block away from the second cooling block, the second inlet branch pipe passes through the bottom of the first cooling block and the second cooling block and is connected to the second cooling channel, and the second outlet branch pipe passes through the bottom of the first cooling block and the second cooling block and is connected to the second cooling channel.

[0008] In an optional embodiment, a flow regulating part is provided on the main outlet pipeline, and the flow regulating part is used to regulate the flow of the liquid passing through the main outlet pipeline.

[0009] In an optional embodiment, a flow detection unit for monitoring flow is further provided on the main water outlet pipe and / or the main water inlet pipe.

[0010] In an optional embodiment, a temperature detection unit for monitoring temperature is provided on the main water outlet pipe and / or the main water inlet pipe.

[0011] In an optional embodiment, the number of the first cooling blocks in one temperature zone is multiple, and the number of the second cooling blocks in another temperature zone is also multiple. The first cooling blocks in the two temperature zones correspond one to one to the second cooling blocks. Multiple first cooling blocks are arranged in sequence along the first direction in one temperature zone, and multiple second cooling blocks are arranged in sequence along the first direction in another temperature zone, and the first direction is the movement direction of the product.

[0012] In an optional embodiment, there are multiple branch water inlet pipe groups, and the connection points between the multiple branch water inlet pipe groups and the main water inlet pipe are spaced apart along the length direction of the main water inlet pipe. There are multiple branch water outlet pipe groups, and the connection points between the multiple branch water outlet pipe groups and the main water outlet pipe are spaced apart along the length direction of the main water outlet pipe.

[0013] In a second aspect, a heating furnace is provided, comprising the furnace cooling device described in any one of the above items.

[0014] The technical effect of the present invention relative to the prior art is as follows: the main water inlet pipe can be connected in parallel with the inlet of the first cooling channel on the first cooling block and the inlet of the second cooling channel on the second cooling block through the branch water inlet pipe group, which can ensure that the initial temperature of the cooling water entering the first cooling block and the second cooling block is consistent. At the same time, the outlet of the first cooling channel on the first cooling block and the inlet of the second cooling channel on the second cooling block are connected in parallel with the main water outlet pipe through the branch water outlet pipe group, thereby ensuring that the water flow rate in the first cooling channel on the first cooling block and the second cooling channel on the second cooling block is consistent. Compared with the cooling device in the prior art, while ensuring the temperature consistency of the first cooling block and the second cooling block, the cooling rate of the first cooling block and the second cooling block can also be kept consistent. When in use, the first cooling block and the second cooling block are respectively set in different temperature zones of the heating furnace, thereby improving the consistency of the temperature and cooling rate of the cooling device in different temperature zones on the heating furnace, and improving the consistency and stability of product quality.

[0015] It can be understood that the beneficial effects of the second aspect mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments of the present invention or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 This is a schematic structural diagram of a furnace cooling device provided by an embodiment of the present utility model;

[0018] Figure 2 This is a partial structural diagram of a furnace cooling device provided by an embodiment of the present utility model;

[0019] Figure 3 yes Figure 1 Schematic diagram of the enlarged structure at point A in the middle.

[0020] Description of reference numerals:

[0021] 1. Main water inlet pipe; 2. Main water outlet pipe; 3. Branch water inlet pipe group; 31. Main inlet pipe; 32. First inlet branch pipe; 33. Second inlet branch pipe; 4. Branch water outlet pipe group; 41. Main outlet pipe; 42. First outlet branch pipe; 43. Second outlet branch pipe; 5. First cooling block; 6. Second cooling block; 7. Flow regulating unit; 8. Flow detection unit; 9. Temperature detection unit. DETAILED DESCRIPTION

[0022] The following describes in detail embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to explain the present invention, and should not be construed as limiting the present invention.

[0023] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0025] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, indirect connection through an intermediate medium, internal communication between two components, or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0026] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.

[0027] Please refer to Figures 1 to 3As shown, in an embodiment of the present invention, a furnace cooling device is provided, which includes a first cooling block 5, a second cooling block 6, a main water inlet pipe 1, a main water outlet pipe 2, a branch water inlet pipe group 3 and a branch water outlet pipe group 4. The first cooling block 5 and the second cooling block 6 are used to be arranged in different temperature zones of the heating furnace. The first cooling block 5 has a first cooling channel, and the second cooling block 6 has a second cooling channel. The branch water inlet pipe group 3 is used to connect the inlet of the first cooling channel and the inlet of the second cooling channel in parallel with the main water inlet pipe 1, and the branch water outlet pipe group 4 is used to connect the outlet of the first cooling channel and the outlet of the second cooling channel in parallel with the main water outlet pipe 2.

[0028] Specifically, the first cooling block 5 and the second cooling block 6 both refer to block-shaped components with a certain volume, and the first cooling block 5 and the second cooling block 6 are both made of materials with relatively high thermal conductivity, such as metal, graphite or silicon carbide. The first cooling channel and the second cooling channel both refer to channel structures with a certain length. By providing a first cooling channel inside the first cooling block 5, heat can be transferred to the refrigerant in the first cooling channel through the first cooling block 5, and when the refrigerant flows in the first cooling channel, the heat is taken away to achieve the purpose of cooling the first cooling block 5. The first cooling channel can be arranged in a disc shape inside the first cooling block 5, or it can be arranged in a reciprocating bending manner. By providing a second cooling channel inside the second cooling block 6, heat can be transferred to the refrigerant in the second cooling channel through the second cooling block 6, and when the refrigerant flows in the second cooling channel, the heat is taken away to achieve the purpose of cooling the second cooling block 6. The second cooling channel can be arranged in a disc shape inside the second cooling block 6, or it can be arranged in a reciprocating bending manner.

[0029] The main water inlet pipe 1 and the main water outlet pipe 2 are both tubular components of a certain length. The main water inlet pipe 1 and the main water outlet pipe 2 can be arranged in a straight line to facilitate the flow of cooling water in the main water inlet pipe 1 and the main water outlet pipe 2. At least one end of the main water inlet pipe 1 is connected to the cold water source, and the main water outlet pipe 2 is used to discharge the cooling water flowing out of the first cooling block 5 and the second cooling block 6, thereby realizing the circulation of cooling water in the cooling device. The branch water inlet pipe group 3 and the branch water outlet pipe group 4 are both components that can allow liquid to pass through. The branch water inlet pipe group 3 and the branch water outlet pipe group 4 can be an integral component, or they can be split components composed of multiple pipes connected to each other.

[0030] The sub-inlet pipe group 3 has one water inlet and two water outlets, and the water inlet of the sub-inlet pipe group 3 is connected to the main water inlet pipe 1, and the two water outlets of the sub-inlet pipe group 3 are respectively connected to the inlet of the first cooling channel and the inlet of the second cooling channel. The sub-outlet pipe group 4 has one water outlet and two water inlets, and the two water inlets of the sub-outlet pipe group 4 are respectively connected to the outlet of the first cooling channel and the outlet of the second cooling channel. At the same time, the water outlet of the sub-outlet pipe group 4 is connected to the main water outlet pipe 2.

[0031] The furnace cooling device provided by the embodiment of the present invention can connect the main water inlet pipe 1 in parallel with the inlet of the first cooling channel on the first cooling block 5 and the inlet of the second cooling channel on the second cooling block 6 through the branch water inlet pipe group 3, which can ensure that the initial temperature of the cooling water entering the first cooling block 5 and the second cooling block 6 is consistent, thereby ensuring that the temperature of the first cooling block 5 and the second cooling block 6 are always consistent. At the same time, the outlet of the first cooling channel on the first cooling block 5 and the inlet of the second cooling channel on the second cooling block 6 are connected in parallel with the main water outlet pipe 2 through the branch water outlet pipe group 4, thereby ensuring that the water flow rate in the first cooling channel on the first cooling block 5 and the second cooling channel on the second cooling block 6 is consistent, thereby ensuring that the heat carried away by the cooling water in a unit time of the first cooling block 5 and the second cooling block 6 is consistent. Compared with the cooling device in the prior art, while ensuring the temperature consistency of the first cooling block 5 and the second cooling block 6, the cooling rate of the first cooling block 5 and the second cooling block 6 can also be kept consistent. When in use, the first cooling block 5 and the second cooling block 6 are respectively arranged in different temperature zones, thereby improving the consistency of the temperature and cooling efficiency of the cooling device in different temperature zones on the heating furnace.

[0032] In one embodiment, see Figure 1 and Figure 2The sub-water inlet pipe group 3 includes a main inlet pipe 31, a first inlet branch pipe 32 and a second inlet branch pipe 33. The first end of the main inlet pipe 31 is connected to the main water inlet pipe 1, and the second end of the main inlet pipe 31 is connected to the first end of the first inlet branch pipe 32 and the first end of the second inlet branch pipe 33 at the same time. The second end of the first inlet branch pipe 32 is connected to the inlet of the first cooling channel, and the second end of the second inlet branch pipe 33 is connected to the inlet of the second cooling channel. Specifically, the main inlet pipe 31 refers to a tubular component with a certain length. The first end of the main inlet pipe 31 can be connected to the main water inlet pipe 1 through a tee joint, etc. The material of the main inlet pipe 31 can be metal, plastic, PP (polypropylene), PE (polyethylene), etc. The first inlet branch pipe 32 and the second inlet branch pipe 33 both refer to tubular components with a certain length. The first end of the first inlet branch pipe 32, the first end of the second inlet branch pipe 33 and the second end of the main inlet pipe 31 can be directly connected, or can be connected through a connecting component such as a tee joint. The first and second branch inlet pipes 32, 33 can be made of metal, plastic, PP (polypropylene), PE (polyethylene), etc. The main inlet pipe 31, the first branch inlet pipe 32, and the second branch inlet pipe 33 are connected to form a branch inlet pipe assembly 3. This simplifies the structure of the branch inlet pipe assembly 3, while also ensuring that the first and second cooling channels are connected in parallel with the main inlet pipe 1. This further simplifies the overall structure of the water inlet pipes for the first and second cooling blocks 5, 6.

[0033] In a specific embodiment, see Figure 1 and Figure 2 The first end of the main inlet pipe 31 is connected to the main water inlet pipe 1 through a three-way joint, and the second end of the main inlet pipe 31 is connected to the first end of the first inlet branch pipe 32 and the first end of the second inlet branch pipe 33 through a three-way joint. A pipe thread can be provided on the outer wall of the second end of the first inlet branch pipe 32, and a pipe thread is also provided on the inner wall at the entrance of the first cooling channel. The connection between the second end of the first inlet branch pipe 32 and the entrance of the first cooling channel can be achieved through the pipe thread. A pipe thread can be provided on the outer wall of the second end of the second inlet branch pipe 33, and a pipe thread is also provided on the inner wall at the entrance of the second cooling channel. The connection between the second end of the second inlet branch pipe 33 and the entrance of the second cooling channel can be achieved through the pipe thread, making the connection and installation of the sub-inlet pipe group 3 more convenient. In addition, the first inlet branch pipe 32 and the second inlet branch pipe 33 can both be composed of pipes connected with two-way joints, which can make the overall structure of the sub-inlet pipe group 3 simpler and the connection and assembly more convenient.

[0034] In one embodiment, see Figure 1 and Figure 2The outlet pipe group 4 includes a main outlet pipe 41, a first outlet branch pipe 42, and a second outlet branch pipe 43. The first end of the main outlet pipe 41 is connected to the main outlet pipe 2, and the second end of the main outlet pipe 41 is connected to the first end of the first outlet branch pipe 42 and the first end of the second outlet branch pipe 43 at the same time. The second end of the first outlet branch pipe 42 is connected to the outlet of the first cooling channel, and the second end of the second outlet branch pipe 43 is connected to the outlet of the second cooling channel. Specifically, the main outlet pipe 41 refers to a tubular component with a certain length. The first end of the main outlet pipe 41 can be connected to the main outlet pipe 2 through a tee or the like. The material of the main outlet pipe 41 can be metal, plastic, PP (polypropylene), PE (polyethylene), etc. The first outlet branch pipe 42 and the second outlet branch pipe 43 both refer to tubular components with a certain length. The first end of the first outlet branch pipe 42, the first end of the second outlet branch pipe 43, and the second end of the main outlet pipe 41 can be directly connected or connected through a connecting component such as a tee joint. The first branch pipe 42 and the second branch pipe 43 can be made of metal, PP (polypropylene), PE (polyethylene), etc. The main outlet pipe 41, the first branch pipe 42, and the second branch pipe 43 are connected to form a branch outlet pipe assembly 4. This simplifies the structure of the branch outlet pipe assembly 4, while ensuring that the first and second cooling channels are connected in parallel with the main outlet pipe 2. This simplifies the overall structure of the outlet pipes for the first and second cooling blocks 5, 6.

[0035] In a specific embodiment, see Figure 1 and Figure 2 The first end of the main outlet pipe 41 is connected to the main water outlet pipe 2 through a three-way joint, and the second end of the main outlet pipe 41 is connected to the first end of the first outlet branch pipe 42 and the first end of the second outlet branch pipe 43 through a three-way joint. A pipe thread can be provided on the outer wall of the second end of the first outlet branch pipe 42, and a pipe thread can also be provided on the inner wall at the outlet of the first cooling channel. The pipe thread can be used to connect the second end of the first outlet branch pipe 42 to the outlet of the first cooling channel. A pipe thread can be provided on the outer wall of the second end of the second outlet branch pipe 43, and a pipe thread can also be provided on the inner wall at the outlet of the second cooling channel. The pipe thread can be used to connect the second end of the second outlet branch pipe 43 to the outlet of the second cooling channel, making the connection and installation of the entire branch water pipe group 4 more convenient. The first outlet branch pipe 42 and the second outlet branch pipe 43 can both be composed of pipes connected with two-way joints, so that the overall structure of the branch water pipe group 4 can be simpler and the connection and assembly can be more convenient.

[0036] In one embodiment, see Figure 1 and Figure 2The total water inlet pipe 1 is located on the side of the first cooling block 5 away from the second cooling block 6, the total water outlet pipe 2 is located on the side of the first cooling block 5 away from the second cooling block 6, the second inlet branch pipe 33 passes through the bottom of the first cooling block 5 and the second cooling block 6 and is connected to the second cooling channel, and the second outlet branch pipe 43 passes through the bottom of the first cooling block 5 and the second cooling block 6 and is connected to the second cooling channel. Specifically, by arranging the total water inlet pipe 1 and the total water outlet pipe 2 on the side of the first cooling block 5 away from the second cooling block 6, and directly connecting the total water inlet pipe 1 to the inlet of the first cooling channel through the first inlet branch pipe 32, and directly connecting the total water outlet pipe 2 to the outlet of the first cooling channel through the first outlet branch pipe 42. Then, the main water inlet pipe 1 is directly connected to the inlet of the second cooling channel through the second inlet branch pipe 33, and the main water outlet pipe 2 is directly connected to the outlet of the second cooling channel through the second outlet branch pipe 43. At the same time, the second inlet branch pipe 33 and the second outlet branch pipe 43 both pass under the first cooling block 5 and the second cooling block 6, which can avoid the second inlet branch pipe 33 and the second outlet branch pipe 43 from affecting the operation of the temperature zone, thereby making the structural layout of the entire cooling device more reasonable.

[0037] In one embodiment, see Figure 1 and Figure 2 , a flow regulating part 7 is provided on the main outlet pipe 41, and the flow regulating part 7 is used to regulate the flow of the liquid passing through the main outlet pipe 41. Specifically, the flow regulating part 7 refers to a component that can regulate the flow of the liquid passing through itself, and the flow regulating part 7 can be a throttle valve, an electromagnetic flow control valve, or a pressure reducing and load reducing valve, etc. And when the number of branch outlet pipe groups 4 is multiple, a flow regulating part 7 can be provided on the main outlet pipe 41 of at least one branch outlet pipe group 4, or a flow regulating part 7 can be provided on the main outlet pipe 41 of each branch outlet pipe group 4. Through the setting of the flow regulating part 7, the flow of cooling water in the first cooling channel and the second cooling channel corresponding to the branch outlet pipe group 4 can be adjusted, thereby achieving the simultaneous adjustment of the cooling efficiency of the first cooling block 5 and the second cooling block 6 corresponding to the first cooling block 5, making the cooling device more convenient to use.

[0038] In a specific embodiment, see Figure 1 The flow regulating part 7 is a throttle valve, which is arranged on the main outlet pipe 41 of one of the branch water pipe groups 4. This branch water pipe group 4 can be the first branch water pipe group 4 along the cooling water flow direction in the main water inlet pipe 1. By setting the throttle valve, the flow of the first branch water pipe group 4 can be adjusted, and the cooling water flow in the first cooling block 5 and the second cooling block 6 of the first group can be adjusted to achieve the adjustment of the cooling rate of the two.

[0039] In one embodiment, see Figure 3, a flow detection unit 8 for monitoring the liquid flow is also provided on the main water outlet pipe 2 and / or the main water inlet pipe 1. Specifically, the flow detection unit 8 refers to a device for measuring the fluid flow, which senses the flow state of the fluid and calculates the fluid flow by using corresponding physical principles or technical means. Common measurement principles include differential pressure type, volume type, velocity type, electromagnetic type, ultrasonic type, etc. The main water outlet pipe 2 and / or the main water inlet pipe 1 are also provided with a flow detection unit 8, including the following situations: Situation 1, a flow detection unit 8 is provided on the main water outlet pipe 2. Situation 2, a flow detection unit 8 is provided on the main water inlet pipe 1. Situation 3, a flow detection unit 8 is provided on both the main water outlet pipe 2 and the main water inlet pipe 1. By providing a flow detection unit 8 on the main water outlet pipe 2 and / or the main water inlet pipe 1, the flow rate of the refrigerant in the entire cooling device can be detected, so that the first cooling block 5 and the cooling efficiency of the first cooling block 5 can be effectively detected.

[0040] In one embodiment, see Figure 3 , a temperature detection unit 9 for monitoring the temperature of the liquid is provided on the total water outlet pipe 2 and / or the total water inlet pipe 1. Specifically, the temperature detection unit 9 refers to a device or component that can retrieve the temperature of an object or liquid. The temperature detection unit 9 can be a temperature sensor, wherein the temperature sensor can be a thermocouple type, a thermistor type, a semiconductor temperature type, etc. The temperature detection unit 9 is provided on the total water outlet pipe 2 and / or the total water inlet pipe 1, including the following situations: Situation 1, a temperature detection unit 9 is provided on the total water outlet pipe 2. Situation 2, a temperature detection unit 9 is provided on the total water inlet pipe 1. Situation 3, a temperature detection unit 9 is provided on both the total water outlet pipe 2 and the total water inlet pipe 1. By further providing a temperature detection unit 9 on the total water outlet pipe 2 and / or the total water inlet pipe 1, the temperature of the cooling water in the entire cooling device can be detected, the first cooling block 5 and the cooling efficiency of the first cooling block 5 can be detected, and the state of the entire cooling device can be adjusted conveniently.

[0041] In a specific embodiment, see Figure 3 A flow detection unit 8 for monitoring liquid flow is provided on the main water inlet pipe 1, and a temperature detection unit 9 for monitoring liquid temperature is provided on the main water outlet pipe 2. By cooperating with the flow detection unit 8 and the temperature detection unit 9, the flow rate and temperature of the refrigerant in the entire cooling device can be detected, making the cooling device more convenient to use.

[0042] In one embodiment, see Figure 1 and Figure 2In one temperature zone, there are multiple first cooling blocks 5, and in another temperature zone, there are multiple second cooling blocks 6. The first cooling blocks 5 and the second cooling blocks 6 in both temperature zones correspond to each other. The multiple first cooling blocks 5 are arranged sequentially along a first direction in one temperature zone, and the multiple second cooling blocks 6 are also arranged sequentially along the first direction in the other temperature zone. The first direction is the direction of movement of the product within the temperature zone. Specifically, the corresponding first cooling blocks 5 and second cooling blocks 6 are connected in parallel to the main water outlet pipe 2 via a branch water outlet pipe group 4, and are also connected in parallel to the main water inlet pipe 1 via a branch water inlet pipe group 3. By providing multiple first cooling blocks 5 and second cooling blocks 6, the cooling time of the product can be extended along the direction of movement of the product, thereby improving the cooling effect of the product. In addition, by controlling the flow rate of the refrigerant entering the first cooling blocks 5 and the second cooling blocks 6 along the direction of movement of the product, the cooling efficiency of the first cooling blocks 5 and the second cooling blocks 6 can be gradiently adjusted in the first direction, making the cooling of the product during operation of the heating furnace more convenient and energy-efficient.

[0043] In a specific embodiment, the number of first cooling blocks 5 in one temperature zone is three, while the number of second cooling blocks 6 in another temperature zone is three. The number of branch water inlet pipe groups 3 and branch water outlet pipe groups 4 are also three. The number of first cooling blocks 5 and second cooling blocks 6 is three, which can reduce the manufacturing and production costs of the entire cooling device while meeting the cooling requirements.

[0044] Based on the above-mentioned feature that the number of the first cooling block 5 and the second cooling block 6 is multiple, please refer to Figure 1 and Figure 2 , there are multiple branch water inlet pipe groups 3, the number of which matches the number of the first cooling blocks 5 and the second cooling blocks 6, and the connection points of the multiple branch water inlet pipe groups 3 and the main water inlet pipe 1 are spaced apart along the length direction of the main water inlet pipe 1. There are multiple branch water outlet pipe groups 4, the number of which matches the number of the first cooling blocks 5 and the second cooling blocks 6, and the connection points of the multiple branch water outlet pipe groups 4 and the main water outlet pipe 2 are spaced apart in sequence along the length direction of the main water outlet pipe 2. Specifically, by arranging the connection points of the multiple branch water inlet pipe groups 3 and the main water inlet pipe 1 at intervals along the length direction of the main water inlet pipe 1, and at the same time arranging the connection points of the branch water outlet pipe groups 4 and the main water outlet pipe 2 at intervals along the length direction of the main water outlet pipe 2, the structural layout of the entire cooling device can be made more reasonable.

[0045] In a second aspect, a heating furnace is provided, comprising any of the above-described furnace cooling devices. The furnace cooling device is configured to cool products within a temperature zone. It is understood that the beneficial effects of the second aspect can be found in the relevant description of the first aspect, and are not further elaborated here.

[0046] The above is merely a preferred embodiment of the present invention and only specifically describes the technical principles of the present invention. These descriptions are intended only to explain the principles of the present invention and should not be construed in any way as limiting the scope of protection of the present invention. Based on the explanations herein, any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention, as well as other specific implementations of the present invention that can be devised by those skilled in the art without inventive effort, shall be included within the scope of protection of the present invention.

Claims

1. A furnace cooling device, characterized in that: It includes a first cooling block, a second cooling block, a main water inlet pipe, a main water outlet pipe, a branch water inlet pipe group and a branch water outlet pipe group. The first cooling block and the second cooling block are used to be arranged in different temperature zones of the heating furnace. The first cooling block has a first cooling channel, and the second cooling block has a second cooling channel. The branch water inlet pipe group is used to connect the first cooling channel and the second cooling channel in parallel with the main water inlet pipe, and the branch water outlet pipe group is used to connect the first cooling channel and the second cooling channel in parallel with the main water outlet pipe.

2. The furnace cooling device according to claim 1, characterized in that: The branch water inlet pipe group includes a main inlet pipe, a first inlet branch pipe and a second inlet branch pipe. The first end of the main inlet pipe is connected to the main water inlet pipe, and the second end of the main inlet pipe is connected to the first end of the first inlet branch pipe and the first end of the second inlet branch pipe at the same time. The second end of the first inlet branch pipe is connected to the inlet of the first cooling channel, and the second end of the second inlet branch pipe is connected to the inlet of the second cooling channel.

3. The furnace cooling device according to claim 2, characterized in that: The branch water outlet pipe group includes a main outlet pipe, a first outlet branch pipe and a second outlet branch pipe. The first end of the main outlet pipe is connected to the main water outlet pipe, and the second end of the main outlet pipe is connected to the first end of the first outlet branch pipe and the first end of the second outlet branch pipe at the same time. The second end of the first outlet branch pipe is connected to the outlet of the first cooling channel, and the second end of the second outlet branch pipe is connected to the outlet of the second cooling channel.

4. The furnace cooling device according to claim 3, characterized in that: The main water inlet pipe is located on the side of the first cooling block away from the second cooling block, the main water outlet pipe is located on the side of the first cooling block away from the second cooling block, the second inlet branch pipe passes through the bottom of the first cooling block and the second cooling block and is connected to the second cooling channel, and the second outlet branch pipe passes through the bottom of the first cooling block and the second cooling block and is connected to the second cooling channel.

5. The furnace cooling device according to claim 4, characterized in that: The main outlet pipeline is provided with a flow regulating part, and the flow regulating part is used to regulate the flow of the liquid passing through the main outlet pipeline.

6. The furnace cooling device according to any one of claims 1 to 5, characterized in that: The main water outlet pipe and / or the main water inlet pipe is also provided with a flow detection unit for monitoring flow.

7. The furnace cooling device according to any one of claims 1 to 5, characterized in that: The main water outlet pipe and / or the main water inlet pipe is provided with a temperature detection unit for monitoring temperature.

8. The furnace cooling device according to any one of claims 1 to 5, characterized in that: In one temperature zone, the number of the first cooling blocks is multiple, and in another temperature zone, the number of the second cooling blocks is also multiple. The first cooling blocks and the second cooling blocks in the two temperature zones correspond one to one. Multiple first cooling blocks are arranged in sequence along a first direction in one temperature zone, and multiple second cooling blocks are also arranged in sequence along the first direction in the other temperature zone. The first direction is the movement direction of the product.

9. The furnace cooling device according to claim 6, characterized in that: There are multiple branch water inlet pipe groups, and the connection points between the multiple branch water inlet pipe groups and the main water inlet pipe are spaced apart along the length direction of the main water inlet pipe. There are multiple branch water outlet pipe groups, and the connection points between the multiple branch water outlet pipe groups and the main water outlet pipe are spaced apart along the length direction of the main water outlet pipe.

10. A heating furnace, characterized in that: It comprises the furnace cooling device according to any one of claims 1 to 9, and the furnace cooling device is used to cool the products in the temperature zone.

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