Preheating table device

Abstract

The utility model provides a preheating heating table device. The preheating heating table device comprises a base, a heat insulation plate and a heating platform, leather belts are arranged on the fixed side plate and the sliding side plate to drive the carrier to move, after the carrier arrives at the position, the workbench lifting push plate is driven by the lead screw motor to move front and back, the cam follower is driven to move, the workbench lifting side plate is made to conduct lifting movement, and then a product on the carrier is driven to move downwards; a product is heated after being attached to the heating platform, the product is fixed through a gas circuit port of the vacuum boss in the heating process, after heating is completed, the lead screw motor operates in the reverse direction to achieve upward movement of the product on the carrier, and the product moves in the discharging direction through belt transmission. The product is preheated before the silver sintering process and then enters the sintering equipment to be sintered, so that the whole sintering process time is shortened, and a better process effect is obtained.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a preheating heating platform device. Background Art

[0002] With the continuous development of semiconductor technology, the production capacity, efficiency and precision of semiconductor wafer packaging and die bonding equipment are also getting higher and higher.

[0003] Currently, silver sintering technology is one of the most suitable interface connection technologies for wide-gap semiconductor module packaging. It is a key technology in silicon carbide module packaging and is currently the most widely used technology. Compared with traditional connection methods, it has excellent electrical and thermal conductivity and reliability. However, this process suffers from low production efficiency, necessitating the development of new technical solutions to address these issues.

[0004] Preheating the product before sintering in the sintering equipment will shorten the entire sintering process time and achieve better process results. Utility Model Content

[0005] The utility model aims to provide a preheating and heating table device which has a simple structure, is easy to fill and can be slowly released.

[0006] To achieve the above purpose, the technical solution of the utility model is as follows:

[0007] A preheating heating table device, the device includes a base, a heat insulation plate and a heating platform;

[0008] A heat insulation board is provided on the base, an accommodating space is provided between the base and the heat insulation board, and a screw motor is provided in the accommodating space;

[0009] The screw motor is provided with a base, and the base is also slidably connected to the workbench lifting push plate through a guide rail slider, and the screw output shaft of the screw motor is slidably connected to the workbench lifting push plate through a bearing;

[0010] There are cam followers on both ends of the workbench lifting push plate;

[0011] The left and right ends of the base are connected by guide rail sliders to slide up and down and are equipped with workbench lifting side panels;

[0012] The lifting side plate of the workbench is provided with an inclined lifting slot which is connected to the cam follower and is connected to the cam follower through the inclined lifting slot;

[0013] An L-shaped cartridge heater is installed above the insulation board;

[0014] A heating platform is provided above the L-shaped cartridge heater;

[0015] A bottom plate and a vacuum boss are sequentially arranged above the heating platform;

[0016] A set of fixed frames and a set of sliding frames connected by guide rail sliders are fixedly installed on the lifting side panels of the workbench;

[0017] The fixed frames of the two sets of workbench lifting side panels are provided with fixed side panels, and the sliding frames of the two sets of workbench lifting side panels are provided with sliding side panels;

[0018] Both the fixed side plate and the sliding side plate are provided with belts, and both the fixed side plate and the sliding side plate are provided with synchronous wheels, which are connected to the belts on the fixed side plate and the sliding side plate. The two sets of synchronous wheels are synchronously connected through a transmission shaft, and the fixed side plate and the sliding side plate are provided with a driving motor for driving the synchronous wheels to rotate;

[0019] A carrier is provided on the belt.

[0020] Preferably, a lifting column is provided between the fixed frame and the movable frame of the fixed side plate and the sliding side plate, and a rectangular spring is provided between the lifting column and the fixed frame and the sliding frame.

[0021] Preferably, the fixed side panels and the sliding side panels are provided with photoelectric sensors and micro photoelectric sensors.

[0022] Preferably, the top groove on the vacuum boss is provided with an air passage, which is connected to an external vacuum generator.

[0023] The utility model provides a preheating heating table device, which includes a base, a heat insulation plate and a heating platform; a fixed side plate and a sliding side plate are both provided with a belt to drive the carrier to move, and after reaching the position, the workbench lifting push plate is driven by a screw motor to move back and forth, thereby driving the cam follower to move, so that the workbench lifting side plate is lifted and moved, thereby driving the product on the carrier to move downward, and the product is heated after being bonded to the heating platform. Before the heating process, the product is fixed by the air passage of the vacuum boss. After the heating is completed, the screw motor runs in reverse to move the product on the carrier upward, and is then driven by the belt to move downward. By preheating the product before the silver sintering process and then sintering it in the sintering equipment, the entire sintering process time is shortened and better process effects are achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0025] Figure 2 It is a top view of the present utility model.

[0026] Figure 3 It is a left view of the present utility model.

[0027] Figure 4 yes Figure 2AA cross-sectional view.

[0028] Figure 5 yes Figure 2 BB cross-sectional view. DETAILED DESCRIPTION

[0029] The present invention is described in detail below with reference to the accompanying drawings. Example

[0030] like Figure 1-5 As shown, a preheating heating table device includes a base 100, a heat insulation plate 18 and a heating platform 16;

[0031] A heat insulation plate 18 is provided on the base 100 , an accommodation space is provided between the base 100 and the heat insulation plate 18 , and a screw motor 7 is provided in the accommodation space;

[0032] The screw motor 7 is provided with a base 100, and the base 100 is also slidably connected to the workbench lifting push plate 8 through a guide rail slider, and the screw output shaft of the screw motor 7 is slidably connected to the workbench lifting push plate 8 through a bearing;

[0033] The left and right ends of the workbench lifting push plate 8 are provided with cam followers 9;

[0034] The left and right ends of the base 100 are connected to the workbench lifting side panels 10 by means of guide rail sliders for sliding up and down;

[0035] The workbench lifting side plate 10 is provided with an inclined lifting groove 901 that fits in with the cam follower 9 and is connected to the cam follower 9 through the inclined lifting groove 901;

[0036] An L-shaped cartridge heater 14 is provided above the heat insulation plate 18;

[0037] A heating platform 16 is provided above the L-shaped cartridge heater 14;

[0038] The bottom plate 12 and the vacuum boss 17 are sequentially provided above the heating platform 16;

[0039] The workbench lifting side panels 10 are fixedly provided with a set of fixed frames 15a and a set of sliding frames 15b connected by guide rail sliders;

[0040] The fixed frames of the two sets of workbench lifting side panels 10 are provided with fixed side panels 19a, and the sliding frames of the two sets of workbench lifting side panels 10 are provided with sliding side panels 19b;

[0041] The fixed side plate 19a and the sliding side plate 19b are both provided with a belt 4, and the fixed side plate 19a and the sliding side plate 19b are both provided with a synchronous wheel 3, and the synchronous wheels 3 are both transmission-connected with the belts 4 on the fixed side plate 19a and the sliding side plate 19b, and the two sets of synchronous wheels 3 are synchronously transmission-connected through the transmission shaft 2, and the fixed side plate 19a and the sliding side plate 19b are provided with a drive motor 1 for driving the synchronous wheels 3 to rotate;

[0042] A carrier 5 is provided on the belt 4 .

[0043] Preferably, a lifting column 21 is provided between the fixed side plate and the sliding side plate and the fixed frame 15a and the movable frame 15b, and a rectangular spring 11 is provided between the lifting column 21 and the fixed frame 15a and the sliding frame 15b.

[0044] Preferably, a photoelectric sensor 13 and a micro photoelectric sensor 6 are provided on the fixed side plate 19a and the sliding side plate 19b.

[0045] Preferably, the top groove on the vacuum boss 17 is provided with an air passage, and the air passage is connected to an external vacuum generator.

[0046] In this embodiment, multiple heating at different temperatures is adopted, that is, multiple devices of the present invention are connected. In this embodiment, two heating tables are used as an example, that is, the hollow motor 1 provides power. After power is turned on, the motor drives the belts 4 on both sides connected to the transmission shaft 2 and the synchronous wheel 3 to make linear horizontal movements synchronously, so that the carrier 5 and the DBC thereon move in the direction of unloading. After reaching the specified position, the monitoring signal of the micro photoelectric sensor 6 controls the screw motor 7 to drive the workbench lifting push plate 8 to move away from the motor, so that the cam follower 9 connected to the H lifting push plate 8 slides in the slot of the workbench lifting left plate 10 and moves the module downward to compress the rectangular spring 11, and the carrier 5 and the DBC thereon are lowered until the bottom surface of the DBC is in contact with the bottom plate 12. After the photoelectric sensor 13 detects the position signal, it starts the vacuum generator to adsorb the DBC and powers on the L-shaped cartridge heater 14 for heating. When the temperature is reached, the thermocouple 15 monitors the signal and stops heating. At this time, the screw motor 7 is driven to reset and the hollow motor 1 is lifted and the carrier 5 and the DBC thereon are transferred to the second heating station, and the above steps are repeated.

[0047] The principle of the vacuum air path during the heating process is as follows: the air path port is directly connected to the heating platform 16, the bottom plate 12, and the vacuum boss 17. When the air path port generates a vacuum through the vacuum generator, the negative pressure will eventually pass through the top groove of the vacuum boss 17 to adsorb the substrate.

[0048] The preheating stage's heating and temperature control principle: Heating is achieved via an L-shaped cartridge heater 14. The vacuum boss 17 and base plate 12 are both made of materials with excellent thermal conductivity. Ultimately, heat is transferred to the vacuum boss, heating the adsorbed substrate. Temperature regulation is achieved via thermocouples, providing temperature feedback to the vacuum boss 17 of the heated workpiece. An external thermostat then controls the voltage across the heating rod, thus forming a closed-loop temperature control loop with the L-shaped cartridge heater 14. The heated workpiece is separated from the bottom motion module by a thermal insulation plate 18, ensuring the module's temperature remains below 30°C, preventing damage to the motor coils due to overheating. Furthermore, while ensuring temperature control, this preheating stage system also enables staged heating of the substrate (heating to 100°C on the first stage is followed by heating on the second stage, with the structures of both heating stages 1 and 2 being identical), maximizing heating efficiency.

[0049] The above is a detailed description of the present invention in conjunction with specific embodiments, and the specific implementation methods of the present invention should not be considered to be limited to these descriptions. For those skilled in the art of the present invention, if a number of equivalent substitutions or obvious modifications are made without departing from the concept of the present invention and the performance or use are the same, they should be considered to fall within the scope of patent protection of the present invention as determined by the submitted claims.

Claims

1. A preheating heating table device, characterized in that: The device comprises a base (100), a heat insulation plate (18) and a heating platform (16); A heat insulation plate (18) is provided on the base (100), an accommodation space is provided between the base (100) and the heat insulation plate (18), and a screw motor (7) is provided in the accommodation space; The screw motor (7) is provided with a base (100), and the base (100) is also slidably connected to a workbench lifting push plate (8) via a guide rail slider, and the screw output shaft of the screw motor (7) is slidably connected to the workbench lifting push plate (8) via a bearing; Cam followers (9) are provided at both ends of the workbench lifting push plate (8); The left and right ends of the base (100) are connected to the workbench lifting side panels (10) by means of guide rail sliders for sliding up and down; The workbench lifting side plate (10) is provided with an inclined lifting groove (901) that is engaged with the cam follower (9) and is connected to the cam follower (9) via the inclined lifting groove (901); An L-shaped cartridge heater (14) is provided above the heat insulation plate (18); A heating platform (16) is provided above the L-shaped cartridge heater (14); A bottom plate (12) and a vacuum boss (17) are sequentially provided above the heating platform (16); A set of fixed frames (15a) and a set of sliding frames (15b) connected via guide rail sliders are fixedly arranged on the workbench lifting side panels (10); The fixed frames of the two sets of workbench lifting side panels (10) are provided with fixed side panels (19a), and the sliding frames of the two sets of workbench lifting side panels (10) are provided with sliding side panels (19b); The fixed side plate (19a) and the sliding side plate (19b) are both provided with a belt (4), and the fixed side plate (19a) and the sliding side plate (19b) are both provided with a synchronous wheel (3), and the synchronous wheel (3) is connected to the belt (4) on the fixed side plate (19a) and the sliding side plate (19b) by transmission, and the two sets of synchronous wheels (3) are connected by synchronous transmission through a transmission shaft (2), and the fixed side plate (19a) and the sliding side plate (19b) are provided with a driving motor (1) for driving the synchronous wheel (3) to rotate; A carrier (5) is provided on the belt (4).

2. A preheating heating table device according to claim 1, characterized in that: A lifting column (21) is provided between the fixed side plate and the sliding side plate and the fixed frame (15a) and the movable frame (15b), and a rectangular spring (11) is provided between the lifting column (21) and the fixed frame (15a) and the sliding frame (15b).

3. A preheating heating table device according to claim 2, characterized in that: A photoelectric sensor (13) and a micro photoelectric sensor (6) are provided on the fixed side plate (19a) and the sliding side plate (19b).

4. The preheating heating table device according to claim 1, characterized in that: The top groove on the vacuum boss (17) is provided with an air passage, and the air passage is communicated with an external vacuum generator.

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