Heating device and extension machine table

Abstract

The utility model provides a heating device and an epitaxial machine table, and relates to the technical field of semiconductor manufacturing. Comprising a heating pipe, the heating pipe is used for being arranged on a gaseous pipeline in a sleeving mode, the heating pipe comprises an outer protection layer, an inner protection layer and a heating layer, and the heating layer is located between the inner protection layer and the outer protection layer; heating wires which are wound and distributed along a shaft are arranged in the heating layer, and the winding distance of the heating wires, close to the gas inlet end of the gas-state pipeline, of the heating layer is larger than that of the heating wires, close to the gas outlet end of the gas-state pipeline, of the heating layer. The requirement for temperature change in the gas flowing process can be met, the temperature of the gas pipeline is maintained, gaseous molecules are prevented from being condensed, and therefore pipeline damage and impurity introduction are reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a heating device and an epitaxial growth machine. Background Art

[0002] In semiconductor manufacturing, the epitaxial growth (EPI) process has become indispensable due to its ability to provide compressive stress and enhance carrier mobility. Currently, EPI processes mostly utilize vapor phase epitaxy, a process in which gaseous molecules decompose, adsorb, and then grow. After the reaction, both undecomposed and decomposed gas molecules are pumped away. However, liquid precursors can cause irreversible damage to gas pipelines and introduce particle and metal contamination, impacting chip yield and performance. A common solution is to install heating tape in the pipelines to prevent condensation of gas molecules and increase transport speed.

[0003] Existing heating belts require multi-section wrapping heating to achieve long-distance transportation of reaction precursors and vaporization of reaction precursors. However, multi-section wrapping heating belts may have temperature gaps that cause potential temperature condensation points, which may damage the pipeline and introduce impurities. Summary of the Invention

[0004] The present application mainly provides a heating device and an epitaxial machine to solve the technical problems raised in the above background technology, such as the existence of a temperature gap causing a potential temperature condensation point, causing damage to the pipeline, and introducing impurities.

[0005] The technical solutions adopted by this application to solve the above technical problems are:

[0006] A heating device includes a heating tube, which is used to be sleeved on a gas pipeline. The heating tube includes an outer protective layer, an inner protective layer and a heating layer, and the heating layer is located between the inner protective layer and the inner protective layer; heating wires are arranged in the heating layer and are distributed along the axis, and the winding spacing of the heating wires at the air inlet end of the heating layer close to the gas pipeline is greater than the winding spacing of the heating wires at the air outlet end of the heating layer close to the gas pipeline.

[0007] Optionally, the heating device also includes a monitoring unit, a control processing unit and an adjustment unit; the monitoring unit is arranged on the heating wire and is used to monitor the temperature of the heating wire; the adjustment unit is connected to the heating wire and is used to adjust the temperature of the heating wire; the control processing unit is electrically connected to the monitoring unit and the adjustment unit, respectively, and is used to receive the temperature data monitored by the monitoring unit and issue adjustment instructions to the adjustment unit.

[0008] Optionally, the monitoring unit includes an inlet temperature sensor, and the end of the heating wire close to the air inlet of the gas pipeline is a loose end, and the end of the heating wire close to the air outlet of the gas pipeline is a dense end; the inlet temperature sensor is arranged at the loose end of the heating wire, and is used to collect first temperature data of the loose end of the heating wire, and send the first temperature data to the control processing unit; the control processing unit is electrically connected to the inlet temperature sensor, and receives the first temperature data sent by the inlet temperature sensor. The control processing unit is preset with first warning temperature data. When the first temperature data exceeds the first warning temperature data, the control processing unit sends a stop heating instruction to the adjustment unit; the adjustment unit receives the stop heating instruction and stops heating the heating wire.

[0009] Optionally, the monitoring unit also includes an outlet temperature sensor; the outlet temperature sensor is arranged at the dense end of the heating wire, and is used to collect second temperature data of the dense end of the heating wire; the control processing unit is electrically connected to the outlet temperature sensor, and receives the second temperature data sent by the outlet temperature sensor. The control processing unit is also preset with second warning temperature data. When the second temperature data exceeds the second warning temperature data, the control processing unit sends a stop heating instruction to the adjustment unit; the adjustment unit receives the stop heating instruction and stops heating the heating wire.

[0010] Optionally, the heating device further includes a warning unit, which is electrically connected to the control processing unit; the control processing unit further sends the stop heating instruction to the warning unit, and the warning unit issues a warning to indicate temperature abnormality after receiving the stop heating instruction.

[0011] Optionally, the warning unit includes a buzzer and a warning light, and the control processing unit is electrically connected to the buzzer and the warning light respectively; the buzzer is used to receive the stop heating instruction sent by the control processing unit and buzz; the warning light is used to receive the stop heating instruction sent by the control processing unit and flash.

[0012] Optionally, the control processing unit is provided with a touch screen for setting the first target temperature data and the second target temperature data; when the first temperature data and the first target temperature data are the same, and the second temperature data and the second target temperature data are the same, the control processing unit sends a fixed instruction to the adjustment unit, and the adjustment unit executes the fixed instruction to fix the heating mode and heating parameters of the heating wire.

[0013] Optionally, the monitoring unit also includes multiple monitoring temperature sensors, which are arranged on the heating wire and distributed along the axial direction of the heating layer to collect the temperature on different sections of the heating wire; the control processing unit fits the temperature collected by the multiple monitoring temperature sensors into a temperature curve, and sends a calibration instruction to the adjustment unit based on a pre-set temperature difference range and temperature curve; the adjustment unit calibrates the temperature parameters of the heating wire according to the calibration instruction.

[0014] Optionally, the regulating unit is provided with an overload protection device, and when the heating wire is overloaded, the overload protection device is powered off.

[0015] Optionally, the heating device further includes a storage unit, which is electrically connected to the control processing unit and is used to store historical temperature data and overload power-off data of the heating wire.

[0016] Also provided is an epitaxial machine, comprising a wafer reaction chamber, a gas delivery pipeline, and the aforementioned heating device, wherein the heating device is sleeved on the gas delivery pipeline.

[0017] The present application provides a heating device and an epitaxial growth machine. The device comprises a heating tube sleeve mounted on a gas pipeline of the machine. The heating tube comprises an outer protective layer, an inner protective layer, and a heating layer. The heating layer is located between the inner and outer protective layers and includes a built-in heating wire that is wound and distributed along the axial direction. The winding spacing of the heating wire is greater near the gas inlet end of the gas pipeline than at the gas outlet end. This design helps provide different heating intensities at different locations in the pipeline to adapt to temperature changes during gas flow, maintain the temperature of the gas pipeline, prevent condensation of gas molecules, and thus reduce pipeline damage and the introduction of impurities. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 This is a schematic diagram of the structure of the heating device of this application;

[0020] Figure 2 This is a schematic diagram of the heating device flow chart for this application.

[0021] Icons: 100-outer protective layer; 200-heating layer; 210-heating wire; 211-loose end; 212-dense end; 300-inner protective layer; 400-monitoring unit; 410-inlet temperature sensor; 420-outlet temperature sensor; 430-monitoring temperature sensor; 500-control processing unit; 600-adjustment unit; 700-warning unit; 710-buzzer; 720-warning light.

[0022] The realization of the objectives, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0023] To make the purpose, technical solutions, and advantages of this application more clear, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0024] It should be noted that all directional indications in the embodiments of this application (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0025] In this application, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; it can mean mechanical connection or electrical connection; it can mean direct connection or indirect connection through an intermediate medium; it can mean internal communication between two elements or interaction between two elements, unless otherwise specified. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0026] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present application, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the meaning of "and / or" appearing throughout the text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement it. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0027] Existing heating belts require multiple sections of wrapping heating to achieve long-distance transport and vaporization of reaction precursors. However, these wrapping sections can create temperature gaps, creating potential freezing points, which can damage the pipeline and introduce impurities. To address these issues, embodiments of the present invention provide the following technical solutions to overcome them.

[0028] Please refer to Figure 1 and Figure 2 , an embodiment of the present application provides a heating device, including a heating tube, which is used to be sleeved on a gas pipeline, and the heating tube includes an outer protective layer 100, an inner protective layer 300 and a heating layer 200, and the heating layer 200 is located between the inner protective layer 300 and the inner protective layer 300; a heating wire 210 is arranged in the heating layer 200 and is distributed along the axis, and the winding spacing of the heating wire 210 of the heating layer 200 close to the air inlet end of the gas pipeline is greater than the winding spacing of the heating wire 210 of the heating layer 200 close to the air outlet end of the gas pipeline.

[0029] Specifically, the heating tube is sheathed over the gas pipeline of the machine. The inner protective layer 300 and the outer protective layer 100 protect the heating layer 200 from damage. The heating filaments 210 inside the heating layer 200 are wound axially, with the winding spacing larger near the gas inlet end than the gas outlet end. This design allows the heating filaments 210 to provide lower heating intensity at the gas inlet end of the pipeline and higher heating intensity at the gas outlet end. This temperature gradient helps vaporize the precursor and prevents condensation in the pipeline.

[0030] The present application provides a heating device, which is constructed by placing a heating tube over a machine gas pipeline. The heating tube is composed of an outer protective layer 100, an inner protective layer 300, and a heating layer 200. The heating layer 200 is located between the inner and outer protective layers 100 and has a built-in heating wire 210 that is wound and distributed along the axial direction. The winding spacing of the heating wire 210 is larger at the gas inlet end near the gas pipeline than at the gas outlet end. This design helps to provide different heating intensities at different locations in the pipeline to adapt to the temperature changes during gas flow, maintain the temperature of the gas pipeline, prevent condensation of gas molecules, and thus reduce pipeline damage and the introduction of impurities.

[0031] In an embodiment of the present application, the heating device also includes a monitoring unit 400, a control processing unit 500 and an adjustment unit 600; the monitoring unit 400 is arranged on the heating wire 210, for monitoring the temperature of the heating wire 210; the adjustment unit 600 is connected to the heating wire 210, for adjusting the temperature of the heating wire 210; the control processing unit 500 is electrically connected to the monitoring unit 400 and the adjustment unit 600, respectively, for receiving the temperature data monitored by the monitoring unit 400 and issuing adjustment instructions to the adjustment unit 600.

[0032] Specifically, the monitoring unit 400 is directly provided on the heating wire 210 for monitoring the temperature of the heating wire 210 in real time. These monitoring units 400 can be sensors, such as thermocouples or thermistors, which can accurately measure and feedback the temperature information of the heating wire 210. The control processing unit 500 is responsible for receiving the temperature data transmitted by the monitoring unit 400. Based on this data, the control processing unit 500 performs data analysis and decision-making to determine whether it is necessary to adjust the temperature of the heating wire 210. The adjustment unit 600 adjusts the temperature of the heating wire 210 according to the instructions of the control processing unit 500, which involves changing the current or voltage of the heating wire 210, thereby adjusting its heat generation to maintain or reach the set temperature.

[0033] Using this setup, through real-time monitoring and adjustment, the system ensures that the temperature of the heating filament 210 remains within a set range, thereby providing a stable heating environment for the gas pipeline. Maintaining a constant temperature effectively prevents condensation of gaseous molecules in the pipeline, thus avoiding damage to the pipeline caused by liquid reaction precursors. Precise temperature control reduces the introduction of impurities due to temperature fluctuations, thereby improving the cleanliness of the semiconductor manufacturing process. Furthermore, a stable heating environment helps improve the yield of semiconductor chips and reduces chip defects caused by improper temperature control.

[0034] In an embodiment of the present application, the monitoring unit 400 includes an inlet temperature sensor 410, and the end of the heating wire 210 close to the air inlet of the gas pipeline is a loose end 211, and the end of the heating wire 210 close to the air outlet of the gas pipeline is a dense end 212; the inlet temperature sensor 410 is arranged at the loose end 211 of the heating wire 210, and is used to collect the first temperature data of the loose end 211 of the heating wire 210, and send the first temperature data to the control processing unit 500; the control processing unit 500 is electrically connected to the inlet temperature sensor 410, and receives the first temperature data sent by the inlet temperature sensor 410. The control processing unit 500 is preset with first warning temperature data. When the first temperature data exceeds the first warning temperature data, the control processing unit 500 sends a stop heating instruction to the adjustment unit 600; the adjustment unit 600 receives the stop heating instruction and stops heating the heating wire 210.

[0035] The monitoring unit 400 also includes an outlet temperature sensor 420; the outlet temperature sensor 420 is arranged at the dense end 212 of the heating wire 210, and is used to collect second temperature data of the dense end 212 of the heating wire 210; the control processing unit 500 is electrically connected to the outlet temperature sensor 420, and receives the second temperature data sent by the outlet temperature sensor 420. The control processing unit 500 is also preset with second warning temperature data. When the second temperature data exceeds the second warning temperature data, the control processing unit 500 sends a stop heating instruction to the adjustment unit 600; the adjustment unit 600 receives the stop heating instruction and stops heating the heating wire 210.

[0036] Specifically, the inlet temperature sensor 410 is arranged at the loose end 211 of the heating wire 210, and collects and sends the first temperature data of the loose end 211 of the heating wire 210 to the control processing unit 500 in real time; the control processing unit 500 is responsible for receiving the first temperature data sent by the inlet temperature sensor 410, and has a first warning temperature data preset internally. When the monitored first temperature data exceeds this warning value, the control processing unit 500 will send an instruction to the adjustment unit 600 to stop heating; the adjustment unit 600 is connected to the heating wire 210, and adjusts (increases or stops) the heating of the heating wire 210 according to the instruction of the control processing unit 500 to maintain or restore it to a safe or ideal temperature range.

[0037] The outlet temperature sensor 420 is arranged at the dense end 212 of the heating wire 210, and collects and sends the second temperature data of the dense end 212 of the heating wire 210 to the control processing unit 500 in real time; the control processing unit 500 is responsible for receiving the second temperature data sent by the outlet temperature sensor 420, and has a second warning temperature data preset internally. When the monitored second temperature data exceeds this warning value, the control processing unit 500 will send an instruction to the adjustment unit 600 to stop heating; the adjustment unit 600 is connected to the heating wire 210, and adjusts (increases or stops) the heating of the heating wire 210 according to the instruction of the control processing unit 500 to maintain or restore it to a safe or ideal temperature range.

[0038] By adopting the above-mentioned setting, overheating can be effectively prevented by real-time monitoring and control of the temperature of the heating wire 210, thereby avoiding possible damage to the gas pipeline or its surrounding components; by maintaining the temperature in the gas pipeline, the condensation of the liquid reaction precursor in the pipeline is reduced or avoided, thereby reducing particle and metal contamination, improving the yield of the semiconductor manufacturing process and chip performance, and the temperature control mechanism helps to improve the safety of the entire semiconductor manufacturing process and prevent potential safety risks caused by temperature runaway; further, precise temperature control helps to optimize EPI process conditions, improve carrier mobility, and thus improve the performance of semiconductor devices; by preventing overheating and improper heating, it helps to extend the service life of the heating wire 210 and its related components.

[0039] In an embodiment of the present application, the heating device further includes a warning unit 700, which is electrically connected to the control processing unit 500. The control processing unit 500 also sends the stop heating instruction to the warning unit 700, and upon receiving the stop heating instruction, the warning unit 700 issues a warning to indicate a temperature abnormality. The warning unit 700 includes a buzzer 710 and a warning light 720, and the control processing unit 500 is electrically connected to the buzzer 710 and the warning light 720, respectively. The buzzer 710 is configured to receive the stop heating instruction sent by the control processing unit 500 and emit a buzzing sound; the warning light 720 is configured to receive the stop heating instruction sent by the control processing unit 500 and emit a flashing sound.

[0040] Specifically, the monitoring unit 400 includes an inlet temperature sensor 410 disposed on the heating wire 210 for real-time monitoring of the temperature of the heating wire 210; the control processing unit 500 is electrically connected to the monitoring unit 400, receives temperature data sent by the monitoring unit 400, and compares it with preset warning temperature data; the warning unit 700 is electrically connected to the control processing unit 500, and is configured to issue a warning signal when a temperature anomaly is detected. The warning unit 700 includes a buzzer 710 and a warning light 720, each electrically connected to the control processing unit 500. When the control processing unit 500 detects that the temperature of the heating wire 210 exceeds the preset warning temperature, it sends a stop heating instruction to the warning unit 700 and triggers the warning unit 700 to issue a warning signal. Upon receiving the stop heating instruction, the buzzer 710 emits an audible signal, and the warning light 720 flashes a visual signal to alert the operator to the temperature anomaly.

[0041] With the above-mentioned setting, when the temperature of the heating wire 210 exceeds the safety threshold, the warning unit 700 can immediately issue a warning, provide instant feedback, and remind the operator through sound and visual signals, so as to prevent the operator from continuing to operate without knowing it, thereby avoiding possible safety accidents. In addition, the timely warning can prompt the operator to take measures, such as stopping heating or adjusting the temperature setting, to prevent the equipment from overheating and damage.

[0042] In an embodiment of the present application, the control processing unit 500 is provided with a touch screen (not shown in the figure) for setting the first target temperature and the second target temperature; when the first temperature is the same as the first target temperature, and the second temperature is the same as the second target temperature, the control processing unit 500 sends a fixed instruction to the adjustment unit 600, and the adjustment unit 600 executes the fixed instruction to fix the heating mode and heating parameters of the heating wire 210.

[0043] Specifically, the control processing unit 500 is provided with a touch screen, and the operator can intuitively set the first target temperature data and the second target temperature data through the touch screen. These first target temperature data and the second target temperature data are specific temperature values ​​that the heating wire 210 is expected to reach. The monitoring unit 400 monitors the temperature of the heating wire 210 in real time and sends the data to the control processing unit 500. When the monitored first temperature data reaches the preset first target temperature data and the second temperature data reaches the second target temperature data, the control processing unit 500 sends a fixed instruction to the adjustment unit 600. After receiving the fixed instruction from the control processing unit 500, the adjustment unit 600 will execute the instruction to fix the heating method and heating parameters of the heating wire 210 to ensure that the heating wire 210 is maintained at the set target temperature.

[0044] With the above setting form, the operator can accurately set the target temperature through the touch screen, which improves the accuracy and flexibility of temperature control. Through automated temperature monitoring and adjustment, manual intervention is reduced, and the convenience and efficiency of operation are improved.

[0045] In an embodiment of the present application, the monitoring unit 400 also includes a plurality of monitoring temperature sensors 430, which are arranged on the heating wire 210 and distributed along the axial direction of the heating layer 200 to collect temperature data on different sections of the heating wire 210; the control processing unit 500 fits the temperature data collected by the plurality of monitoring temperature sensors 430 into a temperature curve, and issues a calibration instruction to the adjustment unit 600 according to a pre-set temperature difference range and the temperature curve; the adjustment unit 600 calibrates the temperature parameters of the heating wire 210 according to the calibration instruction.

[0046] Specifically, multiple monitoring temperature sensors 430 are distributed along the axial direction of the heating layer 200, and can continuously monitor the temperature of each section on the heating wire 210, so as to obtain the temperature distribution of the entire heating wire 210. Each monitoring temperature sensor 430 independently collects temperature data at its location and transmits this data to the control processing unit 500. The control processing unit 500 receives the temperature data from each monitoring temperature sensor 430, and fits the temperature curve of the entire heating wire 210 based on this temperature data. The control processing unit 500 analyzes the temperature uniformity of the entire heating wire 210 based on the preset temperature difference range and the fitted temperature curve. If there is a deviation between the actual temperature curve and the preset temperature curve, the control processing unit 500 will generate a calibration instruction to adjust the temperature parameters of the heating wire 210. The adjustment unit 600 receives the calibration instruction issued by the control processing unit 500, and adjusts the heating method and heating parameters of the heating wire 210 to achieve more precise temperature control.

[0047] By adopting the above-mentioned setting, multi-point monitoring and adjustment can be used to ensure that the temperature of each part of the heating wire 210 is more uniform, avoiding local overheating or overcooling. Precise temperature control can improve heating efficiency and reduce energy waste. For temperature-sensitive processes such as semiconductor manufacturing, uniform temperature control helps to improve product quality and yield.

[0048] In an embodiment of the present application, an overload protection device (not shown in the figure) is provided on the regulating unit 600. When the heating wire 210 is overloaded, the overload protection device is powered off.

[0049] Specifically, the regulating unit 600 is provided with an overload protection device, which is used to monitor the load of the heating wire 210. When the current or power of the heating wire 210 exceeds a safety threshold, it is considered to be overloaded. Once an overload condition is detected, the control processing unit 500 will send a power-off command to the overload protection device. Upon receiving the power-off command, the overload protection device immediately cuts off the power supply, causing the heating wire 210 to stop heating. The power-off operation also triggers the warning unit 700 to issue a warning signal to notify the operator of the overload condition. By promptly cutting off the power in the event of an overload, the heating wire 210 and related electrical components can be prevented from being damaged by overheating. The overload protection device helps prevent fires or electrical short circuits caused by overload, thereby improving the safety of the entire system.

[0050] In an embodiment of the present application, the heating device further includes a storage unit (not shown in the figure), which is electrically connected to the control processing unit 500 and is used to store historical temperature data and overload power-off data of the heating wire 210.

[0051] Specifically, the storage unit is electrically connected to the control processing unit 500 and is used to store temperature data transmitted from the monitoring unit 400. This data includes historical temperature records of the heating wire 210 under different operating conditions. When the heating wire 210 is overloaded, the control processing unit 500 will send a power-off command to the adjustment unit 600 and simultaneously store this event and its related data in the storage unit. The storage unit organizes the data by chronological order or event type to facilitate subsequent retrieval and analysis. Historical temperature data and overload power-off data help technicians diagnose faults and analyze the causes of heating wire 210 overloads, thereby taking preventive measures. By analyzing the changing trends of temperature data, it is possible to predict the maintenance needs of the heating wire 210, implement predictive maintenance, and reduce unplanned downtime.

[0052] In an embodiment of the present application, an epitaxial growth machine is further provided, comprising a wafer reaction chamber, a gas delivery pipeline, and the aforementioned heating device, wherein the heating device is sleeved on the gas delivery pipeline.

[0053] Specifically, an epitaxial machine is a device used in semiconductor manufacturing, which includes a wafer reaction chamber, a gas delivery pipeline, and a heating device. The heating device is installed on the gas delivery pipeline to ensure that the gas maintains an appropriate temperature during the delivery process to avoid condensation and ensure the optimal reaction activity of the gas.

[0054] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A heating device, characterized in that: The heating pipe is used to be sleeved on the gas pipeline, and the heating pipe includes an outer protective layer, an inner protective layer and a heating layer, and the heating layer is located between the inner protective layer and the inner protective layer; The heating layer is provided with heating wires distributed along the axis, and the winding spacing of the heating wires at the air inlet end of the heating layer close to the gas pipeline is greater than the winding spacing of the heating wires at the air outlet end of the heating layer close to the gas pipeline.

2. The heating device according to claim 1, characterized in that The heating device also includes a monitoring unit, a control processing unit and a regulating unit; The monitoring unit is provided on the heating wire and is used to monitor the temperature of the heating wire; The regulating unit is connected to the heating wire and is used to regulate the temperature of the heating wire; The control processing unit is electrically connected to the monitoring unit and the regulating unit respectively, and is used to receive the temperature data monitored by the monitoring unit and send a regulating instruction to the regulating unit.

3. The heating device according to claim 2, characterized in that The monitoring unit includes an inlet temperature sensor, the end of the heating wire close to the gas inlet of the gas pipeline is a loose end, and the end of the heating wire close to the gas outlet of the gas pipeline is a dense end; The inlet temperature sensor is arranged at the loose end of the heating wire, and is used to collect first temperature data of the loose end of the heating wire and send the first temperature data to the control processing unit; The control processing unit is electrically connected to the inlet temperature sensor and receives first temperature data sent by the inlet temperature sensor. The control processing unit is preset with first warning temperature data. When the first temperature data exceeds the first warning temperature data, the control processing unit sends a heating stop instruction to the regulating unit. The regulating unit receives the heating stop instruction and stops the heating wire from heating.

4. The heating device according to claim 3, characterized in that The monitoring unit also includes an outlet temperature sensor; The outlet temperature sensor is arranged at the dense end of the heating wire, and is used to collect the second temperature data of the dense end of the heating wire; The control processing unit is electrically connected to the outlet temperature sensor and receives second temperature data sent by the outlet temperature sensor. The control processing unit is also preset with second warning temperature data. When the second temperature data exceeds the second warning temperature data, the control processing unit sends a stop heating instruction to the regulating unit. The regulating unit receives the heating stop instruction and stops the heating wire from heating.

5. The heating device according to claim 4, characterized in that The heating device further includes a warning unit, wherein the warning unit is electrically connected to the control processing unit; The control processing unit further sends the heating stop instruction to the warning unit, and the warning unit issues a warning to indicate temperature abnormality after receiving the heating stop instruction.

6. The heating device according to claim 5, characterized in that The warning unit includes a buzzer and a warning light, and the control processing unit is electrically connected to the buzzer and the warning light respectively; The buzzer is used to receive the stop heating instruction sent by the control processing unit and make a buzzer sound; The warning light is used to receive the stop heating instruction sent by the control processing unit and flash.

7. The heating device according to claim 4, characterized in that The control processing unit is provided with a touch screen for setting the first target temperature data and the second target temperature data; When the first temperature data is the same as the first target temperature data, and the second temperature data is the same as the second target temperature data, the control processing unit sends a fixed instruction to the adjustment unit, and the adjustment unit executes the fixed instruction to fix the heating mode and heating parameters of the heating wire.

8. The heating device according to claim 7, characterized in that The monitoring unit further includes a plurality of monitoring temperature sensors, which are arranged on the heating wire and distributed along the axial direction of the heating layer to collect temperature data on different sections of the heating wire; The control processing unit fits the temperature data collected by the plurality of monitoring temperature sensors into a temperature curve, and issues a calibration instruction to the adjustment unit according to a preset temperature difference range and the temperature curve; The adjustment unit calibrates the temperature parameter of the heating wire according to the calibration instruction.

9. The heating device according to any one of claims 2 to 8, characterized in that: The regulating unit is provided with an overload protection device, and when the heating wire is overloaded, the overload protection device is powered off.

10. The heating device according to claim 9, characterized in that The heating device further includes a storage unit, which is electrically connected to the control processing unit and is used to store historical temperature data and overload power-off data of the heating wire.

11. An epitaxial growth machine, characterized in that: It comprises a wafer reaction chamber, a gas delivery pipeline, and a heating device as described in any one of claims 1 to 10, wherein the heating device is sleeved on the gas delivery pipeline.

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