Plate feeding clamp of photoetching machine

Abstract

The utility model discloses a photoetching machine plate feeding clamp which comprises a table and a rotary table rotationally arranged at the top of the table through a rotary shaft, a vortex strip is fixedly connected to the rotary table, four driving strips distributed in an X shape are arranged above the vortex strip, a plurality of driving teeth are fixedly connected to the bottoms of the driving strips, the driving teeth are clamped on the vortex strip, and the vortex strip is fixedly connected with the rotary table. A guide strip is fixedly connected to the end, away from the rotary disc, of the driving strip, a suction cup is fixedly installed on the guide strip, a guide rail is fixedly connected to the top of the table, and the guide strip is arranged on the guide rail in a sliding mode. The motor is started to drive the worm to rotate, the worm drives the worm wheel to rotate, the worm wheel drives the rotating disc to rotate through the rotating shaft, and the vortex-shaped strip on the rotating disc is matched with the driving teeth, so that the driving strip is pushed to move linearly, the guide strip moves in the direction of the guide rail, and at the moment, the position of the suction cup on the guide strip changes. According to the device, the positions of the four suction cups can be adjusted at the same time, and operation steps are saved.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography machines, in particular to a plate loading fixture for a photolithography machine. Background Art

[0002] The photolithography machine is the core equipment for chip manufacturing. It uses a technology similar to photo printing to print the fine patterns on the mask onto the silicon wafer through light exposure. The general photolithography process involves cleaning and drying the chrome plate surface, primer coating, spin coating of photoresist, soft baking, alignment exposure, post-baking, development, hard baking, etching and other processes. The operating steps of the photolithography machine are loading the plate, positioning, moving the platform, focusing, centering, exposing and removing the plate. The chrome plate needs to be fixed when loading the plate.

[0003] Patent application number 202022252075.2 discloses a plate loading fixture for a photolithography machine. When in use, the two hydraulic cylinders are controlled to extend and retract, and the two hydraulic cylinders will drive the two second boxes to move inward or outward at the same time. The two second boxes will drive four vacuum suction cups to move. According to the length of the chrome plate, the two pairs of vacuum suction cups are controlled to move to the appropriate position. Then the motor is turned on, and the motor drives the first bevel gear to rotate, and the first bevel gear drives the second bevel gear to rotate, and the second bevel gear drives the threaded rod to rotate. The two threaded holes in each second box have opposite thread directions, and the threaded rod drives the two sliders in each second box to move inward or outward at the same time through the threaded holes. According to the width of the chrome plate, the two sliders in each second box will drive the corresponding vacuum suction cups to move inward or outward at the same time, so that the vacuum suction cups move to the appropriate position to position the chrome plate;

[0004] The above-mentioned position adjustment of the suction cup requires two separate actions and cannot be performed synchronously, thereby increasing the operation steps and being more troublesome. Utility Model Content

[0005] (1) Technical problems solved

[0006] In view of the deficiencies in the prior art, the present invention provides a plate-loading fixture for a photolithography machine, which solves the problems raised in the above-mentioned background technology.

[0007] (2) Technical solution

[0008] To achieve the above objectives, the present invention is implemented through the following technical solutions: a plate clamp for a photolithography machine, comprising a table, a turntable arranged on the top of the table by a rotating shaft, a vortex bar fixedly connected to the turntable, four drive bars distributed in an X shape arranged above the vortex bar, a plurality of drive teeth fixedly connected to the bottom of the drive bar, the drive teeth being clamped on the vortex bar, a guide bar fixedly connected to the end of the drive bar away from the turntable, a suction cup fixedly installed on the guide bar, a guide rail fixedly connected to the top of the table, and the guide bar slidingly set on the guide rail.

[0009] Preferably, the lower end of the rotating shaft passes through the table and is fixedly connected to a worm gear, a motor is fixedly installed at the bottom of the table, and a worm is fixedly connected to the output end of the motor, and the worm is in meshing contact with the worm gear.

[0010] Preferably, a hose is fixedly connected to the bottom end of the suction cup, a central shell is provided under the table, the other end of the hose is connected to the central shell, and an air pump is fixedly installed on the side wall of the central shell.

[0011] Preferably, four legs are fixedly connected to the bottom of the table, wherein a support plate is fixedly connected between two of the legs, and the air pump is fixedly installed on the support plate.

[0012] Preferably, the table is provided with four openings distributed in an X shape, and the hose is located inside the openings.

[0013] Preferably, a T-slot is provided at the bottom of the guide bar, and the guide rail is T-shaped.

[0014] (3) Beneficial effects

[0015] The utility model provides a plate clamp for a photolithography machine, which has the following beneficial effects:

[0016] 1. In the present invention, the motor is started to drive the worm to rotate, the worm drives the worm wheel to rotate, and the worm wheel drives the turntable to rotate through the rotating shaft. The vortex bar on the turntable cooperates with the driving teeth, thereby pushing the driving bar to move linearly, so that the guide bar moves along the direction of the guide rail. At this time, the position of the suction cup on the guide bar changes. This device can adjust the position of four suction cups at the same time, saving operating steps.

[0017] 2. In the present invention, the air pump is started to draw air from the suction cup into the hose, through the central housing, and finally discharged through the air pump, so that negative pressure is formed in the suction cup to suck the chrome plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a front-view stereoscopic structural diagram of a plate-loading fixture for a photolithography machine proposed in the present invention;

[0019] Figure 2 This is a bottom-up three-dimensional structural diagram of a plate-loading fixture for a photolithography machine proposed by the present invention;

[0020] Figure 3 for Figure 1 A magnified structure diagram.

[0021] In the figure: 1, table; 101, opening; 2, turntable; 201, vortex bar; 3, drive bar; 4, drive teeth; 5, guide bar; 6, suction cup; 7, hose; 8, center shell; 9, air pump; 10, support leg; 11, support plate; 12, guide rail; 13, worm gear; 14, motor; 15, worm. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0023] See also Figures 1 to 3 The utility model provides a technical solution: a plate clamp for a photolithography machine, comprising a table 1, a turntable 2 arranged on the top of the table 1 by a rotating shaft, a vortex bar 201 fixedly connected to the turntable 2, four driving bars 3 distributed in an X shape are arranged above the vortex bar 201, a plurality of driving teeth 4 are fixedly connected to the bottom of the driving bar 3, and the driving teeth 4 are clamped on the vortex bar 201. The rotating vortex bar 201 cooperates with the driving teeth 4 to achieve linear movement of the driving bar 3. The structure at this location is similar to a four-claw chuck structure, and a guide bar 5 is fixedly connected to the end of the driving bar 3 away from the turntable 2, and a suction cup 6 is fixedly installed on the guide bar 5. A guide rail 12 is fixedly connected to the top of the table 1, and the guide bar 5 is slidably set on the guide rail 12, and the guide rail 12 is used to achieve the purpose of linear guidance of the guide bar 5.

[0024] The lower end of the rotating shaft passes through the table 1 and is fixedly connected to a worm gear 13 . A motor 14 is fixedly installed at the bottom of the table 1 . A worm 15 is fixedly connected to the output end of the motor 14 . The worm 15 is in meshing contact with the worm gear 13 .

[0025] Start the motor 14 to drive the worm 15 to rotate, the worm 15 drives the worm wheel 13 to rotate, and the worm wheel 13 drives the turntable 2 to rotate through the rotating shaft. The vortex bar 201 on the turntable 2 cooperates with the driving tooth 4, thereby pushing the driving bar 3 to move linearly, so that the guide bar 5 moves along the direction of the guide rail 12. At this time, the position of the suction cup 6 on the guide bar 5 changes. This device can adjust the position of the four suction cups 6 at the same time, saving operating steps.

[0026] The bottom end of the suction cup 6 is fixedly connected to a hose 7, a central shell 8 is provided under the table 1, the other end of the hose 7 is connected to the central shell 8, and an air pump 9 is fixedly installed on the side wall of the central shell 8.

[0027] Start the air pump 9, suck the air at the suction cup 6 into the hose 7, pass through the central shell 8, and finally be discharged through the air pump 9, so that negative pressure is formed in the suction cup 6 to suck the chrome plate.

[0028] Four legs 10 are fixedly connected to the bottom of the table 1 , wherein a support plate 11 is fixedly connected between two legs 10 , and the air pump 9 is fixedly mounted on the support plate 11 .

[0029] The table 1 is provided with four openings 101 distributed in an X shape. The hose 7 is located inside the opening 101 . The hose 7 can move inside the opening 101 , ensuring that the suction cup 6 can move normally.

[0030] Furthermore, a T-shaped slot is provided at the bottom of the guide bar 5 , and the guide rail 12 is T-shaped.

[0031] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A plate-loading fixture for a photolithography machine, characterized in that: The invention comprises a table (1), a turntable (2) arranged on the top of the table (1) by rotating through a rotating shaft, a vortex bar (201) fixedly connected to the turntable (2), four driving bars (3) distributed in an X shape arranged above the vortex bar (201), a plurality of driving teeth (4) fixedly connected to the bottom of the driving bar (3), the driving teeth (4) being clamped on the vortex bar (201), a guide bar (5) fixedly connected to one end of the driving bar (3) away from the turntable (2), a suction cup (6) fixedly mounted on the guide bar (5), a guide rail (12) fixedly connected to the top of the table (1), and the guide bar (5) being slidably arranged on the guide rail (12).

2. The lithography machine plate loading fixture according to claim 1, characterized in that: The lower end of the rotating shaft passes through the table (1) and is fixedly connected to a worm gear (13); a motor (14) is fixedly installed at the bottom of the table (1); an output end of the motor (14) is fixedly connected to a worm gear (15); and the worm gear (15) is in meshing contact with the worm gear (13).

3. The lithography machine plate loading fixture according to claim 1, characterized in that: The bottom end of the suction cup (6) is fixedly connected to a hose (7), a central shell (8) is provided below the table (1), the other end of the hose (7) is connected to the central shell (8), and an air pump (9) is fixedly installed on the side wall of the central shell (8).

4. The plate loading fixture for a photolithography machine according to claim 3, characterized in that: Four legs (10) are fixedly connected to the bottom of the table (1), wherein a support plate (11) is fixedly connected between two of the legs (10), and the air pump (9) is fixedly mounted on the support plate (11).

5. The plate loading fixture for a photolithography machine according to claim 3, characterized in that: The table (1) is provided with four openings (101) distributed in an X shape, and the hose (7) is located inside the openings (101).

6. The plate loading fixture for a photolithography machine according to claim 1, characterized in that: A T-shaped slot is provided at the bottom of the guide bar (5), and the guide rail (12) is T-shaped.

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