Wafer box jig structure

Abstract

The utility model relates to a wafer cassette jig structure, which comprises a supporting platform, a wafer cassette, a driving push rod, a push rod, a sliding block and a sliding rod, a wafer is arranged on the wafer cassette, the sliding rod is fixedly arranged below the supporting platform, and the sliding rod is kept still relative to the supporting platform. The sliding block is connected to the sliding rod in a sliding manner, so that the sliding block slides on the sliding rod; one end of the pushing rod is fixedly connected to the sliding block, and the other end of the pushing rod is fixedly connected to the driving pushing rod, so that the sliding block drives the driving pushing rod to advance or retreat when sliding on the sliding rod, and when the driving pushing rod advances or retreats, the driving pushing rod is driven to move forwards or backwards. And the driving push rod pushes the wafer on the wafer box to move so as to transfer the wafer.

Description

Technical Field

[0001] The utility model relates to the field of jigs, and in particular to a wafer box jig structure. Background Art

[0002] Wafer boxes are mainly used to place and transport wafers in semiconductor production. In order to simplify transportation and minimize the risk of contamination, chip manufacturers use wafer boxes to move and store wafers. In the current wafer movement process, the traditional practice is to load the wafers into the wafer box, and then the workers transport the wafer box to the next process. However, manual transportation of wafers is time-consuming and labor-intensive, and it is very easy to cause damage and contamination to the wafers during transportation. To this end, the industry has sought many solutions, and this application came into being. Summary of the Invention

[0003] The purpose of the utility model is to solve the shortcomings of the prior art and to propose a wafer box fixture structure.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions: a wafer box fixture structure, including a support platform, a wafer box, an active pushing rod, a pushing rod, a sliding block, and a sliding rod. The wafer box is equipped with a wafer, the sliding rod is fixedly installed under the support platform, and the sliding rod remains stationary relative to the support platform. The sliding block is slidably connected to the sliding rod, so that the sliding block slides on the sliding rod; one end of the pushing rod is fixedly connected to the sliding block, and the other end of the pushing rod is fixedly connected to the active pushing rod, so that when the sliding block slides on the sliding rod, it drives the active pushing rod forward or backward, and when the active pushing rod moves forward or backward, the active pushing rod pushes the wafer on the wafer box to move, thereby transferring the wafer.

[0005] Furthermore, the wafer box includes a first wafer box, the first wafer box includes a first side panel, a second side panel, a top panel, and a bottom panel, and there is a preset distance between the first side panel and the second side panel, and the two side side panels of the top panel are fixedly connected to the top edge of the first side panel and the top edge of the second side panel, and the bottom panel is fixedly connected to the bottom edge of the first side panel and the bottom edge of the second side panel; a wafer through hole is provided on the first wafer, and the wafer through hole passes through the wafer; a preset number of grooves are provided on the first side panel and the second side panel, and the grooves on the first side panel and the grooves on the second side panel are parallel and have the same height, and the two side edges of the wafer slide into the grooves on the first side panel and the grooves on the second side panel respectively, so that the wafer is loaded into the first wafer box.

[0006] Furthermore, it also includes a passive pushing rod, which is fixedly connected to the active pushing rod, so that when the active pushing rod moves forward or backward, it drives the passive pushing rod to move forward or backward synchronously; the passive pushing rod is used to push the wafer on the wafer box and pass it through the wafer through hole, so that the wafer is transported to a preset position; the fixed connection method between the passive pushing rod and the active pushing rod includes welding, screw / bolt connection, clamping, or one-piece molding.

[0007] Furthermore, the active push rod includes a first section, a second section, and a third section. The two ends of the first section are fixedly connected to the second section and the third section respectively. The second section is perpendicular to the first section, and the third section is perpendicular to the first section. The length extension direction of the second section is opposite to the length extension direction of the third section.

[0008] Furthermore, the active push rod also includes a connecting head, which is fixedly connected to the second section of the active push rod. A plug hole is provided on the connecting head, and one end of the push rod is plugged into the plug hole, so that the push rod and the active push rod are fixedly connected.

[0009] Furthermore, it also includes a first support column and a second support column, the first support column and the second support column are both fixedly mounted on the support platform, and the first support column and the second support column are both located below the support platform, and the two ends of the sliding rod are respectively plugged into the first support column and the second support column, so that the sliding rod is fixedly connected to the first support column and the second support column.

[0010] Furthermore, a sliding through hole is provided on the sliding block, the sliding through hole passes through the sliding block, the sliding through hole is adapted to the sliding rod, and the sliding rod passes through the sliding through hole, so that the sliding block slides on the sliding rod.

[0011] Furthermore, it also includes a follower block, and the other end of the push rod is inserted into the follower block, so that the push rod and the follower block are fixedly connected; the follower block and the sliding block are fixedly connected, so that when the sliding block moves, it drives the follower block to move synchronously.

[0012] Furthermore, a clamping groove is provided on the sliding block, and the follower block is clamped into the clamping groove, so that the follower block and the sliding block are fixedly connected.

[0013] Furthermore, the wafer box also includes a second wafer box. The first wafer box and the second wafer box have the same structure. The first wafer box and the second wafer box are both fixedly mounted on the supporting platform, and the first wafer box and the second wafer are docked.

[0014] The beneficial effects of the present application are: the wafer box fixture provided by the present application has a simple structure and is easy to assemble, and since an active pushing rod is provided, the active pushing rod pushes the wafer to move the wafer to a preset position, thereby reducing the risk of wafer damage and contamination due to negligence during manual transportation of the wafer box. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a structural schematic diagram of a wafer box fixture structure provided by the utility model.

[0016] Figure 2 This is another structural schematic diagram of a wafer box fixture structure provided by the present invention.

[0017] Figure 3 This is a structural schematic diagram of a wafer box of a wafer box fixture structure provided by the present invention.

[0018] Figure 4 This is another structural schematic diagram of a wafer box of the wafer box fixture structure provided by the present invention.

[0019] Figure 5 This is a structural schematic diagram of a sliding block of a wafer box fixture structure provided by the present invention. DETAILED DESCRIPTION

[0020] The present application is further described in detail below by means of specific embodiments in conjunction with the accompanying drawings. Similar elements in different embodiments are numbered with associated similar elements. In the following embodiments, many detailed descriptions are provided to enable the present application to be better understood. However, those skilled in the art will readily appreciate that some of the features may be omitted in different circumstances, or may be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification. This is to avoid the core portion of the present application being overwhelmed by excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail. They can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0021] In addition, the features, operations, or characteristics described in the specification may be combined in any appropriate manner to form various implementations, and the operational steps involved in each embodiment may be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for the purpose of clearly describing a particular embodiment and do not imply a required composition and / or sequence.

[0022] The serial numbers assigned to components herein, such as "first," "second," etc., are used solely to distinguish the objects being described and do not convey any sequential or technical meaning. References to "connection" and "coupling" herein, unless otherwise specified, include both direct and indirect connections (couplings).

[0023] Please refer to Figure 1-5 The present application provides a wafer box fixture structure (hereinafter referred to as the fixture), which includes a support platform 1, a wafer box 2, an active pushing rod 3, a pushing rod 4, a sliding block 7, and a sliding rod 9. The wafer box 2 is equipped with a wafer, and the sliding rod 9 is fixedly installed under the support platform 1, and the sliding rod 9 remains stationary relative to the support platform 1. The sliding block 7 is slidably connected to the sliding rod 9, so that the sliding block 7 slides on the sliding rod 9; one end of the pushing rod 4 is fixedly connected to the sliding block 7, and the other end of the pushing rod 4 is fixedly connected to the active pushing rod 3, so that when the sliding block 7 slides on the sliding rod 9, it drives the active pushing rod 3 forward or backward. When the active pushing rod 3 moves forward or backward, the active pushing rod 3 pushes the wafer on the wafer box 2 to move, thereby transferring the wafer.

[0024] In one embodiment of the present application, the wafer box 2 includes a first wafer box 21, the first wafer box 21 includes a first side panel 211, a second side panel 212, a top panel 214, and a bottom panel 215. There is a preset distance between the first side panel 211 and the second side panel 212. The two side edges of the top panel 214 are fixedly connected to the top edge of the first side panel 211 and the top edge of the second side panel 212. The bottom panel 215 is fixedly connected to the bottom edge of the first side panel 211 and the bottom edge of the second side panel 212. A wafer through hole 210 is provided on the first wafer 21, and the wafer through hole 210 passes through the wafer 2; a preset number of grooves 213 are provided on the first side panel 211 and the second side panel 212, and the grooves 213 on the first side panel 211 and the grooves 213 on the second side panel 212 are parallel and have the same height, and the two side edges of the wafer slide into the grooves 213 on the first side panel 211 and the grooves 213 on the second side panel 212 respectively, so that the wafer is loaded into the first wafer box 2.

[0025] In one embodiment of the present application, the fixture also includes a passive pushing rod 2, which is fixedly connected to the active pushing rod 3, so that when the active pushing rod 3 moves forward or backward, it drives the passive pushing rod 2 to move forward or backward synchronously; the passive pushing rod 2 is used to push the wafer on the wafer box 2 and pass through the wafer through hole 210, so that the wafer is transported to a preset position; the fixed connection method between the passive pushing rod 2 and the active pushing rod 3 includes welding, screw / bolt connection, clamping, or one-piece molding.

[0026] In one embodiment of the present application, the active push rod 3 includes a first section 31, a second section 32, and a third section 33. The two ends of the first section 31 are fixedly connected to the second section 32 and the third section 33, respectively. The second section 32 is perpendicular to the first section 31, and the third section 33 is perpendicular to the first section 31. The length extension direction of the second section 32 is opposite to the length extension direction of the third section 33.

[0027] In one embodiment of the present application, the active push rod 3 also includes a connecting head 34, which is fixedly connected to the second section 32 of the active push rod 3. A plug hole 340 is provided on the connecting head 34, and one end of the push rod 4 is plugged into the plug hole 340, so that the push rod 4 and the active push rod 3 are fixedly connected.

[0028] In one embodiment of the present application, the fixture also includes a first support column 5 and a second support column 6, and the first support column 5 and the second support column 6 are both fixedly mounted on the support platform 1, and the first support column 5 and the second support column 6 are both located below the support platform 1, and the two ends of the sliding rod 9 are respectively inserted into the first support column 5 and the second support column 6, so that the sliding rod 9 is fixedly connected to the first support column 5 and the second support column 6.

[0029] In one embodiment of the present application, a sliding through hole 72 is provided on the sliding block 7, and the sliding through hole 72 passes through the sliding block 7. The sliding through hole 72 is adapted to the sliding rod 9, and the sliding rod 9 passes through the sliding through hole 72, so that the sliding block 7 slides on the sliding rod 9.

[0030] In one embodiment of the present application, the fixture also includes a follower block 8, and the other end of the push rod 4 is inserted into the follower block 8, so that the push rod 4 and the follower block 8 are fixedly connected; the follower block 8 and the sliding block 7 are fixedly connected, so that when the sliding block 7 moves, the follower block 8 is driven to move synchronously.

[0031] In one embodiment of the present application, a snap-fit ​​groove 70 is provided on the sliding block 7 , and the follower block 8 is snapped into the snap-fit ​​groove 70 , thereby fixing the follower block 8 and the sliding block 7 in connection.

[0032] In one embodiment of the present application, the wafer box 2 also includes a second wafer box 22. The first wafer box 21 and the second wafer box 22 have the same structure. The first wafer box 21 and the second wafer box 22 are both fixedly mounted on the support platform 1, and the first wafer box 21 and the second wafer box 22 are docked.

[0033] It should be noted that the wafer box 2 is fixed to the support platform 1 by screws / bolts. Of course, there can be other ways, such as clamping.

[0034] The wafer box fixture provided in the present application has a simple structure and is easy to assemble. In addition, an active push rod is provided to push the wafer to move the wafer to a preset position, thereby reducing the risk of wafer damage and contamination due to negligence during manual transportation of the wafer box.

[0035] The above embodiments are intended only to illustrate the technical concepts and features of the present invention. Their purpose is to enable those familiar with the art to understand the contents of the present invention and implement them accordingly. They are not intended to limit the scope of protection of the present invention. Any equivalent changes or modifications based on the spirit of the present invention are intended to be included in the scope of protection of the present invention.

Claims

1. A wafer box fixture structure, characterized in that: It includes a supporting platform, a wafer box, an active pushing rod, a pushing rod, a sliding block, and a sliding rod. The wafer box is equipped with a wafer, the sliding rod is fixedly installed under the supporting platform, and the sliding rod remains stationary relative to the supporting platform. The sliding block is slidably connected to the sliding rod, so that the sliding block slides on the sliding rod; one end of the pushing rod is fixedly connected to the sliding block, and the other end of the pushing rod is fixedly connected to the active pushing rod, so that when the sliding block slides on the sliding rod, it drives the active pushing rod forward or backward. When the active pushing rod moves forward or backward, the active pushing rod pushes the wafer on the wafer box to move, thereby transferring the wafer.

2. The wafer box fixture structure according to claim 1, characterized in that: The wafer box includes a first wafer box, which includes a first side panel, a second side panel, a top panel, and a bottom panel. There is a preset distance between the first side panel and the second side panel, and the two side panels of the top panel are fixedly connected to the top edge of the first side panel and the top edge of the second side panel, and the bottom panel is fixedly connected to the bottom edge of the first side panel and the bottom edge of the second side panel; a wafer through hole is provided on the first wafer, and the wafer through hole passes through the wafer; a preset number of grooves are provided on the first side panel and the second side panel, and the grooves on the first side panel and the grooves on the second side panel are parallel and have the same height, and the two side edges of the wafer slide into the grooves on the first side panel and the grooves on the second side panel respectively, so that the wafer is loaded into the first wafer box.

3. The wafer box fixture structure according to claim 2, characterized in that: It also includes a passive pushing rod, which is fixedly connected to the active pushing rod, so that when the active pushing rod moves forward or backward, it drives the passive pushing rod to move forward or backward synchronously; the passive pushing rod is used to push the wafer on the wafer box and pass it through the wafer through hole, so that the wafer is transported to a preset position; the fixed connection method between the passive pushing rod and the active pushing rod includes welding, screw / bolt connection, clamping, or one-piece molding.

4. The wafer box fixture structure according to claim 1, characterized in that: The active push rod includes a first section, a second section, and a third section. The two ends of the first section are fixedly connected to the second section and the third section respectively. The second section is perpendicular to the first section, and the third section is perpendicular to the first section. The length extension direction of the second section is opposite to the length extension direction of the third section.

5. The wafer box fixture structure according to claim 4, characterized in that: The active push rod also includes a connecting head, which is fixedly connected to the second section of the active push rod. A plug hole is provided on the connecting head, and one end of the push rod is plugged into the plug hole, so that the push rod and the active push rod are fixedly connected.

6. The wafer box fixture structure according to claim 3, characterized in that: It also includes a first support column and a second support column, the first support column and the second support column are both fixedly mounted on the support platform, and the first support column and the second support column are both located below the support platform, and the two ends of the sliding rod are respectively plugged into the first support column and the second support column, so that the sliding rod is fixedly connected to the first support column and the second support column.

7. The wafer box fixture structure according to claim 6, characterized in that: The sliding block is provided with a sliding through hole, which passes through the sliding block and is adapted to the sliding rod. The sliding rod passes through the sliding through hole, so that the sliding block slides on the sliding rod.

8. The wafer box fixture structure according to claim 7, characterized in that: It also includes a follower block, and the other end of the push rod is inserted into the follower block, so that the push rod and the follower block are fixedly connected; the follower block and the sliding block are fixedly connected, so that when the sliding block moves, the follower block is driven to move synchronously.

9. The wafer box fixture structure according to claim 8, characterized in that: The sliding block is provided with a clamping groove, and the following block is clamped into the clamping groove, so that the following block and the sliding block are fixedly connected.

10. The wafer box fixture structure according to claim 9, characterized in that: The wafer box also includes a second wafer box. The first wafer box and the second wafer box have the same structure. The first wafer box and the second wafer box are both fixedly mounted on the supporting platform, and the first wafer box and the second wafer are docked.

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