Target material cooling plate and magnetron sputtering device

Abstract

The utility model discloses a target material cooling plate and a magnetron sputtering device, the target material cooling plate comprises a bottom plate and a sealing plate, and the sealing plate is used for covering the bottom plate; in the length direction of the bottom plate, one end of the bottom plate is provided with a liquid inlet hole, and the other end is provided with a liquid outlet hole; the end face, adjacent to the sealing plate, of the bottom plate is provided with a flow channel set used for allowing cooling liquid to flow through. And the target material cooling plate is used for enabling cooling liquid to flow in from the liquid inlet hole, and the cooling liquid is discharged from the liquid outlet hole after passing through the flow channel group. Wherein the cooling liquid flows through the flow channel group, so that the cooling liquid in the target material cooling plate can be uniformly distributed, and the heat is fully dissipated.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering, in particular to a target material cooling plate and a magnetron sputtering device. Background Art

[0002] The working principle of magnetron sputtering is that electrons, under the influence of an electric field, collide with argon atoms as they fly toward the substrate, ionizing them to produce positive Ar ions and new electrons. The new electrons fly toward the substrate, and the positive Ar ions, under the influence of the electric field, are accelerated toward the target material and bombard the target surface with high energy, causing the target material to sputter. However, because a large portion of the energy is converted into heat, this heat will increase the temperature of the target material, affecting the film quality. Existing technologies use single-channel cooling devices for cooling, but this method is ineffective and cannot fully dissipate heat. Utility Model Content

[0003] The main technical problem solved by the utility model is to provide a target material cooling plate to solve the problem of poor cooling effect and insufficient heat dissipation.

[0004] In order to solve the above technical problems, a technical solution adopted by the present invention is to provide a target material cooling plate, including a base plate and a sealing plate, the sealing plate is used to cover the base plate; in the length direction of the base plate, one end of the base plate is provided with a liquid inlet hole, and the other end is provided with a liquid outlet hole; a flow channel group is provided on the end surface of the base plate adjacent to the sealing plate, and the flow channel group is used to allow the coolant to flow through; the target material cooling plate is used to allow the coolant to flow in from the liquid inlet hole, and the coolant is discharged from the liquid outlet hole after passing through the flow channel group.

[0005] In some embodiments, the flow channel group includes multiple single flow channels, and the multiple single flow channels are arranged in parallel along the length direction of the bottom plate; the flow channel group is used to allow the coolant to flow through the single flow channels at the same time and then be discharged.

[0006] In some embodiments, in the width direction of the bottom plate, the length of the single flow channel adjacent to the middle is successively shorter than the lengths of the single flow channels on both sides.

[0007] In some embodiments, the flow channel group includes a main channel and two winding branch channels, and the main channel and the two branch channels are arranged side by side along the length direction of the bottom plate; the main channel is arranged between the two branch channels, the first end of the main channel is connected to the liquid inlet, the second end of the main channel is connected to the first ends of the two branch channels, and the second ends of the two branch channels are respectively connected to the two liquid outlets.

[0008] In some embodiments, the first end of the main channel is connected to a liquid inlet channel, and the liquid inlet channel is connected to a plurality of liquid inlet holes.

[0009] In some embodiments, an interlocking groove is provided on the end surface of the bottom plate away from the sealing plate, and the interlocking groove is used to install the target material.

[0010] Based on the same inventive concept, the present invention also provides a magnetron sputtering device, including the above-mentioned target cooling plate.

[0011] The beneficial effects of the present invention are as follows: the present invention provides a target cooling plate, characterized in that it includes a base plate and a sealing plate, the sealing plate being used to cover the base plate; a liquid inlet hole is provided at one end of the base plate and a liquid outlet hole is provided at the other end in the longitudinal direction of the base plate; a flow channel group is provided on the end surface of the base plate adjacent to the sealing plate, the flow channel group being used to allow coolant to flow through; the target cooling plate is used to allow coolant to flow in from the liquid inlet hole, pass through the flow channel group, and be discharged from the liquid outlet hole. The coolant flowing through the flow channel group can evenly distribute the coolant in the target cooling plate, effectively dissipating heat. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic structural diagram of an embodiment of the present utility model;

[0013] Figure 2 This is a schematic diagram of the explosion structure of an embodiment of the utility model;

[0014] Figure 3 This is a schematic diagram of the bottom plate structure of an embodiment of the utility model;

[0015] Figure 4 This is a schematic diagram of the explosion structure of another embodiment of the utility model;

[0016] Figure 5 This is a schematic diagram of the bottom plate structure of another embodiment of the utility model;

[0017] Figure 6 It is a structural schematic diagram of another perspective of an embodiment of the utility model. DETAILED DESCRIPTION

[0018] To facilitate understanding of the present invention, the present invention is described in more detail below with reference to the accompanying drawings and specific embodiments. The accompanying drawings illustrate preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described in this specification. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the disclosure of the present invention.

[0019] It should be noted that, unless otherwise defined, all technical and scientific terms used in this specification have the same meanings as those commonly understood by those skilled in the art in the technical field of this utility model. The terms used in this specification are only for the purpose of describing specific embodiments and are not intended to limit the utility model. The term "and / or" as used in this specification includes any and all combinations of one or more of the relevant listed items.

[0020] Figures 1-6 The embodiment of the target cooling plate of the present invention is shown, which includes a base plate 1 and a sealing plate 2. The sealing plate 2 is used to cover the base plate 1, and then the sealing plate 2 is fixed to the base plate 1 by screws. In the longitudinal direction of the base plate 1, one end of the base plate 1 is provided with a liquid inlet hole (not shown in the figure), and the other end is provided with a liquid outlet hole (not shown in the figure). A flow channel group 13 is provided on the end surface of the base plate 1 adjacent to the sealing plate 2, and the flow channel group 13 is used to allow coolant to flow through. The target cooling plate is used to allow coolant to flow in from the liquid inlet hole, and the coolant is discharged from the liquid outlet hole after passing through the flow channel group 13. Among them, the coolant can be evenly distributed in the target cooling plate by flowing through the flow channel group 13, and the heat is fully dissipated.

[0021] like Figure 2 、 Figure 3 As shown, in some embodiments, the flow channel group 13 includes multiple single flow channels 131, which are arranged in parallel along the length of the base plate 1. The flow channel group 13 is used to allow coolant to flow through the single flow channels 131 simultaneously and then be discharged. In this embodiment, the flow channel group 13 includes ten single flow channels 131. Specifically, the base plate 1 is provided with a cavity, and nine partitions 1311 are arranged in parallel within the cavity. The nine partitions 1311 divide the cavity into ten single flow channels 131. The coolant flows through the ten single flow channels 131 simultaneously, ensuring that the coolant is evenly distributed in the target cooling plate, achieving a sufficient heat dissipation effect.

[0022] Of course, in actual use, more or fewer single flow channels 131 can be provided according to other factors such as the size of the target material and the flow rate of the coolant, and this is not limited here.

[0023] In some embodiments, in the width direction of the base plate 1, the length of the single flow channel 131 adjacent to the middle is successively shorter than the length of the single flow channels 131 on both sides, so that the two ends of the parallel single flow channels 131 form a first triangular area 1321 and a second triangular area 1322; after the coolant flows into the liquid inlet, it converges at the first triangular area 1321, and the first triangular area 1321 facilitates the coolant to quickly enter the multiple parallel single flow channels 131; before the coolant flows out of the liquid outlet, it converges at the second triangular area 1322, and the second triangular area 1322 facilitates the coolant to quickly flow out of the liquid outlet.

[0024] like Figure 4 、 Figure 5As shown, in some embodiments, the flow channel group 13 includes a main channel 133 and two winding branch channels 134, and the main channel 133 and the two branch channels 134 are arranged side by side along the length direction of the base plate 1; the main channel 133 is set in the middle position of the base plate 1 and is located between the two branch channels 134, the first end 1331 of the main channel is connected to the liquid inlet, the second end 1332 of the main channel is connected to the first end 1341 of the two branch channels, and the second end 1342 of the two branch channels is connected to the two liquid outlets respectively. In this embodiment, the two branch channels 134 meander once, and after the coolant enters the main channel 133, it flows into the two branch channels 134 respectively from the second end 1332 of the main channel, and then flows out from the two liquid outlets respectively after meandering. This process extends the distance the coolant flows, can make full use of the coolant, and ultimately achieve a better heat dissipation effect.

[0025] Of course, in actual use, depending on other factors such as the size of the target material and the flow rate of the coolant, the two branch flow channels 134 can meander more times and then connect to the liquid outlet. There is no limitation here.

[0026] In some embodiments, the first end 1331 of the main channel is connected to a liquid inlet channel 135, which is connected to multiple liquid inlet holes. The provision of multiple liquid inlet holes allows for rapid flow of coolant into the target cooling plate, achieving rapid cooling. In this embodiment, the liquid inlet channel 135 is disposed along the width of the base plate 1 to facilitate connection to multiple liquid inlet holes.

[0027] like Figure 6 As shown, in some embodiments, an interlocking groove 14 is provided on the end surface of the base plate 1 away from the sealing plate 2. The interlocking groove 14 is used to install the target material. The interlocking groove 14 is adapted to the size and shape of the target material and can play a guiding role during installation to facilitate assembly.

[0028] Based on the same inventive concept, the present invention also provides a magnetron sputtering device, including the above-mentioned target cooling plate.

[0029] As can be seen, the utility model discloses a device including a base plate and a sealing plate, wherein the sealing plate is used to cover the base plate; in the longitudinal direction of the base plate, a liquid inlet hole is provided at one end of the base plate, and a liquid outlet hole is provided at the other end; a flow channel group is provided on the end surface of the base plate adjacent to the sealing plate, and the flow channel group is used to allow coolant to flow through; the target cooling plate is used to allow coolant to flow in from the liquid inlet hole, and the coolant is discharged from the liquid outlet hole after passing through the flow channel group. The coolant flowing through the flow channel group can evenly distribute the coolant in the target cooling plate, fully utilize the coolant, remove more heat, and achieve a better heat dissipation effect.

[0030] The above are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structural transformations made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A target cooling plate, characterized in that: It includes a base plate and a sealing plate, the sealing plate is used to cover the base plate; in the length direction of the base plate, one end of the base plate is provided with a liquid inlet hole, and the other end is provided with a liquid outlet hole; the end surface of the base plate adjacent to the sealing plate is provided with a flow channel group, and the flow channel group is used to allow the coolant to flow through; the target material cooling plate is used to allow the coolant to flow in from the liquid inlet hole, and the coolant is discharged from the liquid outlet hole after passing through the flow channel group.

2. The target cooling plate according to claim 1, wherein: The flow channel group includes a plurality of single flow channels, and the plurality of single flow channels are arranged in parallel along the length direction of the bottom plate; the flow channel group is used to allow the coolant to flow through the single flow channels at the same time and then be discharged.

3. The target cooling plate according to claim 2, characterized in that In the width direction of the bottom plate, the length of the single flow channel adjacent to the middle is successively shorter than the lengths of the single flow channels on both sides.

4. The target cooling plate according to claim 1, wherein: The flow channel group includes a main channel and two winding branch channels, and the main channel and the two branch channels are arranged side by side along the length direction of the base plate; the main channel is arranged between the two branch channels, the first end of the main channel is connected to the liquid inlet hole, the second end of the main channel is connected to the first ends of the two branch channels, and the second ends of the two branch channels are respectively connected to the two liquid outlet holes.

5. The target cooling plate according to claim 4, characterized in that The first end of the main channel is connected to a liquid inlet channel, and the liquid inlet channel is connected to a plurality of the liquid inlet holes.

6. The target cooling plate according to any one of claims 1 to 5, characterized in that: An embedding groove is provided on the end surface of the bottom plate away from the sealing plate, and the embedding groove is used for installing the target material.

7. A magnetron sputtering device, characterized in that: The target cooling plate comprises the target cooling plate according to any one of claims 1 to 6.

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