Liquid buffer device for MOCVD (Metal Organic Chemical Vapor Deposition) organic source system

Abstract

The utility model relates to a liquid buffer device for an MOCVD (Metal Organic Chemical Vapor Deposition) organic source system, which is arranged on a liquid pump and comprises a metal shell, a quartz tube, an upper end cover, a lower end cover, a liquid inlet pipe and a liquid outlet pipe, the quartz tube is arranged in the metal shell, the upper end cover and the lower end cover are respectively and fixedly arranged at two ends of the metal shell, and the liquid inlet pipe and the liquid outlet pipe are arranged in the metal shell. The upper end cover is provided with the liquid inlet pipe in a penetrating manner, the lower end cover is provided with the liquid outlet pipe in a penetrating manner, the liquid inlet pipe and the liquid outlet pipe are both communicated with the quartz tube, and the liquid inlet pipe is communicated with an exhaust pipeline. According to the utility model, the pulse characteristic of liquid can be greatly reduced, and stable and continuous liquid supply is provided for the atomizer.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid transportation, in particular to a liquid buffer device for an MOCVD organic source system. Background Art

[0002] MOCVD is widely used in the semiconductor and superconducting materials fields. It typically involves dissolving metal organic compounds in a solvent, atomizing the solution, and delivering it to the deposition area. In the semiconductor field, due to the relatively small source volume, bubbling atomization within the source solution is commonly used. However, in the field of second-generation high-temperature superconductors, source volumes are much higher, typically tens of milliliters per minute. Bubbling atomization cannot meet such high flow rates, so the common approach is to use a liquid pump coupled with an atomizer.

[0003] Because the source solution pipeline is directly connected to the vacuum chamber, the liquid pump's sealing requirements are extremely stringent, otherwise inaccurate flow rates will result. Two types of pumps are commonly used in practice: 1. Peristaltic pumps; 2. Plunger pumps. While these two types ensure excellent sealing, they also have significant drawbacks: the solution is pumped out in a pulsed manner, resulting in a pulsed atomization. This further causes the vacuum level within the atomizer wall to fluctuate, significantly hindering process stability. Utility Model Content

[0004] To this end, the technical problem to be solved by the present invention is to overcome the shortcomings of the existing technology and provide a liquid buffer device for an MOCVD organic source system. The device is installed behind the existing liquid pump, which can greatly reduce the pulse characteristics of the liquid and provide a stable and continuous liquid supply for the atomizer.

[0005] In order to solve the above technical problems, the utility model provides a liquid buffer device for an MOCVD organic source system, which is installed on a liquid pump and includes a metal shell, a quartz tube, an upper end cover, a lower end cover, a liquid inlet pipe and a liquid outlet pipe. The quartz tube is arranged inside the metal shell, and the upper end cover and the lower end cover are fixedly installed on both ends of the metal shell. The liquid inlet pipe is provided through the upper end cover, and the liquid outlet pipe is provided through the lower end cover. The liquid inlet pipe and the liquid outlet pipe are both connected to the quartz tube, and the liquid inlet pipe is connected to the exhaust pipe.

[0006] In one embodiment of the present invention, the liquid inlet pipe includes a first liquid inlet pipe and a second liquid inlet pipe, and the first liquid inlet pipe and the second liquid inlet pipe are connected to the exhaust pipe through a tee.

[0007] In one embodiment of the present invention, when the liquid inventory in the quartz tube reaches 1 / 6 of the quartz tube, the internal and external pressures of the quartz tube reach equilibrium.

[0008] In one embodiment of the present invention, sealing rings are provided between the metal shell and the upper end cover and the lower end cover.

[0009] In one embodiment of the present invention, both the upper end cover and the lower end cover are provided with locking members.

[0010] In one embodiment of the present invention, an observation window is provided on the metal shell for observing the liquid level in the quartz tube.

[0011] In one embodiment of the present invention, scale lines are provided on the outer wall of the quartz tube.

[0012] In one embodiment of the present invention, a metering pump is further provided between the liquid inlet pipe and the liquid pump.

[0013] In one embodiment of the present invention, the liquid outlet pipe is connected to the negative pressure cavity.

[0014] In one embodiment of the present invention, a switch valve is provided on the exhaust pipe.

[0015] The working process of the liquid buffer device described in the utility model is as follows:

[0016] Open the exhaust pipe, close the liquid outlet pipe, turn on the liquid pump, make the solution fill about 3 / 4 of the quartz tube, and turn off the liquid pump;

[0017] Close the exhaust pipe and open the liquid outlet pipe. Since the negative pressure chamber connected to the liquid outlet pipe is a vacuum chamber, and the upper part of the quartz tube is at normal atmospheric pressure, under the action of negative pressure, the liquid level drops to about 1 / 6 of the quartz tube. The internal and external pressures of the quartz tube reach equilibrium, and the liquid level in the quartz tube is still.

[0018] Turn on the liquid pump again, and the liquid enters the quartz tube in a pulsed manner from the liquid inlet pipe. Due to the existence of the upper space in the quartz tube, the pulsed liquid is buffered here. The upper space acts like a spring, buffering the pulse to a stable state, so that the flow rate of the liquid at the outlet of the liquid outlet pipe is continuous and stable.

[0019] The above technical solution of the utility model has the following beneficial effects compared with the prior art:

[0020] The utility model discloses a liquid buffer device for an MOCVD organic source system, which is installed behind an existing liquid pump and includes a metal shell, a quartz tube, an upper end cover, a lower end cover, a liquid inlet pipe, and a liquid outlet pipe. The quartz tube is arranged inside the metal shell, and the upper end cover and the lower end cover are fixedly installed at both ends of the metal shell. The liquid inlet pipe is provided through the upper end cover, and the liquid outlet pipe is provided through the lower end cover. The liquid inlet pipe and the liquid outlet pipe are both connected to the quartz tube, and the liquid inlet pipe is connected to the exhaust pipe. The device can greatly reduce the pulse characteristics of the liquid and provide a stable and continuous liquid supply for the atomizer. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to make the content of the utility model easier to understand, the utility model is further described in detail below based on the specific embodiments of the utility model and in conjunction with the accompanying drawings, wherein

[0022] Figure 1 This is a schematic structural diagram of a liquid buffer device in a preferred embodiment of the present invention;

[0023] Figure 2 yes Figure 1 The diagram shows the connection between the liquid buffer device, the metering pump and the liquid pump.

[0024] Explanation of the reference numerals in the accompanying drawings in the specification: 1. Metal casing; 11. Observation window; 2. Quartz tube; 3. Upper end cover; 4. Lower end cover; 5. Liquid inlet pipe; 6. Liquid outlet pipe; 7. Exhaust pipe; 8. Tee; 9. Locking piece; 100. Liquid pump; 101. Metering pump. DETAILED DESCRIPTION

[0025] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0026] Reference Figure 1 As shown, the utility model provides a liquid buffer device for an MOCVD organic source system, which is installed on a liquid pump 100 and includes a metal shell 1, a quartz tube 2, an upper end cover 3, a lower end cover 4, a liquid inlet pipe 5 and a liquid outlet pipe 6. The quartz tube 2 is arranged inside the metal shell 1, and the upper end cover 3 and the lower end cover 4 are fixedly installed at both ends of the metal shell 1. The liquid inlet pipe 5 is penetrated by the upper end cover 3, and the liquid outlet pipe 6 is penetrated by the lower end cover 4. The liquid inlet pipe 5 and the liquid outlet pipe 6 are both connected to the quartz tube 2. The liquid inlet pipe 5 is connected to an exhaust pipe 7, and the exhaust pipe 7 is provided with a switch valve.

[0027] Furthermore, the liquid inlet pipe 5 includes a first liquid inlet pipe and a second liquid inlet pipe, which are connected to the exhaust pipe 7 via a tee 8. The liquid inlet pipe 5 is connected to the liquid pump 100 via a pipe, and the liquid pump 100 transports the liquid along the first liquid inlet pipe, the tee 8, and the second liquid inlet pipe to the quartz tube 2 in the metal housing 1.

[0028] When the liquid inventory in the quartz tube 2 reaches 1 / 6 of the quartz tube 2 , the internal and external pressures of the quartz tube 2 reach equilibrium.

[0029] Furthermore, sealing rings are provided between the metal shell 1 and the upper end cover 3 and the lower end cover 4. The sealing rings improve the sealing performance between the upper end cover 3, the lower end cover 4 and the metal shell 1.

[0030] In this embodiment, the upper end cover 3 and the lower end cover 4 are both provided with locking members 9. The locking members 9 fix the upper end cover 3 and the lower end cover 4 to the two ends of the metal shell 1.

[0031] Furthermore, an observation window 11 is provided on the metal shell 1 for observing the liquid level in the quartz tube 2 .

[0032] In addition, scale lines are provided on the outer wall of the quartz tube 2. The scale lines are designed to observe the liquid inventory in the quartz tube 2.

[0033] Furthermore, a metering pump 101 is provided between the liquid inlet pipe 5 and the liquid pump 100. The metering pump 101 can measure the liquid entering the quartz tube 2, so as to control the opening or closing of the liquid pump 100.

[0034] Based on the liquid buffer device in the above embodiment, when the liquid outlet pipe 6 is connected to the negative pressure cavity, its working process is as follows:

[0035] Open the exhaust pipe 7, close the liquid outlet pipe 6, turn on the liquid pump 100, fill the quartz tube 2 with the solution to about 3 / 4 of the position, and turn off the liquid pump 100;

[0036] Close the exhaust pipe 7 and open the liquid outlet pipe 6. Since the negative pressure chamber connected to the liquid outlet pipe 6 is a vacuum chamber, and the upper part of the quartz tube 2 is at normal atmospheric pressure, under the action of negative pressure, the liquid level drops to about 1 / 6 of the quartz tube 2. The internal and external pressures of the quartz tube 2 reach equilibrium, and the liquid level in the quartz tube 2 is still.

[0037] Turn on the liquid pump 100 again, and the liquid enters the quartz tube 2 in a pulsed manner from the liquid inlet pipe 5. Due to the existence of the upper space in the quartz tube 2, the pulsed liquid is buffered here. The upper space acts like a spring, buffering the pulse to a stable state, so that the flow rate of the liquid at the outlet of the liquid outlet pipe 6 is continuous and stable.

[0038] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A liquid buffer device for an MOCVD organic source system, mounted on a liquid pump, characterized by: It includes a metal shell, a quartz tube, an upper end cover, a lower end cover, a liquid inlet pipe and a liquid outlet pipe. The quartz tube is arranged inside the metal shell. The upper end cover and the lower end cover are fixedly installed on both ends of the metal shell. The liquid inlet pipe is set through the upper end cover, and the liquid outlet pipe is set through the lower end cover. The liquid inlet pipe and the liquid outlet pipe are both connected to the quartz tube, and the liquid inlet pipe is connected to the exhaust pipe.

2. The liquid buffer device for an MOCVD organic source system according to claim 1, characterized in that: The liquid inlet pipe includes a first liquid inlet pipe and a second liquid inlet pipe, and the first liquid inlet pipe and the second liquid inlet pipe are connected to the exhaust pipe through a tee.

3. The liquid buffer device for an MOCVD organic source system according to claim 1, characterized in that: When the liquid inventory in the quartz tube reaches 1 / 6 of the quartz tube, the internal and external pressures of the quartz tube reach equilibrium.

4. The liquid buffer device for an MOCVD organic source system according to claim 1, characterized in that: Sealing rings are provided between the metal shell and the upper end cover and the lower end cover.

5. The liquid buffer device for an MOCVD organic source system according to claim 4, characterized in that: The upper end cover and the lower end cover are both provided with locking pieces.

6. The liquid buffer device for an MOCVD organic source system according to claim 1, characterized in that: The metal shell is provided with an observation window for observing the liquid level in the quartz tube.

7. The liquid buffer device for an MOCVD organic source system according to claim 6, characterized in that: Scale lines are provided on the outer wall of the quartz tube.

8. The liquid buffer device for an MOCVD organic source system according to claim 1, characterized in that: A metering pump is also provided between the liquid inlet pipe and the liquid pump.

9. The liquid buffer device for an MOCVD organic source system according to claim 1, characterized in that: The liquid outlet pipe is connected to the negative pressure cavity.

10. The liquid buffer device for an MOCVD organic source system according to claim 1, characterized in that: The exhaust pipe is provided with an on-off valve.

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