Evaporation source heat insulation device and vacuum evaporation equipment

Abstract

The utility model relates to an evaporation source heat insulation device and vacuum evaporation equipment. At least one heat insulation piece is hinged to the connecting rod; the heat insulation piece is hinged to the movable rod; and the output end of the driving part is connected with the movable rod. According to the evaporation source heat insulation device and the vacuum evaporation equipment, the heat insulation piece can be prevented from wrinkling, and the service life of the heat insulation piece is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of heat insulation devices, in particular to an evaporation source heat insulation device and vacuum evaporation equipment. Background Art

[0002] Vacuum evaporation equipment is mainly used in the electronics industry, automobile and aviation manufacturing, medical industry, construction engineering and other fields. Vacuum evaporation refers to a process method in which the coating material is evaporated by heating evaporation and other methods under vacuum conditions to vaporize the coating material. The vaporized coating material moves to the surface of the substrate and condenses into a film.

[0003] In order to industrialize large-area vacuum evaporation technology, improve production efficiency and reduce product costs, a linear evaporation source is used to evaporate perovskite materials. Depending on the evaporated material, the linear source needs to be heated to 150-600 degrees during operation to heat the material and evaporate the material in a vacuum. However, the evaporation method for preparing the perovskite functional layer requires co-evaporation. When the evaporation temperatures of the materials differ greatly, they affect each other, resulting in unstable temperature control. The heat transfer affects the temperature regulation and affects the stability of the evaporation rate, thereby affecting the stability of the material film formation. Therefore, during the evaporation process, the outside of the evaporation source needs to be insulated. In the prior art, a reflective plate is added between the crucible and the evaporation source nozzle to achieve heat insulation. The reflective plate will reflect the radiant heat received to the crucible, increasing the heating thermal efficiency. However, when the evaporation process is completed and cooling is required, the reflective plate will affect the cooling effect of the water cooling system.

[0004] Based on the above problems, CN219772230U proposes an insulation mechanism that facilitates rapid heating and cooling. A flexible insulation board is set between the evaporation source and the cooling component. The insulation board is retracted and extended by a roller to achieve switching between insulation and cooling of the evaporation source. Since the flexible insulation board will have surface wrinkles and damage during long-term use, the insulation effect is reduced, which in turn leads to a shorter service life of the insulation board. Utility Model Content

[0005] Therefore, the technical problem to be solved by the present invention is to provide an evaporation source insulation device and a vacuum evaporation device, which can prevent the insulation from wrinkling and increase the service life of the insulation.

[0006] In order to solve the above technical problems, the utility model provides an evaporation source insulation device, including: a connecting rod; an insulation member, at least one of which is hinged to the connecting rod; a movable rod, the insulation member is hinged to the movable rod; and a driving member, the output end of the driving member is connected to the movable rod.

[0007] In one embodiment of the present invention, the middle position of the thermal insulation member is hinged to the connecting rod via a first hinge shaft, and a plurality of the thermal insulation members are hinged to the connecting rod.

[0008] In one embodiment of the present invention, a plurality of the first hinge shafts are equidistantly arranged along the connecting rod.

[0009] In one embodiment of the present invention, the end of the heat insulating member is hinged to the movable rod via a second hinge shaft, and a plurality of the heat insulating members are hinged to the movable rod.

[0010] In one embodiment of the present invention, the center line of the connecting rod is parallel to the center line of the movable rod.

[0011] In one embodiment of the present invention, an acute angle is formed between the plane where the thermal insulation member is located and the center line of the connecting rod.

[0012] In one embodiment of the present invention, a blocking rod is further included, wherein the end of the blocking rod is connected to the end of the movable rod, and the center line of the blocking rod is perpendicular to the center line of the movable rod.

[0013] In one embodiment of the present invention, the output end of the driving member is connected to a push rod, the blocking rod is slidably connected to a slider, and the end of the push rod is hinged to the slider via a third hinge shaft.

[0014] In one embodiment of the present invention, when the thermal insulation member is in a heat preservation state, the projection of a line from the center of the first hinge shaft to the end of the thermal insulation member away from the movable rod in the direction of the connecting rod is greater than the center distance of adjacent first hinge shafts.

[0015] The utility model also provides a vacuum evaporation device, comprising the above-mentioned evaporation source heat insulation device.

[0016] The above technical solution of the utility model has the following advantages compared with the prior art:

[0017] The utility model discloses an evaporation source heat insulation device and vacuum evaporation equipment. Through the cooperation of a movable rod and a heat insulation member, the blocking area between the evaporation source and the cooling mechanism of the heat insulation member can be changed, thereby realizing the switching of the evaporation source between the heat preservation state and the heat dissipation state. By changing the angle between the heat insulation member and the connecting rod, the cooling speed of the evaporation source can be adjusted. The heat insulation member can adopt a hard heat insulation board, and the heat insulation member can switch between the heat preservation state and the heat dissipation state only by rotation, thereby preventing the heat insulation member from wrinkling and improving the service life of the heat insulation member. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the content of the utility model easier to understand, the utility model is further described in detail below based on the specific embodiments of the utility model and in conjunction with the accompanying drawings, wherein

[0019] Figure 1This is a structural diagram of the heat dissipation state of an evaporation source heat insulation device of the utility model;

[0020] Figure 2 It is a structural diagram of the heat preservation state of the evaporation source insulation device.

[0021] Explanation of the reference numerals in the accompanying drawings in the specification: 1. Connecting rod; 2. Heat insulating member; 3. Movable rod; 4. Stop rod; 5. Driving member; 21. First hinge shaft; 22. Second hinge shaft; 41. Slider; 42. Third hinge shaft; 51. Push rod. DETAILED DESCRIPTION

[0022] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0023] Example 1

[0024] Reference Figure 1 As shown, the evaporation source thermal insulation device of the present invention includes: a connecting rod 1; thermal insulation members 2, at least one of which is hingedly connected to the connecting rod 1; a movable rod 3, the thermal insulation member 2 being hingedly connected to the movable rod 3; and a driving member 5, the output end of the driving member 5 being connected to the movable rod 3. The angle a between the connecting rod 1 and the thermal insulation member 2 is 0°-90° or 90°-180°.

[0025] In this embodiment, an evaporation source insulation device is disposed between the evaporation source and a cooling mechanism. A driving member 5 drives a movable rod 3 to move, thereby adjusting the angle between the insulation member 2 and the connecting rod 1. Generally, the closer the angle a between the insulation member 2 and the connecting rod 1 is to 90°, the worse the insulation effect and the better the heat dissipation effect. The closer the angle a between the insulation member 2 and the connecting rod 1 is to 0°, the better the insulation effect and the worse the heat dissipation effect. Therefore, when the evaporation source needs to be rapidly cooled, the driving member 5 drives the movable rod 3 downward until the angle between the connecting rod 1 and the insulation member 2 approaches 90°. This reduces the area between the insulation member 2 and the cooling mechanism, allowing the cooling mechanism to dissipate heat from the evaporation source. When the evaporation source needs to be rapidly insulated, the driving member 5 drives the movable rod 3 upward until the angle between the connecting rod 1 and the insulation member 2 approaches 0°. This increases the area between the insulation member 2 and the cooling mechanism, gradually increasing the insulation effect on the evaporation source. Thus, the angle can be adjusted as needed to control the evaporation source temperature.

[0026] By cooperating with the movable rod 3 and the thermal insulation member 2, the blocking area of ​​the thermal insulation member 2 between the evaporation source and the cooling mechanism can be changed, thereby realizing the switching of the evaporation source between the heat preservation state and the heat dissipation state. By changing the angle between the thermal insulation member 2 and the connecting rod 1, the cooling speed of the evaporation source can be adjusted. The thermal insulation member 2 can adopt a hard thermal insulation board, and the thermal insulation member 2 can switch between the heat preservation state and the heat dissipation state only by rotation, thereby preventing the thermal insulation member 2 from wrinkling and improving the service life of the thermal insulation member 2.

[0027] The thermal insulation member 2 is flat as a whole and is made of hard insulation material. At least one thermal insulation member 2 is hinged to the connecting rod 1, and the connecting rod 1 is fixedly connected to the evaporation chamber. In this embodiment, the middle position of the thermal insulation member 2 is hinged to the connecting rod 1 through a first hinge shaft 21, so that the thermal insulation member 2 can rotate on the connecting rod 1. A plurality of thermal insulation members 2 are hinged on a single connecting rod 1, so that the thermal insulation member 2 can cover a larger area and can be suitable for larger evaporation sources and cooling mechanisms. The thermal insulation members 2 are parallel to each other, and a plurality of first hinge shafts 21 are equidistantly arranged along the connecting rod 1, so that the distance between any two adjacent thermal insulation members 2 is equal, thereby making the thermal insulation effect of each position of the evaporation source insulation device the same.

[0028] The ends of the multiple thermal insulation elements 2 are hinged to the movable rod 3 via second hinge axes 22. The distance between any two adjacent second hinge axes 22 is equal, and the distance between adjacent second hinge axes 22 is the same as the distance between adjacent first hinge axes 21. The angle between the thermal insulation elements 2 and the connecting rod 1 can be adjusted by changing the position of the movable rod 3. The centerline of the connecting rod 1 is parallel to the centerline of the movable rod 3, ensuring parallelism between the thermal insulation elements 2.

[0029] Reference Figure 1 and Figure 2 As shown, the plane of the thermal insulator 2 forms an acute angle with the centerline of the connecting rod 1. Specifically, when the thermal insulator 2 is in the heat dissipation state, the angle between the thermal insulator 2 and the connecting rod 1 is close to 90°, forming a channel for heat radiation to pass through between adjacent thermal insulators 2. The heat radiation from the evaporation source can pass through the channel between adjacent thermal insulators 2 and be absorbed by the cooling mechanism. When the thermal insulator 2 is in the heat-retaining state, the angle between the thermal insulator 2 and the connecting rod 1 is close to 30° and is smaller than the angle between the thermal insulator 2 and the connecting rod 1 when in the heat dissipation state. The channel between adjacent thermal insulators 2 is tilted, making it difficult for the heat radiation from the evaporation source to pass through the channel between the thermal insulators 2. At the same time, the thermal insulator 2 can reflect the heat radiation, thereby achieving the purpose of heat preservation. By changing the angle between the thermal insulator 2 and the connecting rod 1, the radial area and angle of the channel between adjacent thermal insulators 2 can be adjusted, that is, the overall blocking area of ​​the thermal insulator 2 is adjusted, thereby adjusting the cooling rate of the evaporation source and achieving uniform heat dissipation at all locations of the evaporation source insulation device.

[0030] Preferably, when the thermal insulation member 2 is in a heat-insulating state, the projection of the line from the center of the first hinge shaft 21 to the end of the thermal insulation member 2 away from the movable rod 3 in the direction of the connecting rod 1 is greater than the center distance of the adjacent first hinge shafts 21, that is, the thermal insulation member 2 can block the channel between the first hinge shafts 21, so that the channel between adjacent thermal insulation members 2 is set at an angle, and the heat radiation of the evaporation source cannot pass vertically through the channel between the thermal insulation members 2, thereby improving the overall heat preservation effect of the thermal insulation member 2.

[0031] The output end of the driving member 5 is connected to the movable rod 3. Specifically, the end of the movable rod 3 is also connected to the blocking rod 4. The end of the blocking rod 4 is connected to the end of the movable rod 3, and the center line of the blocking rod 4 is perpendicular to the center line of the movable rod 3. The driving member 5 can be regarded as a motor. The output end of the driving member 5 is connected to the top rod 51. The driving member 5 can drive the top rod 51 to rotate. The side of the blocking rod 4 close to the driving member 5 is slidably connected to the slider 41. The end of the top rod 51 is hinged to the slider 41 through the third hinge shaft 42, so that the driving member 5 can drive the movable rod 3 to move through the top rod 51. Since the moving path of the movable rod 3 is an arc, the slider 41 and the blocking rod 4 will slide relative to each other during the movement of the movable rod 3. The driving member 5 drives the top rod 51 to rotate in the direction close to the connecting rod 1. At this time, the distance between the movable rod 3 and the driving member 5 is reduced, the overall height of the movable rod 3 is reduced, and the heat insulation member 2 is in a heat dissipation state. When the driving member 5 drives the top rod 51 to move to a state nearly perpendicular to the blocking rod 4, the distance between the movable rod 3 and the driving member 5 increases, the overall height of the movable rod 3 rises, and the heat insulating member 2 is in a heat-insulating state.

[0032] In another embodiment, the driving member 5 can be regarded as a cylinder, which can drive the top rod 51 to extend and retract, and the driving member 5 drives the top rod 51 to rise or fall, thereby moving the movable rod 3, thereby completing the switching between the heat preservation state and the heat dissipation state of the evaporation source insulation device.

[0033] During use, the movable rod 3 is moved by the driving member 5, thereby adjusting the angle between the thermal insulation member 2 and the connecting rod 1. When the angle between the thermal insulation member 2 and the connecting rod 1 is large, the thermal radiation from the evaporation source can pass through the channel between adjacent thermal insulation members 2 and be absorbed by the cooling mechanism, and the thermal insulation members 2 are in a heat dissipation state. When the angle between the thermal insulation member 2 and the connecting rod 1 is small, the channel between adjacent thermal insulation members 2 is inclined, making it difficult for the thermal radiation from the evaporation source to pass through the channel between the thermal insulation members 2, and the thermal insulation members 2 are in a heat-retaining state.

[0034] Example 2

[0035] This embodiment also provides a vacuum evaporation device, including the evaporation source insulation device of embodiment one, and also including an evaporation source and a cooling mechanism. Since independent water cooling modules or shared water cooling modules are currently used in large-scale evaporation production equipment, the evaporation source insulation device can be set in different positions according to different water cooling setting modes. When an independent water cooling module is used, a single cooling mechanism is set to surround the evaporation source, and multiple vacuum evaporation devices are arranged in a straight line. The evaporation source insulation device is located between adjacent cooling mechanisms. When heat preservation is required, the cooling mechanism stops working and the evaporation source insulation device is in a heat preservation state, thereby isolating the heat radiation between adjacent evaporation sources; when heat dissipation is required, the cooling mechanism works and the evaporation source insulation device is in a heat dissipation state.

[0036] When a shared water cooling module is used, the evaporation source is located in multiple cooling spaces of the cooling mechanism, and the evaporation source insulation device is located between the cooling mechanism and the evaporation source. When insulation is required, the cooling mechanism stops working and the evaporation source insulation device is in an insulation state; when heat dissipation is required, the cooling mechanism works and the evaporation source insulation device is in a heat dissipation state.

[0037] Multiple evaporation source insulation devices can be connected by a driving rod to flexibly connect the ends of multiple movable rods 3, and the output end of the driving member 5 is connected to the driving rod, thereby driving multiple insulation members 2 to move in the same direction. The driving member 5 provided here can be one or more.

[0038] The utility model provides an evaporation source insulation device and vacuum evaporation equipment. Through the cooperation of the movable rod 3 and the insulation member 2, the blocking area between the evaporation source and the cooling mechanism of the insulation member 2 can be changed, thereby realizing the switching of the evaporation source between the heat preservation state and the heat dissipation state. By changing the angle between the insulation member 2 and the connecting rod 1, the cooling speed of the evaporation source can be adjusted. The insulation member 2 can adopt a hard insulation board, and the insulation member 2 can switch between the heat preservation state and the heat dissipation state only by rotation, thereby preventing the insulation member 2 from wrinkling and improving the service life of the insulation member 2.

[0039] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. An evaporation source insulation device, characterized in that: include: link; a heat insulating member, at least one of the heat insulating members being hingedly connected to the connecting rod; a movable rod, the thermal insulation member being hinged to the movable rod; A driving member, wherein an output end of the driving member is connected to the movable rod.

2. The evaporation source insulation device according to claim 1, characterized in that: The middle position of the heat insulating member is hinged to the connecting rod via a first hinge shaft, and a plurality of the heat insulating members are hinged to the connecting rod.

3. The evaporation source insulation device according to claim 2, characterized in that: The plurality of first hinge shafts are equidistantly arranged along the connecting rod.

4. The evaporation source insulation device according to claim 1, characterized in that: The end of the heat insulating member is hinged to the movable rod through a second hinge shaft, and a plurality of the heat insulating members are hinged to the movable rod.

5. The evaporation source insulation device according to claim 1, characterized in that: The center line of the connecting rod is parallel to the center line of the movable rod.

6. The evaporation source insulation device according to claim 1, characterized in that: An acute angle is formed between the plane where the heat insulation member is located and the center line of the connecting rod.

7. The evaporation source insulation device according to claim 1, characterized in that: It also includes a blocking rod, the end of which is connected to the end of the movable rod, and the center line of the blocking rod is perpendicular to the center line of the movable rod.

8. The evaporation source insulation device according to claim 7, characterized in that: The output end of the driving member is connected to a push rod, the blocking rod is slidably connected to a slider, and the end of the push rod is hinged to the slider through a third hinge shaft.

9. The evaporation source insulation device according to claim 3, characterized in that: When the heat insulating element is in a heat-insulating state, a projection of a line from the center of the first hinge shaft to the end of the heat insulating element away from the movable rod toward the connecting rod is greater than a center distance between adjacent first hinge shafts.

10. A vacuum evaporation equipment comprising the evaporation source insulation device according to any one of claims 1 to 9.

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