Ejector pin device and die bonding equipment

Abstract

The utility model is applicable to the technical field of die bonding, and provides an ejector pin device and die bonding equipment, the ejector pin device comprises an ejector pin assembly, a base, a first sliding seat and a second sliding seat, the first sliding seat is slidably arranged on the base, the second sliding seat is slidably arranged on the first sliding seat, and the ejector pin assembly is arranged on the second sliding seat. The die bonding equipment comprises any one of the ejector pin devices. The first voice coil motor and the second voice coil motor have the advantages of being simple in structure and small in size, so that the overall structure of the ejector pin device is simpler. Meanwhile, a first voice coil motor and a second voice coil motor are used for adjusting the position of the ejector pin assembly, vibration generated when the first sliding base and the second sliding base move can be reduced, the first sliding base and the second sliding base move more stably, meanwhile, the first sliding base and the second sliding base can react more rapidly, and the service life of the ejector pin assembly is prolonged. Moreover, the control of the motion state is more convenient and accurate, and the die bonding precision and the die bonding efficiency are effectively improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of crystal bonding, and in particular relates to an ejector pin device and crystal bonding equipment. Background Art

[0002] A die bonder is a piece of equipment used in semiconductor device manufacturing, connecting semiconductor wafers to other components. During operation, a die bonder typically supports a wafer ring using a wafer feed platform. A pin mechanism then separates the chip from the blue film. Finally, a die bonder nozzle picks up the chip from the ring, securing the solder joints between the chip and the package substrate to achieve die bonding. However, existing pin mechanisms often suffer from complex positioning mechanisms and low reliability. Utility Model Content

[0003] The purpose of the utility model is to provide an ejector pin device and a crystal bonding device, aiming to solve the problems of the ejector pin device in the prior art in that the position adjustment structure is complex and the movement reliability is low when in use.

[0004] The utility model is implemented as follows: in a first aspect, a pin device is provided, the pin device comprising a pin assembly, a base, a first sliding seat and a second sliding seat, the first sliding seat being slidably arranged on the base, the second sliding seat being slidably arranged on the first sliding seat, the pin assembly being arranged on the second sliding seat, a first voice coil motor being arranged between the first sliding seat and the base, the first voice coil motor being used to drive the first sliding seat to slide relative to the base along a first direction, a second voice coil motor being arranged between the first sliding seat and the second sliding seat, the second voice coil motor being used to drive the second sliding seat to slide relative to the first sliding seat along a second direction, and the first direction and the second direction being arranged at an angle.

[0005] In an optional embodiment, two first linear slide rails are arranged between the first sliding seat and the base, and the two first linear slide rails are arranged along the first direction, and the two first linear slide rails are respectively located at the two ends of the first sliding seat, and the second sliding seat is provided with two second linear slide rails between the first sliding seat, and the two second linear slide rails are arranged along the second direction, and the two second linear slide rails are respectively located at the two ends of the second sliding seat.

[0006] In an optional embodiment, the first voice coil motor is located in the area between the two first linear slides, and the distance between the first voice coil motor and the two first linear slides is equal. The second voice coil motor is also located in the area between the two second linear slides, and the distance between the second voice coil motor and the two second linear slides is equal.

[0007] In an optional embodiment, a first measuring part is provided between the base and the first sliding seat, and the first measuring part is used to detect the displacement of the first sliding seat relative to the base. A second measuring part is also provided between the first sliding seat and the second sliding seat, and the second measuring part is used to detect the displacement of the second sliding seat relative to the first sliding seat.

[0008] In an optional embodiment, the first voice coil motor and the second voice coil motor include a stator assembly and a mover assembly, the mover assembly is movably arranged on the stator assembly, the stator assembly has a magnetic part, and the mover assembly has a coil part, and the coil part is used to act with the magnetic part after power is applied to drive the mover assembly to move in a linear direction.

[0009] In an optional embodiment, the stator assembly further has an installation space, the magnetic portion is arranged on the inner wall of the installation space, at least part of the movable component is movably arranged in the installation space, and has the freedom to move in a linear direction relative to the stator assembly, and the coil portion is arranged on the portion of the movable component located in the installation space.

[0010] In an optional embodiment, the ejector assembly includes an ejector bracket, an ejector body and a driving structure, the ejector body includes a fixed cylinder and a lifting member, the ejector bracket is arranged on the second sliding seat, the fixed cylinder is arranged on the ejector bracket, and the lifting member is movably arranged in the fixed cylinder, and the driving structure is arranged on the ejector bracket and / or the second sliding seat, and is used to drive the movable rod of the ejector body to move along the third direction.

[0011] In an optional embodiment, the driving structure includes a power unit and a driving member, the driving member has a first state and a second state, the driving member is connected to the driving end of the power unit, and the power unit is used to drive the driving member to move. During the movement from the second state to the first state, the driving member pushes the movable rod to move along a third direction, and during the movement from the first state to the second state, the movable rod returns to its initial position.

[0012] In an optional embodiment, the ejector assembly further includes a guide assembly, which is used to prevent the movable rod from rotating. The guide assembly includes a guide member and a connecting member. The guide member is slidably connected to the ejector bracket and has freedom along a third direction relative to the ejector bracket. The connecting member is connected between the guide member and the movable rod.

[0013] In a second aspect, a die bonding device is provided, comprising any one of the ejector pin devices described above.

[0014] The present invention provides the following technical advantages over the prior art: a first sliding seat is slidably mounted on a base, a second sliding seat is slidably mounted on the first sliding seat, a first voice coil motor is disposed between the first sliding seat and the base, and a second voice coil motor is disposed between the first and second sliding seats. The first voice coil motor drives the first sliding seat to slide relative to the base in a first direction, and the second voice coil motor drives the second sliding seat to slide relative to the first sliding seat in a second direction. Furthermore, an ejector assembly is disposed on the second sliding seat to adjust the position of the ejector assembly. Compared to the ejector assembly in the prior art, which utilizes a motor and an eccentric wheel structure, the first and second voice coil motors have a simpler structure and smaller size, further simplifying the overall structure of the ejector assembly. Furthermore, the use of the first and second voice coil motors to adjust the position of the ejector assembly reduces vibration generated by the movement of the first and second sliding seats, resulting in smoother movement, faster response, and more convenient and precise control, effectively improving die bonding accuracy and efficiency.

[0015] It can be understood that the beneficial effects of the second aspect mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments of the present invention or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 This is a schematic structural diagram of the ejector device provided by an embodiment of the present utility model;

[0018] Figure 2 It is a structural schematic diagram of the base used in the embodiment of the present utility model;

[0019] Figure 3 It is a structural diagram of the base and the first sliding seat used in the embodiment of the utility model;

[0020] Figure 4 Schematic diagram of the structure of the first voice coil motor used in the embodiment of the present utility model;

[0021] Figure 5 It is a structural schematic diagram of the ejector pin assembly used in the embodiment of the present utility model.

[0022] Description of reference numerals:

[0023] 1. Base; 2. First sliding seat; 3. Second sliding seat; 4. Ejector assembly; 41. Ejector bracket; 42. Ejector body; 43. Driving structure; 431. Driving member; 432. Power unit; 44. Guide assembly; 441. Guide member; 442. Connecting member; 5. First voice coil motor; 51. Stator assembly; 52. Mover assembly; 53. Magnetic part; 54. Coil part; 55. Installation space; 6. Second voice coil motor; 7. First linear slide; 8. Second linear slide; 9. First measuring part; 10. Second measuring part. DETAILED DESCRIPTION

[0024] The following describes in detail embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to explain the present invention, and should not be construed as limiting the present invention.

[0025] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0026] In this embodiment, according to Figure 1 The XYZ rectangular coordinate system established in the definition is: the side located in the positive direction of the X axis is defined as the front, and the side located in the negative direction of the X axis is defined as the back; the side located in the positive direction of the Y axis is defined as the left, and the side located in the negative direction of the Y axis is defined as the right; the side located in the positive direction of the Z axis is defined as the top, and the side located in the negative direction of the Z axis is defined as the bottom.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0028] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, indirect connection through an intermediate medium, internal communication between two components, or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0029] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.

[0030] Please refer to Figures 1 to 5 As shown, in an embodiment of the utility model, in the first aspect, a pin device is provided, which includes a pin assembly 4, a base 1, a first sliding seat 2 and a second sliding seat 3. The first sliding seat 2 is slidably arranged on the base 1, and the second sliding seat 3 is slidably arranged on the first sliding seat 2. The pin assembly 4 is arranged on the second sliding seat 3. A first voice coil motor 5 is arranged between the first sliding seat 2 and the base 1. The first voice coil motor 5 is used to drive the first sliding seat 2 to slide relative to the base 1 along a first direction X. A second voice coil motor 6 is arranged between the first sliding seat 2 and the second sliding seat 3. The second voice coil motor 6 is used to drive the second sliding seat 3 to slide relative to the first sliding seat 2 along a second direction Y, and the first direction X and the second direction Y are arranged at an angle.

[0031] Specifically, base 1 refers to a component having a certain volume. Base 1 can be in the form of a block, plate, or a combination of multiple shapes. Base 1 is typically mounted on the machine platform of the device during use. First sliding seat 2 and second sliding seat 3 also refer to components having a certain volume. First sliding seat 2 and second sliding seat 3 can be in the form of a block, plate, or a combination of multiple shapes. Ejector assembly 4 refers to a component structure that can lift the chip. Ejector assembly 4 can include moving parts and a power component that drives the moving parts.

[0032] The first voice coil motor 5 and the second voice coil motor 6 are both direct drive motors that operate based on the principle that a current-carrying conductor is subjected to the Ampere force in a magnetic field. During operation, the first voice coil motor 5 and the second voice coil motor 6 do not experience error accumulation in intermediate transmission links, thereby achieving very high positioning accuracy and repeatability. Furthermore, the motors have a compact structure for easy installation and stable operation.

[0033] The first direction X and the second direction Y may both refer to directions in a horizontal plane, and in the same horizontal plane, the angle between the first direction X and the second direction Y is preferably a right angle.

[0034] The present invention provides an ejector device comprising a first sliding seat 2 slidably mounted on a base 1, a second sliding seat 3 slidably mounted on the first sliding seat 2, a first voice coil motor 5 disposed between the first sliding seat 2 and the base 1, and a second voice coil motor 6 disposed between the first and second sliding seats 2 and 3. The first voice coil motor 5 drives the first sliding seat 2 to slide relative to the base 1 in a first direction X, while the second voice coil motor 6 drives the second sliding seat 3 to slide relative to the first sliding seat 2 in a second direction Y. Furthermore, an ejector assembly 4 is mounted on the second sliding seat 3, thereby enabling adjustment of the position of the ejector assembly 4. Compared to conventional ejector devices employing a motor and an eccentric wheel structure, the first and second voice coil motors 5 and 6 have a simpler structure and smaller size, further simplifying the overall structure of the ejector device. Furthermore, using the first and second voice coil motors 5 and 6 to adjust the position of the ejector assembly 4 allows for smoother and more responsive movement of the first and second sliding seats 2 and 3, more convenient and precise control of their motion, and effectively improves die bonding accuracy and efficiency.

[0035] In one embodiment, see Figures 1 to 3Two first linear slides 7 are provided between the first sliding seat 2 and the base 1. The two first linear slides 7 are both provided along the first direction X. The two first linear slides 7 are respectively located at the two ends of the first sliding seat 2. Two second linear slides 8 are provided between the second sliding seat 3 and the first sliding seat 2. The two second linear slides 8 are both provided along the second direction Y. The two second linear slides 8 are respectively located at the two ends of the second sliding seat 3. Specifically, the first linear slide 7 refers to a component or assembly used to achieve linear sliding between two objects. The first linear slide 7 is generally composed of a guide rail and a slider. The guide rail is generally installed on a relatively fixed component, and the slider is installed on a component that needs to be moved. The guide rail in the first linear slide 7 can be provided along the first direction X, and the guide rails in the two first linear slides 7 are respectively located at the two ends of the first sliding seat 2. The second linear slide 8 refers to a component or assembly used to achieve linear sliding between two objects. The second linear slide 8 is generally composed of a guide rail and a slider. The guide rail is generally installed on a component with a relatively fixed position, and the slider is installed on a component that needs to be moved. The guide rail in the second linear slide 8 can be arranged along the second direction Y, and the guide rails in the two second linear slides 8 are respectively located at both ends of the second sliding seat 3. By providing two first linear slides 7 arranged along the first direction X between the first sliding seat 2 and the base 1, and two second linear slides 8 arranged along the second direction Y between the second sliding seat 3 and the first sliding seat 2, sliding between the first sliding seat 2 and the base 1 and between the second sliding seat 3 and the first sliding seat 2 is made more convenient. At the same time, it can also reduce the difficulty of installing the second sliding seat 3 and the first sliding seat 2, improve the reliability of the entire ejector assembly 4, and reduce the maintenance cost of the entire ejector assembly 4.

[0036] Based on the above-mentioned features of the first linear guide rail 7 and the second linear guide rail 8, please refer to Figure 2 and Figure 3The first voice coil motor 5 is located in the area between the two first linear slides 7, and the distance between the first voice coil motor 5 and the two first linear slides 7 is equal. The second voice coil motor 6 is also located in the area between the two second linear slides 8. The distance between the second voice coil motor 6 and the two second linear slides 8 is equal. Specifically, the body of the first voice coil motor 5 can be disposed on the top surface of the base 1. The first voice coil motor 5 can have a first driving end and a second driving end, respectively located on either side of the body of the first voice coil motor 5, and both the first driving end and the second driving end are connected to the bottom surface of the first sliding base 2. In addition, the distance between the first driving end and one of the first linear slide rails 7 is a first distance, and the distance between the second driving end and the other of the first linear slide rails 7 is a second distance. The first distance and the second distance are equal, so as to achieve the purpose of equal distance between the first voice coil motor 5 and the two first linear slide rails 7. When the first voice coil motor 5 is working, the force applied to the first sliding seat 2 is evenly distributed on the two first linear slide rails 7, so that the force on the first sliding seat 2 during movement is more balanced, thereby improving the sliding stability of the first sliding seat 2 and the overall stability of the ejector device.

[0037] The body of the second voice coil motor 6 can be disposed on the top surface of the first sliding seat 2. The second voice coil motor 6 can have a third driving end and a fourth driving end, located on either side of the body of the second voice coil motor 6. Both the third driving end and the fourth driving end are connected to the bottom surface of the second sliding seat 3. Furthermore, the distance between the third driving end and one of the second linear slide rails 8 is a third distance, and the distance between the fourth driving end and the other of the second linear slide rails 8 is a fourth distance. The third and fourth distances are equal, thereby achieving equal distances between the second voice coil motor 6 and the two second linear slide rails 8. This ensures that the force applied by the second voice coil motor 6 to the second sliding seat 3 during operation is evenly distributed across the two second linear slide rails 8, resulting in a more balanced force on the second sliding seat 3 during movement. This improves the sliding stability of the second sliding seat 3 and the overall stability of the ejector device.

[0038] In one embodiment, see Figures 1 to 3A first measuring part 9 is provided between the base 1 and the first sliding seat 2. The first measuring part 9 is used to detect the displacement of the first sliding seat 2 relative to the base 1. A second measuring part 10 is provided between the first sliding seat 2 and the second sliding seat 3. The second measuring part 10 is used to detect the displacement of the second sliding seat 3 relative to the first sliding seat 2. Specifically, the first measuring part 9 refers to a component or assembly that can measure the displacement of an object. The first measuring part 9 can be a physical measuring structure, such as a scale and an indicator. The first measuring part 9 can also be a sensor. The second measuring part 10 refers to a component or assembly that can measure the displacement of an object. The second measuring part 10 can be a physical measuring structure, such as a scale and an indicator. The second measuring part 10 can also be a sensor. By providing the first measuring part 9, the displacement of the first sliding seat 2 relative to the base 1 can be measured. During operation, the measurement result of the first measuring part 9 can be used to determine whether the sliding position of the first sliding seat 2 is accurate. Similarly, by setting up the second measuring part 10, the displacement of the second sliding seat 3 relative to the first sliding seat 2 can be measured. During operation, the measurement results of the second measuring part 10 can be used to judge the accuracy of the movement of the second sliding seat 3, so that the movement adjustment of the first sliding seat 2 and the second sliding seat 3 is more accurate.

[0039] In an alternative embodiment, see Figures 1 to 3 The first measuring part 9 and the second measuring part 10 can both include a read head assembly and a grating ruler. When in use, the read head assembly and the grating ruler can be respectively installed on two relatively moving parts. For example, when the first measuring part 9 is installed, the read head assembly can be installed on the first sliding seat 2 so that the read head assembly can move with the first sliding seat 2. The grating ruler is installed on the base 1, and the grating ruler can be set along the first direction X. During operation, the read head assembly can read the value on the grating ruler on the base 1 while the first sliding seat 2 slides, thereby realizing real-time measurement of the movement displacement of the first sliding seat 2. Similarly, when the second measuring part 10 is installed, the read head assembly can be installed on the second sliding seat 3 so that the read head assembly can move with the second sliding seat 3. The grating ruler is installed on the first sliding seat 2, and the grating ruler can be set along the second direction Y. During operation, the read head assembly can read the value on the grating ruler on the first sliding seat 2 while the second sliding seat 3 slides, thereby realizing real-time measurement of the movement displacement of the second sliding seat 3. By using the method of cooperating the read head assembly with the grating ruler, the use and installation of the first measuring part 9 and the second measuring part 10 can be made more convenient, and the measurement results of the first measuring part 9 and the second measuring part 10 can also be made more accurate.

[0040] In one embodiment, see Figure 4The first voice coil motor 5 and the second voice coil motor 6 both include a stator assembly 51 and a mover assembly 52. The mover assembly 52 is movably arranged on the stator assembly 51. The stator assembly 51 has a magnetic part 53, and the mover assembly 52 has a coil part 54. The coil part 54 is used to generate a magnetic field after power is applied and interact with the magnetic part 53 to drive the mover assembly 52 to move in a straight line direction.

[0041] Specifically, the stator assembly 51 refers to a component with a certain volume. The magnetic part 53 refers to a component that has magnetism and can generate a stable magnetic field. The magnetic part 53 can be a permanent magnet component or an electromagnetic component. The mover assembly 52 also refers to a component with a certain volume, and a coil part 54 is also provided on the mover assembly 52. The coil part 54 refers to a structure formed by winding a wire. The mover assembly 52 can be movably connected to the stator assembly 51. When the first voice coil motor 5 or the second voice coil motor 6 is working, the coil part 54 can be connected to the external circuit. After the coil part 54 is energized, a magnetic field will also be generated, and it will interact with the magnetic field generated by the magnetic part 53 to make the mover assembly 52 move in a straight line. By changing the direction of the current passed into the coil part 54, the direction of the magnetic field on the coil part 54 can be changed, thereby achieving control of the movement direction of the mover assembly 52. Similarly, the motion state of the mover assembly 52 can be controlled by controlling the opening and closing of the current, and the operating speed of the mover assembly 52 can be adjusted by changing the current passing through the coil part 54, so that the first voice coil motor 5 and the second voice coil motor 6 can run more smoothly and reliably, respond more quickly during operation, control of the motion state is more convenient and accurate, and the overall structure is simpler and smaller in size.

[0042] In one embodiment, see Figure 4 The stator assembly 51 also has an installation space 55. The magnetic portion 53 is disposed on the inner wall of the installation space 55. At least a portion of the movable assembly 52 is movably disposed within the installation space 55 and has freedom of movement in a linear direction relative to the stator assembly 51. The coil portion 54 is disposed on the portion of the movable assembly 52 located within the installation space 55. Specifically, the installation space 55 refers to a accommodating space of a certain volume. The installation space 55 generally has two openings. By disposing the central region of the movable assembly 52 within the installation space 55, and having the two ends of the movable assembly 52 extend from the two openings of the installation space 55 to form two driving ends, the movable installation of the stator assembly 51 and the movable assembly 52 can be made more convenient and space-saving.

[0043] In one embodiment, see Figure 1 and Figure 5The ejector assembly 4 includes an ejector bracket 41, an ejector body 42, and a driving structure 43. The ejector body 42 includes a fixed cylinder and a lifting member. The ejector bracket 41 is arranged on the second sliding seat 3, the fixed cylinder is arranged on the ejector bracket 41, and the lifting member is movably arranged in the fixed cylinder. The driving structure 43 is arranged on the ejector bracket 41 and / or the second sliding seat 3, and is used to drive the movable rod of the ejector body 42 to move along the third direction Z. Specifically, the ejector bracket 41 refers to a supporting component with a certain height. The ejector bracket 41 can be block-shaped, plate-shaped, or a combination of multiple shapes. The ejector body 42 refers to a component that can lift the chip. The ejector body 42 can include a fixed cylinder and a lifting member. The lifting member has a tip and a driving part respectively. The tip is lifted and lowered by the movement of the lifting member in the fixed cylinder to lift the chip. The driving structure 43 refers to a component or assembly that can drive an object to move. The driving structure 43 can be a cylinder, a hydraulic cylinder, or an electric push rod, etc. The driving structure 43 can also be a cam motor structure or a crankshaft crankshaft structure, etc. By setting the fixed cylinder of the ejector body 42 on the ejector bracket 41, and the lifting member being movably set in the fixed cylinder, the driving structure 43 is set on the ejector bracket 41 and / or the second sliding seat 3. When working, the driving structure 43 acts on the driving part of the lifting member to drive the lifting member to move relative to the fixed cylinder, so as to achieve the purpose of moving the tip, making the use of the ejector assembly 4 more convenient.

[0044] It should be noted that, in the above embodiment, only the necessary structure of the ejector body 42 is described. The ejector body 42 also includes other structures, which are described in detail in the prior art and will not be repeated here.

[0045] In one embodiment, see Figure 1 and Figure 5The driving structure 43 includes a power unit 432 and a driving member 431. The driving member 431 has a first state and a second state. The driving member 431 is connected to the driving end of the power unit 432. The power unit 432 is used to drive the above-mentioned driving member 431 to move. During the process of the driving member 431 moving from the second state to the first state, the driving member 431 pushes the movable rod to move along the third direction Z. During the process of the driving member 431 moving from the first state to the second state, the movable rod returns to its initial position. Specifically, the driving member 431 refers to a component with a certain volume. The driving member 431 can be a block, plate or column. The first state and the second state refer to two states during the movement of the driving member 431. The power unit 432 refers to a component or assembly that can drive an object to move. The power unit 432 can be a component such as an electric motor or a hydraulic motor that drives an object to rotate. The power unit 432 can also be a cylinder, a hydraulic cylinder or an electric push rod that drives an object to move in a straight line. By connecting the drive end of power unit 432 to driver 431, power unit 432 drives driver 431 to move when in operation, thereby enabling driver 431 to transition between the first and second states. During the movement of driver 431 from the second state to the first state, driver 431 pushes the movable rod in a third direction Z, typically vertically upward, allowing ejector body 42 to lift the chip. During the movement of driver 431 from the first state to the second state, the movable rod returns to its initial position. The aforementioned structure of drive mechanism 43 facilitates and accelerates the actuation of ejector body 42, improving its operating efficiency.

[0046] In a specific embodiment, see Figure 1 and Figure 5 The power unit 432 is an electric motor, and the driving member 431 is a cam structure. The cam structure is disposed at the driving end of the motor and can rotate under the action of the motor and switch between a first state and a second state during the rotation process. During the rotation of the cam structure from the first state to the second state, the outer wall of the cam structure and the lifting member abut against each other, thereby pushing the lifting member to move. During the rotation of the cam structure from the second state to the first state, the cam structure can disengage from the lifting member, allowing the lifting member to return to its original position under the action of the elastic member, thereby ultimately achieving the purpose of driving the lifting member on the ejector body 42 to move, making the driving structure 43 more convenient to use.

[0047] In one embodiment, see Figure 5The ejector assembly 4 also includes a guide assembly 44, which is used to prevent the movable rod from rotating. The guide assembly 44 includes a guide member 441 and a connector 442. The guide member 441 is slidably connected to the ejector bracket 41 and has freedom along the third direction Z relative to the ejector bracket 41. The connector 442 is connected between the guide member 441 and the movable rod. Specifically, the guide member 441 refers to a component having a certain length. The guide member 441 can be rod-shaped or columnar. A sliding sleeve can be provided on the ejector bracket 41, and the axis of the sliding sleeve is arranged along the third direction Z. The guide member 441 can be inserted into the sliding sleeve, thereby achieving a sliding connection between the guide member 441 and the ejector bracket 41. The connector 442 refers to a component having a certain length. The connector 442 can be block-shaped, rod-shaped, or columnar. By connecting the connecting member 442 between the guide member 441 and the movable rod, the guide member 441 can move with the movable rod when the movable rod moves along the third direction Z. When the movable rod tends to rotate around its own axis, the guide member 441 will limit the movable rod to prevent the movable rod from rotating around its own axis, making the use of the ejector body 42 more stable and reliable.

[0048] In a second aspect, a die bonding apparatus is provided, comprising any of the above-mentioned ejector pin devices. The ejector pin device is used to lift the die from the wafer ring from below. It is understood that the beneficial effects of the second aspect can be found in the relevant description of the first aspect, and will not be repeated here.

[0049] The above is merely a preferred embodiment of the present invention and only specifically describes the technical principles of the present invention. These descriptions are intended only to explain the principles of the present invention and should not be construed in any way as limiting the scope of protection of the present invention. Based on the explanations herein, any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention, as well as other specific embodiments of the present invention that can be imagined by those skilled in the art without inventive effort, shall be included within the scope of protection of the present invention.

Claims

1. A ejector device, characterized in that: It includes a pin assembly, a base, a first sliding seat and a second sliding seat, the first sliding seat is slidably set on the base, the second sliding seat is slidably set on the first sliding seat, the pin assembly is set on the second sliding seat, a first voice coil motor is set between the first sliding seat and the base, the first voice coil motor is used to drive the first sliding seat to slide relative to the base along a first direction, a second voice coil motor is set between the first sliding seat and the second sliding seat, the second voice coil motor is used to drive the second sliding seat to slide relative to the first sliding seat along a second direction, and the first direction and the second direction are set at an angle.

2. The ejector device according to claim 1, characterized in that Two first linear slide rails are arranged between the first sliding seat and the base, and the two first linear slide rails are arranged along the first direction, and the two first linear slide rails are respectively located at the two ends of the first sliding seat. Two second linear slide rails are arranged between the second sliding seat and the first sliding seat, and the two second linear slide rails are arranged along the second direction, and the two second linear slide rails are respectively located at the two ends of the second sliding seat.

3. The ejector device according to claim 2, characterized in that: The first voice coil motor is located in the area between the two first linear slides, and the distance between the first voice coil motor and the two first linear slides is equal. The second voice coil motor is also located in the area between the two second linear slides, and the distance between the second voice coil motor and the two second linear slides is equal.

4. The ejector device according to claim 3, characterized in that A first measuring part is provided between the base and the first sliding seat, and the first measuring part is used to detect the displacement of the first sliding seat relative to the base. A second measuring part is also provided between the first sliding seat and the second sliding seat, and the second measuring part is used to detect the displacement of the second sliding seat relative to the first sliding seat.

5. The ejector device according to claim 1, characterized in that: The first voice coil motor and the second voice coil motor include a stator assembly and a mover assembly. The mover assembly is movably arranged on the stator assembly. The stator assembly has a magnetic part. The mover assembly has a coil part. The coil part is used to act with the magnetic part after power is applied to drive the mover assembly to move in a linear direction.

6. The ejector device according to claim 5, characterized in that: The stator assembly also has an installation space, the magnetic part is arranged on the inner wall of the installation space, at least part of the movable component is movably arranged in the installation space, and has the freedom to move in a linear direction relative to the stator assembly, and the coil part is arranged on the part of the movable component located in the installation space.

7. The ejector device according to any one of claims 1 to 6, characterized in that: The ejector assembly includes an ejector bracket, an ejector body and a driving structure. The ejector body includes a fixed cylinder and a lifting member. The ejector bracket is arranged on the second sliding seat, the fixed cylinder is arranged on the ejector bracket, and the lifting member is movably arranged in the fixed cylinder. The driving structure is arranged on the ejector bracket and / or the second sliding seat, and is used to drive the movable rod of the ejector body to move along the third direction.

8. The ejector device according to claim 7, characterized in that: The driving structure includes a power unit and a driving member, the driving member has a first state and a second state, the driving member is connected to the driving end of the power unit, and the power unit is used to drive the driving member to move. During the movement from the second state to the first state, the driving member pushes the movable rod to move along a third direction. During the movement from the first state to the second state, the movable rod returns to its initial position.

9. The ejector device according to claim 8, characterized in that: The ejector assembly also includes a guide assembly, which is used to prevent the movable rod from rotating. The guide assembly includes a guide member and a connecting member. The guide member is slidably connected to the ejector bracket and has freedom along a third direction relative to the ejector bracket. The connecting member is connected between the guide member and the movable rod.

10. A die bonding device, characterized in that: The invention comprises the ejector device according to any one of claims 1 to 9.

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