Auxiliary measuring device for crystal bar

Abstract

The utility model discloses an auxiliary measuring device for a crystal bar. The auxiliary measuring device comprises a sliding rail, a left sliding mechanism and a right sliding mechanism, an extension frame is mounted on the sliding mechanism, and a clamping end is arranged at the top of the extension frame; the left sliding mechanism and the right sliding mechanism can move in opposite directions at the same time so as to drive the clamping ends to clamp or loosen the crystal bar to be tested; the clamping end can rotate along the axis so as to drive the clamped crystal bar to be tested to turn over; and the height of the extension frame is not less than 1 / 2 of the length of the crystal bar to be measured, so that the crystal bar does not interfere with the slide rail when being turned over. According to the auxiliary measuring device with the structure, the distance between the clamping end and the sliding rail is prolonged by using the extension frame, so that the distance is enough for the crystal bar to rotate along the short axis of the crystal bar and does not interfere with the sliding rail.

Description

Technical Field

[0001] The utility model belongs to the technical field of crystal rod production, and in particular relates to a crystal rod auxiliary measuring device. Background Art

[0002] Crystal ingots are the fundamental material for semiconductor production. After growing, crystals need to be cut into ingots of a certain length for easy transportation and use. Before processing the ingot, the dimensions of each surface must be measured.

[0003] During the dimensional measurement process, it is necessary to measure each side of the crystal ingot. However, a single crystal ingot generally weighs around 300 kilograms, making it difficult to manually turn it over and measure it.

[0004] Prior art Chinese patent application CN202111490952.2 A crystal rod flipping device and a crystal rod flipping method, the crystal rod flipping device includes: a base, a bearing component is provided on the base, the bearing component moves relative to the base in a direction perpendicular to the bottom surface of the base, and performs loading and unloading steps on the crystal rod; a clamping component located on the base, including a fixed end and a movable end; a rotating component arranged on the clamping component; a detection component, including: a detection module, the detection module is used to detect whether the position of the surface to be unloaded of the crystal rod meets the preset position; a first control unit, the first control unit is communicatively connected to the rotating component, if the position of the surface to be unloaded does not meet the preset position, the detection module sends a first feedback signal to the first control unit, and the first control unit controls the crystal rod to flip based on the first feedback signal until the position of the surface to be unloaded meets the preset position.

[0005] The flipping device disclosed in the above-mentioned prior art can only flip the crystal ingot along its long axis, but cannot flip it along its short axis, and is therefore not suitable for measuring the crystal ingot. Utility Model Content

[0006] In view of this, the utility model provides a crystal ingot auxiliary measurement device, which can clamp the side of the crystal ingot and drive the crystal ingot to flip along its own short axis to facilitate measurement.

[0007] In order to solve the above technical problems, the technical solution of the present invention is to adopt a crystal rod auxiliary measurement device, including a slide rail and two left and right sliding mechanisms that can move along the slide rail; an extension frame is installed on the sliding mechanism, and a clamping end is provided on the top of the extension frame; the left and right sliding mechanisms can move in opposite directions at the same time, thereby driving the clamping end to clamp or loosen the crystal rod to be measured; the clamping end can rotate along the axis, thereby driving the clamped crystal rod to be measured to flip; the height of the extension frame is not less than 1 / 2 of the length of the crystal rod to be measured, so that when the crystal rod flips, it does not interfere with the slide rail.

[0008] As an improvement, it further includes a lead screw arranged parallel to the slide rail, and the two sliding mechanisms are engaged with the lead screw through threads;

[0009] The thread directions of the two sliding mechanisms are opposite, or the lead screw includes two sections respectively engaged with the threads of the two sliding mechanisms, and the thread directions of the two sections of the lead screw are opposite.

[0010] As a further improvement, the slide rails are two parallel left and right slide rails; the sliding mechanism includes a base and four sliders fixed to the bottom of the base, and the four sliders are symmetrically installed on the two slide rails.

[0011] As another further improvement, a threaded block is provided at the bottom of the base between the sliding blocks, and the internal threaded hole of the sliding mechanism is opened on the threaded block.

[0012] As an improvement, the lead screw is shielded by a retractable accordion cover.

[0013] As an improvement, the extension frame is composed of a vertical plate and side plates arranged on both sides of the vertical plate; the two side plates are arranged opposite to each other and at 90° to the vertical plate; a reinforcing beam is arranged between the vertical plate and the side plates; and a trapezoidal stabilizing plate is connected to the bottom of the extension frame.

[0014] As an improvement, weight-reducing holes are provided on the vertical plate.

[0015] As an improvement, the clamping end includes a base, and the base is disc-shaped; a rotating shaft is connected to the rear end of the base, and the rotating shaft is connected to the extension frame by a bearing.

[0016] As an improvement, one of the two clamping ends is an active rotating clamping end, and the other is a passive rotating clamping end; the active rotating clamping end is driven by a motor to rotate a rotating shaft.

[0017] As an improvement, a liquid receiving tray is provided above the slide rail between the left and right clamping ends.

[0018] The utility model is beneficial in that:

[0019] The auxiliary measurement device with the above structure uses an extension frame to extend the distance between the clamping end and the slide rail, so that the distance is sufficient to allow the crystal ingot to rotate along its short axis without interfering with the slide rail. When measuring a crystal ingot, the short axis of the crystal ingot is generally clamped at both ends. Therefore, when the crystal ingot is flipped, it can be regarded as drawing a circle with a radius of 1 / 2 of the long axis of the crystal ingot. Therefore, other components cannot be placed in its rotation path. In the utility model, the length of the extension frame is at least 1 / 2 of the length of the crystal ingot to be measured, so that the distance between the clamping end and the slide rail meets the requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1It is a structural diagram of the present utility model.

[0021] Figure 2 This is a structural diagram of the extension frame.

[0022] Figure 3 Schematic diagram of the structure of the clamping end.

[0023] Markings in the figure:

[0024] 1 extension frame, 2 clamping end, 3 liquid receiving tray, 5 lead screw, 6 slide rail.

[0025] 11 vertical plate, 12 side plate, 13 reinforcing beam, 14 stabilizing plate, 21 base, 22 rubber cushion, 41 bottom platform, 42 slider, 43 threaded block, and crystal ingot 100 to be measured. DETAILED DESCRIPTION

[0026] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with specific implementation methods.

[0027] like Figure 1 As shown, the utility model provides a crystal ingot auxiliary measurement device, including a slide rail 6 and two left and right sliding mechanisms that can move along the slide rail; an extension frame 1 is installed on the sliding mechanism, and a clamping end 2 is provided on the top of the extension frame 1; the left and right sliding mechanisms can move in opposite directions at the same time, thereby driving the clamping end 2 to clamp or loosen the crystal ingot 100 to be measured; the clamping end 2 can rotate along the axis, thereby driving the clamped crystal ingot 100 to be measured to flip; the height of the extension frame 1 is not less than 1 / 2 of the length of the crystal ingot 100 to be measured, so that when the crystal ingot flips, it does not interfere with the slide rail 6.

[0028] The principle of this utility model is to use an extension frame 1 to extend the distance between the clamping end 2 and the slide rail 6, so that the distance is sufficient to allow the crystal ingot to rotate along its short axis without interfering with the slide rail 6. When measuring a crystal ingot, the short axis of the crystal ingot is generally clamped at both ends. Therefore, when the crystal ingot is turned, it can be regarded as drawing a circle with a radius of 1 / 2 of the long axis of the crystal ingot. Therefore, other components cannot be placed in its rotation path. In this utility model, the length of the extension frame 1 is at least 1 / 2 of the length of the crystal ingot to be measured, so that the distance between the clamping end and the slide rail meets the requirements.

[0029] Of course, in actual settings, the length of the extension rack can be further extended to facilitate the installation of other components.

[0030] Due to the heavy weight of the crystal ingot, sufficient clamping force is required to maintain stability. Figure 2As shown, this embodiment also includes a lead screw 5 arranged parallel to the slide rail. Two sliding mechanisms engage the lead screw 5 through threads. The lead screw 5 drives the sliding mechanism, thereby enabling the clamping end 2 mounted on the sliding mechanism to clamp the crystal ingot. This threaded engagement ensures that even if the lead screw 5 loses power, the clamping force is retained. This prevents the crystal ingot from falling due to a loss of clamping force caused by unexpected events such as power outages and equipment damage.

[0031] The present invention achieves simultaneous, counter-rotating movement of the two sliding mechanisms through two methods. First, the threads of the two sliding mechanisms run in opposite directions. Second, the lead screw 5 comprises two sections, each threadedly engaged with the two sliding mechanisms. With this arrangement, the motor drives the lead screw to rotate, causing the two sliding mechanisms to move together or apart synchronously, thereby tightening or loosening the crystal ingot.

[0032] like Figure 3 As shown, in order to achieve the flipping of the crystal rod, the clamping end 2 in the present invention is rotatable, and the rotation of the clamping end 2 drives the crystal rod to flip. Specifically, the clamping end 2 includes a base 21, and the base 21 is disc-shaped; the rear end of the base 21 is connected to a rotating shaft, and the rotating shaft is connected to the extension frame 1 by a bearing. In addition, in the present invention, one of the two clamping ends 2 is an active rotating clamping end, and the other is a passive rotating clamping end; the active rotating clamping end is driven by a motor to rotate the rotating shaft, and the passive rotating clamping end moves with the action of the crystal rod to play a supporting role. Of course, the possibility that both clamping ends are active rotating clamping ends is not ruled out.

[0033] Since the crystal ingot itself is very smooth and has a low friction coefficient, in order to further improve stability, in this embodiment, a rubber pad 22 is provided on the base 21. The rubber pad 22 has anti-slip grooves, thereby increasing the friction between the base and the crystal ingot and preventing scratches on the crystal ingot.

[0034] To further enhance clamping stability, in this embodiment, the slide rails 6 are arranged in parallel on the left and right sides. The sliding mechanism comprises a base 41 and four sliders 42 fixed to the bottom of the base 41. The four sliders 42 are symmetrically mounted on the two slide rails 6. Furthermore, a threaded block 43 is provided at the bottom of the base 41, between the sliders 2. The internal threaded holes of the sliding mechanism are formed in the threaded block 43. This arrangement makes the entire sliding mechanism extremely stable, sufficient to support the weight of the crystal ingot.

[0035] In addition, in order to prevent foreign matter from being involved in the lead screw 5, the lead screw 5 can be shielded by a retractable accordion cover.

[0036] The extension frame 1 also needs to be strong enough to support the ingot and flip it. Therefore, in this embodiment, the extension frame 1 is composed of a vertical plate 11 and side plates 12 arranged on either side of the vertical plate 11. The two side plates 12 are arranged opposite each other and at a 90-degree angle to the vertical plate 11. A reinforcing crossbeam 13 is installed between the vertical plate 11 and the side plates 12. A trapezoidal stabilizing plate 14 is connected to the bottom of the extension frame 1. This arrangement ensures that the extension frame 1 has sufficient strength to support the ingot.

[0037] In addition, in order to reduce weight and save materials, in some embodiments, weight-reducing holes may be opened on the vertical plate 11 to reduce the weight of the entire extension frame 1 without affecting the strength.

[0038] The crystal rod will carry some liquid during the production process. In order to prevent the liquid from dripping onto the slide rail 6 and the lead screw 5 below, a liquid receiving tray 3 can be set above the slide rail 6 and between the left and right clamping ends 2.

[0039] During use, the crystal ingot from the previous process is transferred between the two clamping ends 2 and clamped there. The operator then measures the end dimensions of the ingot. After the measurement is completed, the operator rotates the clamping ends 2, which causes the crystal ingot to flip so that the other end faces the operator, making it easier for the operator to measure.

[0040] Of course, the present invention does not exclude the use of image recognition and other methods to perform measurements through artificial intelligence models.

[0041] The above are merely preferred embodiments of the present invention. It should be noted that the above preferred embodiments should not be construed as limiting the present invention. The scope of protection of the present invention shall be determined by the scope defined in the claims. Persons skilled in the art will appreciate that improvements and modifications may be made without departing from the spirit and scope of the present invention, and such improvements and modifications shall also be considered within the scope of protection of the present invention.

Claims

1. A crystal ingot auxiliary measurement device, characterized in that: It includes a slide rail and two left and right sliding mechanisms that can move along the slide rail; an extension frame is installed on the slide mechanism, and a clamping end is provided on the top of the extension frame; the left and right sliding mechanisms can move in opposite directions at the same time, thereby driving the clamping end to clamp or loosen the crystal rod to be measured; the clamping end can rotate along the axis, thereby driving the clamped crystal rod to be measured to flip; the height of the extension frame is not less than 1 / 2 of the length of the crystal rod to be measured, so that when the crystal rod is flipped, it does not interfere with the slide rail.

2. The crystal ingot auxiliary measurement device according to claim 1, characterized in that: It also includes a lead screw arranged parallel to the slide rail, and the two sliding mechanisms are engaged with the lead screw through threads; The thread directions of the two sliding mechanisms are opposite, or the lead screw includes two sections respectively engaged with the threads of the two sliding mechanisms, and the thread directions of the two sections of the lead screw are opposite.

3. The crystal ingot auxiliary measurement device according to claim 2, characterized in that: The slide rails are two parallel left and right slide rails; the sliding mechanism includes a base and four sliders fixed to the bottom of the base, and the four sliders are symmetrically installed on the two slide rails.

4. The crystal ingot auxiliary measurement device according to claim 3, characterized in that: A threaded block is provided at the bottom of the base between the sliding blocks, and the internal threaded hole of the sliding mechanism is opened on the threaded block.

5. The crystal ingot auxiliary measurement device according to claim 2, characterized in that: The lead screw is shielded by a retractable accordion cover.

6. The crystal ingot auxiliary measurement device according to claim 1, characterized in that: The extension frame is composed of a vertical plate and side plates arranged on both sides of the vertical plate; the two side plates are arranged opposite to each other and are at 90 degrees to the vertical plate; a reinforcing beam is arranged between the vertical plate and the side plates; the bottom of the extension frame is connected to a trapezoidal stabilizing plate.

7. The crystal ingot auxiliary measurement device according to claim 6, characterized in that: The vertical plate is provided with weight-reducing holes.

8. The crystal ingot auxiliary measurement device according to claim 1, characterized in that: The clamping end includes a base, which is disc-shaped; a rotating shaft is connected to the rear end of the base, and the rotating shaft is connected to the extension frame by a bearing; a rubber pad is laid on the base, and an anti-slip groove is opened on the rubber pad.

9. The crystal ingot auxiliary measurement device according to claim 8, characterized in that: One of the two clamping ends is an active rotating clamping end, and the other is a passive rotating clamping end; the active rotating clamping end is driven by a motor to rotate a rotating shaft.

10. The crystal ingot auxiliary measurement device according to claim 1, characterized in that: A liquid receiving tray is provided above the slide rail and between the left and right clamping ends.

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