Conveying device and conveying equipment

Abstract

The utility model provides a conveying device and conveying equipment. The conveying device comprises a machine body; the conveying modules are distributed in parallel in the first direction and are suitable for conveying materials in the second direction; wherein the conveying modules are arranged on the machine body, each conveying module is correspondingly provided with a driving unit, and the driving units are suitable for driving the corresponding conveying modules so that the conveying speed of conveying each column of materials can be adjusted. According to the conveying device provided by the utility model, the at least two conveying modules which are distributed in parallel are configured, so that double-row conveying of the silicon wafers can be realized, and each conveying module is independently provided with the driving unit, so that each conveying module can independently adjust the speed of conveying the silicon wafers, the relative positions of the silicon wafers in the conveying process can be flexibly adjusted, and the conveying efficiency of the silicon wafers is improved. Therefore, accurate alignment and synchronization of the materials can be realized, a single-row wafer repairing function can be realized quickly, and a caching device can cache a single silicon wafer.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell manufacturing, and more particularly to a conveying device and conveying equipment comprising the conveying device. Background Art

[0002] In solar cell manufacturing, double-half-cell technology is widely used for its improved efficiency and reduced costs. During the production process, silicon wafers sometimes need to be refilled to address insufficient wafers in a row. However, existing conveying devices cannot independently control the transport of two rows of silicon wafers and cannot automatically refill them. This not only affects production efficiency but also increases operational complexity. Furthermore, existing systems do not facilitate the buffering of a single row of silicon wafers, which also affects production efficiency. Utility Model Content

[0003] The utility model provides a new technical solution for a conveying device, which can at least solve the problem that the existing conveying device cannot automatically patch.

[0004] The utility model also provides a conveying device, comprising the above-mentioned conveying device.

[0005] According to the first aspect of the present utility model, a conveying device is provided, comprising: a machine body; at least two conveying modules distributed in parallel along a first direction, the conveying modules being suitable for conveying materials along a second direction; wherein the conveying modules are arranged on the machine body, and each of the conveying modules is correspondingly provided with a driving unit, and the driving unit is suitable for driving the corresponding conveying module so that the conveying speed of each column of materials can be adjusted.

[0006] Optionally, the conveying module includes: a pulley unit, which is arranged on the machine body; an annular conveyor belt, which is suitable for conveying a column of materials along the second direction, and the annular conveyor belt is sleeved on at least a portion of the pulley unit, and the driving unit is transmission-connected to the annular conveyor belt.

[0007] Optionally, the endless conveyor belt includes: a first sub-conveyor belt, which is sleeved on at least a portion of the pulley unit; a second sub-conveyor belt, which is sleeved on at least a portion of the pulley unit and is spaced apart from the first sub-conveyor belt along the first direction; the first sub-conveyor belt and the second sub-conveyor belt are transmission-connected to the drive unit, and in the first direction, the machine body is provided with an installation space between the first sub-conveyor belt and the second sub-conveyor belt.

[0008] Optionally, the pulley unit includes: a first pulley group, which is rotatably provided on the machine body; a second pulley group, which is rotatably provided on the machine body and spaced apart from the first pulley group along the second direction, and the endless conveyor belt is sleeved on the first pulley group and the second pulley group; a tensioning pulley group, which is provided on the machine body, and the tensioning pulley group is provided with a tensioning pulley, the position of the tensioning pulley in the third direction is adjustable, and the tensioning pulley cooperates with the endless conveyor belt to tension the endless conveyor belt.

[0009] Optionally, the first sub-conveyor belt and the second sub-conveyor belt are sleeved on the first pulley group and the second pulley group, and the tensioning pulley group includes: a first tensioning wheel, which is rotatably provided on the machine body, and the position of the first tensioning wheel in the third direction is adjustable, and the first tensioning wheel is suitable for cooperating with the inner side of the first sub-conveyor belt to tension and transport the first sub-conveyor belt; a second tensioning wheel, which is rotatably provided on the machine body, and the position of the second tensioning wheel in the third direction is adjustable, and the second tensioning wheel is suitable for cooperating with the inner side of the second sub-conveyor belt to tension and transport the first sub-conveyor belt.

[0010] Optionally, the tensioning pulley group also includes: a first connecting plate, the first connecting plate is movably provided on the machine body along the third direction, the first tensioning wheel is rotatably provided on the first connecting plate, the first connecting plate is provided with a first fastener, the first fastener is suitable for fixing or releasing the position of the first connecting plate in the third direction; a second connecting plate, the second connecting plate is movably provided on the machine body along the third direction, the second tensioning wheel is rotatably provided on the second connecting plate, the second connecting plate is provided with a second fastener, the second fastener is suitable for fixing or releasing the position of the second connecting plate in the third direction.

[0011] Optionally, in the second direction, the machine body is provided with a limit block at the unloading end of the endless conveyor belt to block the material on the endless conveyor belt.

[0012] Optionally, the first sub-conveyor belt and / or the second sub-conveyor belt is an elastic belt.

[0013] Optionally, the conveying device further comprises: a detection unit, the detection unit being arranged in the installation space, the detection unit being suitable for detecting the position of the material on the endless conveyor belt, and the presence or absence of material tailing and material within the variable pitch.

[0014] According to a second aspect of the present invention, a conveying device is provided, comprising: a conveying device as described in any one of the above items; a cache device, the cache device corresponding to the position of the conveying device, and the cache device suitable for caching materials on the two conveying modules.

[0015] According to the conveying device of the present invention, double-column conveying of silicon wafers can be achieved by configuring at least two conveying modules distributed in parallel, and a driving unit is independently set on each conveying module, so that each conveying module can independently adjust the speed of conveying silicon wafers, so that the relative position of the silicon wafers in the conveying process can be flexibly adjusted, which is conducive to achieving precise alignment and synchronization of materials, and can quickly realize the single-column patching function, and is conducive to the caching of single silicon wafers by the cache device, effectively improving the applicability of the conveying device and the production efficiency of photovoltaic cells.

[0016] Other features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

[0018] Figure 1 This is a top view of a conveying device according to an embodiment of the present invention;

[0019] Figure 2 This is a perspective view of a conveying device according to an embodiment of the present invention;

[0020] Figure 3 This is an exploded view of the structure of a conveying device according to an embodiment of the present invention;

[0021] Figure 4 It is a structural schematic diagram of a tensioning pulley assembly of a conveying device according to an embodiment of the present utility model.

[0022] Reference numerals

[0023] 100. Conveying device;

[0024] 10. Machine body; 10a. Limit block;

[0025] 20. Conveying module;

[0026] 21. Drive unit; 211. Drive wheel; 212. Motor;

[0027] 22. Pulley unit; 221. First pulley assembly; 222. Second pulley assembly; 223. Tensioning pulley assembly; 223a. First tensioning pulley; 223b. First connecting plate; 223c. First fastener; 224. Idle pulley;

[0028] 23. Annular conveyor belt; 231. First sub-conveyor belt; 232. Second sub-conveyor belt;

[0029] 30. Detection unit; 31. Capacitive proximity sensor; 32. Mirror-reflective photoelectric sensor. DETAILED DESCRIPTION

[0030] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0031] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.

[0032] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0033] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0034] It should be noted that like reference numerals and letters refer to like items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0035] The following first describes in detail the conveying device 100 according to an embodiment of the present invention with reference to the accompanying drawings.

[0036] like Figures 1 to 4 As shown, the conveying device 100 according to an embodiment of the present invention includes: a body 10 and at least two conveying modules 20 distributed in parallel along a first direction.

[0037] Specifically, the conveying module 20 is suitable for conveying materials along the second direction. The conveying module 20 is arranged on the body 10. Each conveying module 20 is correspondingly provided with a driving unit 21. The driving unit 21 is suitable for driving the corresponding conveying module 20 so that the conveying speed of each column of materials can be adjusted.

[0038] In other words, if Figures 1 to 4As shown, the conveying device 100 according to an embodiment of the present invention mainly includes a body 10 and a conveying module 20, wherein the number of the conveying modules is multiple, for example, two or more, and the multiple conveying modules are distributed in parallel along a first direction (for example, the width direction of the body 10), and each conveying module can convey a column of materials along the second direction. The following is a specific explanation taking two conveying modules as an example.

[0039] The body 10 is provided with a first mounting frame and a second mounting frame, and the first mounting frame and the second mounting frame are spaced apart along a first direction (for example, the width direction of the body 10). The first mounting frame and the second mounting frame can provide installation positions for two conveying modules 20. The first conveying module 20 can be installed on the first mounting frame, and the second conveying module 20 can be installed on the second mounting frame, so that the two conveying modules 20 are distributed side by side along the first direction, so that double-row material transportation can be achieved through the two conveying modules 20.

[0040] In this embodiment, each conveying module 20 is provided with a corresponding drive unit 21, that is, the first conveying module 20 and the second conveying module 20 are both provided with a drive unit 21, so that the drive unit 21 on the first conveying module 20 can drive the first conveying module 20 to convey the first column of materials (for example, the first half of the battery silicon wafer), and the drive unit 21 on the second conveying module 20 can drive the second conveying module 20 to convey the second column of materials (for example, the second half of the battery silicon wafer), thereby making the conveying speed of each column of materials adjustable. It should be noted that the conveying speed of the two columns of materials includes but is not limited to the following situations:

[0041] Case 1: The conveying speed of the first column of materials is lower than that of the second column, and the conveying speed of the first column of materials can be zero;

[0042] Case 2: The conveying speed of the second column of materials is less than that of the first column, and the conveying speed of the second column of materials can be zero;

[0043] Case 3: The conveying speed of the first column of materials is the same as the conveying speed of the second column of materials.

[0044] Therefore, when a single column of wafers needs to be patched, the patching process can be achieved by controlling the conveying speed of the material in this column to be greater than the conveying speed of the material in another column; when a single column of silicon wafers needs to be cached, the conveying speed of the material in this column can be greater than the conveying speed of the material in another column, so that the silicon wafers in this column can reach the cache position first, thereby realizing the caching of a single column of silicon wafers.

[0045] Therefore, according to the conveying device 100 provided in this embodiment, double-column conveying of silicon wafers can be achieved by configuring at least two parallel conveying modules 20, and the driving unit 21 independently arranged on each conveying module 20 enables each conveying module 20 to independently adjust the speed of conveying silicon wafers, so that the relative position of the silicon wafers during the conveying process can be flexibly adjusted, which is conducive to achieving precise alignment and synchronization of materials, and can quickly realize the single-column patching function, and is conducive to the caching of single silicon wafers by the cache device, effectively improving the applicability of the conveying device 100 and the production efficiency of photovoltaic cells.

[0046] According to one embodiment of the present invention, the conveying module 20 includes: a pulley unit 22 and an annular conveyor belt 23, the pulley unit 22 is arranged on the body 10, the annular conveyor belt 23 is suitable for conveying a column of materials along the second direction, the annular conveyor belt 23 is sleeved on at least a portion of the pulley unit 22, and the drive unit 21 is transmission-connected to the annular conveyor belt 23.

[0047] That is to say, if Figures 1 to 3 As shown, the structures of the two conveyor modules 20 can be identical or different. In this embodiment, the two conveyor modules 20 have the same structure. The conveyor modules 20 primarily include a pulley unit 22, an endless conveyor belt 23, and a drive unit 21. The pulley unit 22 is mounted on a corresponding mounting frame, and the endless conveyor belt 23 is sleeved around at least a portion of the pulley unit 22. The pulley unit 22 allows tensioning of the inner side of the endless conveyor belt 23, allowing the endless conveyor belt 23 to transport a row of silicon wafers along the second direction. Furthermore, the drive unit 21 is in transmission connection with the endless conveyor belt 23, allowing the drive unit 21 to drive the endless conveyor belt 23 to rotate around at least a portion of the pulley unit 22, thereby transporting the silicon wafers along the second direction.

[0048] In this embodiment, the conveying module 20 is a belt conveying module 20 , which has a simple structure and can reliably convey silicon wafers.

[0049] In some embodiments of the present invention, the annular conveyor belt 23 includes: a first sub-conveyor belt 231 and a second sub-conveyor belt 232, the first sub-conveyor belt 231 is sleeved on at least a portion of the pulley unit 22, the second sub-conveyor belt 232 is sleeved on at least a portion of the pulley unit 22, and is spaced apart from the first sub-conveyor belt 231 along the first direction, the first sub-conveyor belt 231 and the second sub-conveyor belt 232 are transmission-connected to the drive unit 21, and in the first direction, the body 10 is provided with an installation space between the first sub-conveyor belt 231 and the second sub-conveyor belt 232.

[0050] Specifically, if Figures 1 to 3As shown, the endless conveyor belt 23 includes two independently arranged parts, namely, a first sub-conveyor belt 231 and a second sub-conveyor belt 232. The first sub-conveyor belt 231 and the second sub-conveyor belt 232 are spaced apart and arranged along a first direction. The first sub-conveyor belt 231 and the second sub-conveyor belt 232 are both mounted on at least a portion of the pulley unit 22, so that the pulley assembly can tension the first sub-conveyor belt 231 and the second sub-conveyor belt 232. The first sub-conveyor belt 231 and the second sub-conveyor belt can be driven to move synchronously by the drive unit 21. When transporting silicon wafers, the first sub-conveyor belt 231 and the second sub-conveyor belt 232 can carry the silicon wafers together to transport the silicon wafers, thereby reducing the contact area between the silicon wafers and the conveying module 20.

[0051] In this embodiment, the first sub-conveyor belt 231 and the second sub-conveyor belt 232 are spaced apart along the first direction, and an installation space is formed between the first sub-conveyor belt 231 and the second sub-conveyor belt 232 on the body 10, which is lower than the upper side of the first sub-conveyor belt 231 and the second sub-conveyor belt 232. The installation space can provide an installation position for other structures, which is beneficial for other structures to perform corresponding processes on the conveyed silicon wafers, and can avoid the conveying device 100 occupying too much space.

[0052] According to one embodiment of the present invention, the pulley unit 22 includes: a first pulley group 221, a second pulley group 222 and a tensioning pulley group 223. The first pulley group 221 is rotatably provided on the machine body 10, the second pulley group 222 is rotatably provided on the machine body 10, and is spaced apart from the first pulley group 221 along the second direction. The endless conveyor belt 23 is sleeved on the first pulley group 221 and the second pulley group 222, and the tensioning pulley group 223 is provided on the machine body 10. The tensioning pulley group 223 is provided with a tensioning pulley, and the position of the tensioning pulley in the third direction is adjustable. The tensioning pulley cooperates with the endless conveyor belt 23 to tension the endless conveyor belt 23.

[0053] That is to say, if Figures 1 to 3As shown, the pulley unit 22 mainly includes a first pulley group 221, a second pulley group 222 and a tension pulley group 223, wherein the axial directions of the first pulley group 221 and the second pulley group 222 are both in the same first direction, the first pulley group 221 and the second pulley group 222 are both rotatably arranged on the body 10 around their own axes, and the first pulley group 221 and the second pulley group 222 are spaced apart along the first direction, and the endless conveyor belt 23 is sleeved on the first pulley group 221 and the second pulley group 222. The tension pulley group 223 is installed on the body 10 and has a tensioning wheel. The axial direction of the tensioning wheel is in the same first direction. The tensioning wheel can cooperate with the inner side or the outer side of the endless conveyor belt 23, and the position of the tensioning wheel in the third direction (for example, the height direction of the frame) is adjustable, thereby adjusting the tension of the endless conveyor belt 23. When the endless conveyor belt 23 is loose, the endless conveyor belt 23 can be tightened by adjusting the position of the tensioning wheel, thereby enabling the conveying module 20 to reliably convey silicon wafers, thereby effectively improving the reliability of the conveying device 100.

[0054] In some embodiments of the present invention, the first sub-conveyor belt 231 and the second sub-conveyor belt 232 are sleeved on the first pulley group 221 and the second pulley group 222, and the tensioning pulley group 223 includes: a first tensioning wheel 223a and a second tensioning wheel, the first tensioning wheel 223a is rotatably provided on the machine body 10, and the position of the first tensioning wheel 223a in the third direction is adjustable, the first tensioning wheel 223a is suitable for cooperating with the inner side of the first sub-conveyor belt 231 to tension and convey the first sub-conveyor belt 231, the second tensioning wheel is rotatably provided on the machine body 10, and the position of the second tensioning wheel in the third direction is adjustable, the second tensioning wheel is suitable for cooperating with the inner side of the second sub-conveyor belt 232 to tension and convey the first sub-conveyor belt 231.

[0055] Specifically, if Figures 1 to 4 As shown, the first pulley group 221 includes a first sub-pulley and a second sub-pulley arranged coaxially, and the first sub-pulley and the second sub-pulley are respectively rotatably arranged on the body 10 around their own axes; the second pulley group 222 is spaced apart from the first pulley group 221 along the second direction, and the second pulley group 222 includes a third sub-pulley and a fourth sub-pulley arranged coaxially, and the second sub-pulley and the third sub-pulley are respectively rotatably arranged on the body 10 around their own axes; the first sub-conveyor belt 231 is sleeved on the first sub-pulley and the third sub-pulley, and the second sub-conveyor belt 232 is sleeved on the second sub-pulley and the fourth sub-pulley.

[0056] Furthermore, if Figures 1 to 4As shown, the tensioning pulley group 223 mainly includes a first tensioning pulley 223a and a second tensioning pulley. The first tensioning pulley 223a is located on the inner side of the first sub-conveyor belt 231. The first tensioning pulley 223a is rotatably arranged on the machine body 10 around its own axis, and on the machine body 10, the position of the first tensioning pulley 223a in the third direction can be adjusted to adjust the tension of the first sub-conveyor belt 231; when the first sub-conveyor belt 231 is loose, the first sub-conveyor belt 231 can be tensioned by adjusting the position of the first tensioning pulley 223a.

[0057] The second tensioning wheel is located on the inner side of the second sub-conveyor belt 232. The second tensioning wheel is rotatably provided on the machine body 10 around its own axis, and the position of the second tensioning wheel in the third direction on the machine body 10 is adjustable, so as to adjust the tension of the second sub-conveyor belt 232; when the second sub-conveyor belt 232 is loose, the second sub-conveyor belt 232 can be tightened by adjusting the position of the second tensioning wheel.

[0058] In this embodiment, the first sub-conveyor belt 231 can be tensioned by adjusting the position of the first tensioning wheel 223a, and the second sub-conveyor belt 232 can be tensioned by the second tensioning wheel, thereby ensuring the consistency of rotation of the first sub-conveyor belt 231 and the second sub-conveyor belt 232.

[0059] In some optional examples of the present invention, the drive unit 21 mainly includes a motor 212 and two drive wheels 211, the two drive wheels 211 are fixedly connected by a connecting shaft, and the connecting shaft is rotatably arranged on the body 10 around its own axis. The first drive wheel 211 is located on the inner side of the first sub-conveyor belt 231 and engages with it, and the second drive wheel 211 is located on the inner side of the second sub-conveyor belt 232 and engages with it. The motor 212 is fixed to the body 10, and the output end of the motor 212 is fixedly connected to one end of the connecting shaft, so that the two drive wheels 211 can be driven to rotate by the motor 212, thereby driving the first sub-conveyor belt 231 and the second sub-conveyor belt 232 to rotate synchronously.

[0060] According to one embodiment of the present invention, the tensioning pulley group 223 also includes: a first connecting plate 223b and a second connecting plate, the second connecting plate is movably provided on the body 10 along the third direction, the first tensioning wheel 223a is rotatably provided on the first connecting plate 223b, the first connecting plate 223b is provided with a first fastener 223c, the first fastener 223c is suitable for fixing or releasing the position of the first connecting plate 223b in the third direction, the second connecting plate is movably provided on the body 10 along the third direction, the second tensioning wheel is rotatably provided on the second connecting plate, the second connecting plate is provided with a second fastener, the second fastener is suitable for fixing or releasing the position of the second connecting plate in the third direction.

[0061] Specifically, if Figures 1 to 4As shown, the tensioning pulley group 223 also includes a first connecting plate 223b and a second connecting plate. The first tensioning pulley 223a is rotatably arranged on the first connecting plate 223b around its own axis. The body 10 is provided with a first mounting groove extending along a third direction. The first connecting plate 223b is movably arranged in the first mounting groove along the third direction, and the first connecting plate 223b is provided with a plurality of first elongated holes. The length direction of the first elongated holes is the same as the third direction. The first elongated holes are inserted with first fasteners 223c (for example, screws), and the first mounting groove is provided with second threaded holes corresponding to the first fasteners 223c. When the first fastener 223c is not tightened, the first fastener 223c releases the first connecting plate 223b, and the first connecting plate 223b can move along the third direction, so that the position of the first tensioning wheel 223a can be adjusted; when the first fastener 223c is tightened, the first fastener 223c fixes the first connecting plate 223b to the body 10, thereby fixing the position of the first tensioning wheel 223a, which is easy to operate.

[0062] like Figures 1 to 4 As shown, the body 10 is provided with a second mounting slot extending along a third direction. The second connecting plate is movably mounted in the second mounting slot along the third direction. The second connecting plate is provided with a plurality of second elongated holes, the length of which is aligned with the third direction. Second fasteners (e.g., screws) are inserted into the second elongated holes, and the second mounting slot is provided with second threaded holes corresponding to the second fasteners. When the second fasteners are not tightened, the first fasteners 223c release the second connecting plate, allowing the second connecting plate to move along the third direction, thereby adjusting the position of the second tensioning pulley. When the second fasteners are tightened, the second fasteners secure the second connecting plate to the body 10, thereby fixing the position of the second tensioning pulley and facilitating operation.

[0063] Furthermore, the machine body 10 is provided with a plurality of first threaded holes and a plurality of groups of second threaded holes, and the positions of the first tensioning wheel 223a and the second tensioning wheel can be further adjusted by adjusting the positions of the first connecting plate 223b and the second connecting plate.

[0064] In some optional examples of the present invention, in the second direction, both sides of the first tensioning wheel 223a, the second tensioning wheel and the driving wheel 211 are provided with idler wheels 224 staggered in the third direction, and the idler wheels 224 are rotatably adapted to the machine body 10 around their own axes, and the idler wheels 224 abut against the outer side of the corresponding annular conveyor belt 23.

[0065] In some embodiments of the present invention, in the second direction, the machine body 10 is provided with a limiting block 10 a at the unloading end of the endless conveyor belt 23 to block the material on the endless conveyor belt 23 .

[0066] Specifically, if Figures 1 to 3As shown, the machine body 10 is provided with two stop blocks 10a, which correspond one-to-one with the two conveyor modules 20. Below, one conveyor module 20 is used for specific description. The endless conveyor belt 23 has a loading end and a unloading end distributed along the second direction. The machine body 10 is provided with a stop block 10a at the unloading end of the endless conveyor belt 23. The stop block 10a is located between the first sub-conveyor belt 231 and the second sub-conveyor belt 232. The stop block 10a can block the silicon wafers on the endless conveyor belt 23, thereby preventing the silicon wafers from falling from the endless conveyor belt 23 due to inertia and other reasons. The silicon wafers can be accurately retained at the unloading position, and the fragmentation rate of the silicon wafers is reduced.

[0067] According to one embodiment of the present invention, the first sub-conveyor belt 231 and / or the second sub-conveyor belt 232 is an elastic belt.

[0068] That is to say, the first sub-conveyor belt 231 and the second sub-conveyor belt 232 are both configured as elastic belts, which can better adapt to changes in tension, effectively reduce wear and breakage caused by improper tension, and effectively increase the service life of the first sub-conveyor belt 231 and the second sub-conveyor belt 232.

[0069] In some embodiments of the present invention, the conveying device 100 further includes: a detection unit 30, which is disposed in the installation space and is suitable for detecting the position of the material on the endless conveyor belt 23, as well as the presence or absence of material tailing and material within the variable pitch.

[0070] Specifically, if Figures 1 to 3 As shown, the body 10 is provided with one or more detection units 30 in the installation space between the first sub-conveyor belt 231 and the second sub-conveyor belt 232. The detection unit 30 mainly includes a capacitive proximity sensor 31 and a mirror-reflective photoelectric sensor 32. The capacitive proximity sensor 31 and the mirror-reflective photoelectric sensor 32 are both fixed to the body 10. The capacitive proximity sensor 31 can detect the position of the silicon wafer on the endless conveyor belt 23, and the mirror-reflective photoelectric sensor 32 can detect the tailing of the material and the presence or absence of the material within the variable pitch.

[0071] In this embodiment, the control system of the conveying device 100 is electrically connected to the detection unit 30. The control system can control the operation of the conveying module 20 according to the detection conditions of the detection unit 30, thereby facilitating the adjustment of the silicon wafers on the two circular conveyor belts 23 to appropriate positions.

[0072] The present invention also provides a conveying device including the conveying device 100 described in any of the above embodiments and a buffer device, wherein the buffer device corresponds to the position of the conveying device 100 and is suitable for buffering materials on two conveying modules 20. Since the conveying device 100 according to the embodiment of the present invention has the above-mentioned technical effects, the conveying device according to the embodiment of the present invention also has corresponding technical effects, which will not be described in detail in this embodiment.

[0073] In some embodiments of the present invention, the cache device includes a first cache rack and a second cache rack distributed along a first direction. The first cache rack and the second cache rack are respectively provided with a plurality of cache tooth groups distributed along a third direction. The position of the first cache rack corresponds to the position of the first conveying module 20, and the position of the second cache rack corresponds to the position of the second conveying module 20. The cache device also includes a driving member for driving the first cache rack and the second cache rack to move along the third direction. The driving member can be a structure such as a cylinder, and the output end of the driving member is fixedly connected to the first cache rack and the second cache rack.

[0074] When the conveying device according to the embodiment of the present invention is in use, the first and second buffer racks are both located at the bottom, and the two conveying modules 20 convey two rows of silicon wafers along the second direction. When the first row of silicon wafers needs to be buffered, the first conveying module 20 drives the corresponding endless conveyor belt 23 via the corresponding drive unit 21 to move one more wafer spacing, so that the silicon wafers on the first conveying module 20 first reach the corresponding position of the buffer device. Then, the drive component controls the first and second buffer racks to rise by one buffer tooth spacing in the third direction, and the top buffer tooth lifts the corresponding silicon wafer to achieve buffering. When the first buffer rack has silicon wafers buffered and the second buffer rack has no silicon wafers buffered, if the first row of silicon wafers needs to be patched, the first conveying module 20 drives the corresponding endless conveyor belt 23 via the corresponding drive unit 21 to move one more wafer spacing to achieve the patching process; alternatively, the drive component drives the first and second buffer racks to descend, placing the silicon wafers on the first conveying module 20 to achieve the patching process. When both the first and second buffer racks contain wafers, if the first row of wafers needs to be patched, the first conveyor module 20, via the corresponding drive unit 21, drives the corresponding endless conveyor belt 23 to shift one wafer spacing further to implement the patching process. The buffering and patching methods for the second row of wafers are similar to those for the first row, and will not be further described in this embodiment.

[0075] Although some specific embodiments of the present invention have been described in detail through examples, those skilled in the art will appreciate that the above examples are for illustration only and are not intended to limit the scope of the present invention. Those skilled in the art will appreciate that modifications may be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A conveying device, characterized in that: include: body; at least two conveying modules distributed in parallel along a first direction, wherein the conveying modules are suitable for conveying materials along a second direction; The conveying modules are arranged on the machine body, and each conveying module is correspondingly provided with a driving unit, and the driving unit is suitable for driving the corresponding conveying module so that the conveying speed of each column of materials can be adjusted.

2. The conveying device according to claim 1, characterized in that The conveying module comprises: a pulley unit, the pulley unit being arranged on the machine body; An endless conveyor belt is suitable for conveying materials along the second direction. The endless conveyor belt is sleeved on at least a portion of the pulley unit. The driving unit is in driving connection with the endless conveyor belt.

3. The conveying device according to claim 2, characterized in that The endless conveyor belt comprises: a first sub-conveyor belt, wherein the first sub-conveyor belt is sleeved on at least a portion of the pulley unit; a second sub-conveyor belt, the second sub-conveyor belt being sleeved on at least a portion of the pulley unit and spaced apart from the first sub-conveyor belt along the first direction; The first sub-conveyor belt and the second sub-conveyor belt are in transmission connection with the driving unit. In the first direction, the machine body is provided with an installation space between the first sub-conveyor belt and the second sub-conveyor belt.

4. The conveying device according to claim 3, characterized in that The pulley unit comprises: a first pulley assembly rotatably disposed on the machine body; a second pulley set rotatably disposed on the machine body and spaced apart from the first pulley set along the second direction, the endless conveyor belt being sleeved on the first pulley set and the second pulley set; A tensioning pulley assembly is provided on the machine body. The tensioning pulley assembly is provided with a tensioning wheel. The position of the tensioning wheel in the third direction is adjustable. The tensioning wheel cooperates with the endless conveyor belt to tension the endless conveyor belt.

5. The conveying device according to claim 4, characterized in that The first sub-conveyor belt and the second sub-conveyor belt are sleeved on the first pulley group and the second pulley group, and the tensioning pulley group includes: a first tensioning wheel rotatably mounted on the machine body, wherein the position of the first tensioning wheel in the third direction is adjustable, and the first tensioning wheel is adapted to cooperate with the inner side of the first sub-conveyor belt to tension and convey the first sub-conveyor belt; The second tensioning wheel is rotatably provided on the machine body, and the position of the second tensioning wheel in the third direction is adjustable. The second tensioning wheel is suitable for cooperating with the inner side of the second sub-conveyor belt to tension and convey the first sub-conveyor belt.

6. The conveying device according to claim 5, characterized in that The tension pulley assembly further comprises: a first connecting plate, the first connecting plate being movably provided on the machine body along the third direction, the first tensioning wheel being rotatably provided on the first connecting plate, the first connecting plate being provided with a first fastener, the first fastener being adapted to fix or release the position of the first connecting plate in the third direction; A second connecting plate, wherein the second connecting plate is movably arranged on the body along the third direction, the second tensioning wheel is rotatably arranged on the second connecting plate, and the second connecting plate is provided with a second fastener, which is suitable for fixing or releasing the position of the second connecting plate in the third direction.

7. The conveying device according to claim 2, characterized in that In the second direction, the machine body is provided with a limit block at the unloading end of the endless conveyor belt to block the material on the endless conveyor belt.

8. The conveying device according to claim 3, characterized in that The first sub-conveyor belt and / or the second sub-conveyor belt are elastic belts.

9. The conveying device according to claim 3, characterized in that Also includes: A detection unit is provided in the installation space, and is suitable for detecting the position of the material on the endless conveyor belt, as well as the presence or absence of material tailing and material within the variable pitch.

10. A conveying device, characterized in that: include: The conveying device according to any one of claims 1 to 9; A buffer device, the buffer device corresponds to the position of the conveying device, and the buffer device is suitable for caching materials on the two conveying modules.

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