Wafer grinding head convenient to disassemble

Abstract

The utility model discloses a wafer grinding head convenient to disassemble, which comprises a grinding head, the top of the grinding head is fixedly provided with a combination block, the outer side of the combination block is provided with an installation assembly, the top of the installation assembly is provided with a fixing assembly, the combination block is internally provided with an insertion groove, a rack is inserted in the insertion groove, and the rack is provided with a clamping groove. The outer side end of the rack movably penetrates through the side wall between the mounting groove and the inner groove, and the rotating shaft is fixedly mounted at the top of the mounting block. According to the wafer grinding head convenient to disassemble, a screw rod is rotated through an internal hexagonal wrench and a hexagonal groove, the screw rod rotates to drive a lower fixing rod to rotate, and the fixing rod rotates to drive a lower gear to rotate, so that synchronous movement of a plurality of racks can be realized, and the grinding head can be mounted only by rotating one screw rod; and the convenience of mounting and dismounting is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer grinding heads, in particular to a wafer grinding head which is easy to disassemble. Background Art

[0002] Wafer grinding heads are key components in semiconductor manufacturing. They are typically made of high-precision materials with exceptional hardness and wear resistance. During wafer processing, the grinding head adheres closely to the wafer surface, rotating at high speed and using precise pressure control to perform fine grinding to remove surface defects and excess material, ensuring the highest standards of wafer flatness and thickness uniformity.

[0003] The wafer grinding head needs to be replaced frequently because it is needed to grind the wafer. However, the existing wafer grinding head is installed by bolts, etc. This installation method requires the installation of multiple bolts, so it is inconvenient during installation and disassembly.

[0004] To this end, the utility model provides a wafer grinding head that is easy to disassemble to solve the above problems. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides a wafer grinding head that is easy to disassemble, thereby solving the above-mentioned problems.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a wafer grinding head that is easy to disassemble, comprising a grinding head, a combination block fixedly mounted on the top of the grinding head, a mounting assembly provided on the outside of the combination block, a fixed assembly provided on the top of the mounting assembly, a rotating shaft provided on the top of the mounting assembly, the mounting assembly comprising a mounting block, an internal groove provided inside the mounting block, a mounting groove provided inside the mounting block, the combination block inserted into the mounting groove, a slot provided inside the combination block, a rack inserted into the slot, the outer end of the rack movably passing through the side wall between the mounting groove and the internal groove, and the rotating shaft fixedly mounted on the top of the mounting block.

[0007] Preferably, a limiting rod is fixedly mounted on the outer inner wall of the mounting block, and the limiting rod is inserted into the corresponding rack.

[0008] By adopting the above technical solution, the rack is supported and limited by the limiting rod.

[0009] Preferably, the inner bottom of the inner groove is rotatably connected to a rotating rod, the top of the rotating rod is fixedly mounted with a gear, and the gear is meshed with the corresponding rack.

[0010] By adopting the above technical solution, the rack is driven to move by the rotation of the gear.

[0011] Preferably, the inner side wall of the inner groove is rotatably connected to a gear ring, and the gears are all screwed onto the outer side of the gear ring.

[0012] By adopting the above technical solution, the gears are driven to move synchronously by the rotation of the gear ring, thereby achieving synchronous movement of the rack.

[0013] Preferably, the fixing assembly includes a fixing rod, which is rotatably connected to the top of the gear, and the top of the fixing rod movably passes through the top of the mounting block. A screw is fixedly installed on the top of the fixing rod, and a hexagonal slot is provided on the top of the screw.

[0014] By adopting the above technical solution, the gear can be driven to rotate by rotating the fixing rod and the screw.

[0015] Preferably, a nut is threaded onto the outer side of the screw rod, a friction plate is fixedly mounted on the bottom of the nut, and the friction plate is sleeved onto the outer side of the screw rod and fits onto the top of the mounting block.

[0016] By adopting the above technical solution, the screw rod can be fixed by tightening the nut.

[0017] Beneficial effects

[0018] The utility model provides a wafer grinding head that is easy to disassemble. Compared with the prior art, it has the following beneficial effects:

[0019] 1. The wafer grinding head which is easy to disassemble can fix the assembly block in the mounting slot by synchronously moving multiple racks and plugging them into the slot, thereby fixing the grinding head to the bottom of the mounting block, thereby fixing the grinding head. When disassembling, the racks can be synchronously moved out of the slot to release the fixation of the assembly block, and the grinding head can be directly removed, thereby achieving the effect of convenient installation and disassembly of the grinding head.

[0020] 2. The wafer grinding head is easy to disassemble. The screw is rotated through the hexagonal slot using an inner hexagonal wrench. The rotation of the screw drives the rotation of the fixed rod below. The rotation of the fixed rod drives the rotation of the gear below, thereby realizing the synchronous movement of multiple racks. In this way, the grinding head can be installed by simply turning one screw, ensuring the convenience of installation and disassembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the implementation scheme of the present invention or the technical scheme in the prior art, the drawings required for use in the implementation scheme or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some implementation schemes of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0022] Figure 1 This is a three-dimensional diagram of the external structure of the utility model;

[0023] Figure 2 It is a three-dimensional diagram of the bottom structure of the utility model;

[0024] Figure 3 It is a cross-sectional view of the overall internal structure of the utility model;

[0025] Figure 4 This is a cross-sectional view of the internal structure of the utility model during the disassembly process;

[0026] Figure 5 It is a three-dimensional diagram of the internal structure of the installation component of the present utility model.

[0027] In the figure: 1. Grinding head; 2. Mounting assembly; 21. Mounting block; 22. Internal groove; 23. Rack; 24. Limit rod; 25. Slot; 26. Mounting groove; 27. Gear; 28. Rotating rod; 29. ​​Gear ring; 3. Fixing assembly; 31. Fixing rod; 32. Screw; 33. Hexagonal groove; 34. Nut; 35. Friction plate; 4. Rotating shaft; 5. Assembly block. DETAILED DESCRIPTION

[0028] It should be noted that in the description of the embodiments of the present application, the terms "front, rear", "left, right", "up, down", etc. indicating directions or positional relationships are all based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present application. The terms "install", "connect", and "connected" should be understood in a broad sense. For example, they can be fixedly connected, detachably connected, or integrally connected; they can be directly connected, or indirectly connected through an intermediate medium, or they can be internal connections between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0029] The present application will be further described in detail below through the accompanying drawings and examples.

[0030] Reference Figures 1 to 5The embodiment of the present application provides a wafer grinding head that is easy to disassemble, including a grinding head 1, a combination block 5 is fixedly installed on the top of the grinding head 1, a mounting component 2 is provided on the outside of the combination block 5, a fixing component 3 is provided on the top of the mounting component 2, and a rotating shaft 4 is provided on the top of the mounting component 2. The mounting component 2 includes a mounting block 21, an internal groove 22 is provided inside the mounting block 21, a mounting groove 26 is provided inside the mounting block 21, the combination block 5 is inserted into the mounting groove 26, a slot 25 is provided inside the combination block 5, a rack 23 is inserted into the slot 25, the outer end of the rack 23 movably passes through the side wall between the mounting groove 26 and the internal groove 22, and the rotating shaft 4 is fixedly mounted on the top of the mounting block 21.

[0031] A limit rod 24 is fixedly mounted on the outer inner wall of the mounting block 21 and inserted into the corresponding rack 23. A rotating rod 28 is rotatably connected to the inner bottom of the internal groove 22. A gear 27 is fixedly mounted on the top of the rotating rod 28 and meshes with the corresponding rack 23. A gear ring 29 is rotatably connected to the inner side wall of the internal groove 22, and each gear 27 is threaded onto the outer side of the gear ring 29.

[0032] In this embodiment, the rotation of the gear 27 can drive the gear ring 29 to rotate, and the rotation of the gear ring 29 can drive the multiple gears 27 on the outside to rotate synchronously. The synchronous rotation of the gear 27 can drive the multiple racks 23 on the outside to move synchronously inward or outward, and the externally arranged limit rod 24 can ensure that the rack 23 moves horizontally. By synchronously moving and plugging the multiple racks 23 into the slot 25, the combination block 5 can be fixed inside the mounting groove 26, thereby fixing the grinding head 1 to the bottom of the mounting block 21, thereby fixing the grinding head 1, and when disassembling, the rack 23 can be synchronously moved out of the slot 25 to release the fixation of the combination block 5, and the grinding head 1 can be directly removed, thereby achieving the effect of convenient installation and disassembly of the grinding head 1.

[0033] Reference Figures 1 to 5 In one aspect of this embodiment, the fixing assembly 3 includes a fixing rod 31, which is rotatably connected to the top of the gear 27, and the top of the fixing rod 31 movably passes through the top of the mounting block 21. A screw 32 is fixedly installed on the top of the fixing rod 31, and a hexagonal slot 33 is provided on the top of the screw 32.

[0034] A nut 34 is threaded onto the outer side of the screw rod 32 , and a friction plate 35 is fixedly mounted on the bottom of the nut 34 . The friction plate 35 is sleeved onto the outer side of the screw rod 32 and fits onto the top of the mounting block 21 .

[0035] In this embodiment, when the gear 27 needs to be rotated to disassemble the table grinding head 1, the nut 34 is loosened to remove the friction plate 35 from the mounting block 21, thereby releasing the fixation of the screw 32. The screw 32 is rotated through the hexagonal slot 33 using an Allen wrench. The rotation of the screw 32 drives the lower fixed rod 31 to rotate. The rotation of the fixed rod 31 can drive the lower gear 27 to rotate, thereby realizing the synchronous movement of multiple racks 23, thereby realizing the installation of the grinding head 1 by only rotating one screw 32, ensuring the convenience of installation and disassembly.

[0036] At the same time, the contents not described in detail in this specification belong to the existing technology well known to those skilled in the art.

[0037] Working principle: The rotation of the gear 27 can drive the gear ring 29 to rotate, and the rotation of the gear ring 29 can drive the multiple gears 27 on the outside to rotate synchronously. The synchronous rotation of the gear 27 can drive the multiple racks 23 on the outside to move synchronously inward or outward, and the external limit rod 24 can ensure that the rack 23 moves horizontally. By synchronously moving multiple racks 23 and plugging them into the slot 25, the combination block 5 can be fixed in the installation groove 26, thereby fixing the grinding head 1 to the bottom of the mounting block 21, and fixing the grinding head 1. When disassembling, the rack 23 can be synchronously removed from the slot 25 to release the combination block. 5 is fixed, the grinding head 1 can be directly removed, thereby achieving the effect of convenient installation and disassembly of the grinding head 1; and when the gear 27 needs to be rotated for disassembling the grinding head 1, the nut 34 is loosened to remove the friction plate 35 from the mounting block 21, thereby releasing the fixation of the screw 32, and the screw 32 is rotated through the hexagonal slot 33 using an inner hexagonal wrench. The rotation of the screw 32 drives the lower fixed rod 31 to rotate, and the rotation of the fixed rod 31 drives the lower gear 27 to rotate, so that the synchronous movement of multiple racks 23 can be achieved, so that the grinding head 1 can be installed by rotating only one screw 32, ensuring the convenience of installation and disassembly.

[0038] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0039] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A wafer grinding head that is easy to disassemble, comprising a grinding head (1), characterized in that: A combination block (5) is fixedly mounted on the top of the grinding head (1), a mounting assembly (2) is arranged on the outside of the combination block (5), a fixing assembly (3) is arranged on the top of the mounting assembly (2), a rotating shaft (4) is arranged on the top of the mounting assembly (2), the mounting assembly (2) comprises a mounting block (21), an internal groove (22) is provided inside the mounting block (21), a mounting groove (26) is provided inside the mounting block (21), the combination block (5) is plugged into the mounting groove (26), a slot (25) is provided inside the combination block (5), a rack (23) is plugged into the slot (25), the outer end of the rack (23) movably passes through the side wall between the mounting groove (26) and the internal groove (22), and the rotating shaft (4) is fixedly mounted on the top of the mounting block (21).

2. The easily disassembled wafer polishing head according to claim 1, characterized in that: A limiting rod (24) is fixedly mounted on the outer inner wall of the mounting block (21), and the limiting rod (24) is inserted into the interior of the corresponding rack (23).

3. The easily disassembled wafer polishing head according to claim 2, characterized in that: The inner bottom of the inner groove (22) is rotatably connected to a rotating rod (28), and a gear (27) is fixedly installed on the top of the rotating rod (28), and the gear (27) is meshed with the corresponding rack (23).

4. The easily disassembled wafer polishing head according to claim 3, characterized in that: The inner side wall of the inner groove (22) is rotatably connected to a gear ring (29), and the gears (27) are all screwed onto the outer side of the gear ring (29).

5. The easily disassembled wafer polishing head according to claim 1, characterized in that: The fixing assembly (3) includes a fixing rod (31), the fixing rod (31) is rotatably connected to the top of the gear (27), the top of the fixing rod (31) movably passes through the top of the mounting block (21), a screw rod (32) is fixedly mounted on the top of the fixing rod (31), and a hexagonal groove (33) is provided on the top of the screw rod (32).

6. The easily disassembled wafer polishing head according to claim 5, characterized in that: The outer side of the screw rod (32) is threaded with a nut (34), and the bottom of the nut (34) is fixedly mounted with a friction plate (35). The friction plate (35) is sleeved on the outer side of the screw rod (32) and fits on the top of the mounting block (21).

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