Graphite thermal expansion measuring assembly and silicon carbide crystal growth furnace
By using graphite thermal expansion measurement components in a silicon carbide long crystal furnace, the deformation of graphite heating body is measured using the damping limit structure of the scale groove and push plate, the problem of insufficient data in the distribution design of graphite heating body is solved, and the measurement and design of reasonable distribution is achieved.
Patent Information
- Application Number
- CN202422655079.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-31
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2034-10-31
AI Technical Summary
During the process of silicon carbide crystal growth, there is a lack of means to directly measure the degree of thermal expansion and deformation of graphite heating bodies, which makes it difficult to ensure that the graphite heating bodies are within a reasonable distribution range, affecting subsequent design.
A graphite thermal expansion measurement component is designed, including a bearing fastener and push plate, and the push plate damping setting in the scale groove is used to measure the push plate displacement amount and obtain the shape variable of the graphite heating body.
The accurate measurement of the deformation degree of graphite heating body in actual production is achieved, ensuring that it is within a reasonable distribution range and supporting subsequent design optimization.
Smart Images
Figure CN223243548U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of crystal growth, in particular to a graphite thermal expansion measurement component and a silicon carbide crystal growth furnace. Background Art
[0002] During the silicon carbide crystal growth process, a large number of graphite heating elements are usually placed in the crystal growth furnace. When the temperature rises from room temperature to the 2000-2200℃ required for silicon carbide crystal growth, the graphite heating element will undergo a certain amount of thermal expansion and deformation, thereby changing the temperature conditions such as the high-temperature zone in the furnace. Graphite heating elements will deform due to heat, so it is necessary to reasonably adjust the distribution gap of the graphite heating element during design. As for the degree of deformation of the graphite heating element, there is currently a lack of means to directly measure the degree of deformation of the heating element at 2000℃ in actual production, making it difficult to effectively measure the thermal expansion of the graphite heating element. Therefore, there is a lack of corresponding data support for the subsequent distribution design of the graphite heating element, making it difficult to ensure that the graphite heating element is within a reasonable distribution range. Utility Model Content
[0003] The purpose of the utility model is to provide a graphite thermal expansion measurement component and a silicon carbide crystal growth furnace, which can measure the deformation degree of the graphite heating element in actual production, facilitate the subsequent better distribution design of the graphite heating element, and ensure that the graphite heating element is within a reasonable distribution range.
[0004] The embodiment of the present utility model is achieved as follows:
[0005] On the one hand, an embodiment of the present invention provides a graphite thermal expansion measuring assembly, including a bearing fastener and a push plate, wherein the bearing fastener is used to be arranged at the end of the graphite heating element and has a scale groove with an opening toward the graphite heating element, and at least one side edge of the scale groove is provided with a scale line extending toward the bottom wall, and the push plate is damped and arranged in the scale groove and is located at the starting position of the scale line, and the push plate is used to abut against the end of the graphite heating element, and the two sides of the push plate are respectively abutted against the opposite side walls of the scale groove, and can move along the scale groove toward the bottom wall of the scale groove under the drive of the heated graphite heating element.
[0006] In an optional embodiment, the side wall of the scale groove is further provided with a damping stop structure, and the damping stop structure is clamped on the edge of the push plate to perform damping and limiting on the push plate.
[0007] In an optional embodiment, the damping stop structure includes a plurality of one-way latches protruding relative to the side wall of the scale groove, the plurality of one-way latches are evenly distributed on the side wall of the scale groove, and a latch groove for holding the push plate is formed between adjacent one-way latches.
[0008] In an optional embodiment, each of the one-way teeth is formed with a guide bevel on a side away from the bottom wall of the scale groove, one side edge of the guide bevel is engaged with the side wall of the scale groove and is set at an obtuse angle with the side wall of the scale groove, and the other side of the guide bevel extends toward the center of the scale groove, and the one-way tooth is formed with a stop table on a side close to the bottom wall of the scale groove, one side edge of the stop table is engaged with the side wall of the scale groove and is set at an acute angle or a right angle with the side wall of the scale groove, and the other side of the stop table extends toward the center of the scale groove.
[0009] In an optional embodiment, a side edge of the guiding inclined surface away from the side wall of the scale groove is engaged with a side edge of the stop table away from the side wall of the scale groove, so that the cross-section of the one-way latch is triangular.
[0010] In an optional embodiment, the angle formed by the guide slope and the side wall of the scale groove is between 120° and 170°; the angle formed by the stop table and the side wall of the scale groove is between 40° and 90°.
[0011] In an optional embodiment, the width of the card slot is less than or equal to the thickness of the push plate.
[0012] In an optional embodiment, the supporting fastener includes a base plate and two side plates, the two side plates are integrally arranged on both side edges of the base plate, and the two side plates and the base plate are jointly arranged to form the scale groove, the push plate is abutted against the inner wall of the side plate, and the opening width of the scale groove is used to adapt to the end width of the graphite heating element, so that the upper inner wall of the side plate fits the graphite heating element.
[0013] In an optional embodiment, the graphite thermal expansion measurement assembly further includes an insulating plate, and the insulating plate is disposed on a side of the load-bearing fastener facing away from the opening.
[0014] On the other hand, an embodiment of the present invention provides a silicon carbide crystal growth furnace, comprising a furnace body, a graphite heating element and the aforementioned graphite thermal expansion measurement assembly, wherein the graphite heating element is arranged in the furnace body, the supporting fastener is arranged on the bottom wall of the furnace body and is located at the end of the graphite heating element, and the push plate is supported on the end of the graphite heating element.
[0015] The beneficial effects of the embodiments of the present utility model are:
[0016] The graphite thermal expansion measuring assembly provided by the embodiment of the present invention sets the bearing fastener at the end of the graphite heating element, and the opening of the scale groove of the bearing fastener faces the graphite heating element, and the edge of the scale groove is provided with a scale line extending downward in the vertical direction, and the push plate is damped and arranged in the scale groove and is located at the starting position of the scale line, and the push plate can be supported on the end of the graphite heating element, and the two sides are supported on the opposite side walls of the scale groove respectively. In actual use, the graphite thermal expansion measuring assembly is assembled first, the push plate is first loaded into the scale groove, and the bearing fastener is fixed to the bottom end of the graphite heating element, and the push plate is supported against the graphite heating element, and then normal crystal growth is carried out. When the temperature in the furnace rises to above 2000℃, the graphite heating element will be deformed by the heat and push the push plate to move downward along the scale groove, thereby changing the position of the push plate, and the scale line is used to measure the displacement of the push plate, so that the deformation of the graphite heating element can be obtained. Compared with the existing technology, the graphite thermal expansion measurement assembly provided by the embodiment of the utility model can measure the deformation degree of the graphite heating element in actual production, facilitate the subsequent better distribution design of the graphite heating element, and thus ensure that the graphite heating element is within a reasonable distribution range. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.
[0018] Figure 1 A schematic structural diagram of a graphite thermal expansion measurement assembly provided in an embodiment of the present utility model;
[0019] Figure 2 A schematic diagram of the assembly structure of a graphite thermal expansion measurement assembly provided in an embodiment of the present utility model;
[0020] Figure 3 for Figure 1 A local enlarged schematic diagram of point III in the middle.
[0021] icon:
[0022] 100-graphite thermal expansion measurement assembly; 110-load-bearing fastener; 111-scale groove; 113-scale line; 115-base plate; 117-side plate; 130-push plate; 150-damping stop structure; 151-one-way tooth; 153-slot; 155-guide slope; 157-stop table; 170-insulating plate; 200-furnace body; 300-graphite heating element. DETAILED DESCRIPTION
[0023] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.
[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.
[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.
[0026] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0027] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.
[0028] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.
[0029] See also Figures 1 to 3 The embodiment of the utility model provides a graphite thermal expansion measurement component 100, which can measure the deformation degree of the graphite heating element 300 in actual production, facilitate the subsequent better distribution design of the graphite heating element 300, and thus ensure that the graphite heating element 300 is within a reasonable distribution range.
[0030] An embodiment of the present utility model provides a graphite thermal expansion measurement assembly 100, including a supporting fastener 110 and a push plate 130. The supporting fastener 110 is used to be arranged at the end of the graphite heating element 300, and has a scale groove 111 with an opening facing the graphite heating element 300. At least one side edge of the scale groove 111 is provided with a scale line 113 extending toward the bottom wall. The push plate 130 is damped and arranged in the scale groove 111 and is located at the starting position of the scale line 113. The push plate 130 is used to abut against the end of the graphite heating element 300, and the two sides of the push plate 130 respectively abut against the opposite side walls of the scale groove 111, and can move along the scale groove 111 toward the bottom wall of the scale groove 111 under the drive of the heated graphite heating element 300.
[0031] It is worth noting that in actual use, the assembly of the graphite thermal expansion measurement component 100 is completed first, the push plate 130 is installed in the scale groove 111, and the supporting fastener 110 is fixed to the bottom end of the graphite heating element 300, and the push plate 130 is made to abut against the graphite heating element 300, and then normal crystal growth is carried out. When the temperature in the furnace rises to above 2000°C, the graphite heating element 300 will be deformed by the heat and push the push plate 130 to move downward along the scale groove 111, thereby changing the position of the push plate 130, and using the scale line 113 to measure the displacement of the push plate 130. After cooling to room temperature, the supporting fastener 110 is removed and the deformation of the graphite heating element 300 can be obtained from the scale line 113.
[0032] It should be noted that the push plate 130 mentioned in this embodiment is arranged in a damped manner in the scale groove 111, which means that the push plate 130 will not move in the scale groove 111 in the absence of external force, and there will be a certain resistance when the push plate 130 is displaced, so that the push plate 130 will remain in position and will not rebound after being displaced by the graphite heating element 300.
[0033] In this embodiment, the sidewalls of the graduated groove 111 are further provided with a damping stop structure 150, which is retained on the edge of the push plate 130 to provide damping and position limiting for the push plate 130. Specifically, the damping and position limiting herein means that the damping stop structure 150 will limit the position of the push plate 130 to a certain extent, and this limit will be broken by the action of an external force.
[0034] Furthermore, the damping stop structure 150 includes a plurality of one-way latching teeth 151 protruding from the sidewalls of the graduated groove 111. The plurality of one-way latching teeth 151 are evenly distributed on the sidewalls of the graduated groove 111, and a latching groove 153 for retaining the push plate 130 is formed between adjacent one-way latching teeth 151. Specifically, the one-way latching teeth 151 can retain the edge of the push plate 130, thereby securing the push plate 130. However, after the graphite heating element 300 expands due to heat, the thermal stress is relatively large. Therefore, the push plate 130 can undergo a slight deformation under the push of the graphite heating element 300, breaking the one-way retaining limit and causing displacement.
[0035] It should be noted that in this embodiment, the push plate 130 , the one-way latch 151 and the load-bearing fastener 110 can all be made of graphite material, and the one-way latch 151 is integrally provided on the side wall of the scale groove 111 .
[0036] In other preferred embodiments of the present invention, the damping stop structure 150 can also be formed by a plurality of protrusions arranged on the side walls of the scale groove 111, which can increase the roughness of the side walls of the scale groove 111 and also achieve damping limitation of the push plate 130.
[0037] In this embodiment, each one-way latch 151 is formed with a guide bevel 155 on a side away from the bottom wall of the scale groove 111. One edge of the guide bevel 155 is joined to the side wall of the scale groove 111 and formed at an obtuse angle therewith. The other side of the guide bevel 155 extends toward the center of the scale groove 111. A stopper 157 is formed on the side of the one-way latch 151 near the bottom wall of the scale groove 111. One edge of the stopper 157 is joined to the side wall of the scale groove 111 and formed at an acute or right angle therewith. The other side of the stopper 157 extends toward the center of the scale groove 111. Specifically, the one-way latch 151 is strip-shaped and spaced apart on the side wall of the scale groove 111. Among them, the guide bevel 155 and the side wall of the scale groove 111 are set at an obtuse angle, which means that the angle between the guide bevel 155 and the side wall of the scale groove 111 located above the guide bevel 155 is an obtuse angle, which is conducive to the push plate 130 moving downward along the guide bevel 155 driven by the graphite heating element 300; and the stop table 157 and the side wall of the scale groove 111 are set at an acute angle or a right angle, which means that the angle between the stop table 157 and the side wall of the scale groove 111 located below the stop table 157 is an acute angle or a right angle, which can prevent the push plate 130 from rebounding upward, ensuring that the push plate 130 can accurately represent the maximum thermal expansion deformation of the graphite heating element 300.
[0038] In this embodiment, the edge of the guide slope 155 away from the side wall of the scale groove 111 is engaged with the edge of the stop surface 157 away from the side wall of the scale groove 111, so that the cross-section of the one-way latch 151 is triangular. It should be noted that the multiple one-way latches 151 can form a sawtooth structure, and the height of the one-way latches 151 relative to the side wall of the scale groove 111 is relatively low, allowing the push plate 130 to move downward under the influence of the graphite heating element 300.
[0039] In this embodiment, the included angle between the guide slope 155 and the sidewall of the scale groove 111 is between 120° and 170°, preferably 150°. Meanwhile, the included angle between the stop surface 157 and the sidewall of the scale groove 111 is between 40° and 90°, preferably 90°, thereby making the cross-section of the one-way latch 151 a right triangle. Of course, the angles of the guide slope 155 and the stop surface 157 are merely illustrative and do not constitute any limitation.
[0040] In this embodiment, the width of the slot 153 is less than or equal to the thickness of the push plate 130. Preferably, the width of the slot 153 is less than the thickness of the push plate 130, so that the spacing between adjacent one-way teeth 151 is closer, the displacement accuracy of the push plate 130 is higher, and the displacement of the push plate 130 can be measured more accurately.
[0041] The bearing fastener 110 includes a bottom plate 115 and two side plates 117. The two side plates 117 are integrally arranged on the two side edges of the bottom plate 115. The two side plates 117 and the bottom plate 115 together form a scale groove 111. The push plate 130 is abutted against the inner wall of the side plate 117. The opening width of the scale groove 111 is used to adapt to the end width of the graphite heating element 300, so that the upper inner wall of the side plate 117 fits the graphite heating element 300. Specifically, the two side plates 117 are respectively attached to the two sides of the graphite heating element 300, so that the bearing fastener 110 can be fastened to the bottom end of the graphite heating element 300.
[0042] Graphite thermal expansion measurement assembly 100 further includes an insulating plate 170, which is disposed on the side of support fastener 110 facing away from the opening. Insulating plate 170 can be made of a high-temperature-resistant, non-conductive, and nitrogen-inert material such as diamond or boron nitride. This effectively isolates the bottom from heat, preventing the support component from affecting the internal thermal field of furnace body 200.
[0043] The present invention also provides a silicon carbide crystal growth furnace, including a furnace body 200, a graphite heating element 300 and a graphite thermal expansion measuring assembly 100, wherein the graphite thermal expansion measuring assembly 100 includes a bearing fastener 110 and a push plate 130, the graphite heating element 300 is arranged in the furnace body 200, the bearing fastener 110 is arranged on the bottom wall of the furnace body 200 and is located at the end of the graphite heating element 300, and the bearing fastener 110 has a scale with an opening facing the graphite heating element 300. Groove 111, at least one side edge of the scale groove 111 is provided with a scale line 113 extending toward the bottom wall, the push plate 130 is dampedly arranged in the scale groove 111 and is located at the starting position of the scale line 113, the push plate 130 is abutted against the end of the graphite heating element 300, and the two sides of the push plate 130 are respectively abutted against the opposite side walls of the scale groove 111, and can move along the scale groove 111 toward the bottom wall of the scale groove 111 under the drive of the heated graphite heating element 300.
[0044] To sum up, the graphite thermal expansion measuring assembly 100 provided by the embodiment of the present invention sets the supporting fastener 110 at the end of the graphite heating element 300, and the opening of the scale groove 111 of the supporting fastener 110 faces the graphite heating element 300, and the edge of the scale groove 111 is provided with a scale line 113 extending downward in the vertical direction, and the push plate 130 is damped and set in the scale groove 111 and is located at the starting position of the scale line 113, and the push plate 130 can be supported on the end of the graphite heating element 300, and the two sides are respectively supported on the opposite side walls of the scale groove 111. In actual use, first complete the assembly of the graphite thermal expansion measurement component 100, first install the push plate 130 in the scale groove 111, and fix the supporting fastener 110 to the bottom end of the graphite heating element 300, and make the push plate 130 and the graphite heating element 300 abut each other, and then carry out normal crystal growth. When the temperature in the furnace rises to above 2000°C, the graphite heating element 300 will be deformed by the heat and push the push plate 130 to move downward along the scale groove 111, thereby changing the position of the push plate 130, and use the scale line 113 to measure the displacement of the push plate 130, so that the supporting fastener 110 can be taken out after cooling, and the deformation of the graphite heating element 300 can be obtained using the scale line 113. Compared with the prior art, the graphite thermal expansion measurement assembly 100 provided in the embodiment of the present invention can measure the deformation degree of the graphite heating element 300 in actual production, which facilitates the subsequent better distribution design of the graphite heating element 300, thereby ensuring that the graphite heating element 300 is within a reasonable distribution range.
[0045] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.
Claims
1. A graphite thermal expansion measurement assembly, characterized in that: The invention comprises a bearing fastener (110) and a push plate (130), wherein the bearing fastener (110) is used to be arranged at the end of the graphite heating element (300) and has a scale groove (111) with an opening facing the graphite heating element (300), at least one side edge of the scale groove (111) is provided with a scale line (113) extending toward the bottom wall, and the push plate (130) is dampedly arranged in the scale groove (111) and is located at the starting position of the scale line (113), and the push plate (130) is used to abut against the end of the graphite heating element (300), and the two sides of the push plate (130) are respectively abutted against the opposite side walls of the scale groove (111), and can move along the scale groove (111) toward the bottom wall of the scale groove (111) under the drive of the heated graphite heating element (300).
2. The graphite thermal expansion measurement assembly according to claim 1, characterized in that: The side wall of the scale groove (111) is further provided with a damping stop structure (150), and the damping stop structure (150) is clamped on the edge of the push plate (130) and is used for damping and limiting the push plate (130).
3. The graphite thermal expansion measurement assembly according to claim 2, characterized in that: The damping stop structure (150) comprises a plurality of one-way latching teeth (151) protruding relative to the side wall of the scale groove (111); the plurality of one-way latching teeth (151) are evenly distributed on the side wall of the scale groove (111); and a latching groove (153) for latching the push plate (130) is formed between adjacent one-way latching teeth (151).
4. The graphite thermal expansion measurement assembly according to claim 3, characterized in that: Each of the one-way latch teeth (151) is formed with a guide bevel (155) on a side away from the bottom wall of the scale groove (111); one side edge of the guide bevel (155) is engaged with the side wall of the scale groove (111) and is arranged at an obtuse angle with the side wall of the scale groove (111); the other side of the guide bevel (155) extends toward the center of the scale groove (111); a stop table (157) is formed on a side of the one-way latch tooth (151) close to the bottom wall of the scale groove (111); one side edge of the stop table (157) is engaged with the side wall of the scale groove (111) and is arranged at an acute angle or a right angle with the side wall of the scale groove (111); the other side of the stop table (157) extends toward the center of the scale groove (111).
5. The graphite thermal expansion measurement assembly according to claim 4, characterized in that: An edge of one side of the guide inclined surface (155) away from the side wall of the scale groove (111) is engaged with an edge of one side of the stop table (157) away from the side wall of the scale groove (111), so that the cross section of the one-way latching tooth (151) is triangular.
6. The graphite thermal expansion measurement assembly according to claim 4 or 5, characterized in that: The included angle formed by the guide inclined surface (155) and the side wall of the scale groove (111) is between 120° and 170°; the included angle formed by the stop surface (157) and the side wall of the scale groove (111) is between 40° and 90°.
7. The graphite thermal expansion measurement assembly according to claim 3, characterized in that: The width of the card slot (153) is less than or equal to the thickness of the push plate (130).
8. The graphite thermal expansion measurement assembly according to claim 1, characterized in that: The supporting fastener (110) includes a bottom plate (115) and two side plates (117), the two side plates (117) are integrally arranged on the two side edges of the bottom plate (115), and the two side plates (117) and the bottom plate (115) are jointly arranged to form the scale groove (111), the push plate (130) is abutted against the inner wall of the side plate (117), and the opening width of the scale groove (111) is used to adapt to the end width of the graphite heating element (300), so that the upper inner wall of the side plate (117) fits the graphite heating element (300).
9. The graphite thermal expansion measurement assembly according to claim 1, characterized in that: The graphite thermal expansion measurement assembly further comprises an insulating plate (170), wherein the insulating plate (170) is arranged on a side of the load-bearing fastener (110) facing away from the opening.
10. A silicon carbide crystal growth furnace, characterized in that: The invention comprises a furnace body (200), a graphite heating element (300) and a graphite thermal expansion measurement assembly as described in any one of claims 1 to 9, wherein the graphite heating element (300) is arranged in the furnace body (200), the supporting fastener (110) is arranged on the bottom wall of the furnace body (200) and is located at the end of the graphite heating element (300), and the push plate (130) is supported on the end of the graphite heating element (300).