Polishing device
By designing a grinding device that cooperates with follower and clamping components, the problem of easy breakage of single crystal silicon products during grinding is solved, achieving a more stable grinding effect and higher surface quality.
Patent Information
- Application Number
- CN202422576929.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-23
- Publication Date
- 2025-08-29
- Estimated Expiration
- 2034-10-23
AI Technical Summary
Existing grinding devices are prone to product breakage when grinding single crystal silicon products, mainly because the single crystal silicon has high hardness and high brittleness, and is prone to breakage when the load exceeds the elastic limit.
A grinding device is designed to clamp both ends of the product by a follower and a first clamping assembly, friction is generated with the polished area of the product by using the polished part, and the driving assembly makes the follower move with the product, reducing the thrust force in the polished area, thereby reducing the risk of fracture.
It effectively reduces the risk of fracture of single crystal silicon products during grinding, improves the stability of the grinding process and the surface quality of the product.
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Figure CN223277732U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the technical field of polishing, and in particular to a polishing device. Background Art
[0002] With the continuous development of modern high-tech and cutting-edge technologies, the application of monocrystalline silicon is becoming increasingly widespread. Due to its excellent properties, monocrystalline silicon can be used as a manufacturing material for satellites, missiles, detectors, and other infrared optical equipment, and is widely used in various manufacturing fields. Usually, after the processing of monocrystalline silicon products is completed, the processing surface of the monocrystalline silicon products needs to be further ground. During the grinding process of the processing surface of the monocrystalline silicon product, the grinding wheel has a rolling and micro-cutting effect, which causes micro-fractures on the processing surface of the monocrystalline silicon product, removes the saw marks and surface damage layer caused by the processing of the monocrystalline silicon product, and effectively corrects the warpage, flatness, and smoothness of the processing surface of the monocrystalline silicon product.
[0003] However, due to the high hardness and brittleness of single-crystal silicon, and the relatively close fracture strength and yield strength, single-crystal silicon products will break when the load they are subjected to even slightly exceeds their elastic limit. The polishing devices used in related art can easily cause single-crystal silicon products to break during the polishing process. Utility Model Content
[0004] In view of this, an embodiment of the present disclosure provides a grinding device, which solves the problem that the grinding device easily causes product breakage during the grinding process.
[0005] 18. The swiftly and minutely adjusting device for a wood-planer working table as claimed in claim 17, wherein said linking member is a pivotal member and a bracket of said sliding member. said linking member being a pivotal member; and said adjusting base being a pivotal member for said wood-planer working table. said linking member being a pivotal member for said wood-planer working table.
[0006] In some embodiments, the first connecting component has a limiting portion extending along the first direction, the follower has a limiting hole corresponding to the limiting portion, the limiting portion penetrates into the corresponding limiting hole, and there is a gap between the limiting portion and the inner wall of the limiting hole.
[0007] In some embodiments, the first connecting component includes: a follower shaft, the first end of which is rotatably connected to the first supporting component; a connecting member, the first end of which has the limiting portion and the first blocking portion connected to each other, the first blocking portion abutting against an end of the follower close to the first clamping component, the second end of the connecting member passing through an end of the limiting hole away from the first clamping component, and connected to the second end of the follower shaft; a first elastic member, which is sleeved on the connecting member, and the two ends of the first elastic member abut against the follower and the follower shaft respectively.
[0008] In some embodiments, the second end of the connecting member has a first threaded portion; wherein the second end of the follower shaft has a second threaded portion, and the second threaded portion is threadedly connected to the first threaded portion.
[0009] In some embodiments, the driving assembly includes: a telescopic member, connected to the first clamping assembly and capable of telescoping in a direction close to or away from the follower to drive the first clamping assembly to move in a direction close to or away from the follower; a second connecting assembly, connected to one end of the telescopic member away from the first clamping assembly; a first driving source, connected to the second connecting assembly, and configured to drive the second connecting assembly to rotate, so that the second connecting assembly drives the telescopic member to rotate, so that the telescopic member drives the first clamping assembly to rotate.
[0010] In some embodiments, the grinding device also includes: a second support assembly, configured to support the first drive source; wherein the first drive source has an output shaft, and the second connecting assembly includes: a driven shaft, rotatably connected to the second support assembly, and connected to the end of the telescopic member away from the first clamping assembly; a coupling, connecting the output shaft and the driven shaft, wherein the first drive source drives the coupling to rotate, so that the coupling drives the driven shaft to rotate, so that the driven shaft drives the telescopic member to rotate.
[0011] In some embodiments, the second clamping assembly includes: a second driving source, which is arranged on the side of the follower; a third support assembly, which is connected to the second driving source, so that the second driving source can drive the third support assembly to move in a direction close to or away from the follower; a clamping member, which is located on the side of the third support assembly close to the follower and is connected to the third support assembly, and is configured to clamp the polishing member, and the third support assembly can drive the clamping member to move in a direction close to or away from the follower, so that the clamping member drives the polishing member to move in a direction close to or away from the follower, so that the polishing member abuts against the polished area or moves away from the polished area.
[0012] In some embodiments, the third support assembly includes: a first support member, connected to the second driving source, the first support member having at least one through hole; at least one second support member, having a second blocking portion and a supporting portion connected to each other, the second blocking portion being capable of abutting against a side of the first support member away from the second support member, the supporting portion passing through the through hole and connected to the clamping member; at least one second elastic member, mounted on the support portion, the two ends of the second elastic member respectively abutting against the first support member and the clamping member.
[0013] In some embodiments, there are multiple through holes, multiple second support members, and multiple second elastic members, and the multiple through holes, multiple second support members, and multiple second elastic members are arranged in a one-to-one correspondence.
[0014] In some embodiments, the grinding device further includes: a cooling component configured to provide a cooling medium, wherein the cooling component has a medium outlet, the medium outlet is located above the follower, and the cooling medium can flow out of the medium outlet and flow toward the grinding area.
[0015] The grinding device provided in the embodiment of the present disclosure utilizes a follower and a first clamping assembly to clamp the two ends of the product, and the grinded area of the product is close to the follower. When the product is grinded, friction is generated between the grinding piece and the grinded area of the product, and the grinding piece generates a thrust on the grinded area of the product. The end of the product with the grinded area can drive the follower to move in a direction away from the grinding piece to reduce the thrust on the grinded area of the product, thereby reducing the risk of product breakage. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 Shown is a schematic diagram of an application scenario of a grinding device provided by an embodiment of the present disclosure.
[0017] Figure 2 Shown is a cross-sectional view of a first connecting assembly and a follower provided in one embodiment of the present disclosure.
[0018] Figure 3 FIG2 is a top view of a grinding device provided by an embodiment of the present disclosure, excluding the second clamping assembly.
[0019] Figure 4 Shown Figure 3 A partial enlarged view of the grinding device in area A is shown.
[0020] Figure 5 Shown is a schematic structural diagram of a second clamping assembly provided in one embodiment of the present disclosure.
[0021] Figure 6 The figure shows a schematic structural diagram of a grinding device provided by an embodiment of the present disclosure excluding a second clamping assembly.
[0022] Reference numerals:
[0023] 10. Grinding device; 100. First supporting assembly; 200. First connecting assembly; 210. Follower shaft; 2101. First end of follower shaft; 2102. Second end of follower shaft; 2112. Second threaded portion; 220. Connector; 2201. First end of connector; 2202. Second end of connector; 230. First elastic member; 201. Limiting portion; 202. First blocking portion; 203. First threaded portion; 300. Follower; 301. Limiting hole; 400. First clamping assembly; 401. Rotation axis of first clamping assembly; 500. Second clamping assembly; 510. Second driving source; 520. Third supporting assembly; 5210. First supporting member; 5 211. Through hole; 5220. Second supporting member; 5221. Second blocking portion; 5222. Supporting portion; 5230. Second elastic member; 5240. Connecting sleeve; 530. Clamping member; 5301. Limiting groove; 600. Driving assembly; 610. Telescopic member; 620. Second connecting assembly; 6210. Driven shaft; 6220. Coupling; 630. First driving source; 6301. Output shaft; 700. Second supporting assembly; 800. Cooling assembly; 801. Medium outlet; 900. Fourth supporting assembly; X1. First direction; 2. Product; 2001. First end of the product; 2002. Second end of the product; 2012. Polished area; 3. Polishing part. DETAILED DESCRIPTION
[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present disclosure in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present disclosure without making any creative efforts shall fall within the scope of protection of the present disclosure.
[0025] The specific structure of the grinding device is described below in conjunction with embodiments.
[0026] Figure 1 Shown is a schematic diagram of an application scenario of a grinding device provided by an embodiment of the present disclosure. Figure 2 FIG. 1 is a cross-sectional view of a first connecting assembly and a follower provided in an embodiment of the present disclosure. Figure 1 and Figure 2 As shown, a grinding device 10 is configured to grind a product 2. The grinding device 10 includes: a first support assembly 100, at least one first connecting assembly 200, a follower 300, a first clamping assembly 400, a second clamping assembly 500, and a drive assembly 600. The first connecting assembly 200 is rotatably connected to the first support assembly 100. The follower 300 is connected to the first connecting assembly 200. The first clamping assembly 400 and the follower 300 are disposed opposite each other. The first clamping assembly 400 is configured to clamp a first end 2001 of the product, with the second end 2002 of the product facing the follower 300. The second end 2002 of the product has a grinding area 2012. The second clamping assembly 500 is configured to clamp a grinding piece 3, which can be moved closer to or further away from the grinding area 2012. The driving assembly 600 is connected to the first clamping assembly 400 and is configured to drive the first clamping assembly 400 to move in a direction close to or away from the follower 300 so that the second end 2002 of the product abuts against or separates from the follower 300. The driving assembly 600 is also configured to drive the first clamping assembly 400 to rotate so that the polished area 2012 generates friction with the polishing piece 3, and the follower 300 follows the product 2 to move away from or close to the polishing piece 3. The rotation axis 401 of the first clamping assembly is parallel to the first direction X1.
[0027] The grinding device 10 uses the follower 300 and the first clamping assembly 400 to clamp the two ends of the product 2, and the grinded area 2012 of the product 2 is close to the follower 300. When grinding the product 2, the grinding piece 3 and the grinded area 2012 of the product 2 generate friction, and the grinding piece 3 generates a thrust on the grinded area 2012 of the product 2. The end of the product 2 with the grinded area 2012 can drive the follower 300 to move in a direction away from the grinding piece 3 to reduce the thrust on the grinded area 2012 of the product 2, thereby reducing the risk of the product 2 breaking.
[0028] For example, the cross-section of the follower 300 may be rectangular, circular, or other polygonal or irregular shapes.
[0029] For example, the first clamping assembly 400 may be a three-jaw clamping cylinder, a four-jaw clamping cylinder or other structures with a clamping function. Figure 2 The first clamping assembly 400 shown in FIG. 4 is a three-jaw clamping cylinder.
[0030] For example, the product 2 may be a straight rod-shaped structure or a curved rod-shaped structure. For example, the material of the product 2 may be silicon carbide, stainless steel, or the like.
[0031] Illustratively, the side of the grinding member 3 facing the grinding area 2012 of the product 2 has a contoured surface. During the grinding process, the contoured surface contacts and rubs against the surface of the grinding area 2012 of the product 2, thereby smoothing the surface of the grinding area 2012 of the product 2. Furthermore, the contoured surface of the grinding member 3 can be adjusted to suit the different shapes of the grinding area 2012 of the product 2, so that different contoured surfaces of different grinding members 3 can be adapted to the different shapes of the grinding areas 2012 of the product 2. Illustratively, the grinding angle of the grinding device 10 on the grinding area 2012 of the product 2 ranges from 135° to 180°.
[0032] In some embodiments, the first connecting component 200 has a limiting portion 201 extending along the first direction X1, and the follower 300 has a limiting hole 301 corresponding to the limiting portion 201. The limiting portion 201 penetrates into the corresponding limiting hole 301 and has a gap between it and the inner wall of the limiting hole 301.
[0033] Since there is a gap between the limiting portion 201 of the first connecting component 200 and the inner wall of the limiting hole 301 of the follower 300, during the process of the polishing piece 3 polishing the product 2, the limiting portion 201 of the first connecting component 200 can be prevented as much as possible from hindering the follower 300 from rotating following the second end 2002 of the product. It can also be achieved that when the follower 300 follows the second end 2002 of the product to move in the direction close to or away from the polishing piece 3, the friction generated by the inner wall of the limiting hole 301 of the follower 300 and the limiting portion 201 drives the first connecting component 200 to rotate.
[0034] In some embodiments, as Figure 1 and Figure 2 As shown, the first connecting assembly 200 includes a follower shaft 210, a connecting member 220, and a first elastic member 230. The first end 2101 of the follower shaft is rotatably connected to the first support assembly 100. The first end 2201 of the connecting member has a stopper 201 and a first blocking portion 202 that are connected to each other. The first blocking portion 202 abuts against the end of the follower 300 that is closer to the first clamping assembly 400. The second end 2202 of the connecting member extends through the end of the stopper hole 301 that is farther away from the first clamping assembly 400 and is connected to the second end 2102 of the follower shaft. The first elastic member 230 is sleeved onto the connecting member 220, and the two ends of the first elastic member 230 abut against the follower 300 and the follower shaft 210, respectively.
[0035] The first elastic member 230 is used to realize elastic contact between the follower 300 and the second end 2002 of the product, and the follower 300 is always in contact with the second end 2002 of the product during the polishing process of the polished area 2012 of the product 2.
[0036] For example, the first elastic member 230 may be a spring, a rubber pad or other structures with elastic function.
[0037] For example, Figure 2 As shown, the follower 300 has two limiting holes 301. There are two first connecting assemblies 200, and the two first connecting assemblies 200 are provided in a one-to-one correspondence with the two limiting holes 301. The use of two first connecting assemblies 200 connected to the follower 300 improves the support stability of the first connecting assembly 200 on the follower 300 and makes it easier for the follower 300 to drive the first connecting assembly 200 to rotate, thereby improving the rotational stability and flexibility of the first connecting assembly 200 and the follower 300.
[0038] For example, the two follower shafts 210 of the two first connecting assemblies 200 are connected to form an integrated follower shaft 210. The second ends 2202 of the two connecting members respectively pass through the ends of the two limiting holes 301 away from the first clamping assembly 400, and are each connected to the second end 2102 of a follower shaft, and the first end 2101 of the follower shaft is rotatably connected to the first support assembly 100.
[0039] In some embodiments, the second end 2202 of the connecting member has a first threaded portion 203 , and the second end 2102 of the follower shaft has a second threaded portion 2112 , and the second threaded portion 2112 is threadedly connected to the first threaded portion 203 .
[0040] For example, Figure 2 As shown, the connecting member 220 is a screw. The screw cap forms the first blocking portion 202, and the main body of the screw forms the limiting portion 201 and the first threaded portion 203. Using the screw as the connecting member 220 to connect the follower shaft 210 and the follower 300 has a simple structure and a simple connection method. For example, the connecting member 220 can also have other structures having the limiting portion 201, the first blocking portion 202, and the first threaded portion 203.
[0041] In some embodiments, as Figure 3As shown, the drive assembly 600 includes a telescopic member 610, a second connecting assembly 620, and a first driving source 630. The telescopic member 610 is connected to the first clamping assembly 400 and is capable of telescoping in a direction close to or away from the follower 300 to drive the first clamping assembly 400 to move in a direction close to or away from the follower 300. The second connecting assembly 620 is connected to an end of the telescopic member 610 away from the first clamping assembly 400. The first driving source 630 is connected to the second connecting assembly 620 and is configured to drive the second connecting assembly 620 to rotate, so that the second connecting assembly 620 drives the telescopic member 610 to rotate, and the telescopic member 610 drives the first clamping assembly 400 to rotate.
[0042] Exemplarily, the telescopic member 610 may be a pneumatic piston, a cylinder, or other structures with telescopic functions.
[0043] Exemplarily, the first driving source 630 may be a motor, a rotary cylinder, or other structures capable of providing rotational force.
[0044] In some embodiments, as Figure 1 、 Figure 3 and Figure 4 As shown, the grinding device 10 also includes a second support assembly 700, which is configured to support the first drive source 630. The first drive source 630 has an output shaft 6301. The second connecting assembly 620 includes a driven shaft 6210 and a coupling 6220. The driven shaft 6210 is rotatably connected to the second support assembly 700 and is connected to the end of the telescopic member 610 away from the first clamping assembly 400. The coupling 6220 connects the output shaft 6301 and the driven shaft 6210. The first drive source 630 drives the coupling 6220 to rotate, causing the coupling 6220 to drive the driven shaft 6210 to rotate, so that the driven shaft 6210 drives the telescopic member 610 to rotate.
[0045] In some embodiments, as Figure 5 As shown, the second clamping assembly 500 includes a second drive source 510, a third support assembly 520, and a clamping member 530. The second drive source 510 is disposed to the side of the follower 300. The third support assembly 520 is connected to the second drive source 510 so that the second drive source 510 can drive the third support assembly 520 to move toward or away from the follower 300. The clamping member 530 is located on a side of the third support assembly 520 near the follower 300 and is connected to the third support assembly 520, and is configured to clamp the polishing member 3. The third support assembly 520 can drive the clamping member 530 to move toward or away from the follower 300, so that the clamping member 530 drives the polishing member 3 to move toward or away from the follower 300, so that the polishing member 3 abuts against or moves away from the polishing area 2012.
[0046] Exemplarily, the second driving source 510 may be a cylinder, a robotic arm, or other structures capable of providing driving force.
[0047] Illustratively, the clamping member 530 has a limiting groove 5301, and the polishing member 3 is placed in the limiting groove 5301, so that the clamping member 530 can clamp the polishing member 3. Illustratively, the clamping member 530 has a clamping claw, and the clamping claw clamps the edge of the polishing member 3, so that the clamping member 530 can clamp the polishing member 3. Illustratively, the clamping member 530 can also be other structures with a clamping function.
[0048] Exemplarily, the grinding device 10 further includes a fourth support assembly 900 , which is configured to support the second driving source 510 .
[0049] In some embodiments, as Figure 5 As shown, the third support assembly 520 includes a first support member 5210, at least one second support member 5220, and at least one second elastic member 5230. The first support member 5210 is connected to the second driving source 510 and has at least one through-hole 5211. The second support member 5220 has a second blocking portion 5221 and a supporting portion 5222 connected to each other. The second blocking portion 5221 can abut against a side of the first support member 5210 away from the second support member 5220. The supporting portion 5222 passes through the through-hole 5211 and is connected to the clamping member 530. The second elastic member 5230 is sleeved on the supporting portion 5222, and the two ends of the second elastic member 5230 respectively abut against the first support member 5210 and the clamping member 530.
[0050] The second elastic member 5230 is used to elastically contact the polishing member 3 with the polished area 2012, thereby preventing the polishing member 3 from exerting excessive thrust on the polished area 2012 due to rigid contact, which could result in breakage of the product 2. Furthermore, the second elastic member 5230 can ensure that the polishing member 3 is in constant contact with the polished area 2012 during the polishing process, thereby adjusting the thrust of the polishing member 3 on the polished area 2012.
[0051] Exemplarily, the second elastic member 5230 may be a spring, a rubber pad or other structures with elastic function.
[0052] Illustratively, the third support assembly 520 further includes a connecting sleeve 5240, which passes through the through-hole 5211 and is connected to the first support member 5210. The support portion 5222 passes through the connecting sleeve 5240 and is slidably connected to the connecting sleeve 5240. The two ends of the second elastic member 5230 respectively abut against the connecting sleeve 5240 and the clamping member 530. Illustratively, the second support member 5220 can be a bolt, with the bolt head forming the second blocking portion 5221 and the screw forming the support portion 5222. Illustratively, the second support member 5220 can also include a round rod and a blocking block connected to each other, with the blocking block forming the blocking portion 5221 and the round rod forming the support portion 5222.
[0053] In some embodiments, there are multiple through holes 5211, multiple second support members 5220, and multiple second elastic members 5230. Multiple through holes 5211, multiple second support members 5220, and multiple second elastic members 5230 are arranged in a one-to-one correspondence, thereby improving the support stability of the third support component 520 on the clamping member 530, thereby improving the abutment stability between the polishing member 3 and the polished area 2012.
[0054] Exemplarily, the number of the through holes 5211 is four, the number of the second support members 5220 is four, the number of the second elastic members 5230 is four, and the four second support members 5220 are symmetrically arranged.
[0055] In some embodiments, as Figure 6 As shown, the grinding device 10 further includes a cooling assembly 800 configured to provide a cooling medium. The cooling assembly 800 has a medium outlet 801 located above the follower 300 , and the cooling medium can flow out of the medium outlet 801 and toward the grinding area 2012 .
[0056] During the grinding process of the grinding area 2012 of the product 2, the grinding area 2012 is flushed with a cooling medium to promptly clean up the debris that falls on the surface of the grinding area 2012, and at the same time cool the grinding area 2012 so that the grinding area 2012 can be cooled quickly.
[0057] For example, the cooling medium may be water, salt water, or other fluid liquids having a cooling effect.
[0058] In the various embodiments of the present disclosure, unless otherwise specified, the connection may be in the form of a detachable connection using bolts and nuts, screws, snaps, magnets, etc. In some connections, if there is no particular requirement for a detachable connection, a non-detachable connection may be achieved by welding, bonding, etc.
[0059] References in the specification to "one embodiment," "an embodiment," and the like indicate that the described embodiment may include a particular feature, structure, or characteristic, but not every embodiment necessarily includes that particular feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not.
[0060] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” means not only “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” includes not only the meaning of “above” or “over,” but also includes the meaning of “above” or “over” with no intervening features or layers therebetween (i.e., directly on something).
[0061] Additionally, spatially relative terms, such as "below," "beneath," "beneath," "above," and the like, may be used herein for ease of description to describe the relationship of one component or feature relative to other components or features as shown in the figures. Spatially relative terms are intended to encompass different orientations of a component in use or operation in addition to the orientation shown in the figures. The device may have other orientations (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.
[0062] It should be noted that, in this document, the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or apparatus comprising the element.
[0063] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the scope of protection of the present disclosure.
Claims
1. A grinding device configured to grind a product, characterized in that: include: a first support assembly; at least one first connecting assembly, rotatably connected to the first supporting assembly; a follower connected to the first connecting assembly; a first clamping assembly disposed opposite the follower and configured to clamp a first end of the product, with a second end of the product facing the follower, the second end of the product having a polished area; a second clamping assembly configured to clamp a grinding piece, wherein the grinding piece can be moved closer to or further away from the grinding area; A drive assembly is connected to the first clamping assembly and is configured to drive the first clamping assembly to move in a direction approaching or away from the follower so that the second end of the product abuts against or separates from the follower. The drive assembly is also configured to drive the first clamping assembly to rotate so that the polished area and the polishing piece generate friction, and the follower follows the product to move away from or toward the polishing piece, wherein the rotation axis of the first clamping assembly is parallel to the first direction.
2. The grinding device according to claim 1, characterized in that: The first connecting component has a limiting portion extending along a first direction, the follower has a limiting hole corresponding to the limiting portion, the limiting portion penetrates the corresponding limiting hole, and a gap is formed between the limiting portion and the inner wall of the limiting hole.
3. The grinding device according to claim 2, characterized in that: The first connection component includes: A follower shaft, a first end of which is rotatably connected to the first support assembly; a connecting member, wherein a first end of the connecting member has the limiting portion and the first blocking portion connected to each other, the first blocking portion abuts against an end of the follower member close to the first clamping assembly, and the second end of the connecting member passes through an end of the limiting hole away from the first clamping assembly and is connected to the second end of the follower shaft; The first elastic member is sleeved on the connecting member, and two ends of the first elastic member are respectively in contact with the follower member and the follower shaft.
4. The grinding device according to claim 3, characterized in that: The second end of the connecting member has a first threaded portion; The second end of the follower shaft has a second threaded portion, and the second threaded portion is threadedly connected to the first threaded portion.
5. The grinding device according to any one of claims 1 to 4, characterized in that: The drive assembly includes: a telescopic member connected to the first clamping assembly and capable of telescoping in a direction approaching or away from the follower to drive the first clamping assembly to move in a direction approaching or away from the follower; a second connecting assembly connected to an end of the telescopic member away from the first clamping assembly; The first driving source is connected to the second connecting component and is configured to drive the second connecting component to rotate, so that the second connecting component drives the telescopic member to rotate, and the telescopic member drives the first clamping component to rotate.
6. The grinding device according to claim 5, characterized in that: Also includes: a second supporting assembly configured to support the first driving source; Wherein, the first driving source has an output shaft, and the second connecting component includes: a driven shaft rotatably connected to the second supporting assembly and connected to an end of the telescopic member away from the first clamping assembly; A coupling connects the output shaft and the driven shaft, wherein the first driving source drives the coupling to rotate, so that the coupling drives the driven shaft to rotate, and the driven shaft drives the telescopic member to rotate.
7. The grinding device according to any one of claims 1 to 4, characterized in that: The second clamping assembly comprises: a second driving source, disposed on the side of the follower; a third supporting assembly connected to the second driving source so that the second driving source can drive the third supporting assembly to move in a direction close to or away from the follower; The clamping member is located on a side of the third supporting assembly close to the follower and is connected to the third supporting assembly, and is configured to clamp the polishing member. The third supporting assembly can drive the clamping member to move in a direction close to or away from the follower, so that the clamping member drives the polishing member to move in a direction close to or away from the follower, so that the polishing member abuts against the polished area or moves away from the polished area.
8. The grinding device according to claim 7, characterized in that: The third support assembly comprises: a first support member connected to the second driving source, wherein the first support member has at least one through hole; at least one second support member, comprising a second blocking portion and a supporting portion connected to each other, wherein the second blocking portion is capable of abutting against a side of the first support member away from the second support member, and the supporting portion passes through the through hole and is connected to the clamping member; At least one second elastic member is sleeved on the supporting portion, and two ends of the second elastic member are respectively in contact with the first supporting member and the clamping member.
9. The grinding device according to claim 8, characterized in that: There are multiple through holes, multiple second support members, and multiple second elastic members. The multiple through holes, multiple second support members, and multiple second elastic members are arranged in a one-to-one correspondence.
10. The grinding device according to any one of claims 1 to 4, characterized in that: Also includes: The cooling assembly is configured to provide a cooling medium, wherein the cooling assembly has a medium outlet, the medium outlet is located above the follower, and the cooling medium can flow out of the medium outlet and flow toward the polished area.