Feeding device of single crystal furnace and single crystal furnace

Abstract

The embodiment of the utility model provides a feeding device of a single crystal furnace and the single crystal furnace, the feeding device comprises a first arm extending in the horizontal direction, a second arm extending in the horizontal direction, a third arm extending in the horizontal direction and a fourth arm extending in the horizontal direction, a second arm extending in the horizontal direction, connected to the other end of the first arm through one end thereof, and rotatable about an axis parallel to the column and passing through the other end of the first arm; the lifter is arranged at the other end of the second arm and can lift and lower a crucible for preloading, the reasonable layout of the feeding device can optimize the space utilization, improve the feeding precision and efficiency, improve the operation safety and reduce the equipment cost at the same time.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a feeding device for a single crystal furnace and the single crystal furnace. Background Art

[0002] In the semiconductor single crystal production field, single crystal furnaces are key equipment for achieving high-quality single crystal production. One of their core functions is to precisely place crucibles loaded with high-purity raw materials into the furnace chamber via a lifting system. The design of the lifting system directly affects operational convenience, production efficiency, and safety. Therefore, optimizing the structural design of the lifting system is of great significance.

[0003] Currently, the lifting system for single crystal furnaces typically utilizes an independent column support structure. This design involves installing a separate column next to the furnace to secure the lifting arm and lifting mechanism, enabling the lifting and placement of the crucible. While this design meets basic lifting requirements, its independent structure has a certain impact on the working environment.

[0004] Specifically, the presence of independent columns causes the lifting system to occupy the operating area next to the single crystal furnace, resulting in a narrow working space. This confined space not only limits operational flexibility but also increases safety risks for operators during the lifting process. The narrow working area can lead to operational errors or accidental collisions, especially in cleanroom environments. Furthermore, the independent column design increases equipment manufacturing costs and installation complexity, hindering system maintenance and long-term operation.

[0005] In view of this, it is necessary to optimize the design of the existing lifting system to make the operating space layout more reasonable. Utility Model Content

[0006] To solve the above technical problems, the present invention provides a feeding device for a single crystal furnace and a single crystal furnace. The rational layout of the feeding device can optimize space utilization, improve feeding accuracy and efficiency, enhance operational safety, and reduce equipment costs.

[0007] The technical solution of the present utility model is achieved as follows:

[0008] In a first aspect, an embodiment of the present invention provides a feeding device for a single crystal furnace, the feeding device comprising:

[0009] a first arm extending in a horizontal direction, wherein one end of the first arm is disposed on a column of the single crystal furnace and is capable of rotating around the column;

[0010] a second arm extending in the horizontal direction, the second arm being connected to the other end of the first arm through one end thereof and being rotatable about an axis parallel to the column and passing through the other end of the first arm;

[0011] An elevator is provided at the other end of the second arm and is capable of raising and lowering the pre-charged crucible.

[0012] In some optional examples, the feeding device further includes a first limit switch, and the first limit switch is used to limit the rotation angle of the first arm around the column.

[0013] In some optional examples, the feeding device further includes a second limit switch, and the second limit switch is used to limit the rotation angle of the second arm around the axis.

[0014] In some optional examples, the feeding device further includes a first in-position switch, and the first in-position switch is used to stop the first arm from rotating when it rotates to a predetermined position.

[0015] In some optional examples, the feeding device further includes a second in-position switch, and the second in-position switch is used to stop the second arm from rotating when it rotates to a predetermined position.

[0016] In some optional examples, the feeding device further includes a first driver, which is fixed to the column and is used to drive the first arm to rotate.

[0017] In some optional examples, the first driver is fixed so that its driving shaft is parallel to the column, and transmits power to the first arm through a spur gear transmission mechanism.

[0018] In some optional examples, the feeding device further includes a second driver, which is fixed to the other end of the first arm, and the second driver is used to drive the second arm to rotate.

[0019] In some optional examples, the second driver is fixed so that its driving shaft is parallel to the second arm, and transmits power to the second arm through a bevel gear transmission mechanism.

[0020] In a second aspect, an embodiment of the present invention provides a single crystal furnace, which includes a feeding device according to the first aspect.

[0021] An embodiment of the present utility model provides a feeding device for a single crystal furnace and a single crystal furnace. The feeding device integrates the lifting system into the columns of the single crystal furnace, eliminating the independent column design in the working platform, thereby freeing up the working space and improving the safety of operation. Moreover, the design that eliminates the additional columns reduces the equipment cost and simplifies maintenance. The first arm and the second arm of the feeding device work together to achieve flexible and precise feeding operations. In this way, not only can a wide range of working areas be covered, but the crucible can also be accurately moved from the pre-loading position to directly above the furnace chamber. The adjustment of the crucible height by the elevator ensures that the crucible can be accurately placed in the target position. This improves the efficiency and safety of the feeding process and ensures the high efficiency and stability of the feeding of the single crystal furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic front view of a conventional single crystal furnace.

[0023] Figure 2 This is a front view schematic diagram of a single crystal furnace provided in an embodiment of the present utility model.

[0024] Figure 3 for Figure 2 An enlarged schematic diagram of the feeding device of the single crystal furnace within the dotted box in FIG.

[0025] Figure 4 A schematic top view of a portion of a single crystal furnace provided in an embodiment of the present utility model.

[0026] Figure 5 A perspective schematic diagram of a feeding device for a single crystal furnace provided in an embodiment of the present utility model. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.

[0028] In the semiconductor manufacturing industry, single crystal furnaces are key pieces of equipment, and the feeding process is crucial to meeting the high purity requirements for single crystals produced. Traditionally, single crystal furnace feeding utilizes a pre-loading system, where high-purity raw materials, such as high-purity polysilicon, are pre-loaded into a quartz crucible within a Class 1000 cleanroom. This process requires high cleanliness levels to minimize contamination and ensure the purity and quality of the single crystals. Subsequently, the quartz crucible is evacuated using a vacuum chuck to prevent the raw materials from coming into contact with air during transportation. This prevents particulate contamination from the crystal pulling environment, which can lead to raw material contamination and ultimately reduce the purity and quality of the single crystals. After evacuation, the quartz crucible containing the raw materials is hoisted into the single crystal furnace chamber using a lifting system, completing the feeding process. This step is an essential component of the single crystal growth process, and its efficiency and safety directly impact single crystal production efficiency and quality.

[0029] exist Figure 1 A conventional single crystal furnace 1A is shown in FIG. Figure 1 As shown, the lifting system 10A of the single crystal furnace 1A is located next to the furnace chamber 30A. This means that the furnace chamber 30A of the single crystal furnace 1A and the lifting system 10A used for charging are two independent components. In this case, the lifting system 10A requires a certain area of ​​the work platform 40A next to the furnace chamber 30A to facilitate the lifting of the quartz crucible. While this independent lifting system 10A can complete the charging task, its independence causes the work platform 40A to occupy space, making this design particularly inconvenient in cleanrooms with limited space.

[0030] The hoisting system's occupation of the work platform space has caused a series of problems. First, the narrow work platform increases the safety risks for operators when performing charging and other related operations, because the limited operating space can easily lead to operational errors, increasing the risk of accidents. Second, operational efficiency is reduced because operators need to perform complex operations within a limited space, which not only increases the difficulty of operation but also prolongs the operation time. In addition, the small space also limits the flexibility and comfort of operators, affecting the continuity and stability of operations. Therefore, the existing single crystal furnace charging method urgently needs to be improved to improve operational safety and efficiency, reduce space occupancy, and ensure high efficiency and high quality of semiconductor single crystal production.

[0031] Based on this, the present invention aims to provide a feeding device for a single crystal furnace and a single crystal furnace. The rational layout of the feeding device can optimize space utilization, improve feeding accuracy and efficiency, enhance operational safety, and reduce equipment costs.

[0032] Specifically, see Figure 2 and Figure 3The embodiment of the present invention provides a feeding device 10 for a single crystal furnace 1. The feeding device 10 may include a first arm 11 extending in the horizontal direction, a second arm 12 extending in the horizontal direction, and a lift 13. It should be noted that "extending in the horizontal direction" means that it can be completely horizontal, such as in Figure 2 and Figure 3 The first arm 11 and the second arm 12 shown in the figure are both completely horizontal, but may also be inclined relative to the horizontal plane but not perpendicular to the horizontal plane.

[0033] The first arm 11 is mounted on the column 20 of the single crystal furnace 1 at one end 11A thereof and is capable of rotating about the column 20. The column 20 of the single crystal furnace 1 is a crucial component of the single crystal furnace 1 and is typically located in the center or to one side of the furnace chamber 30. The column 20 is a key structure that supports and secures the other components of the single crystal furnace 1. The column 20 not only provides physical support but also serves as a mounting platform for the thermal and mechanical components within the furnace chamber 30.

[0034] The second arm 12 is connected to the other end 11B of the first arm 11 via one end 12A thereof, and is rotatable about an axis X that is parallel to the column 20 and passes through the other end 11B of the first arm 11 .

[0035] The elevator 13 is provided at the other end 12B of the second arm 12 and is capable of lifting and lowering the pre-charged crucible C, so as to lift the crucible C above the furnace chamber 30 of the single crystal furnace 1 and lower the crucible C to the same height as the furnace chamber 30, thereby placing the crucible C into the furnace chamber 30 of the single crystal furnace 1. The elevator 13 here can be, for example, Figure 3 The electric hoist shown in .

[0036] Based on the feeding device 10 of the single crystal furnace 1 according to the above-mentioned embodiment of the present invention, the operation process of placing the pre-loaded crucible C into the furnace chamber 30 is as follows: first, the operator ensures that the crucible C has been loaded with the required raw material ratio of high-purity polysilicon, and has completed the pre-loading and vacuum suction cup evacuation processing in a clean workshop with a cleanliness level of 1000 through the pre-loading system; then, the elevator 13 of the feeding device 10 is located directly above the crucible C, ready for the lifting operation. At this time, the positions of the first arm 11 and the second arm 12 are adjusted according to the initial position of the crucible C to ensure that the elevator 13 can directly lift the crucible C; then, the operator starts the elevator 13, and the crucible C begins to be lifted above the furnace chamber 30 of the single crystal furnace 1. At this stage, the crucible C moves in the vertical direction, but has not yet been aligned with the furnace chamber 30, and the first arm 11 and the second arm 12 remain in a fixed position The first arm 11 and the second arm 12 are positioned to ensure that the crucible C can be lifted vertically; once the crucible C is lifted to an appropriate height above the furnace chamber 30, the operator begins to adjust the first arm 11 and the second arm 12 to move the crucible C on the horizontal plane and align it vertically with the entrance of the furnace chamber 30. This step requires precise control of the rotation of the first arm 11 around the column 20 and the rotation of the second arm 12 around the axis X to ensure that the crucible C can be accurately aligned with the furnace chamber 30 in the vertical direction; after the alignment is completed, the operator controls the elevator 13 to slowly lower the crucible C until the crucible C contacts the bottom of the furnace chamber 30 and is placed in place. During the entire descending process, the stability of the crucible C needs to be ensured to avoid any tilting or shaking, which may affect the accuracy and safety of the feeding; after the crucible C is successfully placed in the furnace chamber 30, the elevator 13 is retracted to its initial position, and the first arm 11 and the second arm 12 also return to the standby position, completing the entire feeding process.

[0037] The charging device 10 of the present invention integrates the lifting system into the column 20 of the single crystal furnace 1, eliminating the need for separate columns on the work platform. This frees up working space and improves operational safety. Furthermore, eliminating the need for additional columns reduces equipment costs and simplifies maintenance. The charging device 10 comprises a first arm 11 and a second arm 12, whose coordinated operation enables flexible and precise charging operations. The first arm 11 extends horizontally and can rotate about the column 20. The second arm 12 also extends horizontally and can rotate about the axis X at the end of the first arm 11. This design allows the charging device 10 to cover a wider operating range and precisely move the pre-charged crucible C from a pre-charging position away from the furnace chamber 30 to directly above the furnace chamber 30. Through the coordinated rotation of the first and second arms 11, 12, and the lifting and lowering of the crucible C by the elevator 13, the charging device 10 accurately places the crucible C into the furnace chamber 30 of the single crystal furnace 1. This process not only improves the efficiency of charging and reduces the workload of operators, but also improves the safety of operations, ensuring the efficiency and safety of the single crystal furnace charging process.

[0038] In some embodiments of the present invention, see Figure 3 The feeding device 10 may further include a first limit switch 14 , which is used to limit the rotation angle of the first arm 11 around the column 20 .

[0039] This ensures that the first arm 11 operates within a safe, preset range, not only ensuring the safety of the work platform 40 but also reducing the risk of collision, overturning, or other safety accidents that may occur during operation. Furthermore, the operator can rely on the first limit switch 14 to control the movement of the first arm 11, which reduces the skill level required, makes operation more intuitive and easier, and streamlines the work process.

[0040] In some embodiments of the present invention, see Figure 3 The feeding device 10 may further include a second limit switch 15, which is used to limit the rotation angle of the second arm 12 around the axis X.

[0041] By providing a first limit switch 14 and a second limit switch 15, the feeding device 10 achieves precise control over the first arm 11 and the second arm 12. This dual limit mechanism ensures that the movement of the robotic arms remains within a safe, preset range, reducing safety risks caused by operational errors or mechanical failures. Furthermore, the provision of the first limit switch 14 and the second limit switch 15 allows the operator to more precisely control the movement of the feeding device 10, optimizing the operational process and reducing time wasted adjusting the robotic arms' positions, thereby improving operational efficiency.

[0042] The following is further explained with examples.

[0043] See also Figure 4 , the rotation angle α of the first arm 11 can be limited to no more than 115°, and the rotation angle β of the second arm can be limited to no more than 280°. In this case, the working range of the feeding device 10 can be effectively defined, thereby ensuring the safety area of ​​the working platform 40. On the one hand, this limitation can prevent the robotic arm from exceeding the safe operating range and reduce the potential threat to operators and surrounding equipment. On the other hand, although the rotation angle is limited, the range of 115° and 280° already provides a larger operating angle for the feeding device 10, so that the first arm 11 and the second arm 12 can operate in a wide area, which increases the flexibility of the operation and allows feeding operations to be performed in different directions and positions.

[0044] In some embodiments of the present invention, see Figure 3 The feeding device 10 may further include a first position switch 16, which is used to stop the first arm 11 from rotating when it rotates to a predetermined position.

[0045] The first position switch 16 automatically stops the first arm 11 when it reaches a predetermined position. This ensures that the crucible C is precisely positioned directly above the furnace chamber 30. In practice, the control of the first position switch 16 eliminates the need for operators to manually adjust the position of the first arm 11, thereby reducing human error and improving the accuracy and reliability of material feeding.

[0046] The first position switch 16 can also be used in conjunction with an automatic control system to achieve automatic operation of the feeding device 10.

[0047] Specifically, when the first arm 11 reaches the angle set by the first position switch 16, the first limit switch 14 can trigger a signal to notify the control system to perform the next operation, such as starting the elevator 13 or adjusting the position of the second arm 12. This automated control reduces the operator's workload and improves operational efficiency and safety.

[0048] In some embodiments of the present invention, see Figure 3 The feeding device 10 may further include a second position switch 17, and the second position switch 17 is used to stop the second arm 12 from rotating when it rotates to a predetermined position.

[0049] The use of the second in-position switch 17 in conjunction with the first in-position switch 16 ensures that the two key moving parts of the feeding device 10, namely the first arm 11 and the second arm 12, can accurately rotate to the predetermined position and stop, thereby achieving accurate positioning of the crucible C, so that it can be accurately placed directly above the furnace chamber 30, significantly improving the accuracy and repeatability of feeding. In addition, the cooperation of the two also supports the rapid adjustment of the feeding device 10 in different production scenarios, meets diverse feeding needs, and enhances the adaptability and flexibility of the single crystal furnace 1 in the production environment. At the same time, this precise control mechanism optimizes the operating process, reduces the time wasted due to the adjustment of the position of the robot arm, further improves the operating efficiency and ensures the efficiency and stability of the operation.

[0050] In some embodiments of the present invention, see Figure 3 and Figure 5 The feeding device 10 may further include a first driver 18 , which may be fixed to the column 20 , and the first driver 18 is used to drive the first arm 11 to rotate.

[0051] Since the column 20 of the single crystal furnace 1 is the skeleton and core support structure of the single crystal furnace 1, the attachment of the first driver 18 to the column 20 provides a very stable mounting platform for the driver. This design reduces the risk of driver failure due to unstable installation and enhances the structural reliability of the entire feeding device 10. Furthermore, the attachment of the first driver 18 to the column 20 ensures the mechanical stability of the first arm 11 during rotation. As the central support structure of the single crystal furnace 1, the column 20 provides a solid foundation for the driver, thereby reducing vibration and oscillation caused by the driver and improving the stability and durability of the feeding device 10.

[0052] For example, first driver 18 can be secured to column 20 via its own or an attached flange. To this end, bolt holes are provided on column 20 that match the bolt hole pattern of the flange, allowing the flange to be securely connected to column 20 using bolts and nuts. This provides a reliable securing method for first driver 18 that remains stable under various operating conditions, such as high temperatures and vibration. Furthermore, the flange securing method allows for quick installation and removal of first driver 18, facilitating maintenance and replacement.

[0053] The first driver 18 can be used Figure 5 The stepper motor shown can very precisely control the rotation of the first arm 11, thereby ensuring that the crucible C can be accurately fed into the furnace chamber 30. In addition, the stepper motor can provide high torque output when running at low speed. This feature enables it to demonstrate excellent stability and reliability in the process of driving the first arm 11 to rotate and carry the crucible C.

[0054] A speed reducer can be installed between the first driver 18 and the first arm 11 to adjust the rotational speed of the first arm 11 to meet the requirements of precise feeding operations. A lower rotational speed significantly improves positioning accuracy and control stability, effectively ensuring that the crucible C moves safely and smoothly during the feeding process and is accurately placed within the furnace chamber 30, thereby improving operational reliability and efficiency.

[0055] In some embodiments of the present invention, see Figure 5 Combined with Figure 3 , the first driver 18 may be fixed so that its drive shaft 18S is parallel to the column 20 and transmits power to the first arm 11 through a spur gear transmission mechanism.

[0056] By fixing the first driver 18 so that its drive shaft 18S is parallel to the column 20, the fixing stability of the first driver 18 can be significantly improved. For example, when the first driver 18 is a rectangular stepper motor, this fixing method allows it to occupy a larger contact area with the column 20, thereby achieving more reliable fixation. In addition, when the drive shaft 18S is parallel to the column 20, the transmission shafts used to transmit power can also remain parallel, so that a spur gear transmission mechanism can be used to directly transmit power to the first arm 11. The spur gear transmission mechanism, with its high efficiency, simple structure and strong reliability, ensures that losses during the power transmission process are minimized, thereby improving the energy utilization efficiency of the feeding device 10 and ensuring the precise drive and stable operation of the first arm 11.

[0057] In some embodiments of the present invention, see Figure 5 The feeding device 10 may further include a second driver 19. The second driver 19 may be fixed to the other end 11B of the first arm 11. The second driver 19 may be used to drive the second arm 12 to rotate.

[0058] A speed reducer can be installed between the second driver 19 and the second arm 12 to adjust the rotational speed of the second arm 12 to meet the requirements of precise feeding operations. A lower rotational speed significantly improves positioning accuracy and control stability, ensuring smooth operation of the second arm 12 during the feeding process, thereby effectively ensuring the safe and accurate movement and placement of the crucible C into the furnace chamber 30. This design not only improves the reliability of the feeding operation but also enhances the overall control capabilities of the system, contributing to a more efficient and stable process.

[0059] When the second actuator 19 is fixed to the other end 11B of the first arm 11 and close to the second arm 12, this layout significantly shortens the transmission path. A shorter transmission path effectively reduces power losses during transmission, thereby improving transmission efficiency. This design is crucial for ensuring that the second arm 12 responds quickly and accurately to the actuator's operation, improving system efficiency and enhancing the control stability and precision of the second arm 12 during the feeding process.

[0060] In some embodiments of the present invention, see Figure 5 , the second driver 19 may be fixed so that its drive shaft 19S is parallel to the second arm 12 , and transmits power to the second arm 12 through a bevel gear transmission mechanism.

[0061] Similar to the mounting method for the first actuator 18, the second actuator 19 is secured so that its drive shaft 19S is parallel to the second arm 12, significantly enhancing its stability. For example, when the second actuator 19 is a stepper motor, this mounting method allows it to occupy a larger contact area with the second arm 12, ensuring a more secure installation. However, unlike the transmission of the first actuator 18, the drive shafts used to transmit power from the second actuator 19 to the second arm 12 cannot remain parallel. Therefore, a bevel gear transmission mechanism is used to transmit power from the second actuator 19 to the second arm 12.

[0062] Bevel gear transmission mechanisms are particularly well-suited for right-angle power transmission. Compared to other transmission methods capable of right-angle transmission, bevel gear transmissions offer higher efficiency and greater torque transmission capacity, while their compact design occupies less space. This characteristic is particularly important for the compact layout of single crystal furnaces, helping to maximize space savings while ensuring efficient power transmission, thus supporting the optimization of overall equipment design. Similar to the attachment of the first drive 18, the elevator 13 can also be secured to the other end 12B of the second arm 12 via its own or additional flanges, bolts, and nuts.

[0063] like Figure 3 As shown, a first alarm 11W can be installed on the first arm 11, and a second alarm 12W can be installed on the second arm 12. Both can be in the form of audible and visual alarms. This design allows the alarms to be installed in prominent locations on the first arm 11 and the second arm 12, respectively, ensuring that the operator can clearly see the visual signal and hear the audible alarm. When a potential hazard or fault is detected, the alarm can immediately warn the operator, significantly reducing the risk of accidents.

[0064] Furthermore, the first alarm 11W and the second alarm 12W each indicate an abnormality in the corresponding robotic arm, helping operators quickly locate the source of the problem, thereby improving fault diagnosis and resolution efficiency. This distributed alarm design not only enhances equipment safety but also provides operators with more intuitive feedback on abnormalities, optimizing equipment maintenance and management processes.

[0065] like Figure 3 As shown, when both the first arm 11 and the second arm 12 are horizontal, the distance between the first arm 11 and the work platform 40 is designed to be approximately 4.5 meters. This height design not only provides ample safety space for operators, ensuring that they are not disturbed by the rotation of the first arm 11 and the second arm 12 during operation, but also effectively avoids possible collision or contact risks, significantly improving operation safety.

[0066] Furthermore, this height design significantly optimizes the efficiency of elevator 13. Due to the smaller lifting range, elevator 13 reduces the time and energy required to raise and lower crucible C. This shorter lifting distance directly results in faster lifting speeds and shorter operating cycles, further improving the overall efficiency of the feeding operation. This design balances safety with rapid operation and energy efficiency, meeting the requirements for efficient and safe operations.

[0067] See also Figure 2 The embodiment of the present invention further provides a single crystal furnace 1, which may include a feeding device 10 according to the aforementioned embodiments of the present invention.

[0068] By adopting the feeding device 10 of the present invention, the space utilization rate of the working platform 40 is significantly improved, and the space occupied by the traditional independent lifting system is freed up, thereby expanding the available area on the working platform 40. This improvement provides operators with a more spacious working environment and effectively improves operational safety. The larger available space reduces the risk of collisions and accidents caused by confined spaces, while allowing operators to focus more on their tasks, thereby reducing the incidence of operational errors. This optimized design not only improves the working environment, but also further enhances operational efficiency and safety, meeting the needs of efficient and safe single crystal production.

[0069] It should be noted that the technical solutions described in the embodiments of the present invention can be arbitrarily combined without conflict.

[0070] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A feeding device for a single crystal furnace, characterized in that: The feeding device comprises: a first arm extending in a horizontal direction, wherein one end of the first arm is disposed on a column of the single crystal furnace and is capable of rotating around the column; a second arm extending in the horizontal direction, the second arm being connected to the other end of the first arm through one end thereof and being rotatable about an axis parallel to the column and passing through the other end of the first arm; An elevator is provided at the other end of the second arm and is capable of raising and lowering the pre-charged crucible.

2. The feeding device for a single crystal furnace according to claim 1, characterized in that: The feeding device further includes a first limit switch, which is used to limit the rotation angle of the first arm around the column.

3. The feeding device for a single crystal furnace according to claim 2, characterized in that: The feeding device further includes a second limit switch, and the second limit switch is used to limit the rotation angle of the second arm around the axis.

4. The feeding device for a single crystal furnace according to any one of claims 1 to 3, characterized in that: The feeding device further comprises a first in-position switch, and the first in-position switch is used to stop the first arm from rotating when the first arm rotates to a predetermined position.

5. The feeding device for a single crystal furnace according to claim 4, characterized in that: The feeding device further comprises a second in-position switch, and the second in-position switch is used to stop the second arm from rotating when the second arm rotates to a predetermined position.

6. The feeding device for a single crystal furnace according to any one of claims 1 to 3, characterized in that: The feeding device further includes a first driver, which is fixed to the column and is used to drive the first arm to rotate.

7. The feeding device for a single crystal furnace according to claim 6, characterized in that: The first driver is fixed so that its drive shaft is parallel to the column and transmits power to the first arm through a spur gear transmission mechanism.

8. The feeding device for a single crystal furnace according to any one of claims 1 to 3, characterized in that: The feeding device further includes a second driver, which is fixed to the other end of the first arm and is used to drive the second arm to rotate.

9. The feeding device for a single crystal furnace according to claim 8, characterized in that: The second driver is fixed so that its driving shaft is parallel to the second arm, and transmits power to the second arm through a bevel gear transmission mechanism.

10. A single crystal furnace, characterized in that: The single crystal furnace includes the feeding device according to any one of claims 1 to 9.

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