Electrostatic dust collection device and semiconductor carrying crown block

Abstract

The utility model provides an electrostatic dust collection device which is used for a semiconductor carrying crown block and comprises a base, a shell buckled on the base and a loading and unloading module used for being connected with the crown block. An air inlet and an air outlet are formed in the shell; the base is provided with a fan module and an electrostatic dust removal module, the air inlet and the air outlet form an air duct, the fan module is arranged in the air duct and is close to the air outlet, and the electrostatic dust removal module is arranged in the air duct between the air inlet and the fan module and is used for removing dust and eliminating static electricity. The electrostatic dust collection device disclosed by the utility model can be used for timely removing pollutants generated by the crown block so as to keep the space cleanliness.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an electrostatic dust removal device and a semiconductor transport overhead crane. Background Art

[0002] With the advancement of semiconductor technology, 300mm silicon wafers have gradually replaced 200mm silicon wafers to become the mainstream, and the weight of each wafer box has also increased from 4 kg to 9 kg. Therefore, manual handling is still required, which is inefficient and poses a risk to personal safety. At the same time, semiconductor manufacturing has increasingly stringent requirements for plant utilization and production cycle time. The importance of automated material handling systems (AMHS) as the link connecting silicon wafers between manufacturing modules has become increasingly prominent.

[0003] The overhead crane uses high voltage to generate magnetic buoyancy, and the resulting static electricity from its magnetic field easily attracts fine dust particles from the surrounding environment. Furthermore, the high speed of the transport vehicle system, coupled with the numerous joints and turns along the track that circulates around the cleanroom, can easily cause the crane to vibrate significantly. Over years of operation, friction between its components and the track generates a large amount of dust particles, which are dispersed throughout the cleanroom as the crane moves and vibrates. This dust can cause defects in chip production and severely impact chip yield. Summary of the Invention

[0004] The purpose of the utility model is to provide an electrostatic dust removal device and a semiconductor transport crane, which are used to promptly remove pollutants generated by the crane to maintain the cleanliness of the space.

[0005] In order to solve the above technical problems, the present invention provides a device comprising a base, a shell buckled on the base, and a loading and unloading module for connecting with an overhead travelling crane;

[0006] The shell is provided with an air inlet and an air outlet;

[0007] A fan module and an electrostatic dust removal module are provided on the base, the air inlet and the air outlet form an air duct, the fan module is arranged in the air duct and close to the air outlet, and the electrostatic dust removal module is arranged in the air duct between the air inlet and the fan module for removing dust and eliminating static electricity.

[0008] Optionally, the shell includes a top wall portion and a plurality of side wall portions surrounding the top wall portion, a plurality of air inlets are arranged on the side wall portions and face a plurality of directions, and the air outlet is arranged on the top wall portion of the shell.

[0009] Optionally, the shell further includes a planar side wall portion, and the loading and unloading module is provided on the planar side wall portion for connecting with the side wall of the overhead travelling vehicle facing the moving direction.

[0010] Optionally, the air outlet is provided with a plurality of exhaust fan blades with adjustable directions.

[0011] Optionally, the fan module includes a fan unit close to the air outlet and a bracket supporting the fan unit.

[0012] Optionally, the electrostatic dust removal module includes a filter element and an electrostatic elimination unit, the filter element is arranged toward the air inlet, the electrostatic elimination unit is arranged in the filter element, and the filter element is detachably connected to the base.

[0013] Optionally, the static elimination unit includes a plurality of anode plates and cathode plates that are alternately arranged at intervals.

[0014] Optionally, a filter element life feedback module is also included, which includes a filter element life detection unit and a filter element life prompt unit. The filter element life detection unit monitors the life of the filter element, and the filter element life prompt unit is connected to the filter element life detection unit signal to prompt the life of the filter element.

[0015] Optionally, a power supply module and / or a power supply module are further included to provide power, and the power supply module is electrically connected to the overhead travelling vehicle to supply power.

[0016] According to another aspect of the present invention, a semiconductor transport overhead crane is further provided, wherein the semiconductor transport overhead crane comprises the electrostatic dust removal device as described above.

[0017] In summary, the electrostatic dust removal device provided by the present invention is used for a semiconductor transport crane and includes a base, a housing fastened to the base, and a loading and unloading module for connecting to the crane. The housing is provided with an air inlet and an air outlet; the base is provided with a fan module and an electrostatic dust removal module. The air inlet and air outlet form an air duct, the fan module is disposed in the air duct and is positioned near the air outlet. The electrostatic dust removal module is disposed in the air duct between the air inlet and the fan module and is used to remove dust and eliminate static electricity. In the present invention, the electrostatic dust removal device provided on the crane can eliminate dust particles and other pollutants around the crane, ensuring the cleanliness of the space surrounding it, thereby facilitating improved yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Those skilled in the art should understand that the accompanying drawings are provided to better understand the present invention and do not constitute any limitation to the present invention.

[0019] Figure 1 is a schematic structural diagram of the electrostatic precipitator provided in this embodiment;

[0020] Figure 2 is a schematic top view of the electrostatic precipitator provided in this embodiment;

[0021] Figure 3a is a schematic top view of another housing provided in this embodiment;

[0022] Figure 3b is a schematic top view of other air outlets provided in this embodiment;

[0023] Figure 4a is a schematic top view of a base provided in this embodiment;

[0024] Figure 4b It is a top view schematic diagram of another base provided in this embodiment.

[0025] In the attached figure:

[0026] 10-housing; 11-side wall; 110-first side wall; 12-top wall; 13-air inlet; 14-air outlet; 15-exhaust fan blades; 16-loading and unloading module; 20-base; 21-fan module; 21a-fan unit; 21b-bracket; 22-filter element; 23-static elimination unit; 23a-anode plate; 23b-cathode plate; 24-electrostatic dust removal module; 25-filter element life feedback module. DETAILED DESCRIPTION

[0027] To further clarify the objectives, advantages, and features of the present invention, the present invention is further described below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are highly simplified and not drawn to scale, and are intended solely to facilitate and clearly illustrate the objectives of the embodiments of the present invention. Furthermore, the structures shown in the drawings are often portions of the actual structures. In particular, different drawings may require different emphases and may use different scales.

[0028] It should be understood that when an element or layer is referred to as being "on" or "connected to" another element or layer, it can be directly on or connected to the other element or layer, or there can be intervening elements or layers. Conversely, when an element is referred to as being "directly on" or "directly connected to" another element or layer, there are no intervening elements or layers. Although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are merely used to distinguish one element, component, region, layer, or part from another. Therefore, without departing from the teachings of the present invention, the first element, component, region, layer, or part discussed below may be represented as a second element, component, region, layer, or part. Spatially relational terms such as "under," "below," "below," "above," "above," etc. may be used herein for convenience of description to describe the relationship between an element or feature shown in the figures and other elements or features. It should be understood that, in addition to the orientations shown in the figures, spatial relationship terms are intended to also include different orientations of devices in use and operation. For example, if the device in the drawings is flipped, then, the elements or features described as "under...", "below," or "below" will be oriented as "on" other elements or features. The device can be oriented differently (rotated 90 degrees or other orientations) and the spatial descriptors used herein are interpreted accordingly. The purpose of the terms used herein is only to describe specific embodiments and is not intended to limit the present invention. When used herein, the singular forms "one," "an," and "said / the" are also intended to include plural forms unless the context clearly indicates otherwise. It should also be understood that the term "including" is used to determine the presence of features, steps, operations, elements, and / or parts, but does not exclude the presence or addition of one or more other features, steps, operations, elements, parts, and / or groups. When used herein, the term "and / or" includes any and all combinations of the relevant listed items.

[0029] This embodiment provides an electrostatic dust removal device.

[0030] Figure 1 is a schematic structural diagram of the electrostatic precipitator provided in this embodiment, Figure 2 Schematic diagram of the top view of the electrostatic precipitator provided in this embodiment. Figure 1 and Figure 2 As shown, the electrostatic precipitator provided in this embodiment includes a base 20 , a shell 10 and a loading and unloading module 16 .

[0031] The housing 10 is mounted on the base 20 and is provided with an air inlet 13 and an air outlet 14. The air inlet 13 and the air outlet 14 form an air duct through the housing 10 for air circulation, thereby removing dust particles and other pollutants from the passing air and maintaining the cleanliness of the surrounding space. The housing 10 may include a top wall 12 and a side wall 11 surrounding the top wall 12. The top wall 12 and the side wall 11 are provided with the air inlet 13 and the air outlet 14.

[0032] like Figure 2 As shown, in this embodiment, the housing 10 can be flat and cylindrical, with a side wall 11 (first side wall 110) provided with a mounting module 16 for mounting the electrostatic precipitator on the side wall of the overhead crane. The first side wall 110 can match the side of the overhead crane on which it is mounted to facilitate assembly. The electrostatic precipitator and the overhead crane can be connected by any suitable detachable connection. For example, a bolted connection can be used. The mounting module 16 can include a mounting hole provided on the first side wall 110 of the housing 10 and a cushioning pad (e.g., a rubber pad) provided around the mounting hole. In one example, the side of the overhead crane on which the electrostatic precipitator is mounted is planar, and the first side wall 110 can be a flat side wall. In another example, the side of the overhead crane on which the electrostatic precipitator is mounted is the side wall facing the direction of movement (forward direction), and the air inlet 13 of the electrostatic precipitator mounted on the overhead crane serves as the wind impact surface, facilitating the entry of gas into the air duct for purification without increasing the wind resistance of the overhead crane.

[0033] The air inlet 13 can be provided on the other side walls 11 of the housing 10 except the first side wall 110, that is, the air inlet 13 faces multiple (at least two) directions to form an air inlet surface in multiple directions, so as to improve the air intake effect and thus improve the filtration efficiency. The air outlet 14 can be provided on the top wall 12 of the housing 10 to discharge the purified gas. Please continue to refer to Figure 2 In this embodiment, the cross section of the housing 10 (viewed from above) may be a rounded rectangular shape, the air inlet 13 may be a hole-shaped (e.g., a circular hole), and multiple air inlets 13 are arranged in an array on the second side wall portion 11, the third side wall portion 11, and the fourth side wall portion 11. The air outlet 14 may be a long strip (e.g., a rounded rectangular shape), and the number of air outlets 14 may be one. Multiple rotatable exhaust fan blades 15 are arranged in parallel in the air outlet 14 to adjust the air outlet direction. In another example of this embodiment, the cross section of the housing 10 may also be any suitable flat shape, such as Figure 3a The semi-ellipsoidal shape shown in FIG. 1 has multiple air inlets provided on the curved sidewall of the semi-ellipsoidal shape. Figure 3bAs shown, the top wall 12 of the housing 10 may include multiple air outlets 14, wherein some of the air outlets 14 extend in a first direction, and other of the air outlets 14 extend in a second direction, the first direction being orthogonal to the second direction. The air outlets 14 in both directions are each provided with exhaust fan blades 15 in corresponding directions, for adjusting the air outlet direction from multiple directions. Of course, it is also feasible to not provide exhaust fan blades 15 in the air outlets 14, or to provide exhaust fan blades 15 in only some of the air outlets 14.

[0034] Please refer to Figure 1 The base 20 is detachably connected to the housing 10, and its shape can be close to the top wall 12 of the housing 10 to form a sealed connection with the housing 10. A fan module 21 and an electrostatic dust removal module 24 are provided on the base 20. The air inlet 13 and the air outlet 14 form an air duct. The fan module 21 is arranged in the air duct and is arranged close to the air outlet 14. The electrostatic dust removal module 24 is arranged in the air duct between the air inlet 13 and the fan module 21. The fan module 21 is used to form a negative pressure environment to inhale gas from the air inlet 13 and discharge it from the air outlet 14. The fan module 21 may include a fan unit 21a and a bracket 21b. The fan unit 21a is arranged close to the air outlet 14, or the edge of the fan unit 21a is in contact with the edge of the air outlet 14. The bracket 21b is used to support (fix) the fan unit 21a. The electrostatic dust removal module 24 may include a filter element 22 and an electrostatic elimination unit 23. The filter element 22 is positioned near the air inlet 13 and faces the air inlet 13, and is used to filter out pollutants such as dust particles in the gas. The electrostatic elimination unit 23 is positioned in the air duct within the filter element 22 to eliminate static electricity. The filter element 22 may be annular in shape similar to the housing 10. One end of the filter element 22, which is close to the base 20, may be detachably and tightly connected to the base 20 to prevent leakage and facilitate replacement of the filter element 22. The other end of the filter element 22 is detachably and tightly connected to the edge of the fan unit 21a. The material of the filter element 22 may be, for example, any one of polytetrafluoroethylene, polyperfluoroethylene propylene, polypropylene, and polyethylene.

[0035] In some examples, such as Figure 4a As shown, the fan unit 21a is detachably connected to the bracket 21b, and the filter element 22 passes through the bracket 21b. The plane size of the fan unit 21a is larger than the outer diameter of the filter element 22. Therefore, the fan unit 21a can be covered on the filter element 22 to form a closed connection. In another example, Figure 4b As shown, the fan unit 21a is fixedly connected to the bracket 21b, and the shape and plane size of the fan unit 21a are the same as or close to the inner shape and inner diameter size of the filter element 22. Therefore, the filter element 22 can pass through the fan unit 21a and the bracket 21b and form a detachable and sealed connection with the edge of the fan unit 21a, such as an interference fit or a snap connection.

[0036] Please refer to Figure 1The static elimination unit 23 may include a plurality of alternating anode plates 23a and cathode plates 23b. The electrostatic field formed between the anode plates 23a and cathode plates 23b charges the filter screen with static electricity, thereby eliminating static electricity from the filtered air. Of course, other types of static elimination units 23 are also feasible, such as a point discharge type.

[0037] Please refer to Figure 1 The base 20 may also be provided with a filter life feedback module 25 for monitoring and indicating the filter life. The filter life feedback module 25 may include a filter life detection unit and a filter life indication unit. The filter life detection unit may monitor the life of the filter 22, and the filter life indication unit is signal-connected to the filter life detection unit to indicate the life of the filter 22. In one example, the filter life detection unit is a sensor located on the inside and / or outside of the filter. The sensor detects the difference in gas flow or pressure between the inside and outside of the filter, or measures the particle concentration inside the filter, to detect the filter life. In one example, the filter life indication unit may be a display screen for displaying the remaining life or elapsed life of the filter 22. A window may be provided in the side wall of the housing 10, and the filter life indication unit may be embedded in the window, or a transparent sheet may be provided over the window to display the filter life indication unit. In some examples, the filter life detection unit may also count the current operating time of the filter 22 and calculate the filter life by dividing the current operating time of the filter 22 by the preset operating time of the filter 22. In addition, the filter life reminder unit can also be an audible and visual alarm, which emits a reminder sound or a reminder light when the life of the filter element 22 is about to end. Of course, the filter life reminder unit can also have the above-mentioned display that shows the life and the audible and visual alarm.

[0038] It should be noted that, in addition to providing a power module (such as a rechargeable battery unit) on the base 20 to provide power to the electrostatic precipitator, a power supply module can also be provided on the base 20 to electrically connect the power supply module to the overhead crane to obtain power from the overhead crane.

[0039] This embodiment further provides a semiconductor transport overhead crane, which includes the above-mentioned electrostatic dust removal device, and utilizes the electrostatic dust removal device to eliminate dust particles and other pollutants around the overhead crane to ensure the cleanliness of the space around it.

[0040] In summary, the electrostatic dust removal device provided by the present invention is used for a semiconductor transport crane and includes a base, a housing fastened to the base, and a loading and unloading module for connecting to the crane. The housing is provided with an air inlet and an air outlet; the base is provided with a fan module and an electrostatic dust removal module. The air inlet and air outlet form an air duct, the fan module is disposed in the air duct and is positioned near the air outlet. The electrostatic dust removal module is disposed in the air duct between the air inlet and the fan module and is used to remove dust and eliminate static electricity. In the present invention, the electrostatic dust removal device provided on the crane can eliminate dust particles and other pollutants around the crane, ensuring the cleanliness of the space surrounding it, thereby facilitating improved yield.

[0041] The above description is only a description of the preferred embodiment of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. An electrostatic dust removal device for a semiconductor transport overhead crane, characterized in that: It includes a base, a shell mounted on the base, and a loading and unloading module for connecting with the overhead travelling crane; The shell is provided with an air inlet and an air outlet; A fan module and an electrostatic dust removal module are provided on the base, the air inlet and the air outlet form an air duct, the fan module is arranged in the air duct and close to the air outlet, and the electrostatic dust removal module is arranged in the air duct between the air inlet and the fan module for removing dust and eliminating static electricity.

2. The electrostatic precipitator according to claim 1, characterized in that: The shell includes a top wall portion and a plurality of side walls surrounding the top wall portion. The plurality of air inlets are arranged on the side walls and face in a plurality of directions. The air outlet is arranged on the top wall portion of the shell.

3. The electrostatic precipitator according to claim 2, characterized in that: The housing further comprises a planar side wall portion, and the loading and unloading module is arranged on the planar side wall portion and is used to be connected with the side wall of the overhead travelling vehicle facing the moving direction.

4. The electrostatic precipitator according to claim 1, characterized in that: The air outlet is provided with a plurality of exhaust fan blades with adjustable directions.

5. The electrostatic precipitator according to claim 1, characterized in that: The fan module includes a fan unit close to the air outlet and a bracket supporting the fan unit.

6. The electrostatic precipitator according to claim 1, characterized in that: The electrostatic dust removal module includes a filter element and an electrostatic elimination unit. The filter element is arranged toward the air inlet. The electrostatic elimination unit is arranged in the filter element. The filter element is detachably connected to the base.

7. The electrostatic precipitator according to claim 6, characterized in that: The static elimination unit includes a plurality of anode plates and cathode plates that are alternately arranged at intervals.

8. The electrostatic precipitator according to claim 1, characterized in that: It also includes a filter element life feedback module, which includes a filter element life detection unit and a filter element life prompt unit. The filter element life detection unit monitors the life of the filter element, and the filter element life prompt unit is connected to the filter element life detection unit signal to prompt the life of the filter element.

9. The electrostatic precipitator according to claim 1, characterized in that: It also includes a power supply module and / or a power supply module for providing power, and the power supply module is electrically connected to the overhead traveling vehicle to supply power.

10. A semiconductor transport overhead crane, characterized in that: The semiconductor transport overhead crane includes the electrostatic precipitator according to any one of claims 1 to 9.

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