Ultrahigh-purity graphite heating element for semiconductor

Abstract

The utility model discloses an ultra-pure graphite heating element for semiconductors, which belongs to the field of graphite heating elements and comprises a U-shaped seat and a graphite heating rod, the U-shaped seat is of a U-shaped structure with an upward opening, butt joint cylinders are arranged at the tops of two ends of the U-shaped seat, core rods are vertically arranged in the butt joint cylinders, the core rods and the U-shaped seat are of an integrated structure, and the graphite heating rod is arranged in the butt joint cylinders. The bottom end of the graphite heating rod is matched with the inner size of the butt joint cylinder, a butt joint hole is formed in the bottom of the graphite heating rod, the core rod is matched with the inner size of the butt joint hole, an electrode tip is arranged on the top of the graphite heating rod, and a connecting table is transversely arranged on the inner side of the U-shaped base. The U-shaped graphite heating rod is formed by combining the two independent heating rods and the U-shaped seat, classified transportation can be carried out during transportation, the phenomenon of breakage caused by collision is reduced, the rod body and the U-shaped seat are fixed through the butt joint cylinder, and the core rod is inserted into the center position of the rod body, so that current and heat transfer is improved.

Description

Technical Field

[0001] The utility model relates to the field of graphite heating elements, and more particularly to an ultra-high purity graphite heating element for semiconductors. Background Art

[0002] Common heating materials used in high-temperature furnaces include metals such as molybdenum, tungsten, and tantalum; and non-metallic materials such as molybdenum disilicide rods, silicon carbon rods, zirconium oxide, and graphite. Heating elements made of different materials have varying properties, with graphite heating elements being widely used due to their low cost and high stability. A common graphite heating unit used in high-temperature furnaces is a U-shaped graphite rod. Multiple U-shaped graphite rods form a heating field, and this U-shaped structure improves circuit connection efficiency. However, most existing U-shaped graphite rods are integrated, resulting in low strength. This is particularly true during transportation or installation, where only the bottom of the two rods are connected, making them susceptible to breakage due to impact. Utility Model Content

[0003] 1. Technical problems to be solved

[0004] In response to the problems existing in the prior art, the purpose of the present invention is to provide an ultra-high purity graphite heating element for semiconductors, in which the U-shaped rod is configured to be detachable to facilitate the classified transportation of the U-shaped seat and the heating rod, and to prevent breakage due to collision.

[0005] 2. Technical solution

[0006] In order to solve the above problems, the present invention adopts the following technical solutions.

[0007] The upper end of the U-shaped seat is provided with a U-shaped bottom end, and the lower end of the U-shaped seat is provided with a U-shaped bottom end.

[0008] Furthermore, a boss is provided at the center of the upper surface of the connecting platform, a bolt is vertically screwed through the surface of the boss, and a knob is provided on the top of the bolt.

[0009] Furthermore, an extrusion inclined surface is provided on one side of the two sliding rods close to each other, and an extrusion ball head is provided at the bottom of the bolt, and the extrusion ball head is in contact with the two extrusion inclined surfaces respectively.

[0010] Furthermore, slide grooves are symmetrically provided on both sides of the interior of the docking tube, and convex strips are symmetrically provided below the surface of the graphite heating rod, and the convex strips are adapted to the slide grooves.

[0011] Furthermore, a guide groove is provided on one side of the lower end surface of the graphite heating rod, and the guide groove is placed directly below the positioning hole.

[0012] Furthermore, the interior of the guide groove is an inclined surface, and the distance from the axis of the graphite heating rod gradually decreases from top to bottom, and the guide groove corresponds to the position of the semicircular arc head.

[0013] 3. Beneficial effects

[0014] Compared with the existing technology, the advantages of the present invention are: the present invention provides an ultra-high purity graphite heating element for semiconductors, the U-shaped graphite heating rod is composed of two separate heating rods and a U-shaped seat, which can be transported in a classified manner during transportation to reduce the phenomenon of breakage due to bumps, the rod body and the U-shaped seat are fixed by a docking sleeve, and a core rod is inserted in the center of the rod body to improve the transfer of current and heat, thereby ensuring the stability of the entire thermal field during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the installation three-dimensional structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the heating rod structure of the present utility model;

[0017] Figure 3 This is a schematic cross-sectional view of the U-shaped seat of the present invention;

[0018] Figure 4 This is a schematic diagram of the cross-sectional structure of the bottom of the heating rod of the present invention.

[0019] Explanation of the numbers in the figure: 1. U-shaped seat; 11. Docking tube; 12. Slide groove; 13. Core rod; 14. Connecting platform; 15. Slide cavity; 16. Slide rod; 161. Semicircular arc head; 162. Extrusion slope; 17. Boss; 18. Bolt; 19. Extrusion ball head; 2. Graphite heating rod; 21. Electrode head; 22. Raised strip; 23. Guide groove; 24. Docking hole; 25. Positioning hole. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention; it is obvious that the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0021] Example:

[0022] See also Figure 1-Figure 4 As shown, the ultra-high purity graphite heating element for semiconductors includes a U-shaped seat 1 and a graphite heating rod 2. The U-shaped seat 1 is a U-shaped structure open upward, and the tops of both ends of the U-shaped seat 1 are docking sleeves 11. A core rod 13 is vertically arranged inside the docking sleeve 11. The core rod 13 is an integral structure with the U-shaped seat 1. The bottom end of the graphite heating rod 2 is adapted to the internal size of the docking sleeve 11, and then the two are assembled or disassembled by plugging and unplugging. A docking hole 24 is provided at the bottom of the graphite heating rod 2, and the core rod 13 is adapted to the internal size of the docking hole 24, which improves the conductivity between the graphite heating rod 2 and the U-shaped seat 1 and reduces the influence of the docking gap on the current or heat transfer. An electrode head 21 is provided on the top of the graphite heating rod 2 to facilitate connection with an external circuit. A connecting platform 14 is horizontally provided on the inner side of the U-shaped seat 1 for connection The platform 14 is placed between the two graphite heating rods 2. The connecting platform 14 can increase the sliding space for the slide rod 16 and at the same time improve the strength of the U-shaped seat 1. A sliding cavity 15 is provided inside the connecting platform 14. The sliding cavity 15 is opened horizontally. The two ends of the sliding cavity 15 are respectively connected to the two docking tubes 11. Slide rods 16 are symmetrically installed in the sliding cavity 15. The two slide rods 16 are provided with semicircular arc heads 161 at one end facing away from each other. The arc structure can be used to squeeze the graphite heating rod 2 when it is pressed down for installation, and it is also convenient to push the slide rod 16 inward by squeezing the semicircular arc head 161 when the graphite heating rod 2 is pulled out. A positioning hole 25 is provided on the outer surface of the graphite heating rod 2. The semicircular arc head 161 is adapted to the positioning hole 25. The slide rods 16 are controlled to separate from each other to achieve fixation of the graphite heating rod 2.

[0023] Please refer to Figure 2 As shown, a boss 17 is provided at the center of the upper surface of the connecting platform 14, and a bolt 18 is screwed vertically through the surface of the boss 17. A knob is provided on the top of the bolt 18 to facilitate external control of the bolt 18. An extrusion slope 162 is provided on the side where the two slide bars 16 are close to each other, and an extrusion ball head 19 is provided at the bottom of the bolt 18. The extrusion ball head 19 is in contact with the two extrusion slopes 162 respectively. The position of the extrusion ball head 19 is controlled by controlling the bolt 18. After the graphite heating rod 2 is installed in place, the two slide bars 16 can be moved away from each other by moving the extrusion ball head 19 downward, so that the semicircular arc head 161 enters the positioning hole 25 to fix the graphite heating rod 2.

[0024] Please refer to Figure 1-Figure 4 As shown, slide grooves 12 are symmetrically provided on both sides of the docking tube 11, and ridges 22 are symmetrically provided below the surface of the graphite heating rod 2. The ridges 22 are adapted to the slide grooves 12. The cooperation between the two ensures the stability of the angle of the graphite heating rod 2 after installation, so as to ensure that the guide groove 23 corresponds to the slide rod 16 during installation. After installation, the semicircular arc head 161 can smoothly enter the docking hole 24.

[0025] Please refer to Figure 2 As shown, a guide groove 23 is provided on one side of the lower end surface of the graphite heating rod 2. The guide groove 23 is placed directly below the positioning hole 25. The inside of the guide groove 23 is an inclined surface, and the distance from the axial center of the graphite heating rod 2 gradually decreases from top to bottom. The guide groove 23 corresponds to the position of the semicircular arc head 161, so that when the graphite heating rod 2 is installed downward, the semicircular arc head 161 can be squeezed to ensure that it can enter the inside of the docking tube 11.

[0026] Working principle: When in use, first assemble the U-shaped seat 1 and the two graphite heating rods 2, and keep the electrode head 21 at the top. The bottom of the graphite heating rod 2 is gradually inserted into the docking tube 11, and the direction is fixed by the cooperation of the slide groove 12 and the ridge 22. At this time, the guide groove 23 corresponds to the semicircular arc head 161. When installing, rotate the bolt 18 upward so that the extrusion ball head 19 will not squeeze the extrusion inclined surface 162. When the graphite heating rod 2 moves downward, the guide groove 23 will squeeze the semicircular arc head 161, causing the slide rod 16 to move into the slide cavity 15 until the slide rod 16 is completely retracted into the sliding cavity 15. When the graphite heating rod 2 is installed in place, the lower end face of the graphite heating rod 2 contacts the lower surface of the inner part of the docking tube 11, and the core rod 13 can completely enter the docking hole 24. At this time, the docking hole 24 corresponds to the position of the slide rod 16. At this time, turning the bolt 18 downward can squeeze the extrusion inclined surface 162 by the extrusion ball head 19, so that the two slide rods 16 move away from each other, so that the semicircular arc head 161 enters the docking hole 24, so as to effectively fix the graphite heating rod 2 and ensure the stability of the U-shaped seat 1 and the graphite heating rod 2 after installation.

[0027] The above description is merely a preferred embodiment of the present invention; however, the scope of protection of the present invention is not limited thereto. Any person skilled in the art who, within the technical scope disclosed in the present invention, makes equivalent substitutions or modifications based on the technical solutions and improved concepts of the present invention shall be covered by the scope of protection of the present invention.

Claims

1. An ultra-high purity graphite heating element for semiconductors, comprising a U-shaped seat (1) and a graphite heating rod (2), characterized in that: The U-shaped seat (1) is an upwardly open U-shaped structure, the tops of both ends of the U-shaped seat (1) are docking sleeves (11), a core rod (13) is vertically arranged inside the docking sleeve (11), the core rod (13) and the U-shaped seat (1) are an integral structure, the bottom end of the graphite heating rod (2) is adapted to the internal size of the docking sleeve (11), a docking hole (24) is provided at the bottom of the graphite heating rod (2), the core rod (13) is adapted to the internal size of the docking hole (24), an electrode head (21) is provided on the top of the graphite heating rod (2), and the U-shaped seat (1) is provided with a plurality of holes. ) is provided with a connecting platform (14) on the inner side, the connecting platform (14) is placed between the two graphite heating rods (2), a sliding cavity (15) is provided inside the connecting platform (14), the two ends of the sliding cavity (15) are respectively connected with the two docking tubes (11), a sliding rod (16) is symmetrically slidably installed inside the sliding cavity (15), and a semicircular arc head (161) is provided at one end of the two sliding rods (16) facing away from each other, and a positioning hole (25) is provided on the outer surface of the graphite heating rod (2), and the semicircular arc head (161) is adapted to the positioning hole (25).

2. The ultra-high purity graphite heating element for semiconductors according to claim 1, characterized in that: A boss (17) is provided at the center of the upper surface of the connecting platform (14), a bolt (18) is vertically screwed through the surface of the boss (17), and a knob is provided on the top of the bolt (18).

3. The ultra-high purity graphite heating element for semiconductors according to claim 2, characterized in that: An extrusion inclined surface (162) is provided on one side of the two slide bars (16) close to each other, and an extrusion ball head (19) is provided at the bottom of the bolt (18), and the extrusion ball head (19) is in contact with the two extrusion inclined surfaces (162) respectively.

4. The ultra-high purity graphite heating element for semiconductors according to claim 1, wherein: Slide grooves (12) are symmetrically provided on both sides of the interior of the docking tube (11), and convex strips (22) are symmetrically provided below the surface of the graphite heating rod (2), and the convex strips (22) are adapted to the slide grooves (12).

5. The ultra-high purity graphite heating element for semiconductors according to claim 1, wherein: A guide groove (23) is provided on one side of the lower end surface of the graphite heating rod (2), and the guide groove (23) is located directly below the positioning hole (25).

6. The ultra-high purity graphite heating element for semiconductors according to claim 5, characterized in that: The interior of the guide groove (23) is an inclined surface, and the distance from the axis of the graphite heating rod (2) gradually decreases from top to bottom. The position of the guide groove (23) corresponds to the position of the semicircular arc head (161).

Images