Heating device for single crystal furnace

Abstract

The utility model provides a heating device for a single crystal furnace, and relates to the technical field of single crystal furnace processing, the heating device comprises a middle thermal insulation cylinder, the top of the middle thermal insulation cylinder is provided with a dismounting assembly, the dismounting assembly comprises two groups of heating sheets, the bottoms of the two groups of heating sheets are connected with an insertion block, the outer surfaces of the two sides of the insertion block are provided with slotted holes, and the slotted holes are communicated with the middle thermal insulation cylinder. Two groups of inserting grooves are symmetrically formed in the surface of the middle heat preservation cylinder, fixing blocks are arranged on the outer surfaces of the two sides of the middle heat preservation cylinder, two groups of springs are arranged in each group of fixing blocks, a push rod is inserted into each group of springs, and a handle is connected to one end of each push rod. According to the utility model, when the heating sheet is installed, the heating sheet can be directly inserted into the slot, so that the spring automatically pushes the connecting block to be inserted into the slot hole for rapid fixation, the problem that the process is relatively tedious when the heating sheet is installed by an existing device is avoided, and the installation efficiency of the heating sheet is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a heating device for single crystal furnaces. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment (such as nitrogen or helium) and grow dislocation-free single crystals through the Czochralski method. It is widely used in the semiconductor, optoelectronics, optical communications, photovoltaic, and other fields to produce high-quality single crystal materials such as single crystal silicon, sapphire, and gallium boride.

[0003] As disclosed in publication number CN116180214A, an oxygen reduction heating device for a single crystal furnace has a simple structure. The main heater is composed of several heating plates. When the main heater fails, the heating plate can be quickly located, and the replacement of the heating plate can be completed without removing a large number of components, thereby reducing the cost of use. The main heater includes several heating plates, which are arranged in a circular array to form the main heater, and electrode plates are fixed at both ends of each heating plate.

[0004] This patent can quickly locate the heating plate and replace the heating plate without removing a large number of components. However, the existing device requires a large number of operations to fix the heating plate, and the heating plate cannot be installed quickly. The practicality needs to be improved. Therefore, we propose a new type of heating device for single crystal furnaces. Utility Model Content

[0005] The purpose of the utility model is to solve the problem that the existing device in the prior art needs to be fixed through a large number of operations when fixing the heating plate, the heating plate cannot be installed quickly, and the practicality needs to be improved.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a heating device for a single crystal furnace, comprising a middle insulation cylinder, a disassembly and assembly component is provided on the top of the middle insulation cylinder, the disassembly and assembly component comprises two groups of heating plates, the bottoms of the two groups of heating plates are connected with plug-in blocks, the outer surfaces of both sides of the plug-in blocks are provided with slots, the surface of the middle insulation cylinder is symmetrically provided with two groups of slots, the outer surfaces of both sides of the insulation cylinder are provided with fixed blocks, two groups of springs are provided inside the interior of each group of fixed blocks, and push rods are inserted inside the interior of each group of springs, one end of the two groups of push rods is connected with a handle, and the other end of the two groups of push rods is connected with a push block, one side of the push block is connected with a connecting block, the top of one side of the heating plate is connected with a card block, and the top of the other side of the heating plate is provided with a card slot.

[0007] Furthermore, the position and size of the card block match the position and size of the card slot, and a card-engaging connection is formed between the card block and the card slot.

[0008] Furthermore, the plug-in connection is formed between the plug block and the slot, and an oblique opening is provided on one side of the connection block.

[0009] Furthermore, a plug-in connection is formed between the connecting block and the slot, and an elastic structure is formed between the pushing block and the spring.

[0010] Furthermore, an adjustment component is provided at the bottom of the middle heat-insulating cylinder. The adjustment component includes a support block. A threaded groove is provided inside the support block. A threaded rod is provided inside the threaded groove.

[0011] Furthermore, a supporting foot is connected to the bottom of the threaded rod, a wrench is connected to one side of the supporting foot, and a threaded connection is formed between the threaded rod and the thread groove.

[0012] Compared with the prior art, the advantages and positive effects of the present invention are:

[0013] 1. In the present invention, when installing the heating plate, the heating plate can be directly inserted into the slot, so that the spring automatically pushes the connecting block into the slot for quick fixation, avoiding the cumbersome installation process of the heating plate in the existing device and improving the installation efficiency of the heating plate.

[0014] 2. In the present invention, when the middle insulation cylinder is placed on an uneven ground, the height of the support feet can be adjusted by a wrench to ensure that the device can remain level under different ground conditions, thereby improving stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the three-dimensional structure of a heating device for a single crystal furnace proposed in the utility model;

[0016] Figure 2 This is a schematic diagram of the three-dimensional structure of a heating device for a single crystal furnace proposed by the present invention from another angle;

[0017] Figure 3 This is a schematic diagram of the explosion structure of a heating device for a single crystal furnace proposed in the utility model;

[0018] Figure 4 This is a schematic diagram of the partial explosion structure of a heating device for a single crystal furnace proposed in the utility model;

[0019] Figure 5 This is a schematic diagram of the cross-sectional structure of a fixed block of a heating device for a single crystal furnace proposed in the utility model;

[0020] Figure 6 The utility model provides a schematic diagram of the explosion structure of a support block of a heating device for a single crystal furnace.

[0021] Legend: 1. Middle insulation cylinder; 2. Disassembly and assembly components; 201. Heating plate; 202. Insert block; 203. Slot; 204. Connecting block; 205. Clamping block; 206. Clamping slot; 207. Slot; 208. Fixing block; 209. Push rod; 210. Handle; 211. Push block; 212. Spring; 3. Adjustment component; 301. Support block; 302. Groove; 303. Threaded rod; 304. Support foot; 305. Wrench. DETAILED DESCRIPTION

[0022] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described below with reference to the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features therein can be combined with each other without conflict.

[0023] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0024] Example 1, as Figure 1 - Figure 4 As shown, the utility model provides a heating device for a single crystal furnace, comprising a middle insulation cylinder 1, a disassembly assembly 2 is provided on the top of the middle insulation cylinder 1, the disassembly assembly 2 comprises two groups of heating plates 201, the bottoms of the two groups of heating plates 201 are connected with plug blocks 202, the outer surfaces of both sides of the plug blocks 202 are provided with slots 203, the surface of the middle insulation cylinder 1 is symmetrically provided with two groups of slots 207, the outer surfaces of both sides of the middle insulation cylinder 1 are provided with fixing blocks 208, each group of fixing blocks 208 is provided with two groups of springs 212 inside, each group of springs 212 is plugged with a push rod 209 inside, and one end of the two groups of push rods 209 is connected to a handle 2 10. The other end of the two sets of push rods 209 is connected to a push block 211, one side of the push block 211 is connected to the connecting block 204, the top of one side of the heating plate 201 is connected to a clamping block 205, and the top of the other side of the heating plate 201 is provided with a clamping slot 206. The position and size of the clamping block 205 match the position and size of the clamping slot 206. The clamping block 205 and the clamping slot 206 form a clamping connection, and the inserting block 202 and the slot 207 form a plug-in connection. An oblique opening is provided on one side of the connecting block 204, and the connecting block 204 and the slot 203 form a plug-in connection. An elastic structure is formed between the push block 211 and the spring 212.

[0025] The effect achieved by the entire embodiment 1 is that when the heating plate 201 is damaged and needs to be replaced, the handle 210 can be pulled outward, so that the handle 210 can drive the push block 211 to squeeze the spring 212 through the push rod 209, and drive the connecting block 204 to be pulled out from the slot 203, and then the heating plate 201 is pulled upward to make the plug block 202 at the bottom of the heating plate 201 be pulled out from the slot 207, thereby completing the removal of the heating plate 201. When a new heating plate 201 needs to be installed, the plug block 202 at the bottom of the new heating plate 201 can be pushed into the slot 207. When the bottom of the plug block 202 is aligned with the connecting block 204, the plug block 202 can be pulled out from the slot 207. When the oblique edges of the connecting block 204 make contact, it continues to move downward, causing the connecting block 204 to be squeezed and automatically contracted toward the fixing block 208. When the inserting block 202 at the bottom of the heating plate 201 is completely pushed into the slot 207, the spring 212 will push the pushing block 211 through its own elastic force, driving the connecting block 204 to be inserted into the slot 203 for fixation. At the same time, the clamping block 205 and the clamping slot 206 between the two sets of heating plates 201 will also be clamped and fixed, completing the installation of the heating plate 201, avoiding the problem of the existing device having a more cumbersome process when installing the heating plate 201, and improving the installation efficiency of the heating plate 201.

[0026] Example 2, as Figure 1 and Figure 5 As shown, an adjustment component 3 is provided at the bottom of the middle insulation tube 1, and the adjustment component 3 includes a support block 301, a threaded groove 302 is provided inside the support block 301, a threaded rod 303 is provided inside the threaded groove 302, the bottom of the threaded rod 303 is connected to a support foot 304, and a wrench 305 is connected to one side of the support foot 304, and a threaded connection is formed between the threaded rod 303 and the threaded groove 302.

[0027] The effect achieved by the entire embodiment 2 is that when the middle insulation tube 1 is placed on an uneven ground, the support foot 304 can be driven to rotate by turning the wrench 305, and then the support foot 304 can drive the threaded rod 303 and the threaded groove 302 to rotate threadably, thereby adjusting the height of the support foot 304, ensuring that the device can remain level under different ground conditions, and improving stability during use.

[0028] Working principle: When installing the heating plate 201, the heating plate 201 can be directly inserted into the slot 207, so that the spring 212 automatically pushes the connecting block 204 into the slot 203 for quick fixation, avoiding the problem of the existing device having a more cumbersome installation process for the heating plate 201, and improving the installation efficiency of the heating plate 201. When the middle insulation tube 1 is placed on an uneven ground, the height of the support foot 304 can be adjusted by using the wrench 305 to ensure that the device can remain level under different ground conditions, thereby improving stability.

[0029] The above are merely preferred embodiments of the present invention and do not limit the present invention in any other form. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification made to the above embodiment based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A heating device for a single crystal furnace, comprising a middle insulation cylinder, characterized in that: A disassembly assembly is provided on the top of the middle heat preservation cylinder; The disassembly and assembly assembly includes two groups of heating plates, the bottoms of the two groups of heating plates are connected with equal insertion blocks, the outer surfaces of both sides of the insertion blocks are provided with slots, the surface of the middle insulation tube is symmetrically provided with two groups of slots, the outer surfaces of both sides of the middle insulation tube are provided with fixed blocks, two groups of springs are provided inside each group of the fixed blocks, and push rods are inserted inside each group of springs, one end of the two groups of push rods is connected with a handle, the other end of the two groups of push rods is connected with a push block, one side of the push block is connected with a connecting block, the top of one side of the heating plate is connected with a card block, and the top of the other side of the heating plate is provided with a card slot.

2. The heating device for a single crystal furnace according to claim 1, characterized in that: The position and size of the card block match the position and size of the card slot, and a card-engaging connection is formed between the card block and the card slot.

3. The heating device for a single crystal furnace according to claim 2, characterized in that: The plug-in connection is formed between the plug-in block and the slot, and an oblique opening is provided on one side of the connection block.

4. The heating device for a single crystal furnace according to claim 3, characterized in that: The connecting block and the slotted hole form an inserting connection, and the pushing block and the spring form an elastic structure.

5. The heating device for a single crystal furnace according to claim 1, characterized in that: An adjustment component is provided at the bottom of the middle heat-insulating cylinder. The adjustment component includes a support block. A threaded groove is provided inside the support block. A threaded rod is provided inside the threaded groove.

6. The heating device for a single crystal furnace according to claim 5, characterized in that: The bottom of the threaded rod is connected to a supporting foot, one side of the supporting foot is connected to a wrench, and a threaded connection is formed between the threaded rod and the thread groove.

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