Crystal growth furnace variable speed lifting mechanism and crystal growth furnace equipment

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a crystal growth furnace variable-speed lifting mechanism which comprises a lead screw sliding assembly, a driving motor, a first speed reducer, a second speed reducer and a clutch unit. The clutch unit comprises a first clutch and a second clutch; when the first clutch is separated, the second clutch is connected, and the driving motor is directly in transmission connection with the second speed reducer, so that the lifting speed of the external heating module is reduced; and when the first clutch is engaged, the second clutch is disengaged, and the driving motor is in transmission connection with the second speed reducer after passing through the first speed reducer, so that the lifting speed of the external heating module is further reduced. Meanwhile, the utility model further provides crystal growth furnace equipment based on the lifting mechanism, and the crystal growth furnace equipment has the advantage of being capable of preparing high-performance crystals.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and specifically to a variable speed lifting mechanism for a crystal growth furnace and crystal growth furnace equipment. Background Art

[0002] The Bridgman method is a method for growing single crystals. The key to this method is to place the material to be grown into a single crystal in a crucible and then solidify it through a steep temperature gradient from the crucible. The required speed varies depending on the material.

[0003] A crystal growth furnace is a device that uses the Brichmann method to produce crystal rods. Its working principle is to load the crystal rod growth raw materials into the crucible, start the furnace and heat it to the set temperature, and then use the lifting mechanism to slowly lift the furnace at the speed set by the process, so that the raw materials in the furnace core are melted and crystallized to form crystal rods.

[0004] Existing crystal growth furnace equipment generally uses a motor directly connected to a screw through a reducer as a lifting mechanism. To meet the low-speed process, the mechanism needs to use a reducer with a large reduction ratio. However, the transmission ratio of its transmission mechanism is not adjustable, which will cause the heating furnace to lift too slowly and the waiting time to be too long when adding crystal rod growth materials to the furnace core, affecting production efficiency.

[0005] Based on this, the technical problem solved in this case is: how to solve the problem that the current crystal growth furnace cannot adjust the lifting and lowering speed. Utility Model Content

[0006] To address the above technical issues, this application provides a variable-speed lifting mechanism for a crystal growth furnace. This lifting mechanism not only enables the heating furnace to be slowly raised and lowered to meet the requirements of crystal growth, but also allows for rapid lifting after crystal growth is complete, thereby improving production efficiency. Furthermore, this application provides a crystal growth furnace apparatus based on this lifting mechanism, which has the advantage of being able to produce high-performance crystals.

[0007] The technical solution of this application is:

[0008] A variable speed lifting mechanism for a crystal growth furnace, comprising:

[0009] Screw sliding assembly: used to connect the heating module of the peripheral device;

[0010] Drive motor: acts as the power output end to drive the external heating module to rise and fall;

[0011] The first reducer is used to reduce the rotation speed to adjust the lifting rate of the peripheral heating module;

[0012] Second reducer: used to reduce the speed to adjust the lifting rate of the peripheral heating module;

[0013] Also includes a clutch unit; the clutch unit includes a first clutch and a second clutch;

[0014] When the first clutch is disengaged, the second clutch is engaged, and the drive motor is directly connected to the second reducer, so that the external heating module rises or falls at a first rate;

[0015] When the first clutch is engaged, the second clutch is disengaged, and the drive motor is connected to the second reducer through the first reducer, so that the external heating module rises or falls at a second rate.

[0016] The above-mentioned variable speed lifting mechanism of the crystal growth furnace further includes a first transmission unit and a second transmission unit; the first transmission unit is in transmission connection with the drive motor;

[0017] The first transmission unit is provided with a first output end and a second output end which rotate synchronously;

[0018] The second transmission unit is provided with a third output end and a fourth output end which rotate synchronously;

[0019] The first output end and the third output end are connected through the first clutch and the first reducer;

[0020] The second output end and the fourth output end are transmission-connected via a second clutch.

[0021] In the above-mentioned variable speed lifting mechanism of the crystal growth furnace, a third transmission unit is further included; the third transmission unit is in transmission connection with the second transmission unit;

[0022] The third transmission unit is provided with a fifth output end and a sixth output end which rotate synchronously;

[0023] The fourth output end and the fifth output end are connected through a second reducer;

[0024] The sixth output end is transmission-connected to the lead screw sliding assembly.

[0025] In the above-mentioned variable speed lifting mechanism of the crystal growth furnace, the first output end is the first synchronous wheel, the second output end is the second synchronous wheel; the third output end is the third synchronous wheel, and the fourth output end is the fourth synchronous wheel.

[0026] In the above-mentioned variable speed lifting mechanism of the crystal growth furnace, the fifth output end is the fifth synchronous wheel, and the sixth output end is the sixth synchronous wheel.

[0027] In the above-mentioned variable speed lifting mechanism of the crystal growth furnace, the screw sliding assembly includes a screw, a guide column and a mounting plate; the mounting plate is slidably connected to the guide column and the screw and the external heating module is arranged on the mounting plate; the drive motor is connected to the screw through the second reducer or is connected to the screw through the first reducer and the second reducer.

[0028] In the above-mentioned variable speed lifting mechanism of the crystal growth furnace, the first speed is smaller than the second speed.

[0029] In addition, the present application also provides a crystal growth furnace equipment, including the above-mentioned crystal growth furnace variable speed lifting mechanism, and also including a base, a frame, a furnace core and a heating furnace body; the frame is arranged on the base; the furnace core is arranged on the base and surrounded by the heating furnace body; the heating furnace body and the crystal growth furnace variable speed lifting mechanism are both arranged on the frame; the crystal growth furnace variable speed lifting mechanism is used to drive the heating furnace body to rise and fall to adjust the area of ​​the heating furnace core.

[0030] In the above-mentioned crystal growth furnace equipment, a plurality of rollers are provided at the bottom of the base.

[0031] One of the above technical solutions of this application has at least one of the following advantages or beneficial effects:

[0032] The variable speed lifting mechanism of the crystal growth furnace of the present application controls the transmission path through the clutch unit, specifically, the transmission path is selected through the first clutch and the second clutch, so that the drive motor is decelerated through the first reducer and the second reducer or only decelerated through the second reducer, so as to control the rotation speed of the screw sliding assembly, and then control the lifting rate of the heating module. It can not only achieve slow lifting and lowering of the heating furnace to meet the needs of crystal growth, but also can be quickly lifted after the crystal growth is completed, thereby improving production efficiency.

[0033] The present application also provides a crystal growth furnace device based on the above-mentioned lifting mechanism, which has the advantage of being able to produce high-performance crystals. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is a transmission diagram of the variable speed lifting mechanism of the crystal growth furnace of Example 1 of the present application;

[0035] Figure 2 A three-dimensional diagram showing the crystal growth furnace equipment of Example 2 of the present application;

[0036] Figure 3 This is a side sectional view of the crystal growth furnace equipment of Example 2 of the present application.

[0037] Description of reference numerals:

[0038] 1. Drive motor; 2. First reducer; 3. Second reducer; 4. First clutch; 5. Second clutch; 6. Screw sliding assembly; 61. Screw; 62. Guide column; 63. Mounting plate; 7. First transmission unit; 8. Second transmission unit; 9. Third transmission unit; 101. First synchronous wheel; 102. Second synchronous wheel; 103. Third synchronous wheel; 104. Fourth synchronous wheel; 105. Fifth synchronous wheel; 106. Sixth synchronous wheel; 210. Variable speed lifting mechanism of crystal growth furnace; 220. Base; 221. Roller; 230. Frame; 240. Furnace core; 250. Heating furnace body. DETAILED DESCRIPTION

[0039] The following is a clear and complete description of the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of them. Based on the embodiments of this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0040] Example 1

[0041] refer to Figure 1 , a crystal growth furnace variable speed lifting mechanism, comprising:

[0042] Screw sliding assembly 6: used to connect the heating module of the peripheral device;

[0043] Drive motor 1: serves as the power output end to drive the heating module of the peripheral device to rise and fall;

[0044] The first reducer 2 is used to reduce the rotation speed to adjust the lifting rate of the peripheral heating module;

[0045] Second reducer 3: used to reduce the rotation speed to adjust the lifting rate of the peripheral heating module;

[0046] Also includes a clutch unit; the clutch unit includes a first clutch 4 and a second clutch 5;

[0047] The variable speed lifting mechanism 210 of the crystal growth furnace of this embodiment controls the transmission path through the clutch unit, specifically, the transmission path is selected through the first clutch 4 and the second clutch 5, so that the drive motor 1 is decelerated through the first reducer 2 and the second reducer 3 or only decelerated through the second reducer 3, so as to control the speed of the screw sliding assembly 6, and then control the external heating module to lift and lower at the first rate or the second rate. It can not only realize the slow lifting and lowering of the heating furnace to meet the needs of crystal growth, but also can be quickly lifted after the crystal growth is completed, thereby improving production efficiency.

[0048] More specifically, in actual applications, during crystal growth, first clutch 4 is engaged, second clutch 5 is disengaged, and drive motor 1 is simultaneously driven through first reducer 2 and second reducer 3, reducing the rate of increase and decrease of the external heating module to meet the rate required for crystal growth. In actual applications, the first rate is less than the second rate.

[0049] After the crystal growth is completed, the first clutch 4 is disengaged and the second clutch 5 is engaged. The drive motor 1 is only driven by the second reducer 3, so that the external heating module can quickly leave the furnace, thereby reducing waiting time and improving production efficiency.

[0050] In practical application, it also includes a first transmission unit 7, a second transmission unit 8, and a third transmission unit 9;

[0051] The first transmission unit 7 is provided with a first output end and a second output end which rotate synchronously;

[0052] The second transmission unit 8 is provided with a third output end and a fourth output end which rotate synchronously;

[0053] The third transmission unit 9 is provided with a fifth output end and a sixth output end which rotate synchronously;

[0054] In this embodiment, the first transmission unit 7, the second transmission unit 8, and the third transmission unit 9 are all synchronous pulley sets; in detail, the first output end is the first synchronous pulley 101, the second output end is the second synchronous pulley 102, the third output end is the third synchronous pulley 103, the fourth output end is the fourth synchronous pulley 104, the fifth output end is the fifth synchronous pulley 105, and the sixth output end is the sixth synchronous pulley 106.

[0055] The first synchronous gear 101 and the third synchronous gear 103 are connected through the first clutch 4 and the first reducer 2;

[0056] The second synchronous gear 102 and the fourth synchronous gear 104 are connected in transmission via the second clutch 5 .

[0057] The fourth synchronous wheel 104 and the fifth synchronous wheel 105 are connected by transmission via the second reducer 3;

[0058] The sixth synchronous wheel 106 is transmission-connected to the screw sliding assembly 6 .

[0059] Under the above transmission relationship, the transmission path during crystal growth in this embodiment is specifically as follows:

[0060] Drive motor 1, first synchronous gear 101, first reducer 2, first clutch 4, third synchronous gear 103, fourth synchronous gear 104, second reducer 3, fifth synchronous gear 105, sixth synchronous gear 106, screw sliding assembly 6.

[0061] The transmission path when taking out and putting in the crystal ingot growth raw materials in this embodiment is specifically as follows:

[0062] Drive motor 1, first synchronous gear 101, second synchronous gear 102, second clutch 5, second reducer 3, fifth synchronous gear 105, sixth synchronous gear 106, screw sliding assembly 6.

[0063] Under the above design, the use of synchronous pulleys can ensure the stability and overall accuracy of the system. Compared with other transmission devices, the position error of the synchronous pulley is very small, and it can transmit a large torque without being easily damaged and has high durability.

[0064] In this embodiment, specifically, the screw sliding assembly 6 includes a screw 61, a guide column 62 and a mounting plate 63; the mounting plate 63 is slidingly connected to the guide column 62 and the screw 61 and the external heating module is arranged on the mounting plate 63; the drive motor 1 is connected to the screw 61 through the second reducer 3 or is connected to the screw 61 through the first reducer 2 and the second reducer 3.

[0065] Example 2

[0066] refer to Figure 2 、 3 A crystal growth furnace device includes the crystal growth furnace variable speed lifting mechanism 210 of the above-mentioned embodiment 1, and also includes a base 220, a frame 230, a furnace core 240 and a heating furnace body 250; the frame 230 is arranged on the base 220; the furnace core 240 is arranged on the base 220 and is surrounded by the heating furnace body 250; the heating furnace body 250 and the crystal growth furnace variable speed lifting mechanism 210 are both arranged on the frame 230; the crystal growth furnace variable speed lifting mechanism 210 is used to drive the heating furnace body 250 to rise and fall to adjust the area of ​​the heating furnace core 240.

[0067] It should be noted that, in this embodiment, when growing crystals, the heating furnace body 250 is required to first surround the entire furnace core 240, and then slowly rise at a first rate of 30 mm / min, so that the crystal rod in the furnace core 240 is gradually melted and crystallized from bottom to top to form a crystal rod;

[0068] When taking out and putting in the crystal ingot growth raw materials, in order to improve production efficiency, the heating furnace body 250 is required to quickly rise to a specified height at a second rate of more than 150 mm / min.

[0069] Of course, in actual applications, those skilled in the art can achieve different degrees of deceleration by selecting the transmission ratios of the drive motor 1 and the first reducer 2 and the second reducer 3 in the variable speed lifting mechanism 210 of the crystal growth furnace, which should also be within the protection scope of this embodiment.

[0070] In order to facilitate the staff to carry the crystal growth furnace equipment, four rollers 221 are provided at the bottom of the base 220.

[0071] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and intent of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A variable speed lifting mechanism for a crystal growth furnace, comprising: Screw sliding assembly: used to connect the heating module of the peripheral device; Drive motor: acts as the power output end to drive the external heating module to rise and fall; The first reducer is used to reduce the rotation speed to adjust the lifting rate of the peripheral heating module; Second reducer: used to reduce the speed to adjust the lifting rate of the peripheral heating module; It is characterized in that it further comprises a clutch unit; the clutch unit comprises a first clutch and a second clutch; When the first clutch is disengaged, the second clutch is engaged, and the drive motor is directly connected to the second reducer, so that the external heating module rises or falls at a first rate; When the first clutch is engaged, the second clutch is disengaged, and the drive motor is connected to the second reducer through the first reducer, so that the external heating module rises or falls at a second rate.

2. The variable speed lifting mechanism of the crystal growth furnace according to claim 1, characterized in that: It also includes a first transmission unit and a second transmission unit; the first transmission unit is in transmission connection with the drive motor; The first transmission unit is provided with a first output end and a second output end which rotate synchronously; The second transmission unit is provided with a third output end and a fourth output end which rotate synchronously; The first output end and the third output end are connected through the first clutch and the first reducer; The second output end and the fourth output end are transmission-connected via the second clutch.

3. The variable speed lifting mechanism of the crystal growth furnace according to claim 2, characterized in that: It also includes a third transmission unit; the third transmission unit is transmission-connected to the second transmission unit; The third transmission unit is provided with a fifth output end and a sixth output end which rotate synchronously; The fourth output end and the fifth output end are connected by transmission via the second reducer; The sixth output end is transmission-connected to the screw sliding assembly.

4. The variable speed lifting mechanism of the crystal growth furnace according to claim 2, characterized in that: The first output end is a first synchronous wheel, the second output end is a second synchronous wheel; the third output end is a third synchronous wheel, and the fourth output end is a fourth synchronous wheel.

5. The variable speed lifting mechanism for the crystal growth furnace according to claim 3, characterized in that: The fifth output end is a fifth synchronous wheel, and the sixth output end is a sixth synchronous wheel.

6. The variable speed lifting mechanism for a crystal growth furnace according to claim 1, characterized in that: The screw sliding assembly includes a screw, a guide column and a mounting plate; the mounting plate is slidingly connected to the guide column and the screw and the external heating module is arranged on the mounting plate; the drive motor is connected to the screw through the second reducer or is connected to the screw through the first reducer and the second reducer.

7. A crystal growth furnace device, characterized in that: It comprises the variable speed lifting mechanism of the crystal growth furnace as described in any one of claims 1 to 6, and also comprises a base, a frame, a furnace core and a heating furnace body; the frame is arranged on the base; the furnace core is arranged on the base and is surrounded by the heating furnace body; the heating furnace body and the variable speed lifting mechanism of the crystal growth furnace are both arranged on the frame; the variable speed lifting mechanism of the crystal growth furnace is used to drive the heating furnace body to rise and fall to adjust the area of ​​the heating furnace core.

8. The crystal growth furnace equipment according to claim 7, characterized in that: A plurality of rollers are provided at the bottom of the base.

9. The crystal growth furnace equipment according to claim 7, characterized in that: The first rate is less than the second rate.

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