Vacuum coating equipment

Abstract

The utility model belongs to the technical field of vacuum coating, and discloses vacuum coating equipment. The vacuum coating equipment comprises a containing assembly, a second loading mechanism, a third loading mechanism, a first carrying mechanism and a turnover mechanism, the containing assembly comprises a first coating chamber and a second coating chamber, and the first coating chamber and the second coating chamber are selectively communicated; the second loading mechanism is arranged in the first coating chamber; the third loading mechanism is arranged in the second coating chamber, a loading station is arranged on the third loading mechanism, the loading station can revolve around the central axis of the third loading mechanism, and the workpiece can move from the second loading mechanism and is fixed to the loading station; the first carrying mechanism can carry the workpieces from the second loading mechanism to a loading station corresponding to the first carrying mechanism; the turnover mechanism can make the workpiece rotate in the process that the first carrying mechanism carries the workpiece, so that when the workpiece begins to be placed on the loading station, the to-be-coated face faces the outside, and coating is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating device. Background Art

[0002] In order to improve the performance of workpieces such as glass, it is often necessary to coat the workpieces with thin films with multiple functions. For example, after the optical thin film coating process of the workpiece, an anti-fouling film coating process is often added. If thin films with multiple functions are coated in the same coating chamber, it is easy to cause contamination between different films, thereby affecting the coating quality; it may also lead to low utilization of the coating source, affecting the coating efficiency. If thin films with multiple functions are placed in multiple coating chambers for coating, a conveying mechanism is required to transfer the workpieces between different coating chambers. However, the existing conveying mechanism has technical problems such as large space occupation and complicated conveying process. Utility Model Content

[0003] The purpose of the present utility model is to provide a vacuum coating equipment to solve the problem in the prior art that when multiple functional films are coated in the same coating chamber, contamination between different films is easily caused; when multiple functional films are coated in multiple coating chambers, a conveying mechanism is required to transfer the workpieces between different coating chambers, and the existing conveying mechanism has the problems of large space occupation and complicated conveying process. The quality of the workpiece coated with multiple layers of thin films is improved and the large space occupation of the conveying mechanism is avoided.

[0004] To achieve this purpose, the present invention adopts the following technical solutions:

[0005] Provided is a vacuum coating device, comprising:

[0006] An accommodating component, the accommodating component comprising a first coating chamber and a second coating chamber, the first coating chamber and the second coating chamber being selectively connected;

[0007] a second loading mechanism, the second loading mechanism being disposed in the first coating chamber;

[0008] a third loading mechanism, the third loading mechanism being disposed in the second coating chamber, the third loading mechanism being provided with a loading station capable of orbiting around a central axis of the third loading mechanism, and a workpiece being capable of being moved from the second loading mechanism and fixed to the loading station;

[0009] a first conveying mechanism, wherein the first conveying mechanism is capable of conveying the workpiece from the second loading mechanism to the loading station corresponding to the first conveying mechanism;

[0010] The turning mechanism can rotate the workpiece during the process of the first conveying mechanism conveying the workpiece, so that when the workpiece is initially placed at the loading station, the surface to be coated faces outwards to facilitate coating.

[0011] As an optional technical solution for vacuum coating equipment, the flipping mechanism includes a first base plate, a carrying plate and a lever assembly. The carrying plate is rotatably arranged on the first base plate. When the workpiece is placed on the carrying plate, the lever assembly can drive the carrying plate to rotate, thereby driving the workpiece to rotate.

[0012] As an optional technical solution for vacuum coating equipment, the flipping mechanism also includes a shaft and a bearing, one end of the shaft is fixed to the first base plate, and the other end is arranged at the center of the carrying plate, and the bearing is arranged between the carrying plate and the shaft.

[0013] As an optional technical solution for vacuum coating equipment, the first conveying mechanism includes a first guide member, the first base plate is slidably arranged on the first guide member, and the lever assembly is arranged on one side of the first guide member along the extension direction, so that the carrying plate is rotated by the lever assembly during the process of conveying the workpiece to the loading station.

[0014] As an optional technical solution for vacuum coating equipment, the accommodating component also includes a film feeding chamber, which is selectively connected to the first coating chamber. The film feeding chamber is provided with a first loading mechanism, and the workpiece can be moved from the first loading mechanism and fixed to the second loading mechanism.

[0015] As an optional technical solution for vacuum coating equipment, the first loading mechanism includes a first main turntable and multiple first sub-turntables, and the third loading mechanism includes a second main turntable and multiple second sub-turntables. The multiple first sub-turntables are evenly spaced around the central axis of the first main turntable, and the multiple second sub-turntables are evenly spaced around the central axis of the second main turntable. The first main turntable, the first sub-turntable, the second main turntable and the second sub-turntable can all rotate on their own; the rotation of the first main turntable can drive the first sub-turntable to revolve around the central axis of the first main turntable, and the rotation of the second main turntable can drive the second sub-turntable to revolve around the central axis of the second main turntable.

[0016] As an optional technical solution for vacuum coating equipment, the first loading mechanism and the third loading mechanism both include a driving assembly, and the driving assembly includes a first driving member and a second driving member. The first driving member is used to drive the first main turntable and / or the second main turntable to rotate, and the second driving member is used to drive the first sub-turntable and / or the second sub-turntable to rotate.

[0017] As an optional technical solution for vacuum coating equipment, the drive assembly also includes a first drive shaft, a first driven wheel, a second driven wheel and a first synchronizer. The second driven wheel is connected one-to-one with the first sub-rotor frame or the second sub-rotor frame. The first driven wheel and the second driven wheel are one-to-one and synchronously connected through the first synchronizer. The first drive shaft is arranged at the center of all the second driven wheels. The second drive member drives the first drive shaft to rotate, thereby driving all the first driven wheels and the second driven wheels to rotate.

[0018] As an optional technical solution for the vacuum coating equipment, a first gate valve is provided between the film feeding chamber and the first coating chamber, and a second gate valve is provided between the first coating chamber and the second coating chamber.

[0019] As an optional technical solution for the vacuum coating equipment, an anti-fouling film coating system and an ion source are provided in the second coating chamber to perform anti-fouling film coating and ion treatment on the workpiece respectively.

[0020] Beneficial effects of the utility model:

[0021] The present application discloses a vacuum coating device, comprising a accommodating assembly, a second loading mechanism, a third loading mechanism, a first conveying mechanism and a flipping mechanism, wherein the accommodating assembly comprises a first coating chamber and a second coating chamber, wherein the first coating chamber and the second coating chamber are selectively connected; the second loading mechanism is arranged in the first coating chamber; the third loading mechanism is arranged in the second coating chamber, and the third loading mechanism is provided with a loading station, wherein the loading station can revolve around the central axis of the third loading mechanism, and the workpiece can be moved from the second loading mechanism and fixed to the loading station; the first conveying mechanism can convey the workpiece from the second loading mechanism to the loading station corresponding to the first conveying mechanism; the flipping mechanism can rotate the workpiece during the process of conveying the workpiece by the first conveying mechanism, so that when the workpiece is initially placed at the loading station, the surface to be coated faces outward, thereby facilitating coating and improving coating efficiency. By providing the first coating chamber and the second coating chamber, different types of coatings can be separately arranged to avoid mutual contamination of the coatings; the workpiece is conveyed by the first conveying mechanism, and when the workpiece arrives at different coating chambers, the surface to be coated faces outward, thereby facilitating coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0023] Figure 1This is a schematic structural diagram of a vacuum coating device provided by an embodiment of the present utility model;

[0024] Figure 2 This is a first schematic diagram of a partial structure of a vacuum coating device provided by an embodiment of the present utility model;

[0025] Figure 3 This is a second schematic diagram of a partial structure of a vacuum coating device provided by an embodiment of the present utility model;

[0026] Figure 4 This is a third schematic diagram of a partial structure of a vacuum coating device provided by an embodiment of the present utility model;

[0027] Figure 5 This is a fourth schematic diagram of a partial structure of a vacuum coating device provided by an embodiment of the present utility model;

[0028] Figure 6 This is a fifth schematic diagram of a partial structure of a vacuum coating device provided by an embodiment of the present utility model;

[0029] Figure 7 This is a sixth schematic diagram of a partial structure of a vacuum coating device provided by an embodiment of the present utility model;

[0030] Figure 8 This is a seventh schematic diagram of a partial structure of a vacuum coating device provided by an embodiment of the present utility model;

[0031] Figure 9 This is an eighth schematic diagram of a partial structure of a vacuum coating device provided by an embodiment of the present utility model;

[0032] Figure 10 This is a ninth schematic diagram of a partial structure of a vacuum coating device provided by an embodiment of the present utility model;

[0033] Figure 11 This is the tenth schematic diagram of a partial structure of the vacuum coating equipment provided by an embodiment of the present utility model.

[0034] In the picture:

[0035] 1. Workpiece;

[0036] 100, accommodating component; 110, film feeding chamber; 120, first coating chamber; 130, second coating chamber; 140, first gate valve; 150, second gate valve;

[0037] 200, first loading mechanism; 211, first main turret; 2111, first upper plate; 2112, first lower plate; 2113, connecting rod; 2114, bearing member; 212, first sub-turret; 2121, first transmission shaft; 2122, second upper plate; 2123, second lower plate; 220, drive assembly; 221, first drive member; 222, second drive member; 223, first drive shaft; 224, first driven pulley; 225, second driven pulley; 226, first synchronizer; 227, second synchronizer; 228, second drive shaft;

[0038] 300, second loading mechanism;

[0039] 400, third loading mechanism; 411, second main turret; 412, second sub-turret; 413, second transmission shaft; 414, third upper plate; 415, third lower plate;

[0040] 500, first transport mechanism;

[0041] 600, flip mechanism; 610, first bottom plate; 620, carrier plate; 621, plug connector; 630, first lever; 640, second lever;

[0042] 700, second conveying mechanism; 710, second bottom plate; 711, driving motor; 720, clamping member; 730, second guide member; 740, third guide member;

[0043] 800, antifouling film coating system;

[0044] 900. Ion source. DETAILED DESCRIPTION

[0045] Before any embodiments of the present application are explained in detail, it is to be understood that the application is not limited in its application to the details of construction and the arrangement of components set forth in the following description or illustrated in the foregoing drawings.

[0046] In this application, the terms "comprises," "includes," "has," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not preclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0047] In this application, the term "and / or" describes a relationship between related objects, indicating that three possible relationships exist. For example, "A and / or B" can represent: A exists alone, A and B exist simultaneously, or B exists alone. Additionally, the character " / " in this application generally indicates that the related objects are in an "and / or" relationship.

[0048] In this application, the terms "connect," "combine," "couple," and "install" may refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without an intermediary, and an indirect connection refers to two parts or components being connected to at least one intermediary, with the two parts or components being connected via the intermediary. Furthermore, "connect" and "couple" are not limited to physical or mechanical connections or couplings and may include electrical connections or couplings.

[0049] In this application, it will be understood by those skilled in the art that relative terms (e.g., "about," "approximately," "substantially," etc.) used in conjunction with quantities or conditions include the values ​​and have the meaning indicated by the context. For example, the relative terms include at least the degree of error associated with the measurement of a specific value, the tolerance caused by manufacturing, assembly, use, etc. associated with a specific value. Such terms should also be considered to disclose a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to plus or minus a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​that do not use relative terms should also be disclosed as specific values ​​with tolerances. In addition, "substantially" may refer to plus or minus a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) on the basis of the indicated angle when expressing a relative angular position relationship (e.g., substantially parallel, substantially perpendicular).

[0050] In this application, it will be understood by those skilled in the art that the function performed by an assembly can be performed by one assembly, multiple assemblies, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one assembly, or a combination of multiple parts.

[0051] In the present application, the terms "upper", "lower", "left", "right", "front", "back" and other directional words are described based on the orientation and positional relationship shown in the accompanying drawings, and should not be understood as limiting the embodiments of the present application. In addition, in the context, it is also necessary to understand that when it is mentioned that an element is connected to another element "upper" or "lower", it can not only be directly connected to the other element "upper" or "lower", but also be indirectly connected to the other element "upper" or "lower" through an intermediate element. It should also be understood that directional words such as upper side, lower side, left side, right side, front side, back side, etc. not only represent the positive orientation, but can also be understood as the lateral orientation. For example, below can include directly below, lower left, lower right, lower front and lower back, etc.

[0052] In the prior art, in order to improve the performance of workpieces such as glass, it is often necessary to coat the workpieces with thin films having multiple functions. For example, after the optical thin film coating process of the workpiece, an anti-fouling film coating process is often added. If thin films with multiple functions are coated in the same coating chamber, it is easy to cause contamination between different films, thereby affecting the coating quality; in addition, the utilization rate of the coating source may be low, affecting the coating efficiency. If thin films with multiple functions are placed in multiple coating chambers for coating, a conveying mechanism is required to transfer the workpieces between different coating chambers. However, the existing conveying mechanism has technical problems such as large space occupation and complicated conveying process.

[0053] To solve the above problems, this embodiment provides a vacuum coating device. Figure 1 , including a accommodating component 100, a second loading mechanism 300, a third loading mechanism 400, a first conveying mechanism 500 and a turning mechanism 600, the accommodating component 100 includes a first coating chamber 120 and a second coating chamber 130, the first coating chamber 120 and the second coating chamber 130 are selectively connected; the second loading mechanism 300 is arranged in the first coating chamber 120; the third loading mechanism 400 is arranged in the second coating chamber 130, and a loading station is provided on the third loading mechanism 400, and the loading station can rotate around the center of the third loading mechanism 400 The axis revolves, and the workpiece 1 can be moved from the second loading mechanism 300 and fixed to the loading station; the first conveying mechanism 500 can convey the workpiece 1 from the second loading mechanism 300 to the loading station corresponding to the first conveying mechanism 500 (the loading station of the third loading mechanism 400 that can be operated by the first conveying mechanism 500); the flipping mechanism 600 can rotate the workpiece 1 in the vertical direction during the process of conveying the workpiece 1 by the first conveying mechanism 500, so that when the workpiece 1 is initially placed in the loading station, the surface to be coated faces outwards, so as to facilitate coating. By setting up the first coating chamber 120 and the second coating chamber 130, different types of coatings are set separately to avoid mutual contamination of the coatings; the workpiece 1 is conveyed by the first conveying mechanism 500, and the surface to be coated can face outwards when the workpiece 1 arrives at different coating chambers through the flipping mechanism 600, so as to facilitate coating.

[0054] Specifically, see Figure 1 In this embodiment, a sputtering coating system is provided in the first coating chamber 120, and an anti-fouling film coating system 800 and an ion source 900 are provided in the second coating chamber 130, so as to perform anti-fouling film coating and ion treatment on the workpiece 1, respectively. In some embodiments, the thin film prepared by the sputtering ion coating system provided in the first coating chamber 120 is first ion-treated using the ion source 900, and then anti-fouling film coating is performed. Specifically, the ion source 900 can be a linear ion source, or an ICP ion source, etc., which is not limited here; further, ion treatment includes plasma treatment, which can be used for etching, surface modification, etc., which is not limited here. In other embodiments, the first coating chamber 120 and the second coating chamber 130 can be used to coat other types of thin films, which is not limited here. Further, the ion source 900 can be removed from the second coating chamber 130. It should be noted that the sputtering coating system, the anti-fouling film coating system 800 and the ion source 900 are all existing technologies, and their structures and principles are not described in detail here.

[0055] Furthermore, the second loading mechanism 300 is configured as a rotary workpiece loading mechanism. After the workpiece 1 enters the first coating chamber 120 from the film feed chamber 110, it is mounted on the rotary workpiece loading mechanism with the coating surface facing outward. The rotary workpiece loading mechanism is driven by a motor. Since the rotary workpiece loading mechanism is conventional technology, its structure and principle will not be described in detail here.

[0056] Further, see Figure 1 The accommodating assembly 100 further includes a film feed chamber 110, which is selectively connected to the first coating chamber 120. The film feed chamber 110 is provided with a first loading mechanism 200, and the workpiece 1 can be moved from the first loading mechanism 200 and fixed to the second loading mechanism 300. In this embodiment, the film feed chamber 110, the first coating chamber 120, and the second coating chamber 130 are arranged in a triangular shape. A first gate valve 140 is provided between the film feed chamber 110 and the first coating chamber 120, and a second gate valve 150 is provided between the first coating chamber 120 and the second coating chamber 130. The first gate valve 140 and the second gate valve 150 achieve selective communication between the first coating chamber 120 and the film feed chamber 110, and between the first coating chamber 120 and the second coating chamber 130.

[0057] Further, see Figure 8The flipping mechanism 600 includes a first base plate 610, a carrier plate 620, and a lever assembly. The carrier plate 620 is rotatably mounted on the first base plate 610. When a workpiece 1 is placed on the carrier plate 620, the lever assembly can rotate the carrier plate 620, thereby driving the workpiece 1 to rotate. In this embodiment, the first base plate 610 and the carrier plate 620 in the flipping mechanism 600 are assembled with the first conveying mechanism 500. The first conveying mechanism 500 includes a first guide member. The first base plate 610 is slidably mounted on the first guide member. The lever assembly is disposed on one side of the first guide member along its extension direction. When the workpiece 1 is conveyed to the loading station, the carrier plate 620 is rotated by the lever assembly. Since the workpiece 1 needs to be rotated 180° in this embodiment, the carrier plate 620 is configured as a swash plate. The lever assembly includes a first lever 630 and a second lever 640, which are spaced apart along the path used to transport the workpiece 1 to the loading station. During transport, the first lever 630 rotates the swash plate 90°, while the second lever 640 rotates the swash plate 180°, thereby rotating the workpiece 1. By combining the moving portion of the flip mechanism 600 (the first base plate 610 and the carrier plate 620) with the first transport mechanism 500 into a combined structure, the structure and transporting action of the transport mechanism are simplified, the vacuum coating equipment footprint is reduced, and transport efficiency is improved. In some embodiments, the main portion of the first transport mechanism 500 (excluding a portion of the first guide member) and the flip mechanism 600 are located within the second coating chamber 130, close to the first coating chamber 120, effectively utilizing the chamber space. It can be understood that in order to make the rotation angle of the supporting plate 620 accurate and stable, the angle limitation can be achieved by using mechanical force through structures such as pin holes and spring plungers, or by using electromagnetic force through structures such as magnets. The supporting plate 620 can also be rotated at an accurate angle by using a cylinder plus a gear rack, a rotating cylinder, etc., which will not be described in detail here.

[0058] Furthermore, a first guide member is disposed within the second coating chamber 130, and a portion of the first guide member is disposed at the bottom of the third loading mechanism 400, facilitating the loading of the workpiece 1 into the loading station. Specifically, the first guide member is configured as a guide rail, and a slider is disposed at the bottom of the first base plate 610. The slider and the guide rail cooperate to slide the first base plate 610 onto the first guide member. In this embodiment, plug connectors 621 are provided at each of the four ends of the cross plate to facilitate the rapid insertion of the workpiece 1, thereby improving the speed and efficiency of the workpiece 1 transport.

[0059] Furthermore, the flipping mechanism 600 also includes a shaft and a bearing. One end of the shaft is fixed to the first base plate 610, and the other end is arranged at the center of the supporting plate 620. The bearing is arranged between the supporting plate 620 and the shaft to increase the smoothness of the rotation of the supporting plate 620, so as to avoid excessive friction resistance between the supporting plate 620 and the shaft, resulting in rotation failure or damage to the first lever 630 and the second lever 640.

[0060] Further, see Figure 5-Figure 7 、 Figure 9 The first loading mechanism 200 includes a first main turntable 211 and multiple first sub-turntables 212, and the third loading mechanism 400 includes a second main turntable 411 and multiple second sub-turntables 412. The multiple first sub-turntables 212 are evenly spaced around the central axis of the first main turntable 211, and the multiple second sub-turntables 412 are evenly spaced around the central axis of the second main turntable 411. The first main turntable 211, the first sub-turntable 212, the second main turntable 411 and the second sub-turntable 412 can all rotate on their own; the rotation of the first main turntable 211 can drive the first sub-turntable 212 to revolve around the central axis of the first main turntable 211, and the rotation of the second main turntable 411 can drive the second sub-turntable 412 to revolve around the central axis of the second main turntable 411.

[0061] Specifically, the first main rotate frame 211 and the second main rotate frame 411 have the same structure. The first main rotate frame 211 includes a first upper plate 2111 and a first lower plate 2112. The first upper plate 2111 and the first lower plate 2112 have the same shape and size. In this embodiment, the first upper plate 2111 and the first lower plate 2112 are both configured to be "flower-shaped" and have five petals. A connecting rod 2113 is also connected between the first upper plate 2111 and the first lower plate 2112 to increase the connection stability. In this embodiment, five connecting rods 2113 are provided and are all placed at the connection between two adjacent petals.

[0062] Furthermore, bearings 2114 are provided at positions corresponding to the five petals of the first upper plate 2111 and the first lower plate 2112. The first sub-rotary frame 212 includes a first transmission shaft 2121, a second upper plate 2122 and a second lower plate 2123. The second upper plate 2122 and the second lower plate 2123 are both "flower-shaped" and have five petals. The size of the second upper plate 2122 is smaller than that of the second lower plate 2123. Each petal of the second lower plate 2123 is provided with two pins, and each petal of the second upper plate 2122 is provided with a clamping block. The two pins correspond to the sockets at the bottom of the workpiece 1, and the clamping block is clamped to the top of the workpiece 1.

[0063] Specifically, the second sub-rotor 412 includes a second transmission shaft 413, a third upper plate 414 and a third lower plate 415. The third upper plate 414 and the third lower plate 415 are both "flower-shaped" in shape and have ten petals. The third upper plate 414 and the third lower plate 415 are of the same and corresponding sizes. The third upper plate 414 and the third lower plate 415 are spaced apart from each other on the second transmission shaft 413. Each petal of the third upper plate 414 and the third lower plate 415 is provided with a pin, and the non-coated surface of each workpiece 1 is provided with four sockets, and the four sockets correspond to the pins, so as to facilitate the workpiece 1 to be fixed to the second sub-rotor 412.

[0064] Further, see Figure 2-Figure 4 、 Figure 11 The first loading mechanism 200 and the third loading mechanism 400 both include a drive assembly 220, which includes a first drive member 221 and a second drive member 222. The first drive member 221 is used to drive the first main rotating frame 211 and / or the second main rotating frame 411 to rotate, and the second drive member 222 is used to drive the first sub-rotating frame 212 and / or the second sub-rotating frame 412 to rotate. Specifically, the first drive member 221 and the second drive member 222 are both configured as motors.

[0065] Furthermore, the drive assembly 220 also includes a first drive shaft 223, a first driven wheel 224, a second driven wheel 225 and a first synchronizer 226. The second driven wheel 225 is connected one-to-one with the first sub-rotor frame 212 or the second sub-rotor frame 412. The first driven wheel 224 and the second driven wheel 225 are connected one-to-one and are synchronously connected through the first synchronizer 226. The first drive shaft 223 is arranged at the center of all the second driven wheels 225. The second drive member 222 drives the first drive shaft 223 to rotate, thereby driving all the first driven wheels 224 and the second driven wheels 225 to rotate.

[0066] Furthermore, the drive assembly 220 also includes a second synchronizer 227, through which all second driven wheels 225 are connected. The second synchronizer 227 is located at the top of the first upper disk 2111, and the first synchronizer 226 is located at the top of the first upper disk 2111 and is located vertically below the second synchronizer 227. Specifically, the first synchronizer 226 and the second synchronizer 227 are configured as non-flexible synchronous belts. In other embodiments, they can also be configured as ropes or chains. In other embodiments, a third driven wheel is provided at the lower end of the first drive shaft 223, and the third driven wheel is connected to the first driven wheel 224 by a fifth synchronizer, and two adjacent first driven wheels 224 are connected by a transmission shaft. In other embodiments, teeth can be provided on the first drive shaft 223, and the first driven wheels 224 can be configured as gears, which are meshed with the teeth so that the first drive shaft 223 drives all first driven wheels 224 to rotate. In other embodiments, the first driven pulley 224 , the second driven pulley 225 and the third driven pulley are pulleys, and the first synchronizer 226 , the second synchronizer 227 and the fifth synchronizer are belts.

[0067] Furthermore, the drive assembly 220 further includes a second drive shaft 228, which is connected to the first main turret 211 or the second main turret 411. The first drive member 221 drives the second drive shaft 228 to rotate, thereby driving the first main turret 211 or the second main turret 411 to rotate. The first drive shaft 223 is disposed within the second drive shaft 228. It will be understood that the second drive shaft 228 is connected to the first upper plate 2111 or the first lower plate 2112 to drive the first main turret 211 or the second main turret 411 to rotate.

[0068] In other embodiments, a first driving wheel and a third synchronizer may be provided. The first driving wheel is connected to the first main rotating frame 211, so that the first driving member 221 can drive the first driving wheel to rotate, thereby driving the first main rotating frame 211 to rotate. The first driving wheel is connected to the second driving shaft 228 and a motor located on the top of the first upper plate 2111 drives the first driving wheel via a third synchronizer 229. In other embodiments, a fourth synchronizer may be provided to synchronously connect the second driving shaft 228 and the first driven wheel 224. Deformable clamps are provided on both sides of the fourth synchronizer, allowing the fourth synchronizer to be selectively tightened to synchronously connect or disconnect the second driving shaft 228 and the first driven wheel 224. When the deformation clamp clamps the fourth synchronous member, the second drive shaft 228 and the first driven wheel 224 can be driven synchronously. At this time, the first drive member 221 can be closed, and the first main turntable 211 and the first sub-turntable 212 or the second main turntable 411 and the second sub-turntable 412 can be driven only by the second drive member 222 to save electricity; when the deformation clamp loosens the fourth synchronous member, the first drive member 221 can drive the first main turntable 211 or the second main turntable 411 alone, and the second drive member 222 can drive the first sub-turntable 212 or the second sub-turntable 412 alone, so as to adjust the rotation direction and rotation speed of the loading station.

[0069] Further, see Figure 10The vacuum coating equipment also includes a second conveying mechanism 700. The second conveying mechanism 700 has a substantially the same structure as the first conveying mechanism 500 (the second conveying mechanism 700 does not have a component that docks with the flipping mechanism 600). The second conveying mechanism 700 is located in the film feeding chamber 110 and includes a second base plate 710, a clamping member 720, a second guide member 730 and a third guide member 740. The second guide member 730 is arranged in the film feeding chamber 110 and extends in a direction close to the second loading mechanism 300. Part of the second guide member 730 is arranged at the bottom of the first loading mechanism 200 to facilitate conveying the workpiece 1; the second base plate 710 is slidably arranged on the second guide member 730, and the third guide member 740 is correspondingly arranged above the second guide member 730. The clamping member 720 is slidably arranged on the third guide member 740. The second base plate 710 and the clamping member 720 jointly clamp the workpiece 1 and move the workpiece 1 to the second loading mechanism 300. In this embodiment, the second guide member 730 and the third guide member 740 are both configured as slide rails, and the second base plate 710 and the clamping member 720 are both connected to a drive motor 711 to drive the sliding movement. During the movement of the second base plate 710, a portion of the second base plate 710 enters the first coating chamber 120 to deliver the workpiece 1 to the second loading mechanism 300. Similarly, during the movement of the first base plate 610, a portion of the first base plate 610 enters the first coating chamber 120 to remove the workpiece 1 from the second loading mechanism 300.

[0070] Furthermore, both the first base plate 610 and the second base plate 710 can move in the vertical direction to facilitate placement of the workpiece 1 on the first base plate 610 or the second base plate 710. In some embodiments, cylinders can be provided on the first base plate 610 and the second base plate 710 to push the first base plate 610 and the second base plate 710 to move in the vertical direction, and the cylinders are slidably mounted on the first guide member or the second guide member 730. In some embodiments, a mechanism such as an inclined slide rail can be provided to simultaneously drive the first base plate 610 and the second base plate 710 to move in the vertical direction while the first base plate 610 and the second base plate 710 move in the horizontal direction, thereby achieving both horizontal and vertical movement using only a single horizontal drive mechanism.

[0071] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A vacuum coating device, characterized in that: include: A accommodating component (100), the accommodating component (100) comprising a first coating chamber (120) and a second coating chamber (130), wherein the first coating chamber (120) and the second coating chamber (130) are selectively connected; a second loading mechanism (300), the second loading mechanism (300) being disposed in the first coating chamber (120); a third loading mechanism (400), the third loading mechanism (400) being arranged in the second coating chamber (130), the third loading mechanism (400) being provided with a loading station, the loading station being capable of orbiting around a central axis of the third loading mechanism (400), and the workpiece (1) being capable of being moved from the second loading mechanism (300) and fixed to the loading station; a first conveying mechanism (500), wherein the first conveying mechanism (500) is capable of conveying the workpiece (1) from the second loading mechanism (300) to the loading station corresponding to the first conveying mechanism (500); A turning mechanism (600) is provided, wherein the turning mechanism (600) is capable of rotating the workpiece (1) during the process of the first conveying mechanism (500) conveying the workpiece (1), so that when the workpiece (1) is initially placed at the loading station, the surface to be coated faces outwards, facilitating coating.

2. The vacuum coating equipment according to claim 1, characterized in that: The turning mechanism (600) comprises a first base plate (610), a carrying plate (620) and a shifting rod assembly. The carrying plate (620) is rotatably arranged on the first base plate (610). When the workpiece (1) is placed on the carrying plate (620), the shifting rod assembly can shift the carrying plate (620) to rotate, thereby driving the workpiece (1) to rotate.

3. The vacuum coating equipment according to claim 2, characterized in that: The flip mechanism (600) further includes a shaft and a bearing, wherein one end of the shaft is fixed to the first base plate (610) and the other end is arranged at the center of the supporting plate (620), and the bearing is arranged between the supporting plate (620) and the shaft.

4. The vacuum coating equipment according to claim 2, characterized in that: The first conveying mechanism (500) includes a first guide member, the first base plate (610) is slidably arranged on the first guide member, and the shifting rod assembly is arranged on one side of the first guide member along the extension direction, so that when the workpiece (1) is conveyed to the loading station, the supporting plate (620) is rotated by the shifting rod assembly.

5. The vacuum coating equipment according to claim 1, characterized in that: The accommodating assembly (100) further includes a film feed chamber (110), wherein the film feed chamber (110) is selectively connected to the first coating chamber (120), and the film feed chamber (110) is provided with a first loading mechanism (200), and the workpiece (1) can be moved from the first loading mechanism (200) and fixed to the second loading mechanism (300).

6. The vacuum coating equipment according to claim 5, characterized in that: The first loading mechanism (200) comprises a first main rotating frame (211) and a plurality of first sub-rotating frames (212); the third loading mechanism (400) comprises a second main rotating frame (411) and a plurality of second sub-rotating frames (412); the plurality of first sub-rotating frames (212) are evenly spaced around the central axis of the first main rotating frame (211); the plurality of second sub-rotating frames (412) are evenly spaced around the central axis of the second main rotating frame (411); the first main rotating frame (211), the first sub-rotating frames (212), the second main rotating frame (411) and the second sub-rotating frames (412) are all capable of self-rotation; the self-rotation of the first main rotating frame (211) can drive the first sub-rotating frames (212) to revolve around the central axis of the first main rotating frame (211); the self-rotation of the second main rotating frame (411) can drive the second sub-rotating frames (412) to revolve around the central axis of the second main rotating frame (411).

7. The vacuum coating equipment according to claim 6, characterized in that: The first loading mechanism (200) and the third loading mechanism (400) both include a driving assembly (220), wherein the driving assembly (220) includes a first driving member (221) and a second driving member (222), wherein the first driving member (221) is used to drive the first main rotating frame (211) and / or the second main rotating frame (411) to rotate, and the second driving member (222) is used to drive the first sub-rotating frame (212) and / or the second sub-rotating frame (412) to rotate.

8. The vacuum coating equipment according to claim 7, characterized in that: The driving assembly (220) further includes a first driving shaft (223), a first driven wheel (224), a second driven wheel (225) and a first synchronous member (226); the second driven wheel (225) is connected to the first sub-rotor frame (212) or the second sub-rotor frame (412) in a one-to-one correspondence; the first driven wheel (224) and the second driven wheel (225) are in a one-to-one correspondence and are synchronously connected via the first synchronous member (226); the first driving shaft (223) is located at the center of all the second driven wheels (225); the second driving member (222) drives the first driving shaft (223) to rotate, thereby driving all the first driven wheels (224) and the second driven wheels (225) to rotate.

9. The vacuum coating equipment according to claim 5, characterized in that: A first gate valve (140) is provided between the film feeding chamber (110) and the first coating chamber (120), and a second gate valve (150) is provided between the first coating chamber (120) and the second coating chamber (130).

10. The vacuum coating equipment according to any one of claims 1 to 9, characterized in that: An anti-fouling film coating system (800) and an ion source (900) are provided in the second coating chamber (130) to respectively perform anti-fouling film coating and ion treatment on the workpiece (1).

Images