Graphite thermal expansion measuring assembly and silicon carbide crystal growth furnace

Abstract

The utility model discloses a graphite thermal expansion measuring assembly and a silicon carbide crystal growth furnace, and relates to the technical field of crystal growth, the graphite thermal expansion measuring assembly comprises a component buckle, a carving cone and a nick bearing piece, the component buckle is used for being buckled on a graphite heating body to be measured and can move along the vertical direction under the driving of the graphite heating body to be measured, and the nick bearing piece is used for bearing nicks on the carving cone. The carving cone is arranged on the component buckle and extends out in the horizontal direction, the nick bearing piece is provided with a bearing surface distributed in the vertical direction, the carving cone abuts against the bearing surface in the horizontal direction, and the carving cone is used for moving in the vertical direction under the driving of the component buckle and leaving a nick representing the deformation quantity of the graphite heating element to be measured on the bearing surface. Compared with the prior art, the graphite heating element deformation measuring device has the advantages that the deformation quantity of the graphite heating element is obtained through the nicks, the deformation degree of the graphite heating element can be measured in actual production, the graphite heating element can be conveniently and better distributed and designed subsequently, and it is guaranteed that the graphite heating element is located in a reasonable distribution range.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal growth, in particular to a graphite thermal expansion measurement component and a silicon carbide crystal growth furnace. Background Art

[0002] During the silicon carbide crystal growth process, a large number of graphite heating elements are usually placed in the crystal growth furnace. When the temperature rises from room temperature to the 2000-2200℃ required for silicon carbide crystal growth, the graphite heating element will undergo a certain amount of thermal expansion and deformation, thereby changing the temperature conditions such as the high-temperature zone in the furnace. Graphite heating elements will deform due to heat, so it is necessary to reasonably adjust the distribution gap of the graphite heating element during design. As for the degree of deformation of the graphite heating element, there is currently a lack of means to directly measure the degree of deformation of the heating element at 2000℃ in actual production, making it difficult to effectively measure the thermal expansion of the graphite heating element. Therefore, there is a lack of corresponding data support for the subsequent distribution design of the graphite heating element, making it difficult to ensure that the graphite heating element is within a reasonable distribution range. Utility Model Content

[0003] The purpose of the utility model is to provide a graphite thermal expansion measurement component and a silicon carbide crystal growth furnace, which can measure the deformation degree of the graphite heating element in actual production, facilitate the subsequent better distribution design of the graphite heating element, and ensure that the graphite heating element is within a reasonable distribution range.

[0004] The embodiment of the present utility model is achieved as follows:

[0005] On the one hand, an embodiment of the present utility model provides a graphite thermal expansion measurement assembly, including a component buckle, a scoring cone and a scoring carrier, wherein the component buckle is used to buckle on the graphite heating element to be measured, and can be displaced in the vertical direction under the drive of the graphite heating element to be measured, the scoring cone is arranged on the component buckle and extends in the horizontal direction, the scoring carrier has a bearing surface distributed along the vertical direction, and the scoring cone is abutted against the bearing surface along the horizontal direction, wherein the scoring cone is used to displace in the vertical direction under the drive of the component buckle, and leave a scoring on the bearing surface that characterizes the deformation variable of the graphite heating element to be measured.

[0006] In an optional embodiment, the scoring carrier includes graphite paper, which is used to be laid on the furnace wall and constitute the bearing surface. An adjustment buckle is provided on one side of the component buckle, one end of the scoring cone is assembled in the adjustment buckle, and the other end extends along the horizontal direction and abuts against the surface of the graphite paper.

[0007] In an optional embodiment, the adjustment buckle has an adjustment groove, the inner wall of the adjustment groove is provided with an internal thread, and one end of the engraved cone is threadedly assembled in the adjustment groove.

[0008] In an optional embodiment, a positioning screw hole is provided on the adjustment buckle, the positioning screw hole is connected to the adjustment slot, and is equipped with a positioning knob, the positioning knob extends into the adjustment slot through the positioning screw hole, and abuts against the engraved cone to limit the engraved cone.

[0009] In an optional embodiment, at least one end of the component buckle is provided with a damping groove, and the damping groove is used to cooperate with the graphite heating element to be tested, so that the component buckle is fixed on the graphite heating element to be tested.

[0010] In an optional embodiment, the scoring carrier includes a base, graphite paper, a carrier and a supporting plate, the carrier is arranged on the base and has a receiving groove extending along the vertical direction, the graphite paper is accommodated in the receiving groove, the supporting plate is supported against one side surface of the graphite paper and is connected to one side of the carrier, wherein a clearance opening extending along the vertical direction is provided on the side of the carrier away from the supporting plate, the clearance opening is connected to the receiving groove so that the graphite paper is exposed at the clearance opening and forms the bearing surface, the scoring cone extends into the clearance opening and is supported against the surface of the graphite paper.

[0011] In an optional embodiment, the holding plate is assembled in the accommodating groove and is spaced apart from the evacuation opening, and the graphite paper is arranged between the holding plate and the evacuation opening.

[0012] In an optional embodiment, the scoring carrier further includes an insulating plate, the insulating plate is used to be arranged on the furnace bottom, and the base is arranged on the insulating plate.

[0013] In an optional embodiment, the engraved cone is integrally provided on one side of the component buckle and protrudes toward the evacuation opening, and the diameter of the engraved cone gradually decreases in a direction approaching the evacuation opening.

[0014] On the other hand, an embodiment of the present invention also provides a silicon carbide crystal growth furnace, including a furnace body, a graphite heating element and the aforementioned graphite thermal expansion measurement assembly, the graphite heating element is arranged in the furnace body, and the component is snap-fitted to the graphite heating element.

[0015] The beneficial effects of the embodiments of the present utility model include:

[0016] The embodiment of the present utility model provides a graphite thermal expansion measurement assembly and a silicon carbide crystal growth furnace, wherein a component buckle is fastened to the graphite heating element to be measured, so that under high temperature conditions, the component buckle can be displaced in the vertical direction under the drive of the graphite heating element to be measured, and the inscribed cone is set on the component buckle and extends in the horizontal direction, and the inscribed bearing member has a bearing surface distributed in the vertical direction, and the inscribed cone can be supported on the bearing surface in the horizontal direction. In actual use, the temperature of the crystal growth furnace rises to above 2000°C. At this time, the graphite heating element expands due to the heat, and the component buckle will move in the vertical direction under the drive of the graphite heating element, driving the inscribed cone to move and leaving a notch on the bearing surface. The notch can characterize the deformation of the graphite heating element, and the deformation of the graphite heating element can be obtained by measuring the length of the notch. Compared with the existing technology, the graphite thermal expansion measurement component provided by the embodiment of the utility model obtains the deformation of the graphite heating element by notching, and can measure the deformation degree of the graphite heating element in actual production, which facilitates the subsequent better distribution design of the graphite heating element and ensures that the graphite heating element is within a reasonable distribution range. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 A schematic structural diagram of a graphite thermal expansion measurement assembly provided in the first embodiment of the present utility model;

[0019] Figure 2 for Figure 1 A partial enlarged schematic diagram of middle II;

[0020] Figure 3 A schematic structural diagram of a graphite thermal expansion measurement assembly provided in a second embodiment of the present utility model;

[0021] Figure 4 for Figure 3 A partial enlarged schematic diagram of IV;

[0022] Figure 5 for Figure 3 Schematic diagram of the structure of the middle notch bearing member.

[0023] icon:

[0024] 100-graphite thermal expansion measurement assembly; 110-component buckle; 111-adjustment buckle; 113-adjustment slot; 115-positioning knob; 117-damping slide slot; 130-engraved cone; 150-engraved bearing member; 151-graphite paper; 152-base; 153-carrying frame; 154-supporting plate; 155-accommodating slot; 156-yield opening; 157-insulating plate; 200-furnace body; 300-graphite heating element. DETAILED DESCRIPTION

[0025] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0028] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0029] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0030] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0031] First embodiment

[0032] See also Figure 1 and Figure 2 The embodiment of the utility model provides a graphite thermal expansion measurement component 100, which can measure the deformation degree of the graphite heating element 300 in actual production, facilitate the subsequent better distribution design of the graphite heating element 300, and ensure that the graphite heating element 300 is within a reasonable distribution range.

[0033] An embodiment of the present invention provides a graphite expansion measurement assembly, including a component buckle 110, a scoring cone 130 and a scoring carrier 150. The component buckle 110 is used to buckle onto the graphite heating element 300 to be measured, and can be displaced in the vertical direction under the drive of the graphite heating element 300 to be measured. The scoring cone 130 is arranged on the component buckle 110 and extends in the horizontal direction. The scoring carrier 150 has a bearing surface distributed in the vertical direction, and the scoring cone 130 is supported on the bearing surface in the horizontal direction. The scoring cone 130 is used to displace in the vertical direction under the drive of the component buckle 110, and leave a scoring on the bearing surface that represents the deformation amount of the graphite heating element 300 to be measured.

[0034] It is worth noting that in actual use, the assembly of the components is completed first, the notched carrier 150 is placed in the furnace, the component buckle 110 is buckled on the graphite heating element 300 to be tested, and the position of the component buckle 110 or the notched cone 130 is adjusted so that the notched cone 130 can be gently supported on the bearing surface, and then normal heating is carried out, and the temperature of the crystal growth furnace is raised to above 2000°C. At this time, the graphite heating element 300 expands due to the heat, and the component buckle 110 will move in an unknown vertical direction under the drive of the graphite heating element 300, driving the notched cone 130 to move and leaving a notch on the bearing surface. The notch can characterize the deformation of the graphite heating element 300, and the deformation of the graphite heating element 300 is obtained by measuring the length of the notch.

[0035] In this embodiment, the scoring support 150 includes graphite paper 151, which is laid on the furnace wall and forms a supporting surface. An adjustment buckle 111 is provided on one side of the component buckle 110. One end of the scoring cone 130 is assembled into the adjustment buckle 111, while the other end extends horizontally and abuts against the surface of the graphite paper 151. Specifically, the graphite paper 151 can be adhesively fixed to the side wall surface of the furnace body 200, and the surface of the graphite paper 151 forms the supporting surface. The component buckle 110 can be made of materials such as carbon, tantalum carbide, high-temperature resistant ceramics, diamond, or boron nitride, while the scoring cone 130 can be a long, needle-like object, specifically made of high-temperature resistant ceramics, diamond, or boron nitride. Before crystal growth, the component buckle 110 can be fastened upright or inverted to the heating graphite body at room temperature. The scoring cone 130 can then be adjusted to extend from the adjustment buckle 111 and lightly scored on the graphite paper 151, leaving a scoring point.

[0036] Furthermore, the adjustment buckle 111 has an adjustment slot 113, the inner wall of which is provided with an internal thread, and one end of the engraving cone 130 is threadedly assembled into the adjustment slot 113. Specifically, the engraving cone 130 is needle-shaped and has an external thread on the large end. The large end can be threadedly assembled into the adjustment slot 113 to achieve a fixed fit with the adjustment buckle 111. The position of the engraving cone 130 can be adjusted by rotating the engraving cone 130 to ensure that the engraving cone 130 can be abutted against the supporting surface of the graphite paper 151.

[0037] In this embodiment, the adjustment buckle 111 is provided with a positioning screw hole, which is connected to the adjustment slot 113 and is equipped with a positioning knob 115. The positioning knob 115 extends into the adjustment slot 113 through the positioning screw hole and abuts against the engraved cone 130 to limit the position of the engraved cone 130. Specifically, the positioning knob 115 includes a knob portion and a bolt portion. The bolt portion is threadedly assembled into the positioning screw hole. The knob portion has a larger diameter, which is convenient for manual tightening or loosening. By providing the positioning knob 115, the portion of the engraved cone 130 extending into the adjustment slot 113 can be fixed, preventing the engraved cone 130 from rotating during the crystal growth process and affecting the formation of the scoring.

[0038] In this embodiment, at least one end of the component buckle 110 is provided with a damping chute 117, which is used to cooperate with the graphite heating element 300 to be tested so that the component buckle 110 is fixed on the graphite heating element 300 to be tested. Specifically, the side wall of the damping chute 117 is provided with a plurality of damping reinforcement ribs, which are pressed against the surface of the graphite heating element 300 to ensure the fixing effect of the component buckle 110. The component buckle 110 can be buckled on the top side of the graphite heating element 300, or it can be buckled on the bottom side of the graphite heating element 300. When buckled on the bottom side, the damping force of the damping chute 117 needs to be increased.

[0039] In summary, the embodiment of the present invention provides a graphite thermal expansion measurement assembly 100, which buckles the component buckle 110 on the graphite heating element 300 to be measured, so that under high temperature conditions, the component buckle 110 can be displaced in the vertical direction under the drive of the graphite heating element 300 to be measured, and the engraving cone 130 is set on the component buckle 110 and extends in the horizontal direction, and the inscribed support 150 has a supporting surface distributed in the vertical direction, and the engraving cone 130 can be supported on the supporting surface in the horizontal direction. In actual use, the temperature of the crystal growth furnace rises to above 2000℃. At this time, the graphite heating element 300 expands due to the heat, and the component buckle 110 will move in the vertical direction under the drive of the graphite heating element 300, driving the engraving cone 130 to displace and leaving a notch on the supporting surface. The notch can characterize the deformation of the graphite heating element 300, and the deformation of the graphite heating element 300 is obtained by measuring the length of the notch. Compared with the prior art, the graphite thermal expansion measurement assembly 100 provided in the embodiment of the present invention obtains the deformation of the graphite heating element 300 by notching, and can measure the degree of deformation of the graphite heating element 300 in actual production, thereby facilitating the subsequent better distribution design of the graphite heating element 300 and ensuring that the graphite heating element 300 is within a reasonable distribution range.

[0040] Second embodiment

[0041] See also Figures 3 to 5 This embodiment provides a graphite thermal expansion measurement assembly 100, whose basic structure, principle and technical effects are the same as those of the first embodiment. For the sake of brief description, for parts not mentioned in this embodiment, reference may be made to the corresponding contents in the first embodiment.

[0042] In this embodiment, the scoring carrier 150 includes a base 152, a graphite paper 151, a carrier 153 and a supporting plate 154. The carrier 153 is arranged on the base 152 and has a receiving groove 155 extending in the vertical direction. The graphite paper 151 is accommodated in the receiving groove 155. The supporting plate 154 is supported on one side surface of the graphite paper 151 and is connected to one side of the carrier 153. The side of the carrier 153 away from the supporting plate 154 is provided with a clearance opening 156 extending in the vertical direction. The clearance opening 156 is connected to the receiving groove 155 so that the graphite paper 151 is exposed in the clearance opening 156 and forms a bearing surface. The scoring cone 130 extends into the clearance opening 156 and is supported on the surface of the graphite paper 151.

[0043] Specifically, the support frame 153 and the base 152 are both made of graphite material, and the support member can be integrally provided on the base 152 . Meanwhile, the supporting plate 154 can also be made of graphite material, and can play the role of supporting and supporting the graphite paper 151 .

[0044] In this embodiment, the abutment plate 154 is assembled in the receiving groove 155 and is spaced apart from the clearance opening 156. The graphite paper 151 is disposed between the abutment plate 154 and the clearance opening 156. Specifically, the two side edges of the carrier 153 are provided with retaining protrusions. The retaining protrusions are raised and bent inward, thereby forming the receiving groove 155. The abutment plate 154 is assembled in the receiving groove 155, and the graphite paper 151 is pressed between the abutment plate 154 and the carrier 153, thereby ensuring the fixing effect of the graphite paper 151.

[0045] Furthermore, the scoring support 150 also includes an insulating plate 157, which is disposed at the bottom of the furnace, and the base 152 is disposed on the insulating plate 157. Specifically, the insulating plate 157 can be made of an insulating material such as boron nitride that can withstand temperatures of 2500°C without sublimation or reaction. By providing the insulating plate 157, thermal and electrical isolation can be achieved, preventing the support frame 153 and the base 152 from affecting the thermal field distribution within the furnace.

[0046] In this embodiment, a carving cone 130 is integrally mounted on one side of the component buckle 110 and protrudes toward the clearance opening 156. The diameter of the carving cone 130 gradually decreases as it approaches the clearance opening 156. Specifically, the carving cone 130 is wedge-shaped, with its tip extending into the clearance opening 156 and resting against the surface of the graphite paper 151. This ensures that the carving cone 130 lightly carves into the graphite paper 151 and leaves a mark.

[0047] The graphite thermal expansion measurement assembly 100 provided in this embodiment supports the graphite paper 151 through the additionally designed support frame 153 and base 152 , thereby reducing the amount of graphite paper 151 used and making the measurement more accurate.

[0048] Third embodiment

[0049] Please continue to see Figure 1 and Figure 3 This embodiment also provides a silicon carbide crystal growth furnace, including a furnace body 200, a graphite heating element 300 and a graphite thermal expansion measurement assembly 100. The basic structure and principle of the graphite thermal expansion measurement assembly 100 and the technical effects produced are the same as those of the first embodiment. For the sake of brief description, for parts not mentioned in this embodiment, please refer to the corresponding content in the first embodiment.

[0050] In this embodiment, the silicon carbide crystal growth furnace includes a furnace body 200, a graphite heating element 300 and a graphite thermal expansion measurement assembly 100. The graphite expansion measurement assembly includes a component buckle 110, a scoring cone 130 and a scoring support 150. The graphite heating element 300 is arranged in the furnace body 200. The component buckle 110 is buckled on one of the graphite heating elements 300 and can be displaced in the vertical direction under the drive of the graphite heating element 300. The scoring cone 130 is arranged on the component buckle 110 and extends in the horizontal direction. The scoring support 150 has a bearing surface distributed in the vertical direction, and the scoring cone 130 is supported on the bearing surface in the horizontal direction. The scoring cone 130 is used to displace in the vertical direction under the drive of the component buckle 110 and leave a scoring on the bearing surface that represents the deformation amount of the graphite heating element 300 to be measured.

[0051] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A graphite thermal expansion measurement assembly, characterized in that: The invention comprises a component buckle (110), a scoring cone (130) and a scoring bearing member (150), wherein the component buckle (110) is used to buckle on a graphite heating element (300) to be tested and can be displaced in a vertical direction under the drive of the graphite heating element (300) to be tested, the scoring cone (130) is arranged on the component buckle (110) and extends in a horizontal direction, the scoring bearing member (150) has a bearing surface distributed in the vertical direction, and the scoring cone (130) is supported on the bearing surface in a horizontal direction, wherein the scoring cone (130) is used to be displaced in a vertical direction under the drive of the component buckle (110) and leave a scoring on the bearing surface that represents the deformation amount of the graphite heating element (300) to be tested.

2. The graphite thermal expansion measurement assembly according to claim 1, characterized in that: The scoring bearing member (150) comprises graphite paper (151), which is used for laying on the furnace wall and constituting the bearing surface. An adjustment buckle (111) is provided on one side of the component buckle (110), and one end of the scoring cone (130) is assembled in the adjustment buckle (111), while the other end extends in a horizontal direction and abuts against the surface of the graphite paper (151).

3. The graphite thermal expansion measurement assembly according to claim 2, characterized in that: The adjusting buckle (111) has an adjusting groove (113), the inner wall of the adjusting groove (113) is provided with an internal thread, and one end of the engraved cone (130) is threadedly assembled in the adjusting groove (113).

4. The graphite thermal expansion measurement assembly according to claim 3, characterized in that: The adjusting buckle (111) is provided with a positioning screw hole, the positioning screw hole is connected to the adjusting groove (113), and is equipped with a positioning knob (115). The positioning knob (115) extends into the adjusting groove (113) through the positioning screw hole and abuts against the engraved cone (130) to limit the engraved cone (130).

5. The graphite thermal expansion measurement assembly according to claim 1, characterized in that: At least one end of the component buckle (110) is provided with a damping slide groove (117), and the damping slide groove (117) is used to cooperate with the graphite heating element (300) to be tested, so that the component buckle (110) is fixed on the graphite heating element (300) to be tested.

6. The graphite thermal expansion measurement assembly according to claim 1, characterized in that: The scoring carrier (150) comprises a base (152), graphite paper (151), a carrier (153) and a supporting plate (154). The carrier (153) is arranged on the base (152) and has a receiving groove (155) extending in a vertical direction. The graphite paper (151) is received in the receiving groove (155). The supporting plate (154) is supported on one side surface of the graphite paper (151) and is in contact with the carrier (153). 153), wherein a side of the carrier (153) away from the abutting plate (154) is provided with a clearance opening (156) extending in a vertical direction, and the clearance opening (156) is connected to the accommodating groove (155), so that the graphite paper (151) is exposed in the clearance opening (156) and forms the bearing surface, and the engraving cone (130) extends into the clearance opening (156) and abuts against the surface of the graphite paper (151).

7. The graphite thermal expansion measurement assembly according to claim 6, characterized in that: The supporting plate (154) is assembled in the accommodating groove (155) and is spaced apart from the evacuation opening (156); the graphite paper (151) is arranged between the supporting plate (154) and the evacuation opening (156).

8. The graphite thermal expansion measurement assembly according to claim 6, characterized in that: The notch carrier (150) further comprises an insulating plate (157), wherein the insulating plate (157) is used to be arranged on the bottom of the furnace, and the base (152) is arranged on the insulating plate (157).

9. The graphite thermal expansion measurement assembly according to claim 6, characterized in that: The engraved cone (130) is integrally arranged on one side of the component buckle (110) and protrudes toward the clearance opening (156), and the diameter of the engraved cone (130) gradually decreases in a direction approaching the clearance opening (156).

10. A silicon carbide crystal growth furnace, characterized in that: The invention comprises a furnace body (200), a graphite heating element (300) and a graphite thermal expansion measurement assembly according to any one of claims 1 to 9, wherein the graphite heating element (300) is arranged in the furnace body (200), and the component buckle (110) is buckled on the graphite heating element (300).

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