Driving structure of silicon wafer feeding equipment

Abstract

The utility model discloses a driving structure of silicon wafer feeding equipment, which relates to the technical field of silicon wafers and comprises a device body, a mounting frame and a transmission mechanism are mounted on the upper portion of the device body, a connecting rod is rotatably connected to the upper portion of the mounting frame, and the section of the connecting rod is of a hexagonal structure. The driving structure comprises a connecting rod, the outer side of the connecting rod is sleeved with first sleeves distributed in a linear array mode, one end of each first sleeve is provided with a hexagonal cavity matched with the connecting rod, the outer side of each first sleeve is rotationally sleeved with a sliding block, and the sliding blocks are slidably connected with a mounting frame. According to the silicon wafer feeding device, the linkage rod is arranged on the connecting rod, and the sliding blocks are arranged on the connecting rod, so that a plurality of conveying belts (runways) can be simultaneously driven to operate through the connecting rod only by butting the linkage rod and the inserting rod one by one, and the connecting rod only needs to be provided with single driving equipment to drive the connecting rod to rotate, so that the production and use cost of the silicon wafer feeding device can be effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafers, in particular to a driving structure of silicon wafer dispensing equipment. Background Art

[0002] Silicon wafers are a key material in the production of integrated circuits. Through processes like photolithography and ion implantation, they can be fabricated into various semiconductor devices. They are widely used in agriculture, industry, and other fields. During silicon wafer production, conveyors are often used to transport the wafers, loading and unloading them, or transferring them to the next production step.

[0003] After extensive searching, I found that: China Utility Model Patent Column: Publication No. CN215731629U discloses a silicon wafer dispensing machine. The utility model includes a frame, wherein the upper and lower parts of the frame are respectively provided with a loading layer and a discharging layer, and the loading layer and the discharging layer are both provided with a plurality of conveying runways, and the conveying runways include a plurality of runways.

[0004] In the above scheme, although there are many benefits, the device is equipped with multiple runways (conveyor belts) spliced ​​end to end, and each runway (conveyor belt) needs to be installed with a separate drive device (servo motor) to drive it. Therefore, it not only increases the production and use costs of the silicon wafer delivery equipment, but also increases the complexity of the installation of the silicon wafer delivery equipment. Utility Model Content

[0005] The purpose of the utility model is to provide a driving structure of a silicon wafer dispensing device, so as to solve the problem of high use cost of the current silicon wafer dispensing device proposed in the prior art.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solutions: a driving structure of a silicon wafer dispensing device, comprising a device body, a mounting frame and a transmission mechanism mounted on the upper portion of the device body, a connecting rod rotatably connected to the upper portion of the mounting frame, the connecting rod having a hexagonal cross-section, a first sleeve distributed in a linear array on the outer side of the connecting rod, a hexagonal cavity matched with the connecting rod is provided at one end of the first sleeve, a slider is rotatably provided on the outer side of the first sleeve, the slider is slidably connected to the mounting frame, a linkage rod is rotatably connected to one side of the slider, a linkage groove is provided at the end of the linkage rod, the linkage groove having a hexagonal cross-section, and bevel gears are fixedly provided on the outer sides of the linkage rod and the first sleeve, and the two bevel gears are meshed with each other;

[0007] The transmission mechanism includes a transport frame distributed in a linear array, two rollers are rotatably connected to the transport frame, a conveyor belt is connected between the two rollers, and a plug rod adapted to the linkage groove cavity is fixedly connected to the end of the roller, and the cross-section of the plug rod is a hexagonal structure.

[0008] Preferably, support rods are fixedly connected to the four corners of the bottom of the transport frame, pulleys are provided at the bottom of the support rods, notches are provided at corresponding positions of the device body relative to each support rod, the support rods are slidably connected to the notches, a through-type rotating hole is provided on one side of the transport frame, a threaded rod is rotatably connected in the rotating hole, and a first threaded groove threadedly connected to the threaded rod is provided at the corresponding position of the device body relative to the threaded hole.

[0009] Preferably, the mounting frame includes mounting plates distributed in a linear array, the upper portion of the mounting plate is provided with first fixing ports distributed in a linear array, the device body is provided with second fixing ports at corresponding positions relative to each first fixing port, a first bolt and a nut are provided between the first fixing port and the corresponding second fixing port, the top end of the first bolt is fixedly connected with a nut, the nut is located at the upper portion of the mounting plate, and the nut is located at the bottom of the device body.

[0010] Preferably, the connecting rod includes a first long rod distributed in a linear array, both ends of the first long rod are fixedly connected to an axis rod, the movable end of the axis rod is provided with a connecting groove, and the second long rod is plugged into the connecting groove. The cross-sections of the first long rod and the second long rod are both hexagonal structures, and the outer diameter of the first long rod is larger than the outer diameter of the second long rod, and the cross-section of the connecting groove is a hexagonal cavity.

[0011] Preferably, a second sleeve is rotatably sleeved on the outer side of the shaft, a mounting block is rotatably sleeved on the outer side of the second sleeve, a second bolt is plugged into a third fixing port opened on the upper part of the mounting block, a second thread groove is opened at a corresponding position of the mounting plate relative to the third fixing port, and the movable end of the second bolt is threadedly connected to the second thread groove.

[0012] Preferably, a limiting rod is threadedly connected to the limiting hole provided in the upper portion of the sliding block, and a movable end of the limiting rod is in contact with the upper portion of the mounting plate.

[0013] Preferably, a servo motor is installed on the device body, the movable end of the servo motor is fixedly connected to the end of the second long rod at the end, and the servo motor is electrically connected to the power supply. The servo motor used in this application is a purchased part, which is selected according to the power and size requirements. The system for controlling the switch adopts the module provided by the corresponding merchant, and this application will not go into details.

[0014] Preferably, the transport frame is rotatably connected to support rollers distributed in a linear array, the support rollers are located between two roller shafts, and the support rollers are located inside the conveyor belt and in contact with the top wall inside the conveyor belt.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] 1. This application sets a connecting rod and sets multiple sliders on the connecting rod. In this way, it is only necessary to connect the linkage rod and the plug-in rod one by one to drive multiple conveyor belts (runways) to operate at the same time through the connecting rod. The connecting rod only needs to be installed with a single drive device to drive its rotation, which can effectively reduce the production and use costs of silicon wafer feeding equipment.

[0017] 2. The present application provides a detachable transmission mechanism, a detachable mounting frame and a connecting rod, so that the transportation distance can be extended by increasing the number of the above-mentioned related structures according to the actual needs on site, thereby effectively improving the applicability of the silicon wafer dispensing equipment. The device uses structural docking, uses fewer driving devices and does not require disassembly, thereby avoiding the complexity of installation such as power cord wiring, and improving the convenience of disassembly and assembly of the driving structure of the silicon wafer dispensing equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a three-dimensional schematic diagram of the entire driving structure of a silicon wafer feeding device of the present invention;

[0019] Figure 2 This is a three-dimensional schematic diagram of the cooperation between the mounting frame and the connecting rod of the driving structure of a silicon wafer feeding device of the present invention;

[0020] Figure 3 This is a three-dimensional schematic diagram of the device body of the driving structure of a silicon wafer feeding device of the utility model;

[0021] Figure 4 This is a three-dimensional schematic diagram of the transmission mechanism of the drive structure of a silicon wafer feeding device of the present invention;

[0022] Figure 5 This is a schematic cross-sectional structure diagram of a transmission mechanism of a driving structure of a silicon wafer dispensing device according to the present invention;

[0023] Figure 6 This is a three-dimensional schematic diagram of the connecting rod of the driving structure of the silicon wafer feeding equipment of the present invention.

[0024] Numbers in the figure: 1. Device body; 2. Mounting frame; 201. Mounting plate; 202. First bolt; 3. Transmission mechanism; 301. Transport frame; 302. Roller; 303. Conveyor belt; 4. Connecting rod; 401. First long rod; 402. Shaft; 403. Second long rod; 5. First sleeve; 6. Slider; 7. Linkage rod; 8. Bevel gear; 9. Linkage groove; 10. Connecting rod; 11. Support rod; 12. Pulley; 13. Threaded rod; 14. First threaded groove; 15. Second sleeve; 16. Mounting block; 17. Second bolt; 18. Limit rod; 19. Servo motor; 20. Support roller. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0026] Example: Figure 1 - Figure 6 As shown, the utility model provides a technical solution of the driving structure of a silicon wafer feeding device, comprising a device body 1, a mounting frame 2 and a transmission mechanism 3 are installed on the upper part of the device body 1, a connecting rod 4 is rotatably connected to the upper part of the mounting frame 2, the cross section of the connecting rod 4 is a hexagonal structure, a first sleeve 5 distributed in a linear array is sleeved on the outer side of the connecting rod 4, one end of the first sleeve 5 is provided with a hexagonal cavity adapted to the connecting rod 4, a slider 6 is rotatably sleeved on the outer side of the first sleeve 5, the slider 6 is slidably connected to the mounting frame 2, a linkage rod 7 is rotatably connected to one side of the slider 6, a linkage groove 9 is provided on the end of the linkage rod 7, the cross section of the linkage groove 9 is a hexagonal cavity, and the outer sides of the linkage rod 7 and the first sleeve 5 are fixedly sleeved with a bevel gear 8, and the two bevel gears 8 are meshed and connected with each other;

[0027] The transmission mechanism 3 includes a transport frame 301 distributed in a linear array. Two rollers 302 are rotatably connected to the transport frame 301. A conveyor belt 303 is connected between the two rollers 302. The ends of the rollers 302 are fixedly connected to a plug-in rod 10 that is adapted to the cavity of the linkage slot 9. The plug-in rod 10 has a hexagonal cross-section.

[0028] By rotating the connecting rod 4, the connecting rod 4 drives the first sleeve 5 to rotate together, and the first sleeve 5 drives the linkage rod 7 to rotate via the two bevel gears 8. The linkage rod 7 drives the roller 302 to rotate via the plug rod 10. The roller 302 drives the conveyor belt 303 to rotate, and the conveyor belt 303 is responsible for conveying materials.

[0029] To disassemble the transmission mechanism 3 , it is only necessary to separate the linkage rod 7 and the plug-in rod 10 .

[0030] like Figure 1 - Figure 5 As shown, support rods 11 are fixedly connected to the four corners of the bottom of the transport frame 301, and pulleys 12 are provided at the bottom of the support rods 11. Notches are provided at corresponding positions of the device body 1 relative to each support rod 11, and the support rods 11 are slidably connected to the notches. A through-type rotating hole is provided on one side of the transport frame 301, and a threaded rod 13 is rotatably connected to the rotating hole. A first thread groove 14 threadedly connected to the threaded rod 13 is provided at a corresponding position of the device body 1 relative to the threaded hole.

[0031] The transport rack 301 is installed through the notch and is stably fixed on the device body 1 by threading the threaded rod 13 and the first threaded groove 14. Otherwise, the transport rack 301 is pulled out from the notch; when installing the transport rack 301.

[0032] like Figure 1 - Figure 3 As shown, the mounting frame 2 includes mounting plates 201 arranged in a linear array. The upper portion of the mounting plates 201 is provided with first fixing openings arranged in a linear array. The device body 1 is provided with second fixing openings at positions corresponding to each first fixing opening. First bolts 202 and nuts are provided between the first fixing openings and the corresponding second fixing openings. The top ends of the first bolts 202 are fixedly connected to nuts. The nuts are located on the upper portion of the mounting plates 201, and the nuts are located on the bottom portion of the device body 1.

[0033] The cooperation between the first bolt 202 and the nut facilitates the assembly and disassembly of the mounting plate 201 , so that a certain number of mounting plates 201 can be installed on the device body 1 as needed.

[0034] like Figure 2 and Figure 6 As shown, the connecting rod 4 includes first long rods 401 distributed in a linear array, with shaft rods 402 fixedly connected at both ends of the first long rods 401. The movable end of the shaft rod 402 is provided with a connecting groove, in which the second long rod 403 is plugged and connected. The cross-sections of the first long rod 401 and the second long rod 403 are both hexagonal structures, and the outer diameter of the first long rod 401 is larger than the outer diameter of the second long rod 403. The cross-section of the connecting groove is a hexagonal cavity;

[0035] The second long rod 403 is plugged into the connecting groove on the first long rod 401, so that the first long rod 401 can drive the second long rod 403 to rotate; the second long rod 403 can connect two adjacent first long rods 401 to form an integral connecting rod 4.

[0036] like Figure 1 - Figure 3 As shown, the shaft 402 is rotatably sleeved with a second sleeve 15 on the outer side, and the second sleeve 15 is rotatably sleeved with a mounting block 16 on the outer side. A second bolt 17 is plugged into a third fixing hole formed in the upper portion of the mounting block 16. A second threaded groove is formed at a position of the mounting plate 201 corresponding to the third fixing hole, and the movable end of the second bolt 17 is threadedly connected to the second threaded groove.

[0037] By disassembling and assembling the mounting block 16, it is convenient to install the connecting rod 4. You only need to put the second sleeve 15 on the shaft 402, then set the second sleeve 15 in the mounting block 16, and finally use the second bolt 17 to fix the mounting block 16 on the mounting plate 201. In this way, the connecting rod 4 can be installed.

[0038] like Figure 1 and Figure 2 As shown, the limiting hole provided in the upper portion of the slider 6 is threadedly connected to the limiting rod 18, and the movable end of the limiting rod 18 contacts the upper portion of the mounting plate 201;

[0039] The limiting rod 18 is used to increase the friction between the slider 6 and the mounting plate 201, so that the slider 6 is fixed on the mounting plate 201. The upper part of the mounting plate 201 is fixedly connected to the track rod, and the bottom of the slider 6 is provided with a track groove that is slidably connected to the track rod.

[0040] like Figure 1 and Figure 2 As shown, a servo motor 19 is installed on the device body 1, and the movable end of the servo motor 19 is fixedly connected to the end of the second long rod 403 at the end. The servo motor 19 is electrically connected to the power supply. The servo motor 19 used in this application is a purchased part, which is selected according to the power and size requirements. The system for controlling the switch adopts a module provided by the corresponding merchant, and this application will not go into details.

[0041] The servo motor 19 is used to drive the second long rod 403 to rotate.

[0042] like Figure 5 As shown, the transport frame 301 is rotatably connected to support rollers 20 distributed in a linear array. The support rollers 20 are located between two roller shafts 302 , and the support rollers 20 are located inside the conveyor belt 303 and in contact with the top wall inside the conveyor belt 303 .

[0043] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A driving structure for a silicon wafer dispensing device, comprising a device body (1), characterized in that: The upper part of the device body (1) is equipped with a mounting frame (2) and a transmission mechanism (3); the upper part of the mounting frame (2) is rotatably connected to a connecting rod (4); the outer side of the connecting rod (4) is sleeved with a first sleeve (5) distributed in a linear array; the outer side of the first sleeve (5) is rotatably sleeved with a slider (6); the slider (6) is slidably connected to the mounting frame (2); one side of the slider (6) is rotatably connected to a linkage rod (7); a linkage groove (9) is provided at the end of the linkage rod (7); and the outer sides of the linkage rod (7) and the first sleeve (5) are fixedly sleeved with a bevel gear (8); the two bevel gears (8) are meshed and connected with each other; The transmission mechanism (3) comprises a transport frame (301) distributed in a linear array, two rollers (302) being rotatably connected to the transport frame (301), a conveyor belt (303) being transmission-connected between the two rollers (302), and a plug-in rod (10) adapted to the cavity of the linkage slot (9) being fixedly connected to the end of the roller (302).

2. The driving structure of the silicon wafer dispensing equipment according to claim 1, characterized in that: The four corners of the bottom of the transport frame (301) are fixedly connected to support rods (11), and pulleys (12) are provided at the bottom of the support rods (11). The device body (1) is provided with a notch at a corresponding position relative to each support rod (11), and the support rods (11) are slidably connected to the notch. A through-type rotating hole is provided on one side of the transport frame (301), and a threaded rod (13) is rotatably connected in the rotating hole. A first thread groove (14) threadedly connected to the threaded rod (13) is provided at a corresponding position of the device body (1) relative to the threaded hole.

3. The driving structure of the silicon wafer dispensing equipment according to claim 2, characterized in that: The mounting frame (2) comprises mounting plates (201) distributed in a linear array, the upper portion of the mounting plate (201) is provided with first fixing openings distributed in a linear array, the device body (1) is provided with second fixing openings at positions corresponding to each first fixing opening, and a first bolt (202) and a nut are provided between the first fixing opening and the corresponding second fixing opening.

4. The driving structure of the silicon wafer dispensing equipment according to claim 3, characterized in that: The connecting rod (4) comprises a first long rod (401) distributed in a linear array, both ends of the first long rod (401) are fixedly connected to a shaft rod (402), and a connecting groove is provided at the movable end of the shaft rod (402), and a second long rod (403) is plugged into the connecting groove.

5. The driving structure of the silicon wafer dispensing equipment according to claim 4, characterized in that: A second sleeve (15) is rotatably sleeved on the outer side of the shaft (402), a mounting block (16) is rotatably sleeved on the outer side of the second sleeve (15), a second bolt (17) is plugged into a third fixing opening provided on the upper portion of the mounting block (16), a second threaded groove is provided at a position corresponding to the third fixing opening on the mounting plate (201), and a movable end of the second bolt (17) is threadedly connected to the second threaded groove.

6. The driving structure of the silicon wafer dispensing equipment according to claim 1, characterized in that: The limiting hole provided on the upper portion of the slider (6) is threadedly connected to a limiting rod (18), and the movable end of the limiting rod (18) is in contact with the upper portion of the mounting plate (201).

7. The driving structure of the silicon wafer dispensing equipment according to claim 1, characterized in that: A servo motor (19) is mounted on the device body (1), and a movable end of the servo motor (19) is fixedly connected to the end of the second long rod (403) at the end.

8. The driving structure of the silicon wafer dispensing equipment according to claim 1, characterized in that: The transport frame (301) is rotatably connected to support rollers (20) distributed in a linear array. The support rollers (20) are located between two roller shafts (302). The support rollers (20) are located inside the conveyor belt (303) and are in contact with the top wall inside the conveyor belt (303).

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