Material box purification device

Abstract

The utility model relates to a material box purifying device which is used for purifying a material box, the material box is provided with an air inlet for air to enter, and the material box purifying device comprises a bearing frame, a material box and a purifying device, the purification unit comprises an air source treatment assembly and at least one supporting assembly used for bearing the material box, the supporting assembly comprises a bottom supporting plate, an air outlet and a device mounting box, the material box is placed on the bottom supporting plate, at least two ends of the bottom supporting plate are folded upwards to form limiting plates, and the device mounting box is arranged on the bottom supporting plate. The material box can be limited on the limiting plate; the gas inlet is in butt joint with the gas outlet, so that the gas enters the gas inlet from the gas outlet. According to the material box, quantitative clean and dry air can be introduced into the air inlet of the material box, so that gas in the material box is purified, the process requirement is met, the purification efficiency of the material box can be effectively improved, and a good purification effect is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a material box purification device. Background Art

[0002] In semiconductor manufacturing, a pod is a specialized box used to hold and transport photomasks. It typically features a specific structure and functionality to protect the photomask from contamination and damage. Microparticles within the pod's cavity can damage the photomask's surface, impacting its quality and, consequently, chip performance. Therefore, the air within the pod must be replaced to meet process requirements.

[0003] In the prior art, the inside of the wafer box is generally purged manually, which is relatively inefficient, making the entire process more complicated, while increasing the workload and manpower input of the operators and increasing the labor cost investment. Utility Model Content

[0004] To this end, the technical problem to be solved by the present invention is to overcome the shortcomings of the existing technology and provide a material box purification device. By introducing a certain amount of clean and dry air into the air inlet of the mask box, the original gas in the mask box is discharged by squeezing, thereby purifying the gas in the mask box to meet the process requirements.

[0005] In order to solve the above technical problems, the present utility model provides a material box purification device for purifying a material box, wherein the material box has an air inlet for gas to enter, and the material box purification device comprises a carrying frame;

[0006] The purification unit includes an air source processing component and a support component for carrying the material box, the support component is provided with at least one, and the support component is detachably assembled on the carrying frame, the support component includes a bottom support plate, an air outlet and a device mounting box, the material box is placed on the bottom support plate, at least two ends of the bottom support plate are folded upward to form a limit plate, and the material box can be limited to the limit plate; the air inlet is docked with the air outlet so that the gas enters the air inlet from the air outlet; the device mounting box is connected to the bottom support plate, one end of the air source processing component is connected to the gas supply end, and the other end of the air source processing component is connected to the support component, the gas flows through the air source processing component and the support component in turn into the material box, and overflows through the sealing gap of the material box.

[0007] In one embodiment of the present invention, there are two air inlets, two air outlets, and positions of the two air outlets are configured to correspond to positions of the two air inlets.

[0008] In one embodiment of the present invention, there are multiple support assemblies, and the multiple support assemblies are arranged in sequence along the first direction of the supporting frame.

[0009] In one embodiment of the present invention, the purification unit further includes a sensing component, and the sensing component is used to sense whether the material box is placed in place.

[0010] In one embodiment of the present invention, the sensing component includes a press-sensitive switch, and the press-sensitive switch is arranged on the bottom support plate. When the material box is placed on the bottom support plate, the press-sensitive switch can be pressed.

[0011] In one embodiment of the present invention, two sensing components are provided, and are respectively disposed near edges at two opposite ends of the bottom support plate.

[0012] In one embodiment of the present invention, the two opposite ends of the bottom support plate are folded upward to form a first limiting plate, and the other two ends of the bottom support plate are folded upward to form a second limiting plate. The first limiting plate, the second limiting plate and the bottom support plate are surrounded to form a receiving groove, and the material box is received in the receiving groove.

[0013] In one embodiment of the present invention, a positioning block is further provided on the bottom supporting plate. The positioning block is arranged along the circumference of the material box and is used to position the material box.

[0014] In one embodiment of the present invention, the gas source processing assembly includes a first valve body, a second valve body, an oil mist separator, a pressure display and a third valve body arranged in sequence along the gas flow direction. The first valve body is used to control the on-off of the gas circuit, the second valve body is used to adjust the intake pressure, and the third valve body is used to control the intake pressure.

[0015] In one embodiment of the present invention, the device installation box includes a fourth valve body, a flow display, a flow controller and a filter. The fourth valve body is connected to the air outlet to control the air intake of the material box. The flow display is arranged on the box body of the device installation box. The flow controller is used to control the gas flow. The filter is arranged between the air source processing component and the fourth valve body to filter particulate matter in the gas.

[0016] The above technical solution of the utility model has the following advantages compared with the prior art:

[0017] The material box purification device described in the present invention is provided with a supporting frame and a purification unit, wherein the purification unit includes an air source processing component and a support component, one end of the air source processing component is connected to the gas supply end, and the other end of the air source processing component is connected to the support component, the material box can be placed on the support component, and the air inlet on the material box can be paired with the air outlet of the support component to realize gas exchange, and by controlling the air source processing component and the support component, a certain amount of clean and dry air can be introduced into the air inlet of the material box, and the original gas in the material box is discharged by squeezing, and the original gas can overflow through the sealing gap of the material box, thereby realizing the purification of the gas in the material box to meet the process requirements, and can effectively improve the purification efficiency of the material box to ensure better purification effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the content of the utility model easier to understand, the utility model is further described in detail below based on the specific embodiments of the utility model in conjunction with the accompanying drawings, wherein:

[0019] Figure 1 It is a schematic diagram of the overall structure of a preferred embodiment of the present utility model.

[0020] Figure 2 It is a structural schematic diagram of a material box according to a preferred embodiment of the present utility model.

[0021] Figure 3 It is a partial structural schematic diagram of the bottom support plate and the device installation box of the preferred embodiment of the utility model.

[0022] Figure 4 It is a partial structural diagram of the gas source processing component of the preferred embodiment of the present utility model.

[0023] Figure 5 It is a partial structural diagram of a device installation box according to a preferred embodiment of the present utility model.

[0024] Figure 6 It is a schematic diagram of the air intake route when the preferred embodiment of the utility model is in working state.

[0025] Figure 7 It is a schematic diagram of the working process of the preferred embodiment of the present utility model.

[0026] Explanation of the reference numerals in the specification: 1. Material box; 10. Air inlet; 2. Carrying frame; 3. Air source processing assembly; 4. Support assembly; 40. Bottom support plate; 401. First limit plate; 402. Second limit plate; 403. Positioning block; 41. Air outlet; 42. Device installation box; 43. Fourth valve body; 44. Flow display; 45. Flow controller; 46. Filter; 47. Pressure sensor; 5. Electrical cabinet. DETAILED DESCRIPTION

[0027] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0028] Reference Figures 1 to 7 As shown, the present invention discloses a material box purification device for purifying a material box 1, wherein the material box 1 has an air inlet 10 for gas to enter, and the material box purification device includes a carrying frame 2;

[0029] The material box purification device further includes a purification unit, which includes an air source processing component 3 and a support component 4 for carrying the material box 1 . There is at least one support component 4 , and the support component 4 is detachably assembled on the supporting frame 2 .

[0030] Specifically, the support assembly 4 includes a bottom support plate 40, an air outlet 41 and a device mounting box 42. The material box 1 is placed on the bottom support plate 40. At least two ends of the bottom support plate 40 are folded upward to form a limit plate. With this arrangement, the material box 1 can be limited to the limit plate to avoid sliding off the bottom support plate 40 during movement.

[0031] The air inlet 10 is connected to the air outlet 41 so that the gas enters the air inlet 10 from the air outlet 41. The device mounting box 42 is connected to the bottom support plate 40. One end of the air source processing assembly 3 is connected to the gas supply end, and the other end of the air source processing assembly 3 is connected to the support assembly 4. The gas flows through the air source processing assembly 3 and the support assembly 4 in sequence into the material box 1 and overflows through the sealed gap of the material box 1. This completes the replacement of the gas in the material box 1 and achieves purification of the gas in the material box 1.

[0032] From this, it can be seen that the material box purification device to be protected by the present invention is provided with a carrying frame and a purification unit, wherein the purification unit includes an air source processing component and a support component, one end of the air source processing component is connected to the gas supply end, and the other end of the air source processing component is connected to the support component. The material box can be placed on the support component, and the air inlet on the material box can be paired with the air outlet of the support component to realize gas exchange. By controlling the air source processing component and the support component, a certain amount of clean and dry air can be introduced into the air inlet of the material box, and the original gas in the material box is discharged by squeezing. The original gas can overflow through the sealing gap of the material box, thereby realizing the purification of the gas in the material box to meet the process requirements, and can effectively improve the purification efficiency of the material box to ensure better purification effect.

[0033] Specifically, the material box 1 includes but is not limited to a mask box.

[0034] Specifically, there are two air inlets 10 and two air outlets 41, and the positions of the two air outlets 41 are configured to correspond to the positions of the two air inlets 10. With this arrangement, when the material box 1 is placed on the bottom support plate 40, the air inlets 10 can be docked with the air outlets 41, thereby improving gas circulation efficiency.

[0035] There are multiple support assemblies 4 , and the multiple support assemblies 4 are arranged in sequence along the first direction of the supporting frame 2 .

[0036] As a preferred embodiment, the supporting frame 2 includes a plurality of interconnected crossbeams and a plurality of columns, wherein the direction in which the longest crossbeam extends is defined as the first direction. The air source processing assembly 3 is also assembled to the supporting frame 2 and is located at one end of the supporting frame 2 along the first direction.

[0037] Furthermore, the purification unit further includes a sensing component, which is used to sense whether the material box 1 is placed in place.

[0038] Specifically, the sensing component includes a press sensing switch 44, which is arranged on the bottom support plate 40. When the material box 1 is placed on the bottom support plate, the material box 1 can be pressed against the press sensing switch 44 and trigger the press sensing switch 44, thereby making it easier for the operator to know whether the material box 1 is placed in place.

[0039] As a preferred embodiment, two sensing components are provided, and are respectively arranged near the edges of the opposite ends of the bottom support plate 40. In this way, only when the material box 1 can be placed horizontally on the bottom support plate 40, the two sensing components can be triggered at the same time, thereby facilitating the operator to confirm whether the material box 1 is placed in place.

[0040] From a detailed point of view, the two opposite ends of the bottom support plate 40 are folded upward to form a first limiting plate 401, and the other two ends of the bottom support plate 40 are folded upward to form a second limiting plate 402. The two first limiting plates 401, the two second limiting plates 402 and the bottom support plate 40 are surrounded to form a receiving groove, and the material box 1 can be received in the receiving groove.

[0041] Furthermore, a positioning block 403 is further provided on the bottom supporting plate 40 . The positioning block 403 is arranged along the circumference of the material box 1 . The positioning block 403 is used to guide and position the material box 1 .

[0042] As a preferred embodiment, there are four positioning blocks 403 , which are evenly arranged along the four edges of the material box 1 .

[0043] As a preferred embodiment, the gas source processing assembly 3 includes a first valve body 31, a second valve body 32, an oil mist separator 33, a pressure indicator 34, and a third valve body 35, which are arranged in sequence along the gas flow direction. The first valve body 31 is used to control the on / off of the gas circuit, the second valve body 32 is used to adjust the intake pressure, the oil mist separator 33 can eliminate oil mist in the gas, and the third valve body 35 is used to accurately control the intake pressure online.

[0044] The gas source processing assembly 3 further includes a fine mist separator 36 , which is disposed between the third valve body 35 and the oil mist separator 33 , thereby further removing oil mist from the gas.

[0045] In detail, the first valve body 31 includes but is not limited to a manual valve, the second valve body 32 includes but is not limited to a pressure regulating valve 32, and the third valve body 35 includes but is not limited to an electric proportional valve.

[0046] As a preferred embodiment, the device installation box 42 includes a fourth valve body 43, a flow indicator 44, a flow controller 45, and a filter 46. The fourth valve body 43 is connected to the gas outlet 10 to control the air intake of the material box 1. The flow indicator 44 is provided on the outer wall of the device installation box 42 to display the current flow rate of the gas for easy monitoring by the operator. The flow controller 45 is used to control the flow rate of the gas. The filter 46 is provided between the gas source processing assembly 3 and the fourth valve body 43 to filter fine particles in the gas.

[0047] In detail, a pressure sensor 47 is further provided in the device mounting box 42 , and the pressure sensor 47 is connected to the gas outlet 41 to monitor the gas tightness of the gas outlet 41 .

[0048] The fourth valve body 43 is an intake solenoid valve for controlling intake air.

[0049] As a preferred embodiment, the material purification device further includes an electrical cabinet 5 , which is connected to the purification unit to control the operation of the purification unit.

[0050] It should be noted that the gas includes but is not limited to XCDA (ultra-clean dry compressed air).

[0051] In the description of the embodiments of the present invention, it should be noted that, unless otherwise specified or limited, the terms "disposed" and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0052] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0053] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0054] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. Material box purification device, used to purify the material box, characterized by: The material box has an air inlet for gas to enter, and the material box purification device includes: load-bearing frame; The purification unit includes an air source processing component and a support component for carrying the material box, the support component is provided with at least one, and the support component is detachably assembled on the carrying frame, the support component includes a bottom support plate, an air outlet and a device mounting box, the material box is placed on the bottom support plate, at least two ends of the bottom support plate are folded upward to form a limit plate, and the material box can be limited to the limit plate; the air inlet is docked with the air outlet so that the gas enters the air inlet from the air outlet; the device mounting box is connected to the bottom support plate, one end of the air source processing component is connected to the gas supply end, and the other end of the air source processing component is connected to the support component, the gas flows through the air source processing component and the support component in turn into the material box, and overflows through the sealing gap of the material box.

2. The material box purification device according to claim 1, characterized in that: There are two air inlets and two air outlets, and positions of the two air outlets are configured to correspond to positions of the two air inlets.

3. The material box purification device according to claim 1, characterized in that: There are multiple support assemblies, and the multiple support assemblies are arranged in sequence along the first direction of the supporting frame.

4. The material box purification device according to claim 1, characterized in that: The purification unit further includes a sensing component, which is used to sense whether the material box is placed in place.

5. The material box purification device according to claim 4, characterized in that: The induction component includes a press-sensitive switch, which is arranged on the bottom support plate. When the material box is placed on the bottom support plate, the press-sensitive switch can be pressed.

6. The material box purification device according to claim 4 or 5, characterized in that: There are two sensing components, which are respectively arranged close to the edges of the two opposite ends of the bottom support plate.

7. The material box purification device according to claim 1, characterized in that: The two opposite ends of the bottom support plate are folded upward to form a first limiting plate, and the other two ends of the bottom support plate are folded upward to form a second limiting plate. The first limiting plate, the second limiting plate and the bottom support plate are surrounded to form a receiving groove, and the material box is received in the receiving groove.

8. The material box purification device according to claim 1, characterized in that: The bottom support plate is further provided with a positioning block, which is arranged along the circumference of the material box and is used to position the material box.

9. The material box purification device according to claim 1, characterized in that: The gas source processing assembly includes a first valve body, a second valve body, an oil mist separator, a pressure display and a third valve body arranged in sequence along the gas flow direction. The first valve body is used to control the on and off of the gas circuit, the second valve body is used to adjust the intake pressure, and the third valve body is used to control the intake pressure.

10. The material box purification device according to claim 1, characterized in that: The device installation box includes a fourth valve body, a flow display, a flow controller and a filter. The fourth valve body is connected to the air outlet to control the air intake of the material box. The flow display is arranged on the box body of the device installation box. The flow controller is used to control the gas flow. The filter is arranged between the air source processing component and the fourth valve body to filter particulate matter in the gas.

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