Box opening device

Abstract

The utility model discloses a box opening device which is used for splitting a box body and a cover in a wafer box, the wafer box is placed on an installation base, one side of the cover of the wafer box is attached to the installation base, an unlocking mechanism is installed on the installation base and used for unlocking connection of the box body and the cover, and a mechanical claw is driven by a multi-shaft driving assembly to move the box body and the cover to be opened. The box body is clamped and separated from the cover, so that the box body and the cover of the wafer box are mechanically and automatically disassembled, the situation that wafers in the wafer box are possibly touched by mistake when the box is manually opened is avoided, and the safety of the wafer box in the box opening process is effectively improved.

Description

Technical Field

[0001] The utility model relates to the field of automation technology, in particular to a box opening device. Background Art

[0002] Wafer cassettes are used primarily to store and transport wafers in semiconductor production. To simplify transportation and minimize the risk of contamination, chip manufacturers use wafer cassettes to handle and store wafers. Since wafers themselves cannot be touched freely, specially designed cassettes are designed to be opened only in a specific manner. Manually opening and closing the cassettes can easily lead to accidentally touching a wafer, potentially rendering the entire wafer useless. Utility Model Content

[0003] The purpose of the utility model is to provide a box opening device in response to the technical problems existing in the background technology.

[0004] In order to achieve the above technical objectives, the technical solutions adopted in the first aspect of the present invention are as follows:

[0005] A box opening device is used to separate the box body and the lid of a wafer box. The box opening device includes a body and an opening mechanism and an unlocking mechanism installed on the body; a mounting seat is provided on the body, and the mounting seat is used to place the wafer box, wherein one side of the lid of the wafer box is affixed to the mounting seat; the unlocking mechanism is installed on the mounting seat and is used to unlock the connection between the box body and the lid; the box opening mechanism includes a multi-axis drive assembly and a mechanical claw electrically connected to the multi-axis drive assembly, and the mechanical claw is driven by the multi-axis drive assembly to clamp the box body and separate it from the lid.

[0006] Preferably, a plurality of contour positioning blocks are provided on the mounting seat.

[0007] Preferably, the unlocking mechanism includes an unlocking member, a rotating seat and a rotating rod, the rotating seat is fixed on the machine body, the first end of the rotating rod passes through the rotating seat and is fixedly connected to the unlocking member, and the second end of the rotating rod extends out of the machine body, wherein the second end of the rotating rod is deflected, and the unlocking member rotates around the first end of the rotating rod as an axis to unlock the connection between the box body and the lid.

[0008] Preferably, a rotatable cylindrical handle is provided on the second end of the rotating rod.

[0009] Preferably, the multi-axis drive assembly includes a Z-axis drive unit and a Y-axis drive unit, the Z-axis drive unit is mounted on the machine body, and the Y-axis drive unit is mounted on the Z-axis drive unit and is drive-connected to the Z-axis drive unit.

[0010] Preferably, the mechanical claw includes two claws and two sensors, the two sensors are respectively installed on the two claws and arranged facing each other, the two claws are respectively installed on the Y-axis drive unit and are driven and connected to the Y-axis drive unit, the two claws are arranged facing each other, and under the drive of the Y-axis drive unit, the two claws approach or move away from each other to clamp or release the box body.

[0011] Preferably, U-shaped handles are provided on both sides of the body.

[0012] Compared with the prior art, the utility model has the following beneficial technical effects: it is used to separate the box body and the lid in the wafer box, the wafer box is placed on the mounting seat, one side of the lid of the wafer box is attached to the mounting seat, the unlocking mechanism is installed on the mounting seat and is used to unlock the connection between the box body and the lid, and the mechanical claw is driven by the multi-axis drive assembly to clamp the box body and separate it from the lid, thereby realizing mechanical and automated separation of the box body and the lid of the wafer box, avoiding the situation where the wafers in the wafer box may be accidentally touched when the box is opened manually, and effectively improving the safety of the wafer box when opening the box. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic structural diagram of an embodiment of the present utility model;

[0014] Figure 2 This is a schematic structural diagram of a multi-axis drive assembly in an embodiment of the present utility model;

[0015] Figure 3 This is an exploded schematic diagram of the mounting base and the unlocking mechanism in an embodiment of the present utility model;

[0016] Figure 4 This is a schematic structural diagram of a wafer box in an embodiment of the present utility model;

[0017] Figure 5 for Figure 4 Cross-sectional view of the middle AA section.

[0018] Figure numbers: 100 body, 101 mounting base, 1011 contour positioning block, 102 U-shaped handle, 200 box opening mechanism, 201 multi-axis drive assembly, 2011 Z-axis drive unit, 2012 Y-axis drive unit, 202 mechanical claw, 2021 clamping claw, 2022 sensor, 300 unlocking mechanism, 301 unlocking member, 302 rotating base, 303 rotating rod, 3031 cylindrical handle. DETAILED DESCRIPTION

[0019] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features therein can be combined with each other.

[0020] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0021] In the description of this utility model, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connection, connection, or specific connection; they can refer to mechanical connection or electrical connection; they can refer to direct connection or indirect connection through an intermediate medium; and they can refer to internal communication between two components. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood based on specific circumstances.

[0022] The specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0023] like Figure 1-Figure 3 As shown, the utility model proposes a box opening device, which is used to separate the box body and the lid in the wafer box, and the box opening device includes a body 100 and an opening mechanism 200 and an unlocking mechanism 300 installed on the body 100; a mounting seat 101 is provided on the body 100, and the mounting seat 101 is used to place the wafer box, wherein one side of the lid of the wafer box is attached to the mounting seat 101; the unlocking mechanism 300 is installed on the mounting seat 101 and is used to unlock the connection between the box body and the lid; the box opening mechanism 200 includes a multi-axis drive component 201 and a mechanical claw 202 electrically connected to the multi-axis drive component 201, and the mechanical claw 202 is driven by the multi-axis drive component 201 to clamp the box body and separate it from the lid.

[0024] A plurality of contour positioning blocks 1011 are provided on the mounting seat 101 .

[0025] The specific implementation method is that due to the presence of multiple contour positioning blocks 1011, the wafer box can be quickly positioned and fixed to the specified position of the mounting seat 101 when it is placed on the mounting seat 101. It should be noted that the box opening device is also provided with four driving buttons, which also includes a control end, which is driven and connected to the four driving buttons and the box opening mechanism 200 through the control end. The four driving buttons control the opening and resetting operations of the box opening mechanism 200 in a group of two, and the driving form of a group of two is to allow both hands to leave the operating area of ​​the machine and improve the safety of the operator during operation. It should also be noted that the box body and the lid on the wafer box are structures with a detachable connection. Therefore, when the wafer box is placed on the mounting seat 101, one side of the lid needs to be attached to the mounting seat 101, and the unlocking mechanism 300 unlocks the detachable connection structure between the box body and the lid to facilitate the subsequent removal of the box body by the box opening mechanism 200.

[0026] Furthermore, the unlocking mechanism 300 includes an unlocking member 301, a rotating seat 302 and a rotating rod 303. The rotating seat 302 is fixed on the body 100. The first end of the rotating rod 303 passes through the rotating seat 302 and is fixedly connected to the unlocking member 301. The second end of the rotating rod 303 extends out of the body 100, wherein the second end of the rotating rod 303 is deflected, and the unlocking member 301 rotates around the first end of the rotating rod 303 to unlock the connection between the box body and the lid.

[0027] Participate in the Figure 4 and attached Figure 5 As can be seen from the figure, the detachable structure between the box body and the lid of the wafer box is connected and unlocked by a forward and reverse structure. Therefore, the unlocking member 301 is connected to the forward and reverse structure, and the unlocking member 301 is driven to rotate by the rotating rod 303, thereby driving the forward and reverse structure to unlock the connection between the box body and the lid. In this embodiment, the body 100 includes an inner layer, and the unlocking mechanism 300 is placed in the inner layer as a whole. Only the end of the unlocking member 301 connected to the lid extends from the mounting seat 101, and the second end of the rotating rod 303 extends from one side of the body 100, and a rotatable cylindrical handle 3031 is provided on the second end of the rotating rod 303 to facilitate manual operation by the operator. Of course, the rotating rod 303 can also be automated, such as a motor driving the rotation of the rotating rod 303 to unlock the lid.

[0028] Furthermore, the multi-axis driving assembly 201 includes a Z-axis driving unit 2011 and a Y-axis driving unit 2012 . The Z-axis driving unit 2011 is mounted on the body 100 , and the Y-axis driving unit 2012 is mounted on the Z-axis driving unit 2011 and is drivingly connected to the Z-axis driving unit 2011 .

[0029] The mechanical claw 202 includes two jaws 2021 and two sensors 2022. The two sensors 2022 are respectively installed on the two jaws 2021 and arranged facing each other. The two jaws 2021 are respectively installed on the Y-axis drive unit 2012 and are driven and connected to the Y-axis drive unit 2012. The two jaws 2021 are arranged facing each other. Under the drive of the Y-axis drive unit 2012, the two jaws 2021 approach or move away from each other to clamp or release the box body.

[0030] Furthermore, U-shaped handles 102 are provided on both sides of the body 100 .

[0031] Specifically, the overall structure of the box opening device in this embodiment is compact and small in size. The U-shaped handle 102 is added to facilitate the operator's carrying, thereby improving the portability of the box opening device to a certain extent.

[0032] The above descriptions provide one or more embodiments in conjunction with the specific content, and do not limit the specific implementation of the present invention to these descriptions. Any similarity or similarity with the methods, structures, etc. of the present invention, or any technical deduction or substitution based on the concept of the present invention, shall be deemed to be within the scope of protection of the present invention.

Claims

1. A box opening device for separating the box body and the cover of a wafer box, characterized in that: It comprises a body (100) and a box opening mechanism (200) and an unlocking mechanism (300) installed on the body (100); A mounting seat (101) is provided on the machine body (100), and the mounting seat (101) is used to place the wafer box, wherein one side of the cover of the wafer box is attached to the mounting seat (101); The unlocking mechanism (300) is mounted on the mounting seat (101) and is used to unlock the connection between the box body and the cover; The box opening mechanism (200) comprises a multi-axis drive assembly (201) and a mechanical claw (202) electrically connected to the multi-axis drive assembly (201); the mechanical claw (202) clamps the box body and separates it from the lid under the drive of the multi-axis drive assembly (201).

2. A box opening device according to claim 1, characterized in that: The mounting seat (101) is provided with a plurality of contour positioning blocks (1011).

3. A box opening device according to claim 1, characterized in that: The unlocking mechanism (300) comprises an unlocking member (301), a rotating seat (302) and a rotating rod (303), wherein the rotating seat (302) is fixed on the machine body (100), a first end of the rotating rod (303) passes through the rotating seat (302) and is fixedly connected to the unlocking member (301), and a second end of the rotating rod (303) extends out of the machine body (100), wherein the second end of the rotating rod (303) is deflected, and the unlocking member (301) rotates with the first end of the rotating rod (303) as an axis to unlock the connection between the box body and the lid.

4. A box opening device according to claim 3, characterized in that: A rotatable cylindrical handle (3031) is provided on the second end of the rotating rod (303).

5. A box opening device according to claim 1, characterized in that: The multi-axis drive assembly (201) comprises a Z-axis drive unit (2011) and a Y-axis drive unit (2012), wherein the Z-axis drive unit (2011) is mounted on the machine body (100), and the Y-axis drive unit (2012) is mounted on the Z-axis drive unit (2011) and is drivingly connected to the Z-axis drive unit (2011).

6. A box opening device according to claim 5, characterized in that: The mechanical claw (202) includes two clamping claws (2021) and two sensors (2022), the two sensors (2022) are respectively mounted on the two clamping claws (2021) and arranged facing each other, the two clamping claws (2021) are respectively mounted on the Y-axis driving unit (2012) and are connected to the Y-axis driving unit (2012), the two clamping claws (2021) are arranged facing each other, and under the drive of the Y-axis driving unit (2012), the two clamping claws (2021) move closer to or farther away from each other to clamp or release the box body.

7. A box opening device according to claim 1, characterized in that: U-shaped handles (102) are provided on both sides of the machine body (100).

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