Absorption device for water-soluble impurities in electronic special gas

Abstract

The utility model discloses a device for absorbing water-soluble impurities in electronic special gas, which relates to the technical field of electronic special gas, and comprises a gas source and a four-way joint, the four-way joint is connected with a pressure reducing valve, a first stop valve, a second stop valve and a third stop valve through pipelines, the first stop valve is connected with a nitrogen cylinder through a pipeline, and the second stop valve is connected with a third stop valve through a pipeline. The third stop valve is connected with a vacuum pump through a pipeline, a first barometer is further installed on the pipeline between the third stop valve and the vacuum pump, the second stop valve is connected with a needle valve through a pipeline, the needle valve is connected with an absorption bottle through a pipeline, and the absorption bottle is connected with a mass flow meter through a pipeline. The gas source is connected with the pressure reducing valve through a pipeline; according to the gas absorption device, the three gas paths are designed and comprise gas purging and vacuumizing, and the gas absorption device can be pre-cleaned more thoroughly and quickly by simply opening and closing the valve. And as the pre-cleaning is relatively thorough, the purging amount of the gas to be absorbed is greatly reduced, and the cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of electronic special gases, in particular to a device for absorbing water-soluble impurities in electronic special gases. Background Art

[0002] Ultrapure electronic specialty gases, widely used in chip and integrated circuit manufacturing for electronic etching, component cleaning, and heat transfer processes, contain significant impurities, such as metals, fluoride ions, ammonia, and sulfate. These impurities can impair chip circuit functionality, affect geometric features, and cause crystal defects, severely impacting chip manufacturing quality and precision. A common characteristic of these impurities is their water solubility. International and domestic methods for detecting these water-soluble impurities involve transferring them from the gas phase to the liquid phase through an absorption device, followed by liquid-phase detection.

[0003] Previous absorption device designs were flawed, preventing them from simultaneously performing many critical functions. For example: 1. Pre-cleaning of the device prior to gas absorption often involved only purge, without vacuuming, resulting in incomplete cleaning. 2. The single gas path design prevented direct switching between the absorbed gas and the clean gas, requiring disassembly. This increased the risk of gas path contamination and resulted in significant waste of absorbed gas due to inadequate gas path pre-cleaning. Therefore, to address these issues, a device for absorbing water-soluble impurities in electronic specialty gases was proposed to meet practical application needs. Utility Model Content

[0004] The utility model provides a device for absorbing water-soluble impurities in electronic special gases, which solves the technical problems in the background technology.

[0005] In order to solve the above technical problems, the utility model provides a device for absorbing water-soluble impurities in electronic special gases, including a gas source and a four-way valve, the four-way valve is connected to a pressure reducing valve, a first stop valve, a second stop valve and a third stop valve through a pipeline, the first stop valve is connected to a nitrogen bottle through a pipeline, the third stop valve is connected to a vacuum pump through a pipeline, a first pressure gauge is also installed on the pipeline between the third stop valve and the vacuum pump, the second stop valve is connected to a needle valve through a pipeline, the needle valve is connected to an absorption bottle through a pipeline, the absorption bottle is connected to a mass flow meter through a pipeline, and the gas source and the pressure reducing valve are connected through a pipeline.

[0006] Preferably, the absorption bottle contains absorption liquid, an air bubble stone is provided at the end of the input pipe of the absorption bottle and the end is inserted into the bottom of the absorption liquid, and the output pipe of the absorption bottle is separated from the absorption liquid.

[0007] Preferably, the pressure reducing valve, the first stop valve, the second stop valve and the third stop valve are all fixedly mounted on the base plate via a mounting frame.

[0008] Compared with related technologies, the device for absorbing water-soluble impurities in electronic special gases provided by the present invention has the following beneficial effects:

[0009] This utility model provides an absorption device for water-soluble impurities in electronic specialty gases. Through a three-way design, including purge gas and vacuum pumping, the pre-cleaning of the gas absorption device can be more thorough and rapid with a simple valve switch. This more thorough pre-cleaning significantly reduces the amount of purge gas required for absorption, lowering costs. This design is suitable for absorbing water-soluble or other solvent-soluble impurities in all gases, demonstrating its universal applicability and widespread application. The standardized design facilitates standardized operation, enabling the development of standards for public dissemination. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0011] Numbers in the figure: 1, four-way valve; 2, pressure reducing valve; 3, first stop valve; 4, second stop valve; 5, third stop valve; 6, nitrogen cylinder; 7, first pressure gauge; 8, vacuum pump; 9, needle valve; 10, absorption bottle; 11, mass flow meter; 12, gas source. DETAILED DESCRIPTION

[0012] Example, by Figure 1 It is given that the utility model includes a gas source 12 and a four-way valve 1, the four-way valve 1 is connected to a pressure reducing valve 2, a first stop valve 3, a second stop valve 4 and a third stop valve 5 through a pipeline, the first stop valve 3 is connected to a nitrogen bottle 6 through a pipeline, the third stop valve 5 is connected to a vacuum pump 8 through a pipeline, and a first barometer 7 is also installed on the pipeline between the third stop valve 5 and the vacuum pump 8, the second stop valve 4 is connected to a needle valve 9 through a pipeline, the needle valve 9 is connected to an absorption bottle 10 through a pipeline, the absorption bottle 10 is connected to a mass flowmeter 11 through a pipeline, and the gas source 12 is connected to the pressure reducing valve 2 through a pipeline.

[0013] In this embodiment, one side of the pressure reducing valve 2 is the air inlet end, which is connected to the air source 12. Depending on the model of the pressure reducing valve 2, when the pressure reducing valve 2 does not have a pressure monitoring function, a second pressure gauge needs to be added to the pipeline between the four-way valve 1 and the pressure reducing valve 2. The needle valve 9 can be replaced by a ball valve or other valves that can realize the flow regulation function.

[0014] The absorption bottle 10 contains absorption liquid. An air bubble stone is provided at the end of the input pipe of the absorption bottle 10 and the end is inserted into the bottom of the absorption liquid. The output pipe of the absorption bottle 10 is separated from the absorption liquid.

[0015] In this embodiment, the absorption bottle 10 can be a multi-stage continuous washing bottle to effectively absorb water-soluble impurities in the electronic special gas. Figure 1 Shown is a two-stage continuous wash bottle.

[0016] The pressure reducing valve 2, the first stop valve 3, the second stop valve 4 and the third stop valve 5 are all fixedly mounted on the substrate through a mounting frame. The vacuum pump 8 is placed on the substrate. The gas source 12 and the nitrogen bottle 6 are relatively large and are placed on the ground. The absorption bottle 10 is placed on the substrate.

[0017] Working Principle: A three-way design, including purge and vacuum, allows for a more thorough and efficient pre-cleaning of the gas absorption device with a simple valve opening and closing. This thorough pre-cleaning significantly reduces the amount of purge gas required for absorption, lowering costs. This design is suitable for absorbing all impurities soluble in water or other solvents in gases, offering broad applicability and widespread adoption. This standardized design facilitates standardized operation, enabling the development of standards for public dissemination.

[0018] Implementation steps: 1. Before gas absorption, keep all valves closed and use nitrogen bottle 6 to pass into the gas line at a flow rate of 500ml / min to fill the entire gas line with nitrogen and form a positive pressure. After 1 minute, open all valves and purge the entire gas line with nitrogen for 3 minutes;

[0019] 2. Then use the vacuum pump 8 to evacuate the air, and stop evacuating the air when the vacuum degree displayed by the first pressure gauge 7 is less than 0 Pa.

[0020] 3. Repeat steps 1 and 2 three times to completely purge all trace impurities, particulate matter, and moisture from the entire gas path.

[0021] 4. At the start of the gas absorption experiment, keep all valves closed, and introduce the standard gas or sample gas in the gas source 12 from the air inlet end of the pressure reducing valve 2. The pressure is reduced to 0.2 MPa through the pressure reducing valve 2. Then, open the second stop valve 4 and the needle valve 9, and purge the gas line for 10 minutes.

[0022] 5. Connect the mass flow meter 11 and the absorption bottle 10 in the ventilation state, and control the gas flow rate through the mass flow meter 11 and the needle valve 9 so that the gas flow rate through the absorption bottle 10 is 500 ml / min.

[0023] 6. After absorbing a certain volume of gas according to actual needs, close the second stop valve 4 and the needle valve 9, and close the nitrogen cylinder 6.

[0024] 7. Repeat steps 1 and 2 to rinse the absorption device.

Claims

1. A device for absorbing water-soluble impurities in electronic special gases, comprising a gas source (12) and a four-way valve (1), characterized in that: The four-way valve (1) is connected to a pressure reducing valve (2), a first stop valve (3), a second stop valve (4) and a third stop valve (5) through a pipeline. The first stop valve (3) is connected to a nitrogen bottle (6) through a pipeline. The third stop valve (5) is connected to a vacuum pump (8) through a pipeline. A first pressure gauge (7) is also installed on the pipeline between the third stop valve (5) and the vacuum pump (8). The second stop valve (4) is connected to a needle valve (9) through a pipeline. The needle valve (9) is connected to an absorption bottle (10) through a pipeline. The absorption bottle (10) is connected to a mass flow meter (11) through a pipeline. The gas source (12) is connected to the pressure reducing valve (2) through a pipeline.

2. The device for absorbing water-soluble impurities in electronic special gases according to claim 1, characterized in that: The absorption bottle (10) contains absorption liquid, an air bubble stone is provided at the end of an input pipe of the absorption bottle (10) and the end is inserted into the bottom of the absorption liquid, and an output pipe of the absorption bottle (10) is separated from the absorption liquid.

3. The device for absorbing water-soluble impurities in electronic special gases according to claim 1, characterized in that: The pressure reducing valve (2), the first stop valve (3), the second stop valve (4) and the third stop valve (5) are all fixedly mounted on the base plate via a mounting frame.

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