Breather valve and semiconductor temperature control device

Abstract

The utility model relates to the technical field of semiconductor manufacturing, in particular to a breather valve and a semiconductor temperature control device, the breather valve comprises a shell, the shell is provided with an inner cavity, a first through hole and a second through hole, and the first through hole and the second through hole are respectively communicated with the inner cavity; the air suction valve plate is arranged in the first through hole and is movably connected with the shell through a first adjusting component; the exhalation valve plate is arranged in the second through hole and is movably connected with the shell through a second adjusting part; the breather valve is suitable for being switched between an inspiration state and an expiration state, in the inspiration state, the inspiration valve plate opens the first through hole, the expiration valve plate closes the second through hole, in the expiration state, the inspiration valve plate closes the first through hole, and the expiration valve plate opens the second through hole. When the breathing valve is applied to the circulating liquid system of the semiconductor temperature control device, the breathing function of the circulating liquid system can be realized by arranging the breathing valve capable of simultaneously meeting the requirements of high and low temperature areas through a special structural design, the customization cost is reduced, the structure is simple, and the stability of the circulating liquid system is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a breathing valve and a semiconductor temperature control device. Background Art

[0002] The breathing valve is a critical component of the circulating fluid system of semiconductor temperature control devices. These devices typically use electronic fluorinated liquid as a coolant, covering both high and low temperature ranges. Because the circulating fluid system is sealed, its volatility and thermal expansion and contraction increase the pressure in the high-temperature range and decrease it in the low-temperature range. Whether the pressure increases or decreases, it causes fluctuations in the circulating fluid system's flow rate. In the low-temperature range, the electronic fluorinated liquid's volume decreases, and if it can't enter the circulating fluid system in a timely manner, it can affect the system's stable operation and risk equipment downtime, such as false alarms.

[0003] Currently, circulating fluid systems typically use two constant-pressure check valves, installed forward and reverse, to ensure the system's "breathing" function. Customizing these check valves is costly and cannot be adjusted in real time based on the system's operating conditions, limiting their use. Furthermore, since activated carbon filters cannot be installed or replaced, prolonged use can result in moisture entering the circulating fluid system during breathing. This can cause ice blockage and system failure in low-temperature conditions. Alternatively, a replaceable activated carbon canister with constant-pressure conduction provides increased flexibility, but is bulky, can only be used for exhalation or inhalation, and has a limited function. Utility Model Content

[0004] The utility model provides a breathing valve and a semiconductor temperature control device to solve one of the defects in the prior art. When applied to the circulating liquid system of the semiconductor temperature control device, a breathing valve that can simultaneously meet the needs of high and low temperature zones is set through a special structural design, thereby realizing the breathing function of the circulating liquid system, reducing customization costs, simplifying the structure, and improving the stability of the circulating liquid system.

[0005] The utility model provides a breathing valve, comprising:

[0006] a housing, the housing being provided with an inner cavity and a first through hole and a second through hole respectively communicating with the inner cavity;

[0007] an air intake valve plate, the air intake valve plate being disposed in the first through hole and being movably connected to the housing via a first adjusting component;

[0008] an exhalation valve plate, the exhalation valve plate being disposed in the second through hole and movably connected to the housing via a second adjusting component;

[0009] The breathing valve is suitable for switching between an inhalation state and an exhalation state. In the inhalation state, the inhalation valve plate opens the first through hole and the exhalation valve plate closes the second through hole. In the exhalation state, the inhalation valve plate closes the first through hole and the exhalation valve plate opens the second through hole.

[0010] According to a breathing valve provided by the present invention, the inhalation valve plate is arranged on the inner side of the shell, the inhalation valve plate is movable in the inner cavity, and the exhalation valve plate is arranged on the outer side of the shell.

[0011] According to a breathing valve provided by the utility model, the housing includes:

[0012] a shell body, wherein the shell body encloses the inner cavity and is further provided with a connecting pipe, wherein the connecting pipe is in communication with the inner cavity;

[0013] The enclosure portion is connected to one end of the shell body and extends toward the inner side of the shell body to form the first through hole. The air intake valve plate is movably connected to the enclosure portion through the first adjusting component.

[0014] According to a breathing valve provided by the present invention, the shell further includes an edge portion, which is connected to the other end of the shell body and extends toward the outside of the shell body, and the exhalation valve is movably connected to the edge portion through the second adjustment component.

[0015] According to a breathing valve provided by the present invention, a first sealing portion is provided between the enclosure portion and the inhalation valve plate; and a second sealing portion is provided between the edge portion and the exhalation valve plate.

[0016] According to a breathing valve provided by the utility model, the first regulating component and the second regulating component both include:

[0017] An adjusting rod, wherein the housing is provided with a guide hole, and the adjusting rod is passed through the guide hole and connected to the inhalation valve plate or the exhalation valve plate;

[0018] An elastic member is sleeved on the outside of the adjusting rod, and one end of the elastic member abuts against the shell, and the other end is connected to the adjusting rod.

[0019] According to a breathing valve provided by the present invention, the breathing valve further includes an adsorption component, which is arranged in the inner cavity and extends in a direction from the second through hole to the first through hole.

[0020] According to a breathing valve provided by the utility model, a limiting member is provided in the inner cavity, the limiting member is connected to the shell, one end of the adsorption component is flush with the second through hole, and the other end abuts against the limiting member.

[0021] According to a breathing valve provided by the utility model, the intake valve plate extends inward from the edge to form a groove, and the groove is arranged to correspond to the limiting member.

[0022] The utility model also provides a semiconductor temperature control device, comprising the breathing valve as described above.

[0023] The breathing valve provided by the utility model is mainly composed of a shell, an inhalation valve plate, an exhalation valve plate, a first adjusting component and a second adjusting component. The interior of the shell constitutes an inner cavity, and a first through hole and a second through hole are provided to communicate with the inner cavity respectively. The inhalation valve plate cover is arranged on the first through hole, and the exhalation valve plate cover is arranged on the second through hole. Under the action of the first adjusting component, the inhalation valve plate can remain connected to the shell during movement. Under the action of the second adjusting component, the exhalation valve plate can remain connected to the shell during movement.

[0024] When the external air pressure is greater than the internal pressure of the breathing valve, the inhalation valve plate moves away from the first through hole, so that the first through hole is opened, the exhalation valve plate remains stationary, and the second through hole is closed, thereby gas enters the inner cavity from the outside through the first through hole. At this time, the breathing valve is in the inhalation state, ensuring the pressure balance inside and outside the breathing valve; when the external air pressure is less than the internal pressure of the breathing valve, the exhalation valve plate moves away from the second through hole, so that the second through hole is opened, the inhalation valve plate remains stationary, and the first through hole is closed, thereby gas enters the outside from the inner cavity through the second through hole. At this time, the breathing valve is in the exhalation state, ensuring the pressure balance inside and outside the breathing valve.

[0025] When the breathing valve of the utility model is applied to the circulating liquid system of the semiconductor temperature control device, a breathing valve that can meet the needs of high and low temperature zones at the same time is set through a special structural design, thereby realizing the breathing function of the circulating liquid system, reducing the customization cost, simplifying the structure, and improving the stability of the circulating liquid system. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Figure 1 This is one of the structural diagrams of the breathing valve provided by the embodiment of the utility model;

[0028] Figure 2 This is the second structural diagram of the breathing valve provided by the embodiment of the utility model.

[0029] Reference numerals:

[0030] 100, housing; 110, inner cavity; 120, first through hole; 130, second through hole; 140, housing body; 141, connecting pipe; 142, stopper; 150, enclosure; 160, edge;

[0031] 200, suction valve plate;

[0032] 300, exhalation valve plate;

[0033] 400, first adjusting component; 410, first adjusting rod; 420, first elastic member;

[0034] 500, second adjustment component; 510, second adjustment rod; 520, second elastic member;

[0035] 600, first sealing portion; 610, first sealing ring; 620, first sealing groove;

[0036] 700, second sealing portion; 710, second sealing ring; 720, second sealing groove;

[0037] 800. Adsorption components. DETAILED DESCRIPTION

[0038] To make the purpose, technical solutions, and advantages of the present invention more clear, the following will be combined with the accompanying drawings to clearly and completely describe the technical solutions of the present invention. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0039] like Figure 1 and Figure 2 As shown, the breathing valve provided by the embodiment of the present invention includes a shell 100, an inhalation valve plate 200 and an exhalation valve plate 300. The shell 100 is provided with an inner cavity 110 and a first through hole 120 and a second through hole 130 respectively connected to the inner cavity 110; the inhalation valve plate 200 is arranged at the first through hole 120 and is movably connected to the shell 100 through a first adjustment component 400; the exhalation valve plate 300 is arranged at the second through hole 130 and is movably connected to the shell 100 through a second adjustment component 500; the breathing valve is suitable for switching between an inhalation state and an exhalation state. In the inhalation state, the inhalation valve plate 200 opens the first through hole 120 and the exhalation valve plate 300 closes the second through hole 130. In the exhalation state, the inhalation valve plate 200 closes the first through hole 120 and the exhalation valve plate 300 opens the second through hole 130.

[0040] The breathing valve of the embodiment of the present invention is mainly composed of a shell 100, an inhalation valve plate 200, an exhalation valve plate 300, a first adjusting component 400 and a second adjusting component 500. The shell 100 has an inner cavity 110, and a first through hole 120 and a second through hole 130 are provided to communicate with the inner cavity 110 respectively. The inhalation valve plate 200 covers the first through hole 120, and the exhalation valve plate 300 covers the second through hole 130. Under the action of the first adjusting component 400, the inhalation valve plate 200 can remain connected to the shell 100 during movement. Under the action of the second adjusting component 500, the exhalation valve plate 300 can remain connected to the shell 100 during movement.

[0041] When the external air pressure is greater than the internal pressure of the breathing valve, the inhalation valve plate 200 moves away from the first through hole 120, so that the first through hole 120 is opened, the exhalation valve plate 300 remains stationary, and the second through hole 130 is closed, so that gas enters the inner cavity 110 from the outside through the first through hole 120. At this time, the breathing valve is in the inhalation state, ensuring the pressure balance inside and outside the breathing valve; when the external air pressure is less than the internal pressure of the breathing valve, the exhalation valve plate 300 moves away from the second through hole 130, so that the second through hole 130 is opened, the inhalation valve plate 200 remains stationary, and the first through hole 120 is closed, so that gas enters the outside through the second through hole 130 from the inner cavity 110. At this time, the breathing valve is in the exhalation state, ensuring the pressure balance inside and outside the breathing valve.

[0042] When the breathing valve of the utility model is applied to the circulating liquid system of the semiconductor temperature control device, a breathing valve that can meet the needs of high and low temperature zones at the same time is set through a special structural design, thereby realizing the breathing function of the circulating liquid system, reducing the customization cost, simplifying the structure, and improving the stability of the circulating liquid system.

[0043] According to an embodiment provided by the present invention, the inhalation valve plate 200 is disposed inside the housing 100 and is movable within the inner cavity 110, while the exhalation valve plate 300 is disposed outside the housing 100. In this embodiment, the inhalation valve plate 200 is disposed within the inner cavity 110 and can move closer to or further away from the first through hole 120 along the extension direction of the inner cavity 110, closing or opening the first through hole 120 inside the housing 100. That is, when the exhalation valve is in the inhalation state, the external air pressure can push the inhalation valve plate 200 to move inside the housing 100. The exhalation valve plate 300 is disposed outside the housing 100 and closes or opens the second through hole 130 outside the housing 100. That is, when the exhalation valve is in the exhalation state, the air pressure in the inner cavity 110 can push the exhalation valve plate 300 to move outside the housing 100.

[0044] According to an embodiment provided by the present invention, the shell 100 includes a shell body 140 and an enclosure portion 150. The shell body 140 encloses an inner cavity 110. The shell body 140 is also provided with a connecting pipe 141, which is connected to the inner cavity 110; the enclosure portion 150 is connected to one end of the shell body 140 and extends toward the inner side of the shell body 140 to form a first through hole 120. The intake valve plate 200 is movably connected to the enclosure portion 150 through a first adjustment component 400.

[0045] In this embodiment, the shell 100 is mainly composed of a shell body 140 and a surrounding part 150. The shell body 140 is cylindrical, and the inner side of the cylinder constitutes an inner cavity 110. The connecting pipe 141 is arranged on the shell body 140. One end of the connecting pipe 141 is connected to the inner cavity 110, and the other end is connected to the upper part of the water tank of the circulating liquid system. The enclosure 150 is arranged at one end of the cylinder. The enclosure 150 is in the shape of a ring. The outer ring of the ring is sealed with the port of the cylinder, and the inner ring of the ring forms a first through hole 120, that is, the enclosure 150 extends radially inwardly along the cylinder, and the port of the shell body 140 is narrowed to form the first through hole 120. When the intake valve plate 200 closes the first through hole 120, the edge of the intake valve plate 200 abuts against the enclosure 150, that is, the intake valve plate 200 contacts the side of the enclosure 150 facing the inner cavity 110. When the intake valve plate 200 opens the first through hole 120, the external air pressure pushes the intake valve plate 200 to move through the first through hole 120.

[0046] The first adjustment component 400 connects the enclosure 150 with the intake valve plate 200. When the intake valve plate 200 is away from the first through hole 120, the first adjustment component 400 can always keep the intake valve plate 200 connected to the enclosure 150, and can also help the intake valve plate 200 return to the position of closing the first through hole 120.

[0047] According to one embodiment of the present invention, a first sealing portion 600 is provided between the enclosure portion 150 and the intake valve plate 200. In this embodiment, the first sealing portion 600 is composed of a first sealing ring 610 and a first sealing groove 620. The annular first sealing ring 610 is provided on the side of the intake valve plate 200 facing the enclosure portion 150, and the first sealing groove 620 corresponding to the first sealing ring 610 is provided on the side of the enclosure portion 150 facing the inner cavity 110. When the intake valve plate 200 closes the first through hole 120, the edge of the intake valve plate 200 abuts against the enclosure portion 150, and the first sealing ring 610 is embedded in the first sealing groove 620, thereby providing a sealed and isolated position for the inner cavity 110 of the housing 100 at the location of the intake valve plate 200.

[0048] In other implementations, a first sealing ring 610 may be provided on the enclosure portion 150 , and a first sealing groove 620 may be provided on the intake valve plate 200 .

[0049] According to an embodiment provided by the present invention, the shell 100 further includes an edge portion 160 , which is connected to the other end of the shell body 140 and extends outward from the shell body 140 . The exhalation valve is movably connected to the edge portion 160 through the second adjustment component 500 . In this embodiment, the shell 100 is mainly composed of a shell body 140, a surrounding portion 150 and an edge portion 160. The edge portion 160 is arranged at the other end of the cylinder, opposite to the surrounding portion 150. The edge portion 160 is in a circular ring shape, the inner ring of the ring is sealed with the port of the cylinder, and the outer ring of the ring extends radially outside the cylinder, that is, the port of the shell body 140 connected by the edge portion 160 forms a second through hole 130. When the exhalation valve plate 300 closes the second through hole 130, the edge portion of the exhalation valve plate 300 abuts against the edge portion 160, that is, the exhalation valve plate 300 contacts the side of the edge portion 160 facing away from the inner cavity 110. When the exhalation valve plate 300 opens the second through hole 130, when the air pressure in the inner cavity 110 pushes the exhalation valve plate 300 to move through the second through hole 130.

[0050] The second adjusting component 500 connects the edge portion 160 with the exhalation valve plate 300. When the exhalation valve plate 300 is away from the second through hole 130, the second adjusting component 500 can always keep the exhalation valve plate 300 connected to the edge portion 160, and can also help the exhalation valve plate 300 return to the position of closing the second through hole 130.

[0051] It can be understood that the edge portion 160 , the shell body 140 and the surrounding portion 150 are of an integral configuration.

[0052] According to one embodiment of the present invention, a second sealing portion 700 is provided between the edge portion 160 and the exhalation valve plate 300. In this embodiment, the second sealing portion 700 is composed of a second sealing ring 710 and a second sealing groove 720. The annular second sealing ring 710 is provided on the side of the exhalation valve plate 300 facing the edge portion 160, and a second sealing groove 720 corresponding to the second sealing ring 710 is provided on the side of the edge portion 160 facing away from the inner cavity 110. When the exhalation valve plate 300 closes the second through hole 130, the edge of the exhalation valve plate 300 abuts against the edge portion 160, and the second sealing ring 710 is embedded in the second sealing groove 720, thereby providing a sealed isolation function for the inner cavity 110 of the housing 100 at the location of the exhalation valve plate 300.

[0053] In other implementations, a second sealing ring 710 may be provided on the edge portion 160 , and a second sealing groove 720 may be provided on the exhalation valve plate 300 .

[0054] According to an embodiment provided by the present invention, the first adjustment component 400 and the second adjustment component 500 both include an adjustment rod and an elastic member. The shell 100 is provided with a guide hole, and the adjustment rod is passed through the guide hole and connected to the inhalation valve plate 200 or the exhalation valve plate 300; the elastic member is sleeved on the outside of the adjustment rod, and one end of the elastic member abuts against the shell 100, and the other end is connected to the adjustment rod.

[0055] In this embodiment, the first adjustment component 400 and the second adjustment component 500 are composed of the same components, namely, an adjustment rod and an elastic member. By squeezing the elastic member on the adjustment rod, precise pressure adjustment can be performed according to different operating conditions, dynamically adjusting the opening and closing pressures of the breathing valve, thus providing wider applicability. When the breathing valve is installed on the water tank of the circulating fluid system, its breathing pressure can be adjusted according to different systems, meeting the use of equipment with multiple working conditions. This eliminates the need to customize the breathing valve for different system pressure requirements, reducing customization costs while improving the stability of the circulating fluid system.

[0056] For the connection between the intake valve plate 200 and the shell 100, a first guide hole extending in the same axial direction as the inner cavity 110 is provided on the enclosure 150, and one end of the first adjustment rod 410 of the first adjustment component 400 is fixed on the intake valve plate 200 after passing through the first guide hole, and the first elastic member 420 of the first adjustment component 400 is sleeved on the outside of the first adjustment rod 410, that is, the first elastic member 420 and the intake valve plate 200 are respectively located on both sides of the enclosure 150, one end of the first elastic member 420 abuts against the side of the enclosure 150 facing away from the inner cavity 110, and the other end is fixedly connected to the first adjustment rod 410.

[0057] When the intake valve plate 200 opens the first through hole 120, the intake valve plate 200 gradually moves away from the enclosure 150, and the first adjusting rod 410 moves forward relative to the first guide hole driven by the intake valve plate 200, and the first elastic member 420 is compressed. When the intake valve plate 200 closes the first through hole 120, the first elastic member 420 stretches, and under the action of the restoring force of the first elastic member 420, the first adjusting rod 410 moves reversely relative to the first guide hole, and the intake valve plate 200 gradually approaches the enclosure 150 driven by the first adjusting rod 410.

[0058] Regarding the connection between the exhalation valve plate 300 and the shell 100, a second guide hole extending in the same axial direction as the inner cavity 110 is provided on the edge portion 160. One end of the second adjustment rod 510 of the second adjustment component 500 is fixed on the exhalation valve plate 300 after passing through the second guide hole. The second elastic member 520 of the second adjustment component 500 is sleeved on the outside of the second adjustment rod 510, that is, the second elastic member 520 and the exhalation valve plate 300 are respectively located on both sides of the edge portion 160. One end of the second elastic member 520 abuts against the side of the edge portion 160 facing the inner cavity 110, and the other end is fixedly connected to the second adjustment rod 510.

[0059] When the exhalation valve plate 300 opens the second through hole 130, the exhalation valve plate 300 gradually moves away from the edge portion 160, and the second adjustment rod 510 moves forward relative to the second guide hole under the drive of the exhalation valve plate 300, and the second elastic member 520 is compressed. When the exhalation valve plate 300 closes the second through hole 130, the second elastic member 520 stretches, and under the action of the restoring force of the second elastic member 520, the second adjustment rod 510 moves in the opposite direction relative to the second guide hole, and the exhalation valve plate 300 gradually approaches the edge portion 160 under the drive of the second adjustment rod 510.

[0060] In this embodiment, the adjusting rod may be a bolt, and the elastic member may be a spring.

[0061] According to one embodiment of the present invention, the breathing valve further includes an adsorption component 800, which is disposed within the inner cavity 110 and extends from the second through hole 130 to the first through hole 120. In this embodiment, the adsorption component 800 is an adsorption filter filler that is filled within the inner cavity 110 of the housing 100 and filters and adsorbs the gas entering and exiting the breathing valve during the breathing process.

[0062] The adsorption component 800 can be replaced by disassembling the exhalation valve plate 300, which is a simple and quick operation.

[0063] According to an embodiment of the present invention, a stopper 142 is provided in the inner cavity 110. The stopper 142 is connected to the housing 100. One end of the adsorption component 800 is flush with the second through hole 130, and the other end abuts the stopper 142. In this embodiment, the adsorption component 800 is also cylindrical, adapted to the shape of the inner cavity 110 of the cylindrical housing 100. The adsorption component 800 is not completely filled in the inner cavity 110. There is a certain distance between the stopper 142 and the inhalation valve plate 200. The stopper 142 is fixed to the inner wall of the housing 100. One end of the adsorption component 800 can contact the surface of the exhalation valve plate 300 when the second through hole 130 is closed, and the other end of the adsorption component 800 is abutted by the stopper 142, thereby completing the fixation of the adsorption component 800.

[0064] According to an embodiment provided by the present invention, the suction valve plate 200 extends inward from the edge to form a groove, and the groove corresponds to the arrangement of the stopper 142. In this embodiment, during the suction process, the suction valve plate 200 gradually moves away from the first through hole 120, that is, the suction valve plate 200 gradually approaches the adsorption component 800. In order to prevent the stopper from being arranged on the movement path of the suction valve plate 200 and blocking the movement of the suction valve plate 200, a groove is provided at the edge of the suction valve plate 200. The shape of the groove is adapted to the shape of the stopper 142. As a result, during the movement of the suction valve plate 200, the suction valve plate 200 can pass through the stopper 142 through the arrangement of the groove, and then continue to move to contact the adsorption component 800 and further squeeze the adsorption component 800.

[0065] The utility model also provides a semiconductor temperature control device, comprising the above breathing valve.

[0066] In the semiconductor temperature control device of the embodiment of the present invention, the breathing valve is installed on the outside of the water tank of the circulating liquid system of the semiconductor temperature control device. When the circulating liquid system is in a low-temperature state, the pressure in the system decreases due to the shrinkage of the circulating liquid. The external air pressure is greater than the pressure on the upper surface of the water tank, pushing the intake valve plate 200 open, and the intake valve plate 200 moves from D to C to achieve internal and external pressure balance. Similarly, when the internal pressure of the high-temperature system is greater than the external air pressure, the exhalation valve plate 300 moves from B to A to achieve internal and external pressure balance.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A breathing valve, characterized in that: include: a housing, the housing being provided with an inner cavity and a first through hole and a second through hole respectively communicating with the inner cavity; an air intake valve plate, the air intake valve plate being disposed in the first through hole and being movably connected to the housing via a first adjusting component; an exhalation valve plate, the exhalation valve plate being disposed in the second through hole and movably connected to the housing via a second adjusting component; The breathing valve is suitable for switching between an inhalation state and an exhalation state. In the inhalation state, the inhalation valve plate opens the first through hole and the exhalation valve plate closes the second through hole. In the exhalation state, the inhalation valve plate closes the first through hole and the exhalation valve plate opens the second through hole.

2. The breathing valve according to claim 1, characterized in that The inhalation valve plate is arranged on the inner side of the shell and is movable in the inner cavity. The exhalation valve plate is arranged on the outer side of the shell.

3. The breathing valve according to claim 2, characterized in that: The housing comprises: a shell body, wherein the shell body encloses the inner cavity and is further provided with a connecting pipe, wherein the connecting pipe is in communication with the inner cavity; The enclosure portion is connected to one end of the shell body and extends toward the inner side of the shell body to form the first through hole. The air intake valve plate is movably connected to the enclosure portion through the first adjusting component.

4. The breathing valve according to claim 3, characterized in that: The shell further includes an edge portion, which is connected to the other end of the shell body and extends outward from the shell body. The exhalation valve is movably connected to the edge portion through the second adjustment component.

5. The breathing valve according to claim 4, characterized in that: A first sealing portion is provided between the enclosure portion and the inhalation valve plate, and a second sealing portion is provided between the edge portion and the exhalation valve plate.

6. The breathing valve according to claim 1, characterized in that: The first adjusting component and the second adjusting component both include: An adjusting rod, wherein the housing is provided with a guide hole, and the adjusting rod is passed through the guide hole and connected to the inhalation valve plate or the exhalation valve plate; An elastic member is sleeved on the outside of the adjusting rod, and one end of the elastic member abuts against the shell, and the other end is connected to the adjusting rod.

7. The breathing valve according to any one of claims 1 to 6, characterized in that: The breathing valve further includes an adsorption component, which is disposed in the inner cavity and extends along a direction from the second through hole to the first through hole.

8. The breathing valve according to claim 7, characterized in that: A limiting member is provided in the inner cavity, and the limiting member is connected to the shell. One end of the adsorption component is flush with the second through hole, and the other end abuts against the limiting member.

9. The breathing valve according to claim 8, characterized in that: The air intake valve plate extends inward from the edge to form a groove, and the groove is arranged to correspond to the limiting member.

10. A semiconductor temperature control device, characterized in that: Comprising the breathing valve according to any one of claims 1 to 9.

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