Finish machining thinning sweeping wheel

Abstract

The utility model discloses a finish machining thinning sweeping wheel which comprises a rubber wire column and a wheel disc assembly. The wheel disc assembly is provided with a plurality of installation positions arranged in the circumferential direction, and the rubber screw columns are arranged on the installation positions and fixedly connected with the wheel disc assembly. Wherein the rubber wire column comprises a plurality of brush wires; the wheel disc assembly is used for being connected with driving equipment so as to drive the rubber wire column to conduct thinning and polishing on the finish machining part. According to the technical scheme, the risk that the finish machining part is scratched is reduced, the polishing time is shortened while the surface roughness of the finish machining part is reduced, the fragment rate is reduced, and the yield of finish grinding of the finish machining part is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of grinding and polishing, in particular to a finishing thinning sweeping wheel. Background Art

[0002] In the field of semiconductor material processing technology, silicon carbide, a representative semiconductor material, is classified as a typical difficult-to-process material due to its high hardness and brittleness. In practical applications, the surface of silicon carbide is generally required to be ultra-smooth, defect-free, and damage-free, and the surface roughness needs to be at the nanometer level. After the current silicon carbide undergoes a grinding process, its surface roughness, defects, damage, and flatness do not meet the requirements for use. The existing technology is to improve its surface quality by using free abrasives for chemical mechanical polishing. However, the use of traditional free abrasive processing is not easy to automate and pollutes the environment. In another prior art, a diamond grinding wheel is used as the final step in the grinding and polishing of silicon carbide substrate sheets. The diamond grinding wheel is a mixture of ceramic particles and diamonds. Since the diamonds used in the grinding wheel are micro-nano-scale particles, the diamond surface activity is high and it is very easy to agglomerate; and the ceramic powder prepared by the traditional melting method has a large particle size. The mechanical mixing of ceramic powder particles and micro-nano diamonds will form a non-uniform microstructure centered on the ceramic powder particles, resulting in poor self-sharpening of the grinding wheel and easy scratches on the silicon carbide surface during grinding.

[0003] Therefore, how to achieve precise and efficient processing of silicon carbide surfaces is a technical problem that needs to be solved urgently by those skilled in the art. Utility Model Content

[0004] The utility model aims to provide a finishing thinning sweeping wheel, aiming to achieve precise machining of silicon carbide surface.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] A finishing thinning sweeping wheel, comprising a rubber wire column and a wheel disc assembly;

[0007] The wheel assembly has a plurality of mounting positions arranged along the circumferential direction, the rubber wire column is placed in the mounting positions and is fixedly connected to the wheel assembly; wherein, the rubber wire column includes a plurality of brush wires; the wheel assembly is used to be connected to a driving device to drive the rubber wire column to thin and polish the finished workpiece.

[0008] In one embodiment, the wheel assembly includes a base frame and a rubber wire mounting wheel;

[0009] The base frame is used to be connected to a driving device to drive the base frame to rotate and move;

[0010] The rubber wire installation wheel is fixedly connected to the base frame, the rubber wire installation wheel is ring-shaped, and the rubber wire installation wheel has a plurality of installation positions arranged along the circumferential direction.

[0011] In one embodiment, the base frame is configured with an annular groove, and the rubber wire mounting wheel is received in the annular groove.

[0012] In one embodiment, the wheel assembly further includes screws; the rubber wire mounting wheel is further provided with a through hole, and the screw passes through the through hole and is fixedly connected to the base frame.

[0013] In one embodiment, the via hole is a countersunk hole.

[0014] In one embodiment, a plurality of groups of the mounting positions are spaced apart relative to the rubber wire mounting wheel; and the through hole is configured between two groups of the spaced apart mounting positions.

[0015] In one embodiment, the brush filaments are agglomerated rubber filaments or nylon filaments.

[0016] In one embodiment, the rubber wire column is adhesively connected to the wheel disc assembly.

[0017] In one embodiment, the rubber wire column is connected to the wheel assembly by being tied with a rope.

[0018] Compared with the prior art, the present invention has the following beneficial effects:

[0019] Compared to traditional finishing and thinning processes, this new solution utilizes a brush-like column composed of bristle filaments to polish the finished workpiece, avoiding direct contact with the workpiece. Specifically, the brush-like column achieves flexible grinding during the machining process, resulting in ultra-high surface quality finished parts, reducing the risk of scratches on the finished parts, and simultaneously reducing polishing time and debris while lowering the surface roughness of the finished parts, thereby improving the productivity of surface finishing of the finished parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] The structures, proportions, sizes, etc. depicted in the drawings of this specification are only used to match the contents disclosed in this specification so as to facilitate understanding and reading by those familiar with this technology. They are not intended to limit the conditions under which the present invention can be implemented, and therefore have no substantive technical significance. Any structural modifications, changes in proportional relationships, or adjustments in size, without affecting the efficacy and objectives that can be achieved by the present invention, should still fall within the scope of the technical contents disclosed in the present invention.

[0022] Figure 1 This is a structural schematic diagram of an embodiment of a finishing thinning sweeping wheel;

[0023] Figure 2 for Figure 1 AA section view;

[0024] Figure 3 It is a structural diagram of an embodiment of a base frame;

[0025] Figure 4 This is a structural diagram of an embodiment of a rubber wire installation wheel;

[0026] Figure 5 for Figure 4 BB cross-sectional view

[0027] Figure 6 It is a structural diagram of an embodiment of a rubber wire column;

[0028] Figure 7 for Figure 6 A top view of

[0029] Illustration:

[0030] 100, fine-machined thinning sweeping wheel; 110, rubber wire column; 111, brush wire; 120, wheel assembly; 121, base frame; 121a, annular groove; 122, rubber wire mounting wheel; 122a, mounting position; 122b, through hole. DETAILED DESCRIPTION

[0031] In order to make the technical objectives, features, and advantages of the present invention more obvious and easy to understand, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described below are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0032] In the description of the present invention, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of the present invention and simplify the description. They are not intended to indicate or imply that the devices or elements referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally located component.

[0033] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0034] An embodiment of the present utility model provides a finishing and thinning sweeping wheel 100 .

[0035] See also Figures 1 to 7 In a specific embodiment of the present invention, the finishing thinning and polishing wheel 100 includes a rubber wire column 110 and a wheel disc assembly 120; the wheel disc assembly 120 has a plurality of mounting positions 122a arranged along the circumferential direction, the rubber wire column 110 is placed in the mounting position 122a and is fixedly connected to the wheel disc assembly 120; wherein, the rubber wire column 110 includes a plurality of bristle brushes 111; the wheel disc assembly 120 is used to be connected to a driving device to drive the rubber wire column 110 to thin and polish the finished workpiece.

[0036] It is understood that, compared to traditional fine machining and thinning processes, the present invention utilizes a rubber wire column 110 composed of bristle brushes 111 to polish the finished workpiece, thus avoiding direct contact with the finished workpiece. Specifically, the rubber wire column 110 enables flexible grinding during the machining process, thereby achieving a finished workpiece with ultra-high surface quality, reducing the risk of scratching the finished workpiece, reducing polishing time while lowering the surface roughness of the finished workpiece, reducing the fragmentation rate, and improving the yield rate of fine grinding of the finished workpiece surface.

[0037] It should also be noted that the wheel assembly 120 is usually installed on a grinding wheel thinning machine to drive the wheel assembly 120 to rotate and move, thereby driving the rubber wire column 110 to sweep the silicon carbide substrate.

[0038] It should also be noted that the precision-machined workpiece can be a silicon carbide substrate sheet, or a sapphire substrate or other highly brittle and high hardness material.

[0039] See also Figure 2 、 Figure 3 、 Figure 4 and Figure 5In one embodiment, the wheel assembly 120 includes a base frame 121 and a rubber wire mounting wheel 122;

[0040] The base frame 121 is used to connect to a driving device to drive the base frame 121 to rotate and move;

[0041] The rubber wire installation wheel 122 is fixedly connected to the base frame 121 . The rubber wire installation wheel 122 is annular and has a plurality of installation positions 122 a arranged along a circumferential direction.

[0042] It can be understood that since the rubber wire column 110 is made of a material that is easily worn, the base frame 121 and the rubber wire mounting wheel 122 can facilitate the disassembly and installation of the rubber wire column 110; and if the rubber wire column 110 is severely worn, it can also be achieved by directly replacing the rubber wire mounting wheel 122 and the rubber wire column 110, thereby reducing maintenance costs.

[0043] Optionally, the base frame 121 is made of metal material, and the rubber wire mounting wheel 122 is made of polymer material.

[0044] Furthermore, if Figure 3 As shown, the base frame 121 is configured with an annular groove 121a, into which the rubber wire mounting wheel 122 is received. It will be appreciated that this annular groove effectively secures the rubber wire mounting wheel 122, preventing it from shifting due to vibration or external forces during operation, thereby improving the precision of thinning and scanning. Furthermore, the annular groove 121a provides a layer of physical protection for the rubber wire mounting wheel 122, enhancing the reliability of its fixed connection to the base frame 121.

[0045] Optionally, the rubber wire mounting wheel 122 is adhesively connected to the base frame 121 .

[0046] See also Figure 2 、 Figure 4 and Figure 5 In a specific embodiment, the wheel assembly 120 further includes a screw (not shown); the rubber wire mounting wheel 122 is further provided with a through hole 122 b, and the screw passes through the through hole 122 b and is fixedly connected to the base frame 121 .

[0047] It can be understood that the rubber wire mounting wheel 122 is screw-connected to the base frame 121 , which facilitates the disassembly of the rubber wire mounting wheel 122 , reduces secondary damage to the rubber wire mounting wheel 122 , and is conducive to the reuse of the rubber wire mounting wheel 122 .

[0048] Furthermore, the through hole 122b is a countersunk hole, which enables the nail head of the screw to be flush with or lower than the surface of the rubber wire installation wheel 122, thereby reducing protrusions and reducing the risk of scratching the finished workpiece.

[0049] See also Figure 1 and Figure 4 The plurality of mounting positions 122a are spaced apart relative to the wire mounting wheel 122; the through hole 122b is disposed between two spaced-apart groups of mounting positions 122a. Specifically, the spaced-apart arrangement of the plurality of mounting positions 122a facilitates heat dissipation during the polishing process and reduces the accumulation of polishing debris that could affect the polishing effect.

[0050] It should also be noted that in the above embodiment, the brush filaments 111 are agglomerated rubber filaments or nylon filaments. Specifically, the agglomerated rubber filaments can be abrasive filaments such as aluminum oxide abrasive filaments and diamond filaments. Specifically, the nylon filaments can be resin filaments, plastic filaments, rubber filaments, ceramic filaments, and the like.

[0051] Optionally, the rubber column 110 is connected to the wheel disc assembly 120 by adhesive bonding.

[0052] Optionally, the rubber column 110 and the wheel assembly 120 are connected by binding with a rope.

[0053] In a specific embodiment, Figure 2 As shown, a double-circle finishing thinning sweeping wheel 100 is made of a 0.2um agglomerated rubber silk thread column 110. On a silicon carbide substrate thinning machine, a 6-inch 4H silicon carbide substrate sheet is processed, and its surface roughness can reach Ra<1nm without scratches.

[0054] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A finishing thinning sweeping wheel, characterized in that: Including rubber wire column and wheel disc assembly; The wheel assembly has a plurality of mounting positions arranged along the circumferential direction, the rubber wire column is placed in the mounting positions and is fixedly connected to the wheel assembly; wherein, the rubber wire column includes a plurality of brush wires; the wheel assembly is used to be connected to a driving device to drive the rubber wire column to thin and polish the finished workpiece.

2. The finishing thinning sweeping wheel according to claim 1, characterized in that: The wheel disc assembly includes a base frame and a rubber wire mounting wheel; The base frame is used to be connected to a driving device to drive the base frame to rotate and move; The rubber wire installation wheel is fixedly connected to the base frame, the rubber wire installation wheel is ring-shaped, and the rubber wire installation wheel has a plurality of installation positions arranged along the circumferential direction.

3. The finishing thinning sweeping wheel according to claim 2, characterized in that: The base frame is provided with an annular groove, and the rubber wire mounting wheel is received in the annular groove.

4. The finishing thinning sweeping wheel according to claim 2, characterized in that: The wheel disc assembly also includes screws; the rubber wire mounting wheel is also provided with a through hole, and the screw passes through the through hole and is fixedly connected to the base frame.

5. The finishing thinning sweeping wheel according to claim 4, characterized in that: The via hole is a sink hole.

6. The finishing thinning sweeping wheel according to claim 4, characterized in that: A plurality of groups of the installation positions are spaced apart relative to the rubber wire installation wheel; and the through hole is configured between two groups of the installation positions spaced apart.

7. The finishing thinning sweeping wheel according to any one of claims 1 to 6, characterized in that: The brush filaments are agglomerated rubber filaments or nylon filaments.

8. The finishing thinning sweeping wheel according to claim 7, characterized in that: The rubber wire column is glued and connected to the wheel disc assembly.

9. The finishing thinning sweeping wheel according to claim 7, characterized in that: The rubber wire column is connected to the wheel disc assembly by being tied together with a rope.

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