Electronic-grade hydrofluoric acid packaging container cleaning device

Abstract

The utility model provides an electronic-grade hydrofluoric acid packaging container cleaning device, which belongs to the technical field of container cleaning equipment, and comprises a base, a transverse rotating mechanism and a vertical rotating mechanism, the two ends of the upper surface of the base are fixedly connected with a support frame, the center of the upper end of the support frame is provided with a through hole, and the through hole is communicated with the transverse rotating mechanism. The transverse rotating mechanism comprises a transverse rotating shaft, a rotating frame and a first motor, the rotating frame is located between the two supporting frames, and the centers of the two sides of the rotating frame and the through holes in the supporting frames are located on the same horizontal line. The transverse rotating mechanism and the vertical rotating mechanism are arranged and matched with each other, all-directional cleaning of the electronic-grade hydrofluoric acid packaging container fixed in the rotating cylinder body can be achieved, the device is simple in structure, and the transverse rotating mechanism and the vertical rotating mechanism are combined and supported on the supporting frame on the base, so that the cleaning efficiency is greatly improved. The stability is good.

Description

Technical Field

[0001] The utility model belongs to the technical field of container cleaning equipment, and in particular relates to a device for cleaning electronic-grade hydrofluoric acid packaging containers. Background Art

[0002] Electronic-grade hydrofluoric acid is an essential material in semiconductor manufacturing, primarily used in cleaning and etching steps. Due to its high purity requirements, the production and packaging of electronic-grade hydrofluoric acid require special attention to avoid any contamination. Cleaning the packaging container is particularly important, as any residue inside could compromise the purity of the hydrofluoric acid.

[0003] The patent for "An Electronic-Grade Hydrofluoric Acid Packaging Container Cleaning Device," with publication number "CN218655805U," includes a base, a rocking platform positioned above the base, telescopic mechanisms symmetrically positioned on both sides of the base, the base and rocking platform connected by the telescopic mechanisms driving the rocking platform to swing up and down, a rotating frame positioned above the rocking platform for securing the electronic-grade hydrofluoric acid packaging container, and a rotating mechanism positioned on the rocking platform for driving the rotating frame to rotate. By combining rocking and rotating mechanisms, this device not only improves the cleanliness of electronic-grade hydrofluoric acid packaging containers, ensuring cleaning quality, but also saves costs.

[0004] However, the above cleaning device still has some shortcomings in actual use: the device adopts a combination of swinging and rotating, the structure is relatively complex, and the device is top-heavy and has poor stability. Utility Model Content

[0005] The utility model aims to solve the problems of complex device structure and poor stability in the prior art, and proposes an electronic-grade hydrofluoric acid packaging container cleaning device.

[0006] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0007] An electronic-grade hydrofluoric acid packaging container cleaning device, comprising a base, a lateral rotation mechanism, and a vertical rotation mechanism, wherein both ends of the upper surface of the base are fixedly connected to support frames, a through hole is opened at the center of the upper end of the support frame, the lateral rotation mechanism comprises a lateral rotating shaft, a rotating frame, and a first motor, the rotating frame is located between the two support frames, and the centers of both sides thereof are on the same horizontal line as the through holes on the support frames, there are two lateral rotating shafts, both of which are rotatably connected to the through holes, and opposite ends of the two lateral rotating shafts are fixedly connected to the rotating frame, and the other end of one of the lateral rotating shafts is fixedly connected to the output rotating shaft of the first motor;

[0008] The vertical rotation mechanism includes a second motor and a rotating drum. The second motor is fixedly connected to the center of the top surface of the rotating frame. The rotating drum is located at the inner center of the rotating frame. The driving shaft of the second motor passes through the rotating frame and is fixedly connected to one end of the rotating drum. The other end of the rotating drum is fixedly connected to a vertical rotating shaft. The other end of the vertical rotating shaft is rotatably connected to the rotating frame.

[0009] Preferably, a clamping plate is rotatably connected to the horizontal shaft at the gap between the support frame and the two sides of the rotating frame. The clamping plate is a ring plate, one side of the clamping plate is fixedly connected to the support frame, and the other side is rotatably connected to the rotating frame.

[0010] Preferably, a fixing plate is fixedly connected to the bottom of the first motor, and the fixing plate is fixedly connected to the support frame.

[0011] Preferably, a counterweight is fixedly connected to the center of the bottom surface of the rotating frame, and the weight of the counterweight is equal to that of the second motor.

[0012] Preferably, one side of the rotating cylinder is a rotating cylinder cover, which is rotatably connected to the rotating cylinder through a hinge. A plurality of clamping blocks are evenly and fixedly connected to the inner surface of the rotating cylinder, and the clamping blocks are made of rubber. The rotating cylinder fixes the electronic-grade hydrofluoric acid packaging container in the cylinder body through the clamping blocks.

[0013] Preferably, the centers of the upper and lower inner surfaces of the rotating frame are fixedly connected with limiting ring plates, and the centers of the opposite end surfaces of the two limiting ring plates are provided with annular grooves, and the two ends of the rotating cylinder are rotatably connected to the surfaces of the annular grooves.

[0014] Compared with the prior art, the present invention has the following advantages:

[0015] The utility model is capable of achieving all-round cleaning of electronic-grade hydrofluoric acid packaging containers fixed in the rotating drum body by arranging a horizontal rotation mechanism and a vertical rotation mechanism and cooperating with each other. The device is not only simple in structure, but also has good stability because the horizontal rotation mechanism and the vertical rotation mechanism are supported on a support frame on the base. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic structural diagram of an electronic-grade hydrofluoric acid packaging container cleaning device proposed in the utility model;

[0017] Figure 2 This is a schematic diagram of the main view of an electronic-grade hydrofluoric acid packaging container cleaning device proposed by the present invention;

[0018] Figure 3 This is a cross-sectional schematic diagram of an electronic-grade hydrofluoric acid packaging container cleaning device proposed by the present invention;

[0019] Figure 4 This is a schematic structural diagram of a rotating drum of an electronic-grade hydrofluoric acid packaging container cleaning device proposed by the utility model.

[0020] In the figure: 1 base, 2 support frame, 3 horizontal shaft, 4 rotating frame, 5 first motor, 6 second motor, 7 rotating cylinder, 8 driving shaft, 9 vertical shaft, 10 clamping plate, 11 fixing plate, 12 counterweight, 13 rotating cylinder cover, 14 clamping block, 15 limiting ring plate. DETAILED DESCRIPTION

[0021] The technical solution of the present invention is further described below with reference to the accompanying drawings and embodiments.

[0022] Reference Figures 1-4 , a device for cleaning electronic-grade hydrofluoric acid packaging containers, comprising a base 1, a horizontal rotation mechanism and a vertical rotation mechanism, wherein both ends of the upper surface of the base 1 are fixedly connected to a support frame 2, and a through hole is opened at the center of the upper end of the support frame 2, the horizontal rotation mechanism comprises a horizontal rotating shaft 3, a rotating frame 4 and a first motor 5, the rotating frame 4 is located between the two support frames 2 and the centers of both sides thereof are on the same horizontal line as the through holes on the support frame 2, there are two horizontal rotating shafts 3, both horizontal rotating shafts 3 are rotatably connected to the through holes, and the opposite ends of the two horizontal rotating shafts 3 are fixedly connected to the rotating frame 4, and the other end of one horizontal rotating shaft 3 is fixedly connected to the output rotating shaft of the first motor 5, and a splint 10 is rotatably connected to the horizontal rotating shaft 3 at the gap between the support frame 2 and the rotating frame 4 on both sides, the splint 10 is a ring plate, one side of the splint 10 is fixedly connected to the support frame 2, and the other side is rotatably connected to the rotating frame 4, so as to limit the lateral movement of the rotating frame 4, so that the device is more stable, and a fixing plate 11 is fixedly connected to the bottom of the first motor 5, and the fixing plate 11 is fixedly connected to the support frame 2;

[0023] The vertical rotation mechanism includes a second motor 6 and a rotating drum 7. The second motor 6 is fixedly connected to the center of the top surface of the rotating frame 4. The rotating drum 7 is located in the inner center of the rotating frame 4. One side of the rotating drum 7 is a rotating drum cover 13. The rotating drum cover 13 is rotatably connected to the rotating drum 7 by a hinge. A plurality of clamping blocks 14 are evenly fixedly connected to the inner surface of the rotating drum 7. The clamping blocks 14 are made of rubber. The rotating drum 7 fixes the electronic grade hydrofluoric acid packaging container in the drum body through the clamping blocks 14. Since the rubber has elasticity, the clamping blocks 14 can tightly clamp the container to be cleaned without shaking. The driving shaft 8 of the second motor 6 passes through the rotating frame 4 and is rotatably connected. It is fixedly connected to one end of the rotating cylinder 7, and the other end of the rotating cylinder 7 is fixedly connected to a vertical rotating shaft 9. The other end of the vertical rotating shaft 9 is rotatably connected to the rotating frame 4. The centers of the upper and lower inner surfaces of the rotating frame 4 are fixedly connected to a limiting ring plate 15. The centers of the opposite end surfaces of the two limiting ring plates 15 are provided with an annular groove. The two ends of the rotating cylinder 7 are rotatably connected to the surface of the annular groove. By limiting the rotation of the rotating cylinder 7 in the annular groove, the rotation process is made more stable. A counterweight block 12 is fixedly connected to the center of the bottom surface of the rotating frame 4. The weight of the counterweight block 12 is equal to that of the second motor 6, which is used to balance the mass of the second motor 6, so that the rotating frame 4 rotates more stably and smoothly.

[0024] By providing a horizontal rotation mechanism and a vertical rotation mechanism and cooperating with each other, it is possible to achieve all-round cleaning of the electronic-grade hydrofluoric acid packaging container fixed in the cylinder 7. The device is not only simple in structure, but also has good stability because the horizontal rotation mechanism and the vertical rotation mechanism are combined and supported on the support frame 2 on the base 1.

[0025] The functional principle of this utility model can be explained through the following operation modes:

[0026] During use, a sealed electronic-grade hydrofluoric acid packaging container containing cleaning liquid is placed in the cylinder body of the rotating cylinder 7, and the rotating cylinder cover 13 is covered. At this time, the rubber block 14 on the inner wall of the rotating cylinder 7 fixes the electronic-grade hydrofluoric acid packaging container in the cylinder body to the maximum extent, and the first motor 5 and the second motor 6 are started at the same time. At this time, the rotating frame 4 rotates horizontally around its axis through the horizontal rotating shaft 3, and the rotating cylinder 7 rotates vertically around its axis through the driving rotating shaft 8 on the second motor 6. Through the coordination of the horizontal rotation and the vertical rotation, a small amount of cleaning liquid can be loaded into the electronic-grade hydrofluoric acid packaging container and the inner wall of the container can be cleaned in all directions without dead angles. The device is not only simple in structure, but also has good stability because the horizontal rotation mechanism and the vertical rotation mechanism are combined and supported on the support frame 2 on the base 1.

[0027] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model and are not limiting. Although the utility model is described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the purpose and scope of the technical solution of the utility model, which should be included in the scope of the claims of the utility model.

Claims

1. An electronic grade hydrofluoric acid packaging container cleaning device, comprising a base (1), a horizontal rotation mechanism and a vertical rotation mechanism, characterized in that: The two ends of the upper surface of the base (1) are fixedly connected to the support frame (2), and the center of the upper end of the support frame (2) is provided with a through hole. The horizontal rotation mechanism includes a horizontal shaft (3), a rotating frame (4) and a first motor (5). The rotating frame (4) is located between the two support frames (2) and the centers of both sides thereof are on the same horizontal line as the through holes on the support frames (2). There are two horizontal shafts (3), and both of the two horizontal shafts (3) are rotatably connected to the through holes. The opposite ends of the two horizontal shafts (3) are fixedly connected to the rotating frame (4), and the other end of one of the horizontal shafts (3) is fixedly connected to the output shaft of the first motor (5); The vertical rotation mechanism comprises a second motor (6) and a rotating cylinder (7), wherein the second motor (6) is fixedly connected to the center of the top surface of the rotating frame (4), and the rotating cylinder (7) is located at the inner center of the rotating frame (4). The driving shaft (8) of the second motor (6) passes through the rotating frame (4) and is fixedly connected to one end of the rotating cylinder (7). The other end of the rotating cylinder (7) is fixedly connected to a vertical rotating shaft (9), and the other end of the vertical rotating shaft (9) is rotationally connected to the rotating frame (4).

2. The electronic-grade hydrofluoric acid packaging container cleaning device according to claim 1, characterized in that: A clamping plate (10) is rotatably connected to the horizontal rotating shaft (3) at a gap between the support frame (2) and the rotating frame (4). The clamping plate (10) is a ring plate. One side of the clamping plate (10) is fixedly connected to the support frame (2) and the other side is rotatably connected to the rotating frame (4).

3. The electronic-grade hydrofluoric acid packaging container cleaning device according to claim 1, characterized in that: A fixing plate (11) is fixedly connected to the bottom of the first motor (5), and the fixing plate (11) is fixedly connected to the support frame (2).

4. The electronic-grade hydrofluoric acid packaging container cleaning device according to claim 1, characterized in that: A counterweight (12) is fixedly connected to the center of the bottom surface of the rotating frame (4), and the weight of the counterweight (12) is equal to that of the second motor (6).

5. The electronic-grade hydrofluoric acid packaging container cleaning device according to claim 1, characterized in that: One side of the rotating cylinder (7) is a rotating cylinder cover (13), and the rotating cylinder cover (13) is rotatably connected to the rotating cylinder (7) via a hinge. A plurality of clamping blocks (14) are evenly and fixedly connected to the inner surface of the rotating cylinder (7), and the clamping blocks (14) are made of rubber. The rotating cylinder (7) fixes and clamps the electronic-grade hydrofluoric acid packaging container in the cylinder body via the clamping blocks (14).

6. The electronic-grade hydrofluoric acid packaging container cleaning device according to claim 1, characterized in that: The centers of the upper and lower inner surfaces of the rotating frame (4) are fixedly connected to limiting ring plates (15), and the centers of the opposite end surfaces of the two limiting ring plates (15) are provided with annular grooves, and the two ends of the rotating cylinder (7) are rotatably connected to the surfaces of the annular grooves.

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