Full-automatic IGBT module cooling and transferring system

Abstract

The utility model discloses a full-automatic IGBT (Insulated Gate Bipolar Translator) module cooling and transferring system which is characterized in that a four-axis transferring mechanism (2), a conveying line (3), an NG conveying line (4), a lifting positioner (5), a servo transfer (6), a cooling table (7) and a water inlet and outlet disc (8) are all fixed on an equipment frame (1); a carrier stopper (31), a carrier in-place detector (32), a code scanning gun (33) and a carrier (34) are arranged on the conveying line (3); the four-axis transfer mechanism (2) can transfer the IGBT modules (314), the IGBT modules (314) passing the test are placed in the carrier (34), the lifting positioning (5) is used for positioning the carrier (34), and the IGBT modules (314) not passing the test are placed in the NG conveying line (4). According to the IGBT module cooling and transferring device, the cooling and transferring functions of the IGBT modules can be automatically completed, and the automation degree is high.

Description

Technical Field

[0001] The present invention relates to the field of IGBT module cooling and transportation, and in particular to a full-automatic IGBT module cooling and transportation system. Background Art

[0002] IGBT (Insulated Gate Bipolar Transistor), a new type of power semiconductor field-controlled self-shutoff device, combines the high-speed performance of power MOS (Metal Oxide Semiconductor) field-effect transistors with the low resistance of bipolar devices. It has high input impedance, low power consumption under voltage control, simple control circuits, high voltage resistance, and high current tolerance. It is widely used in various power conversion applications. To meet the huge market demand, high-efficiency, flexible, and intelligent packaging has become the main packaging form of IGBT.

[0003] Currently, during the packaging process, it is mostly necessary to test the stability of IGBT modules under high-temperature conditions. However, after the high-temperature test, the high temperature of the IGBT modules not only makes their transportation difficult but also has an adverse effect on their subsequent processes. Currently, natural cooling or manual transfer of high-temperature modules to a cooling table is mostly used for cooling. These two methods have slow cooling speeds, affecting production efficiency, and there are also safety hazards when manually transferring high-temperature modules. In the current context of automation and intelligence, there is an urgent need for a fully automatic IGBT module cooling and transfer system. Summary of the Invention

[0004] The technical problem to be solved by the present invention is how to provide fully automatic IGBT module cooling and transportation.

[0005] The present invention solves the above technical problems through the following technical means: a fully automatic IGBT module cooling and transporting system, comprising an equipment frame (1), a four-axis transporting mechanism (2), a conveyor line (3), an NG conveyor line (4), a lifting and positioning (5), a servo transfer (6), a cooling table (7), and an inlet and outlet water tray (8), wherein the four-axis transporting mechanism (2), the conveyor line (3), the NG conveyor line (4), the lifting and positioning (5), the servo transfer (6), the cooling table (7), and the inlet and outlet water tray (8) are all fixed on the equipment frame (1); a carrier stop (31), a carrier position detection (32), a code scanning gun (33), and a carrier (34) are provided on the conveyor line (3); the four-axis transporting mechanism (2) can transport the IGBT module (314), the IGBT module (314) that has passed the test is placed in the carrier (34), the lifting and positioning (5) is used to realize the positioning of the carrier (34), and the IGBT module (314) that has failed the test is placed in the NG conveyor line 4.

[0006] As a further optimized technical solution, the servo transfer (6) includes a servo motor (61), a linear module (62), a third module in-position detection (64), and a positioning plate (65). The servo motor (61) drives the linear module (62) to move, the positioning plate (65) is fixed on the linear module (62), the third module in-position detection (64) is provided in the middle of the positioning plate (65), and the servo motor (61) drives the linear module (62) to move.

[0007] As a further optimized technical solution, the servo transfer (6) further includes a heat insulation plate (63), and the heat insulation plate (63) is provided on the upper part of the positioning plate (65).

[0008] As a further optimized technical solution, the lifting and positioning (5) includes a lifting cylinder (51), a positioning pin (52), a guide shaft (53), and a linear bearing (54); the lifting cylinder (51) is used to lift the carrier (34), and the positioning pin (52) is used to achieve positioning of the carrier (34); the guide shaft (53) and the linear bearing (54) guide the lifting process.

[0009] As a further optimized technical solution, the NG conveyor line (4) includes a stepper motor (41), a first transmission mechanism (42), a second transmission mechanism (43), a conveyor belt (44), a mounting block (45), a first module in-place detection device (46), and a second module in-place detection device (47). The inner ends of the conveyor belt (44) are respectively wound around the first transmission mechanism (42) and the second transmission mechanism (43). The stepper motor (41) drives the first transmission mechanism (42) to rotate. The first module in-place detection device (46) and the second module in-place detection device (47) are respectively arranged on the sides of the conveyor belt inlet and outlet above the conveyor belt (44). The mounting block (45) is used to fix the NG conveyor line (44) on the equipment frame (1).

[0010] As a further optimized technical solution, the four-axis transfer mechanism (2) includes an X-axis (21), a Y-axis (22), a Z-axis (23), an R-axis (24), an auxiliary support (25), and an electric clamp (26). The Y-axis (22) is movably arranged on the X-axis (21), the Z-axis (23) is movably arranged on the Y-axis (22), the R-axis (24) is rotatably arranged on one side of the Z-axis (23), and the electric clamp (26) is fixed on the R-axis (24).

[0011] As a further optimized technical solution, the cooling table (7) includes a wind rod (71), a water inlet pipe (72), a water return pipe (73), a cooling plate (74), a module presence detection device (75), and a first water receiving plate (76). The wind rod (71) is arranged on one side of the cooling table (7), the water inlet pipe (72) and the water return pipe (73) are arranged side by side on both sides of the first water receiving plate (76), and a plurality of cooling plates (74) are arranged between the water inlet pipe (72) and the water return pipe (73) on each side. The side of the cooling plate (74) of the cooling table (7) is provided with a module presence detection device (75), and the first water receiving plate (76) is arranged below the entire cooling table (7).

[0012] As a further optimized technical solution, the water inlet and outlet tray (8) includes a first ball valve (81), a solenoid valve (82), a second ball valve (83), a third ball valve (86), a fourth ball valve (88), and a second water receiving tray (89). The first ball valve (81) is arranged on the water inlet pipeline and is a water inlet master switch. When the equipment is running, it is in a normally open state. The solenoid valve (82) is arranged on the water inlet pipeline. The second ball valve (83) is arranged on the water inlet pipeline and is connected in parallel with the solenoid valve (82). The third ball valve (86) is arranged on the water outlet pipeline and is a water outlet master switch. When the equipment is running, it is in a normally open state. The fourth ball valve (88) is arranged below the bottom of the water outlet tray (8) and is connected to the water outlet tray (8). The bottom of the first water receiving tray (76) is connected to the bottom of the second water receiving tray (89) through a pipeline and a three-way connection at the front end of the fourth ball valve (88).

[0013] As a further optimized technical solution, the water inlet and outlet tray (8) further includes a first flow meter (84) and a second flow meter (85), wherein the first flow meter (84) is arranged on the water inlet pipe and the second flow meter (85) is arranged on the water outlet pipe.

[0014] As a further optimized technical solution, the cooling table (7) further includes a first water immersion sensor (77), and the water inlet and outlet tray (8) further includes a second water immersion sensor (87), wherein the first water immersion sensor (77) is placed in the first water receiving tray (76), and the second water immersion sensor (87) is placed in the water inlet and outlet tray (8).

[0015] The advantages of the present invention are:

[0016] (1) It can automatically complete the cooling, screening, and transportation of IGBT modules with a high degree of automation. It can cool multiple cooling plates simultaneously to ensure production efficiency;

[0017] (2) Water cooling and air cooling are carried out simultaneously, further shortening the cooling time; the cooling water system is reliable, simple and efficient; the high-temperature IGBT module enters the equipment through a specific channel, improving equipment safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a top view of the overall structure of an embodiment of the present invention;

[0019] Figure 2 It is an overall view of the overall structure of the embodiment of the present invention;

[0020] Figure 3 This is a four-axis transport mechanism according to an embodiment of the present invention;

[0021] Figure 4 It is a servo transfer according to an embodiment of the present invention;

[0022] Figure 5 It is a cooling stage according to an embodiment of the present invention;

[0023] Figure 6 This is the water inlet and outlet tray of the embodiment of the present invention;

[0024] Figure 7 This is a schematic diagram of the waterway principle of an embodiment of the present invention;

[0025] Figure 8 This is the NG conveyor line according to an embodiment of the present invention;

[0026] Figure 9 is a carrier according to an embodiment of the present invention;

[0027] Figure 10 It is an embodiment of the present invention to lift and position;

[0028] Numbers in the figure: 1. Equipment frame; 2. Four-axis transfer mechanism; 21. X-axis; 22. Y-axis; 23. Z-axis; 24. R-axis; 25. Auxiliary support; 26. Electric gripper; 3. Conveyor line; 31. Carrier stop; 32. Carrier in place detection; 33. Barcode scanner; 34. Carrier; 341. IGBT module; 4. NG conveyor line; 41. Stepper motor; 42. First transmission mechanism; 43. Second transmission mechanism; 44. Conveyor belt; 45. Mounting block; 46. First module in place detection; 47. Second module in place detection; 5. Lifting and positioning; 51. Lifting cylinder; 52. Positioning pin; 53. Guide Towards the axis; 54. Linear bearing; 6. Servo transfer; 61. Servo motor; 62. Linear module; 63. Heat insulation board; 64. Third module in place detection; 65. Positioning plate; 7. Cooling table; 71. Plasma wind rod; 72. Water inlet pipe; 73. Water return pipe; 74. Cooling plate; 75. Module presence detection; 76. First water receiving tray; 77. First water immersion sensor; 8. Water inlet and outlet trays; 81. First ball valve; 82. Solenoid valve; 83. Second ball valve; 84. First flow meter; 85. Second flow meter; 86. Third ball valve; 87. Second water immersion sensor; 88. Fourth ball valve; 89. Second water receiving tray. DETAILED DESCRIPTION

[0029] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0030] It should be noted that the following embodiments and features therein may be combined with one another unless they conflict. Furthermore, the diagrams provided in the following embodiments are merely schematic illustrations of the basic concepts of the present invention. The diagrams only show components relevant to the present invention and are not drawn according to the number, shape, and size of components in actual implementation. In actual implementation, the type, quantity, and proportion of each component may be varied arbitrarily, and the component layout may also be more complex.

[0031] It should be noted that directional terms such as "upper," "lower," "front," "back," "left," and "right" mentioned in the embodiments are merely references to the directions in the accompanying drawings and are not intended to limit the scope of protection of this disclosure. Throughout the drawings, identical elements are represented by identical or similar reference numerals. Conventional structures or configurations will be omitted where they may cause confusion in understanding this disclosure.

[0032] Example 1:

[0033] like Figure 1 、 2 As shown, the fully automatic IGBT module cooling and transfer system of the present invention includes an equipment frame 1, a four-axis transfer mechanism 2, a conveyor line 3, an NG conveyor line 4, a lifting and positioning 5, a servo transfer 6, a cooling table 7, and an inlet and outlet water tray 8;

[0034] like Figure 1 、 2 As shown, the four-axis transfer mechanism 2, conveyor line 3, NG conveyor line 4, lifting and positioning 5, servo transfer 6, cooling table 7, and water inlet and outlet tray 8 are all fixed on the equipment frame 1;

[0035] like Figure 3 As shown, the four-axis transfer mechanism 2 includes an X-axis 21, a Y-axis 22, a Z-axis 23, an R-axis 24, an auxiliary support 25, and an electric gripper 26. The Y-axis 22 is movably mounted on the X-axis 21, the Z-axis 23 is movably mounted on the Y-axis 22, the R-axis 24 is rotatably mounted on one side of the Z-axis 23, and the electric gripper 26 is fixed to the R-axis 24. The X-axis 21, Y-axis 22, Z-axis 23, R-axis 24, and the electric gripper 26 operate in coordination to complete the transfer of the IGBT module 341 within a certain area.

[0036] like Figure 4 As shown, the servo transfer 6 includes a servo motor 61, a linear module 62, a heat shield 63, a third module in-place detection device 64, and a positioning plate 65. The servo motor 61 drives the linear module 62 to move. The positioning plate 65 is fixed to the linear module 62. A third module in-place detection device 64 is provided in the middle of the positioning plate 65 to detect whether the IGBT module 341 is placed on the positioning plate 65. A heat shield 63 is provided on the upper portion of the positioning plate 65 to isolate the IGBT module 341 from the heat. After the IGBT module 341 completes the previous process, it is transferred by the servo transfer 6. Since the temperature of the IGBT module 341 is relatively high at this time, a heat shield 63 is required to protect the device. After the third module in-place detection device 64 detects that the IGBT module 341 is placed on the positioning plate 65, the servo motor 61 drives the linear module 62 to transfer the IGBT module 341 to the operating range of the four-axis transfer mechanism 2.

[0037] like Figure 1 、 2 As shown, the four-axis transport mechanism 2 transports the IGBT module 341 on the positioning plate 65 to the cooling table 7 for cooling (multiple modules can be placed continuously). The electric gripper 26 of the four-axis transport mechanism 2 places the IGBT module 341 on the cooling table 7.

[0038] like Figure 5 As shown, the cooling platform 7 includes a plasma wind rod 71, a water inlet pipe 72, a water return pipe 73, a cooling plate 74, a module presence detection 75, a first water receiving plate 76, and a first water immersion sensor 77. The plasma wind rod 71 is arranged on one side of the cooling platform 7 to blow out plasma wind, which can also remove static electricity while cooling the air. The water inlet pipe 72 and the water return pipe 73 are arranged side by side on both sides of the first water receiving plate 76, and a number of cooling plates 74 are arranged between the water inlet pipe 72 and the water return pipe 73 on each side. The side of the cooling plate 74 (cooling position) of the cooling platform 7 is provided with a module presence detection 75, and the module presence detection 75 is used to detect whether there is material on the corresponding cooling position of the cooling plate 74 to prevent stacking. After the IGBT module 341 is transferred to the operating range of the four-axis transfer mechanism 2, the electric clamp 26 of the four-axis transfer mechanism 2 grabs the IGBT module 341 and puts it on the cooling plate 74 for cooling. The first water receiving tray 76 is provided below the entire cooling platform 7 to prevent cooling water leakage from damaging the equipment during operation of the cooling platform 7. The first water immersion sensor 77 is placed in the first water receiving tray 76 to alert manual intervention when cooling water leaks to a certain extent.

[0039] like Figure 6As shown, the water inlet and outlet tray 8 includes a first ball valve 81, a solenoid valve 82, a second ball valve 83, a first flow meter 84, a second flow meter 85, a third ball valve 86, a second water level sensor 87, a fourth ball valve 88, and a second water receiving tray 89. The second water receiving tray 89 is used to prevent cooling water leakage from the water inlet and outlet tray 8 during operation, thereby damaging the equipment. The second water level sensor 87 is used to alert manual intervention when cooling water leakage reaches a certain level.

[0040] like Figure 7 Combine Figure 5 、 6 As shown, the first ball valve 81 is arranged on the water inlet pipe and is the main switch of the water inlet. It is in the normally open state when the equipment is running; the solenoid valve 82 is arranged on the water inlet pipe and can automatically control the water inlet; the second ball valve 83 is arranged on the water inlet pipe and is connected in parallel with the solenoid valve 82. After the solenoid valve 82 fails, the water inlet can be manually controlled; the first flow meter 84 is arranged on the water inlet pipe for monitoring the water inlet flow; the second flow meter 85 is arranged on the water outlet pipe for monitoring the water outlet flow; the third ball valve 86 is arranged on the water outlet pipe and is the main switch of the water outlet. It is in the normally open state when the equipment is running; the second water immersion sensor 87 is placed in the water inlet and outlet pan 8 to remind manual processing when the cooling water leaks to a certain extent; the fourth ball valve 88 is arranged below the bottom of the water outlet pan 8 and is connected to the water outlet pan 8. The bottom of the first water receiving tray 76 is connected to the front end of the fourth ball valve 88 through a pipe and the bottom of the second water receiving tray 89 through a tee. After the first water immersion sensor 77 or the second water immersion sensor 87 alarms, it reminds people to open the fourth ball valve 88 to put the leaked cooling water into the recovery bucket.

[0041] like Figure 1 、 2 As shown in Figures 9 and 9, the conveyor line 3 is equipped with a carrier stop 31, a carrier in-position detection device 32, a barcode scanner 33, and a carrier 34. After the IGBT module 341 is cooled on the cooling table 7, the four-axis transfer mechanism 2 grabs the IGBT module 341 and brings it to the barcode scanner 33 for code reading. Based on the information from the upstream equipment, the system automatically determines the status of the IGBT module 341. IGBT modules 341 that pass the test are placed in the carrier 34, and IGBT modules 341 that fail the test are placed in the NG conveyor line 4.

[0042] like Figure 10 As shown, the lifting and positioning 5 includes a lifting cylinder 51, a positioning pin 52, a guide shaft 53, and a linear bearing 54; the lifting cylinder 51 is used to lift the carrier 34 to separate it from the conveyor line 3; the positioning pin 52 is used to achieve the positioning of the carrier 34; the guide shaft 53 and the linear bearing 54 can guide the lifting process.

[0043] like Figure 1 、 2 , 10, the carrier 34 is transported to the conveyor line 3 and stopped by the carrier stop 31; after the carrier arrival detection 32 detects that the carrier 34 has moved into position, the carrier 34 is precisely positioned by the lifting positioning 5; the four-axis transfer mechanism 2 places the IGBT module 341 that has passed the test into the precisely positioned carrier 34, and after the carrier 34 is full, the carrier stop 31 releases it and it flows into the next workstation.

[0044] like Figure 8 As shown, the NG conveyor line 4 includes a stepper motor 41, a first transmission mechanism 42, a second transmission mechanism 43, a conveyor belt 44, a mounting block 45, a first module in-place detection device 46, and a second module in-place detection device 47. The inner ends of the conveyor belt 44 are respectively wound around the first transmission mechanism 42 and the second transmission mechanism 43. The stepper motor 41 drives the first transmission mechanism 42 to rotate, thereby driving the conveyor belt 44 to move. The first module in-place detection device 46 and the second module in-place detection device 47 are respectively arranged on the sides of the conveyor belt inlet and outlet above the conveyor belt 44. The mounting block 45 is used to fix the NG conveyor line 4 on the equipment frame 1. After the IGBT module 341 that failed the test is transferred to the NG conveyor line 4 by the four-axis transfer mechanism 2, the first module in-place detection 46 detects the IGBT module 341, and the first transmission mechanism 42 is driven by the stepper motor 41 to rotate, and the conveyor belt 45 follows the rotation. The stepper motor 41 stops rotating after running a fixed number of circles (the distance moved by the conveyor belt 45 is fixed, leaving space for the next IGBT module 341); after the second module in-place detection 47 detects the IGBT module 341, it indicates that the IGBT modules 341 that failed the test in the NG conveyor line 4 are full, and the equipment reminds manual processing.

[0045] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A fully automatic IGBT module cooling and transport system, characterized by: The invention comprises an equipment frame (1), a four-axis transfer mechanism (2), a conveyor line (3), an NG conveyor line (4), a lifting and positioning (5), a servo transfer (6), a cooling platform (7), and an inlet and outlet water tray (8); the four-axis transfer mechanism (2), the conveyor line (3), the NG conveyor line (4), the lifting and positioning (5), the servo transfer (6), the cooling platform (7), and the inlet and outlet water tray (8) are all fixed on the equipment frame (1); the conveyor line (3) is provided with a carrier stop (31), a carrier position detection (32), a code scanning gun (33), and a carrier (34); the four-axis transfer mechanism (2) can transfer an IGBT module (314), an IGBT module (314) that has passed the test is placed in the carrier (34), the lifting and positioning (5) is used to realize the positioning of the carrier (34), and an IGBT module (314) that has failed the test is placed in the NG conveyor line (4).

2. The fully automatic IGBT module cooling and transport system according to claim 1, characterized in that: The servo transfer (6) comprises a servo motor (61), a linear module (62), a third module in-position detection (64), and a positioning plate (65). The servo motor (61) drives the linear module (62) to move. The positioning plate (65) is fixed on the linear module (62). The third module in-position detection (64) is provided in the middle of the positioning plate (65). The servo motor (61) drives the linear module (62) to move.

3. The fully automatic IGBT module cooling and transport system according to claim 2, characterized in that: The servo transfer (6) further includes a heat insulation plate (63), and the heat insulation plate (63) is provided on the upper part of the positioning plate (65).

4. The fully automatic IGBT module cooling and transport system according to claim 1, characterized in that: The lifting and positioning (5) includes a lifting cylinder (51), a positioning pin (52), a guide shaft (53), and a linear bearing (54); the lifting cylinder (51) is used to lift the carrier (34), and the positioning pin (52) is used to achieve positioning of the carrier (34); the guide shaft (53) and the linear bearing (54) guide the lifting process.

5. The fully automatic IGBT module cooling and transport system according to claim 1, characterized in that: The NG conveyor line (4) includes a stepper motor (41), a first transmission mechanism (42), a second transmission mechanism (43), a conveyor belt (44), a mounting block (45), a first module in-place detection device (46), and a second module in-place detection device (47). The inner ends of the conveyor belt (44) are respectively wound around the first transmission mechanism (42) and the second transmission mechanism (43). The stepper motor (41) drives the first transmission mechanism (42) to rotate. The first module in-place detection device (46) and the second module in-place detection device (47) are respectively arranged on the sides of the conveyor belt inlet and outlet above the conveyor belt (44). The mounting block (45) is used to fix the NG conveyor line (44) on the equipment frame (1).

6. The fully automatic IGBT module cooling and transport system according to claim 1, characterized in that: The four-axis transport mechanism (2) comprises an X-axis (21), a Y-axis (22), a Z-axis (23), an R-axis (24), an auxiliary support (25), and an electric clamp (26). The Y-axis (22) is movably arranged on the X-axis (21), the Z-axis (23) is movably arranged on the Y-axis (22), the R-axis (24) is rotatably arranged on one side of the Z-axis (23), and the electric clamp (26) is fixed on the R-axis (24).

7. The fully automatic IGBT module cooling and transport system according to claim 1, characterized in that: The cooling platform (7) comprises a wind rod (71), a water inlet pipe (72), a water return pipe (73), a cooling plate (74), a module presence detection device (75), and a first water receiving plate (76). The wind rod (71) is arranged on one side of the cooling platform (7), the water inlet pipe (72) and the water return pipe (73) are arranged side by side on both sides of the first water receiving plate (76), and a plurality of cooling plates (74) are arranged between the water inlet pipe (72) and the water return pipe (73) on each side. The side of the cooling plate (74) of the cooling platform (7) is provided with a module presence detection device (75), and the first water receiving plate (76) is arranged below the entire cooling platform (7).

8. The fully automatic IGBT module cooling and transport system according to claim 7, characterized in that: The water inlet and outlet tray (8) comprises a first ball valve (81), a solenoid valve (82), a second ball valve (83), a third ball valve (86), a fourth ball valve (88), and a second water receiving tray (89). The first ball valve (81) is arranged on the water inlet pipeline and serves as a water inlet master switch. When the equipment is running, the first ball valve (81) is arranged on the water inlet pipeline. The second ball valve (83) is arranged on the water inlet pipeline and is connected in parallel with the solenoid valve (82). The third ball valve (86) is arranged on the water outlet pipeline and serves as a water outlet master switch. When the equipment is running, the third ball valve (86) is arranged on the water outlet pipeline and serves as a water outlet master switch. When the equipment is running, the fourth ball valve (88) is arranged below the bottom of the water outlet tray (8) and is connected to the water outlet tray (8). The bottom of the first water receiving tray (76) is connected to the bottom of the second water receiving tray (89) through a pipeline and a three-way connection at the front end of the fourth ball valve (88).

9. The fully automatic IGBT module cooling and transport system according to claim 8, characterized in that: The water inlet and outlet tray (8) further comprises a first flow meter (84) and a second flow meter (85), wherein the first flow meter (84) is arranged on the water inlet pipe, and the second flow meter (85) is arranged on the water outlet pipe.

10. The fully automatic IGBT module cooling and transporting system according to claim 8, characterized in that: The cooling table (7) further includes a first water immersion sensor (77), and the water inlet and outlet tray (8) further includes a second water immersion sensor (87). The first water immersion sensor (77) is placed in the first water receiving tray (76), and the second water immersion sensor (87) is placed in the water inlet and outlet tray (8).

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