Air inlet control structure of boron diffusion furnace tube of solar cell

Abstract

The utility model relates to a solar cell boron diffusion furnace tube air inlet control structure which comprises a first air inlet pipe, a second air inlet pipe and a third air inlet pipe, the exhaust end of the first air inlet pipe extends into the tail portion of a diffusion furnace tube, the exhaust end of the second air inlet pipe extends into the middle of the diffusion furnace tube, and the exhaust end of the third air inlet pipe extends into the front portion of the diffusion furnace tube. The first air inlet pipe, the second air inlet pipe and the third air inlet pipe are communicated with an air source through a first air conveying pipe, a second air conveying pipe and a third air conveying pipe respectively, a first flow meter and a first air valve are installed on the first air conveying pipe, a second flow meter and a second air valve are installed on the second air conveying pipe, and a third flow meter and a third air valve are installed on the third air conveying pipe. According to the utility model, the flow ranges of the furnace mouth, the furnace middle and the furnace tail can be respectively controlled, so that gas is uniformly distributed in the diffusion furnace, the diffusion quality is improved, and the doping uniformity is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of solar cells and relates to an air intake control structure of a boron diffusion furnace tube of a solar cell. Background Art

[0002] The process route for TOPCon solar cells is: cleaning and texturing - boron diffusion - edge etching - dephosphorized silicon glass - PECVD - printed electrodes - sintering - sorting and testing. Diffusion is a core process, and whether the diffusion is uniform or not will directly affect the efficiency of the cell. The main diffusion equipment currently used in the industry is the tubular furnace. The production capacity can be increased and costs can be saved by increasing the length of the tubular furnace and adding air inlet pipes. The air inlet of the tubular furnace is divided into three parts: the furnace mouth, the middle of the furnace, and the furnace tail. The existing tubular equipment air inlet pipe is connected to a tee through a flow meter (the main function of the tee is to change the direction of the fluid) to achieve flow control at the furnace mouth, the middle of the furnace, and the furnace tail. The fluid is unevenly distributed when passing through the tee, which will lead to extremely poor diffusion uniformity of the cells located at the furnace mouth, the middle of the furnace, and the furnace tail, seriously affecting the conversion efficiency of the cells. Summary of the Invention

[0003] The purpose of the utility model is to provide a solar cell boron diffusion furnace tube air intake control structure, which can solve the above-mentioned problems and make the gas evenly distributed in the diffusion furnace.

[0004] According to the technical solution provided by the utility model: a solar cell boron diffusion furnace tube air intake control structure includes a first air intake pipe, a second air intake pipe, and a third air intake pipe. The exhaust end of the first air intake pipe extends into the tail of the diffusion furnace tube, the exhaust end of the second air intake pipe extends into the middle of the diffusion furnace tube, and the exhaust end of the third air intake pipe extends into the front of the diffusion furnace tube. The first air intake pipe, the second air intake pipe, and the third air intake pipe are connected to the gas source through the first air supply pipe, the second air supply pipe, and the third air supply pipe respectively. A first flow meter and a first gas valve are installed on the first air supply pipe, a second flow meter and a second gas valve are installed on the second air supply pipe, and a third flow meter and a third gas valve are installed on the third air supply pipe.

[0005] As a further improvement of the present invention, the air inlet ends of the first air inlet pipe, the second air inlet pipe and the third air inlet pipe are connected to the ends of the first air supply pipe, the second air supply pipe and the third air supply pipe and the first ends of the first air supply pipe, the second air supply pipe and the third air supply pipe to input gas.

[0006] As a further improvement of the present invention, the first air inlet pipe extends into the diffusion furnace tube by one third to one quarter.

[0007] As a further improvement of the present invention, the second air inlet pipe extends into the diffusion furnace tube by two-fifths to three-fifths.

[0008] As a further improvement of the present invention, the third air inlet pipe extends into the diffusion furnace tube from five-sixths to seven-eighths.

[0009] As a further improvement of the present invention, the first flow meter is located at the front end of the first gas valve, the second flow meter is located at the front end of the second gas valve, and the third flow meter is located at the front end of the third gas valve.

[0010] As a further improvement of the present invention, the first gas pipe, the second gas pipe and the third gas pipe adopt a bent structure.

[0011] As a further improvement of the present invention, the diffusion furnace tube is a cylindrical structure.

[0012] As a further improvement of the present invention, outer ends of the first air intake pipe, the second air intake pipe, and the third air intake pipe are flush.

[0013] The positive progress of this application is:

[0014] The utility model can respectively control the flow ranges at the furnace mouth, the furnace middle and the furnace tail, so that the gas is evenly distributed in the diffusion furnace, the diffusion quality is improved and the doping uniformity is increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural diagram of the present utility model.

[0016] Figure 1 It includes a first air inlet pipe 1, a second air inlet pipe 2, a third air inlet pipe 3, a diffusion furnace pipe 4, a first air supply pipe 5, a second air supply pipe 6, a third air supply pipe 7, a first flow meter 8, a first gas valve 9, a second flow meter, and a second gas valve 11, a third flow meter 12, a third gas valve 13, etc. DETAILED DESCRIPTION

[0017] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0018] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0019] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate for the embodiments of the present invention described herein. In addition, similar terms such as "including" and "having" mean that in addition to those contents already listed in "including" and "having", other contents that have not been listed may also be "included" and "having"; for example, a process, method, system, product or device that may include a series of steps or units is not necessarily limited to those steps or units that have been clearly listed, but may include other steps or units that are not clearly listed or are inherent to these processes, methods, products or devices.

[0020] Due to the angle of the drawing, some components may not be drawn, but their positions and connection relationships can be partially understood based on the text.

[0021] like Figure 1 As shown, the utility model is an air intake control structure for a solar cell boron diffusion furnace tube, comprising a first air intake pipe 1, a second air intake pipe 2, and a third air intake pipe 3. The exhaust end of the first air intake pipe 1 extends into the tail of the diffusion furnace tube 4, the exhaust end of the second air intake pipe 2 extends into the middle of the diffusion furnace tube 4, and the exhaust end of the third air intake pipe 3 extends into the front of the diffusion furnace tube 4. The first air intake pipe 1, the second air intake pipe 2, and the third air intake pipe 3 are connected to the gas source through a first air supply pipe 5, a second air supply pipe 6, and a third air supply pipe 7 respectively. A first flow meter 8 and a first gas valve 9 are installed on the first air supply pipe 5, a second flow meter 10 and a second gas valve 11 are installed on the second air supply pipe 6, and a third flow meter 12 and a third gas valve 13 are installed on the third air supply pipe 7.

[0022] The air inlet ends of the first air inlet pipe 1, the second air inlet pipe 2, and the third air inlet pipe 3 are connected to the ends of the first air supply pipe 5, the second air supply pipe 6, and the third air supply pipe 7, and the heads of the first air supply pipe 5, the second air supply pipe 6, and the third air supply pipe 7 to input gas.

[0023] The first air inlet pipe 1 extends into the diffusion furnace tube 4 by one third to one quarter.

[0024] The second air inlet pipe 2 extends into the diffusion furnace tube 4 from two-fifths to three-fifths.

[0025] The third air inlet pipe 3 extends into the diffusion furnace tube 4 from five-sixths to seven-eighths.

[0026] The first flow meter is located at the front end of the first air valve 9, the second flow meter 10 is located at the front end of the second air valve 11, and the third flow meter 12 is located at the front end of the third air valve 13, which can accurately measure the value of the intake air.

[0027] The first gas pipe 5 , the second gas pipe 6 , and the third gas pipe 7 adopt a bent structure, which can save layout space.

[0028] The diffusion furnace tube 4 is a cylindrical structure, which is easy to manufacture.

[0029] The outer ends of the first air inlet pipe 1, the second air inlet pipe 2, and the third air inlet pipe 3 are flush, which is convenient for connecting with the air delivery pipe.

[0030] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A solar cell boron diffusion furnace tube air intake control structure, characterized in that: The invention comprises a first air inlet pipe (1), a second air inlet pipe (2), and a third air inlet pipe (3); the exhaust end of the first air inlet pipe (1) extends into the rear end of the diffusion furnace pipe (4), the exhaust end of the second air inlet pipe (2) extends into the middle part of the diffusion furnace pipe (4), and the exhaust end of the third air inlet pipe (3) extends into the front part of the diffusion furnace pipe (4); the first air inlet pipe (1), the second air inlet pipe (2), and the third air inlet pipe (3) are connected to the gas source through the first air supply pipe (5), the second air supply pipe (6), and the third air supply pipe (7), respectively; a first flow meter (8) and a first air valve (9) are installed on the first air supply pipe (5); a second flow meter (10) and a second air valve (11) are installed on the second air supply pipe (6); and a third flow meter (12) and a third air valve (13) are installed on the third air supply pipe (7).

2. The solar cell boron diffusion furnace tube air intake control structure according to claim 1, characterized in that: The air inlet ends of the first air inlet pipe (1), the second air inlet pipe (2), and the third air inlet pipe (3) are connected to the ends of the first air delivery pipe (5), the second air delivery pipe (6), and the third air delivery pipe (7), and the head ends of the first air delivery pipe (5), the second air delivery pipe (6), and the third air delivery pipe (7) to input gas.

3. The solar cell boron diffusion furnace tube air intake control structure according to claim 1, characterized in that: The first air inlet pipe (1) extends into the diffusion furnace tube (4) by one third to one quarter.

4. The solar cell boron diffusion furnace tube air intake control structure according to claim 1, characterized in that: The second air inlet pipe (2) extends into the diffusion furnace tube (4) by two-fifths to three-fifths.

5. The solar cell boron diffusion furnace tube air intake control structure according to claim 1, characterized in that: The third air inlet pipe (3) extends into the diffusion furnace tube (4) from five-sixths to seven-eighths.

6. The solar cell boron diffusion furnace tube air intake control structure according to claim 1, characterized in that: The first flow meter is located at the front end of the first air valve (9), the second flow meter (10) is located at the front end of the second air valve (11), and the third flow meter (12) is located at the front end of the third air valve (13).

7. The solar cell boron diffusion furnace tube air intake control structure according to claim 1, characterized in that: The first gas transmission pipe (5), the second gas transmission pipe (6), and the third gas transmission pipe (7) adopt a bent structure.

8. The solar cell boron diffusion furnace tube air intake control structure according to claim 1, wherein: The diffusion furnace tube (4) is a cylindrical structure.

9. The solar cell boron diffusion furnace tube air intake control structure according to claim 1, characterized in that: The outer ends of the first air intake pipe (1), the second air intake pipe (2), and the third air intake pipe (3) are flush.

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