Connecting structure and chemical mechanical polishing machine

Abstract

The utility model provides a connecting structure and a chemical mechanical polishing machine, the connecting structure is used for connecting a swing arm assembly and a machined part and comprises two opposite ends, one end is provided with a magnetic attraction body configured to attract the swing arm assembly, and the other end is provided with a connecting assembly configured to be connected with the machined part. According to the scheme, one end of the connecting structure is connected with the machined part, and the other end of the connecting structure adsorbs the swing arm assembly, so that the design has good universality and can adapt to connection of machined parts of various different models and the swing arm assembly, and the connection compatibility between the machined parts and the swing arm assembly is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing, and in particular to a connection structure and a chemical mechanical polishing machine. Background Art

[0002] The CMP (Chemical Mechanical Polishing) process, also known as chemical mechanical polishing, is a technology widely used in semiconductor manufacturing to achieve a high degree of flatness on wafer surfaces. The CMP process combines chemical action and mechanical friction to effectively remove surface unevenness, ensuring wafer precision and performance.

[0003] Currently, in the CMP process, a dresser is used to dress and clean the surface of the wafer polishing pad; the dresser is mounted on a swing arm and is driven by the swing arm to make frictional contact with the surface of the polishing pad. Due to the wide variety of dressers, different dressers are connected to the swing arm in different ways, that is, different models of dressers have different connection mechanisms. If the swing arm design is only compatible with a specific type of connection mechanism, the swing arm will not be able to be used with dressers that use other connection mechanisms. For example, a dresser with a magnetic connection method can be connected to the swing arm, while a dresser with a non-magnetic connection method such as a thread cannot be directly connected to the swing arm, resulting in poor connection compatibility between different dressers and the swing arm, which affects the progress of the CMP process and is not conducive to improving processing efficiency.

[0004] Therefore, how to provide a structure for connecting trimmer-type equipment and swing arm-type equipment with strong compatibility is a technical problem that those skilled in the art urgently need to solve. Utility Model Content

[0005] The present application provides a connection structure and a chemical mechanical polishing machine, which realize the compatible connection between the swing arm assembly and the workpiece.

[0006] To achieve the above-mentioned purpose, the first aspect provides a connecting structure for connecting a swing arm assembly and a workpiece, characterized in that the connecting structure includes two opposite ends, one end of which is provided with a magnetic body configured to adsorb the swing arm assembly, and the other end is provided with a connecting assembly configured to connect the workpiece.

[0007] Preferably, the connecting structure includes a main body and an abutment structure, and the abutment structure and the magnetic main body are both formed along the axial extension of the main body; the abutment structure is configured to abut at least part of the swing arm assembly when the magnetic main body is adsorbed on the swing arm assembly.

[0008] Preferably, the extension direction of the abutting structure is consistent with the extension direction of the magnetic body; wherein, in the extension direction, the height of the abutting structure is equal to the height of the magnetic body.

[0009] Preferably, the main body has a center point; the distance from any point on the projection of the abutting structure on the main body to the center point is greater than the distance from any point on the projection of the magnetic body on the main body to the center point.

[0010] Preferably, the main body is provided with at least two recessed structures formed by recessing in opposite directions along the extension direction; the recessed structures are arranged along the circumference of the magnetic main body, and the recessed structures are configured to cooperate with at least part of the positioning structure of the swing arm assembly.

[0011] Preferably, the at least two recessed structures are symmetrical about the center point.

[0012] Preferably, the connection assembly includes at least one through hole; the through hole passes through at least a portion of the body and at least a portion of the abutment structure, and the through hole is configured to allow the fixing structure of the workpiece to pass through for a fastened connection.

[0013] Preferably, the number of the through holes is at least two.

[0014] Preferably, the opening of the recessed structure is circular; and the radius of the through hole is not greater than the radius of the surface of the recessed structure.

[0015] A second aspect provides a chemical mechanical polishing machine, comprising:

[0016] polishing pads;

[0017] Mechanical swing arm;

[0018] A dresser comprising a fixed structure and a polishing head connected to the fixed structure;

[0019] As provided in the first aspect, the connecting structure has one end that is magnetically attracted to the mechanical swing arm, and the other end that is connected to the end of the fixed structure away from the polishing head, and is configured to be driven by the mechanical swing arm so that the surface of the polishing head and the polishing pad are in frictional contact for trimming.

[0020] According to the specific embodiments of the present application, the following technical effects are provided:

[0021] The present application provides a connection structure and a chemical mechanical polisher, wherein the connection structure is used to connect a swing arm assembly and a workpiece, and includes two opposing ends, one end of which is provided with a magnetic body configured to attract the swing arm assembly, and the other end of which is provided with a connection assembly configured to connect the workpiece. One end of the connection structure is connected to the workpiece, and the other end attracts the swing arm assembly. This design has good versatility and can adapt to the connection of various types of workpieces and swing arm assemblies, thereby improving the connection compatibility between the workpiece and the swing arm assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0023] Figure 1 This is an overall schematic diagram of the connection structure provided in the embodiment of the present application;

[0024] Figure 2 This is a schematic diagram of the connection between the connection structure and the swing arm assembly provided in an embodiment of the present application.

[0025] Description of the drawings: 10. Main body; 11. Abutment structure; 12. Magnetic body; 13. Center point; 14. Recessed structure; 15. Through hole; 100. Swing arm assembly. DETAILED DESCRIPTION

[0026] Some embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the scope of protection of the present application.

[0027] As described in the background art, currently, in the CMP process, a dresser is used to dress and clean the surface of the wafer polishing pad; the dresser is mounted on a swing arm and is in frictional contact with the surface of the polishing pad under the drive of the swing arm. Due to the wide variety of dressers, different dressers are connected to the swing arm in different ways, that is, different models of dressers have different connection mechanisms. If the swing arm design is only compatible with a specific type of connection mechanism, the swing arm will not be able to be used in conjunction with dressers that use other connection mechanisms. For example, a dresser with a magnetic connection method can be connected to the swing arm, while a dresser with a non-magnetic connection method such as a thread cannot be directly connected to the swing arm, resulting in poor connection compatibility between different dressers and the swing arm, which affects the progress of the CMP process and is not conducive to improving processing efficiency.

[0028] To solve the above problems, the core of this application is to provide a connection structure and a chemical mechanical polishing machine to achieve compatible connection between the swing arm assembly and the workpiece.

[0029] Example 1

[0030] Example 1 of the present application provides a connecting structure for connecting a swing arm assembly and a workpiece. The connecting structure includes two opposite ends, one end of which is provided with a magnetic body configured to adsorb the swing arm assembly, and the other end is provided with a connecting assembly configured to connect the workpiece.

[0031] Among them, one end of the connection structure is connected to the workpiece, and the other end adsorbs the swing arm assembly. This design has good versatility and can adapt to the connection of various types of workpieces and swing arm assemblies, thereby improving the connection compatibility between the workpiece and the swing arm assembly. The magnetic body uses magnetic force to achieve fast and firm adsorption, reducing the risk of wear and failure that may be caused by traditional mechanical connection methods. Moreover, due to the adsorption characteristics of the magnetic body, the connection and separation process between the swing arm assembly and the workpiece is faster and simpler, which improves the replacement efficiency of the equipment and reduces the downtime caused by unstable connection. At the same time, the setting of the connection assembly can connect different types of workpieces, improving the connection compatibility and scalability between equipment. In addition, this connection method simplifies the installation and maintenance process of the equipment, reduces the difficulty of operation and maintenance costs, thereby improving the overall work efficiency and reliability of equipment operation.

[0032] In some embodiments of the present application, the processing member is a trimmer.

[0033] Preferably, reference Figure 1 and Figure 2 The connecting structure includes a main body 10, an abutting structure 11 formed along the axial extension of the main body 10, and a magnetic main body 12 formed along the axial extension of the main body 10; the abutting structure 11 is configured to abut at least part of the swing arm assembly 100 when the magnetic main body 12 is adsorbed on the swing arm assembly 100.

[0034] Among them, the setting of the magnetic main body 12 enhances the stability of the connection. The matching setting of the abutment structure 11 and the magnetic main body 12 not only provides preliminary fixation by magnetic force, but also increases the reliability of the connection through physical contact. This effectively prevents the loosening of the connection caused by external interference or magnetic field changes that may be caused by a single magnetic attraction, ensuring the long-term stability of the connection under various working conditions. At the same time, the setting of the abutment structure 11 also helps to evenly distribute the force, reduce the loosening or damage that may be caused by uneven force on the connection point, and further improve the durability of the entire connection mechanism and the ease of maintenance. In addition, the abutment structure 11 can also be used to observe the installation status. When the swing arm assembly 100 is correctly installed and fits, the contact surface between it and the abutment structure 11 completely overlaps, and there is no angle. The staff can directly judge the accuracy and fit of the installation by observation, which reduces errors during the installation process and improves installation efficiency.

[0035] Preferably, reference Figure 1 and Figure 2 , the extension direction of the abutting structure 11 is consistent with the extension direction of the magnetic body 12; wherein, in the extension direction, the height of the abutting structure 11 is equal to the height of the magnetic body 12.

[0036] Among them, when the heights of the abutting structure 11 and the magnetic body 12 are consistent, both are in contact with the swing arm assembly 100, which helps to evenly distribute the magnetic attraction force and contact force, thereby ensuring the stability and reliability of the connection.

[0037] In some embodiments of the present application, the height of the abutting structure is greater than the height of the magnetic body, and the abutting structure is also magnetic, and is adsorbed on at least a portion of the swing arm assembly while abutting.

[0038] Among them, when the heights of the abutment structure and the magnetic body are inconsistent and the height of the abutment structure is greater than the height of the magnetic body, even if the magnetic attraction force of the magnetic body is affected by certain external factors, such as magnetic field changes or mechanical vibrations, the higher abutment structure can still exert adsorption force while providing contact force to reduce the risk of loose connection.

[0039] Preferably, reference Figure 1 and Figure 2 , the main body 10 has a center point 13; the distance from any point on the projection of the abutting structure 11 on the main body 10 to the center point 13 is greater than the distance from any point on the projection of the magnetic body 12 on the main body 10 to the center point 13.

[0040] Because the contact structure 11 is further from the center point 13, it can provide greater torque during connection, thereby increasing the stability of the suction connection, especially when subjected to external forces or vibrations. This design also allows for greater flexibility in the layout of the connection structure, allowing the relative position of the contact structure 11 and the magnetic body 12 to be adjusted according to different application requirements to accommodate different installation conditions and equipment configurations.

[0041] Example 2

[0042] Based on Example 1, Example 2 of the present application provides relevant auxiliary structures to improve the connection stability between the workpiece and the swing arm assembly.

[0043] Preferably, reference Figure 1 and Figure 2 The main body 10 is provided with at least two recessed structures 14 formed in opposite directions along the extension direction; the recessed structure 14 is arranged around the magnetic main body 12 along the circumference of the magnetic main body 12 and is configured to cooperate with at least part of the positioning structure of the swing arm assembly 100.

[0044] The recessed structures 14 are arranged around the circumference of the magnetic body 12, providing precise positioning points for the swing arm assembly 100, ensuring accurate alignment during installation and reducing installation errors. The recessed structures 14 can be made magnetic or non-magnetic, depending on the situation. If they are magnetic, they enhance the stability of the overall connection through magnetic attraction and physical interaction when mated with the swing arm assembly 100. If they are non-magnetic, although the magnetic attraction is slightly reduced, the presence of multiple recessed structures 14 still provides multiple points of support, helping to more evenly distribute force and reduce stress, thereby reducing wear at the connection points and extending the service life of the connection structure.

[0045] Preferably, reference Figure 1 , at least two recessed structures 14 are symmetrical along the center point 13 .

[0046] Among them, such as Figure 1 As shown, there are four recessed structures 14, and the two upwardly inclined recessed structures 14 are symmetrical along the center point 13, which helps to evenly distribute the force when positioning and installing the swing arm assembly, and reduce the local stress concentration caused by uneven force; at the same time, the symmetrical design helps to achieve force balance and can effectively resist the tilt or offset of the swing arm assembly caused by external force; in addition, the symmetrical design is visually more balanced and harmonious, which can enhance the aesthetics of the connection structure.

[0047] Preferably, reference Figure 1 The connection assembly includes at least one through hole 15; the through hole 15 is set through at least a portion of the body 10 and at least a portion of the abutment structure 11, and is configured to allow the fixing structure of the workpiece to pass through for a fastened connection.

[0048] Among them, the setting of the through hole 15 enables different types of workpieces to be connected to it through the fixed structure, thereby enhancing the versatility and adaptability of the connection structure. At the same time, when the workpiece or the connection structure needs to be maintained, the through hole 15 provides a convenient disassembly method, thereby improving maintenance efficiency.

[0049] In some embodiments of the present application, the fixing structure is a screw, which is configured to pass through the through hole to achieve the connection between the connecting structure and the workpiece.

[0050] Preferably, reference Figure 1 , the number of the through holes 15 is at least two.

[0051] Among them, such as Figure 1 As shown, there are three through holes 15 evenly distributed on the edge of the body 10. Each through hole 15 is symmetrically arranged around the center point 13, which helps to maintain the balance of the connection.

[0052] Preferably, reference Figure 1 , the opening of the recessed structure 14 is circular.

[0053] In some embodiments of this application, reference is made to Figure 1 , the radius of the through hole 15 is not greater than the radius of the surface of the recessed structure 14 .

[0054] The smaller radius of the through hole 15 can accommodate the installation of fixed structures of workpieces with different diameters, providing a certain degree of flexibility. The larger radius of the recessed structure 14 can prevent wear on the swing arm assembly during the tightening or disassembly process.

[0055] Example 3

[0056] Example 3 of the present application, based on Example 2, provides a chemical mechanical polishing machine, including: a polishing pad; a mechanical swing arm; a dresser, including a fixed structure and a polishing head connected to the fixed structure; a connecting structure as provided in Examples 1 to 2; one end of the connecting structure is magnetically attracted to the mechanical swing arm, and the other end is connected to an end of the fixed structure away from the polishing head, and is configured to make the surfaces of the polishing head and the polishing pad frictionally contact under the drive of the mechanical swing arm for dressing.

[0057] Among them, the connecting structure is applied between the mechanical swing arm and the trimmer, which realizes the compatible connection between the swing arm assembly and the trimmer, and also realizes the fast and stable installation and replacement of the trimmer; the magnetic connection facilitates the removal of the connecting structure and the trimmer from the mechanical swing arm, reducing the downtime caused by the replacement or maintenance of the trimmer and improving the overall trimming efficiency.

[0058] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0059] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0060] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A connecting structure for connecting a swing arm assembly and a workpiece, characterized in that: The connection structure includes two opposite ends, one end of which is provided with a magnetic body configured to absorb the swing arm assembly, and the other end is provided with a connection assembly configured to connect the workpiece.

2. The connection structure according to claim 1, characterized in that: The connecting structure further includes a body and an abutting structure, wherein the abutting structure and the magnetic body are both formed by extending along the axial direction of the body; The abutting structure is configured to abut against at least a portion of the swing arm assembly when the magnetic body is adsorbed onto the swing arm assembly.

3. The connection structure according to claim 2, characterized in that: The extending direction of the abutting structure is consistent with the extending direction of the magnetic body; wherein, in the extending direction, the height of the abutting structure is equal to the height of the magnetic body.

4. The connection structure according to claim 3, characterized in that: The main body has a center point; the distance from any point of the abutting structure on the projection of the main body to the center point is greater than the distance from any point of the magnetic body on the projection of the main body to the center point.

5. The connection structure according to claim 4, characterized in that: The main body is provided with at least two recessed structures formed in opposite directions along the extension direction; the recessed structures are arranged along the circumference of the magnetic body, and the recessed structures are configured to cooperate with at least part of the positioning structure of the swing arm assembly.

6. The connection structure according to claim 5, characterized in that: At least two of the recessed structures are symmetrical about the center point.

7. The connection structure according to claim 6, characterized in that: The connection assembly includes at least one through hole; the through hole penetrates at least a portion of the body and at least a portion of the abutment structure, and the through hole is configured to allow the fixing structure of the workpiece to pass through for a fastened connection.

8. The connection structure according to claim 7, characterized in that: The number of the through holes is at least two.

9. The connection structure according to any one of claims 5 to 8, characterized in that: The opening of the recessed structure is circular.

10. A chemical mechanical polishing machine, characterized in that: include: polishing pads; Mechanical swing arm; A dresser comprising a fixing structure and a polishing head connected to the fixing structure; The connecting structure according to any one of claims 1 to 9; one end of the connecting structure is magnetically attracted to the mechanical swing arm, and the other end is connected to an end of the fixed structure away from the polishing head, and is configured to make the polishing head and the surface of the polishing pad frictionally contact for trimming under the drive of the mechanical swing arm.

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