Micro-volume pressure sensor based on sputtering film core body

Abstract

The utility model provides a micro-volume pressure sensor based on a sputtering film core body, which relates to the technical field of pressure sensors, and comprises a pressure interface seat and a signal conditioning circuit board, the top of the pressure interface seat is provided with a sputtering film pressure sensitive core body through laser welding; a circuit board support is fixedly installed on the outer surface wall of the sputtering film pressure sensitive core body, a signal switching circuit board is fixedly installed on the top of the circuit board support, the signal conditioning circuit board and the signal switching circuit board are connected through a metal contact pin, and a shell is installed on the top of the pressure interface seat through laser welding. The top of the housing is provided with a wire outlet port. According to the utility model, the sensitive element of the sputtering film pressure sensor is arranged in the micro-volume pressure interface seat and the shell, so that the volume of the sensor is reduced, the space is greatly saved, and the pressure sensor is suitable for signal transmission lines of various specifications and can be adapted to more connectors as required, thereby meeting more working requirements.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure sensors, in particular to a micro-volume pressure sensor based on a sputtered thin film core. Background Art

[0002] When the sensor measures pressure, the medium (gas, liquid) applies pressure to the pressure-sensitive element, causing the pressure-sensitive element to deform. The deformation of the pressure-sensitive element drives the deformation of the strain resistor in the Wheatstone bridge, thereby changing the output signal of the bridge. The conditioning circuit in the sensor amplifies and conditions the output signal of the Wheatstone bridge, ultimately causing the sensor to output a standard electrical signal.

[0003] In the existing technology, sputtered thin film pressure sensors are larger in size than other types of sensors due to the limitations of the core process, are inconvenient to install, and have significant limitations on application scenarios. Utility Model Content

[0004] The purpose of the utility model is to solve the problem that the existing equipment is larger in size and inconvenient to install than other types of sensors due to the limitation of the core process when in use, and to propose a small volume pressure sensor based on a sputtered thin film core.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solution: a small-volume pressure sensor based on a sputtered thin film core, including a pressure interface seat and a signal conditioning circuit board, the top of the pressure interface seat is installed with a sputtered thin film pressure sensitive core by laser welding, the outer wall of the sputtered thin film pressure sensitive core is fixedly installed with a circuit board bracket, and the top of the circuit board bracket is fixedly installed with a signal adapter circuit board.

[0006] Preferably, the signal conditioning circuit board and the signal adapter circuit board are connected via metal pins.

[0007] Preferably, a shell is mounted on the top of the pressure interface seat by laser welding, and a wire outlet port is provided on the top of the shell.

[0008] Compared with the prior art, the advantages and positive effects of the present invention are:

[0009] In the utility model, by placing the sensitive element of the sputtered thin film pressure sensor in a small volume pressure interface seat and the housing, the volume of the sensor is reduced, which greatly saves space. In addition, the utility model is suitable for signal transmission lines of various specifications and can be adapted to more connectors as required, thereby being suitable for more work requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1The utility model proposes a schematic diagram of the external structure of a small volume pressure sensor based on a sputtered thin film core;

[0011] Figure 2 The utility model proposes a schematic diagram of the internal structure of a small volume pressure sensor based on a sputtered thin film core;

[0012] Figure 3 The present invention provides a schematic structural diagram of a sputtered thin film pressure sensitive core in a small volume pressure sensor based on a sputtered thin film core;

[0013] Figure 4 The utility model proposes a structural schematic diagram of a pressure interface seat in a small volume pressure sensor based on a sputtered thin film core;

[0014] Figure 5 The utility model proposes a schematic structural diagram of a circuit board bracket in a small volume pressure sensor based on a sputtered thin film core;

[0015] Figure 6 The utility model provides a structural schematic diagram of the shell of a small volume pressure sensor based on a sputtered thin film core.

[0016] Legend:

[0017] Pressure interface seat; 2. Sputtered thin film pressure sensitive core; 3. Circuit board bracket; 4. Signal transfer circuit board; 5. Signal conditioning circuit board; 6. Housing; 7. Outlet port. DETAILED DESCRIPTION

[0018] In order to more clearly understand the above-mentioned purposes, features and advantages of the present invention, the present invention is further described below with reference to the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features therein can be combined with each other unless there is a conflict.

[0019] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0020] Example 1: Figures 1-6As shown, the utility model provides a small volume pressure sensor based on a sputtered thin film core, including a pressure interface seat 1 and a signal conditioning circuit board 5. The top of the pressure interface seat 1 is installed with a sputtered thin film pressure sensitive core 2 by laser welding, the outer wall of the sputtered thin film pressure sensitive core 2 is fixedly installed with a circuit board bracket 3, the top of the circuit board bracket 3 is fixedly installed with a signal adapter circuit board 4, the signal conditioning circuit board 5 and the signal adapter circuit board 4 are connected by metal pins, the top of the pressure interface seat 1 is installed with a shell 6 by laser welding, and the top of the shell 6 is provided with an outlet port 7.

[0021] The effect achieved by the entire embodiment 1 is that the volume of the pressure sensor is reduced by laser welding the sputtered thin film pressure sensitive core 2 in the small volume pressure interface seat 1 and the shell 6, which greatly saves space. The utility model is suitable for signal transmission lines of various specifications and can be adapted to more connectors as required, thereby being suitable for more work requirements. The utility model is designed with an O-ring groove for convenient installation of the O-ring. The utility model has good sealing performance and can protect the sputtered thin film pressure sensitive core 2 to a greater extent, thereby increasing the service life of the pressure sensor.

[0022] Working principle: First, the sputtered thin film pressure sensitive core 2 is laser welded in the small volume pressure interface seat 1 and the shell 6, and then a circuit board bracket 3 is fixedly installed on the outer wall of the sputtered thin film pressure sensitive core 2, and a signal transfer circuit board 4 is fixedly installed on the top of the circuit board bracket 3, and the signal conditioning circuit board 5 and the signal transfer circuit board 4 are connected by metal pins, and then the shell 6 is installed on the top of the pressure interface seat 1 by laser welding, and an outlet port 7 is provided on the top of the shell 6, which not only reduces the volume of the pressure sensor and greatly saves space, but also can be applied to signal transmission lines of various specifications, and can be adapted to more connectors as required, so as to be suitable for more work requirements. Secondly, the utility model is designed with an O-ring groove, which is convenient for installing O-rings and has good sealing performance. It can protect the sputtered thin film pressure sensitive core 2 to a greater extent, thereby improving the service life of the small volume pressure sensor based on the sputtered thin film core.

[0023] The above are only preferred embodiments of the present invention and are not intended to limit the present invention in any other form. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification of the above embodiment made according to the technical essence of the present invention without departing from the content of the technical solution of the present invention shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A micro-volume pressure sensor based on a sputtered thin film core, comprising a pressure interface seat (1) and a signal conditioning circuit board (5), characterized in that: A sputtered film pressure sensitive core (2) is mounted on the top of the pressure interface seat (1) by laser welding, a circuit board bracket (3) is fixedly mounted on the outer wall of the sputtered film pressure sensitive core (2), and a signal transfer circuit board (4) is fixedly mounted on the top of the circuit board bracket (3).

2. The micro-volume pressure sensor based on a sputtered thin film core according to claim 1, characterized in that: The signal conditioning circuit board (5) and the signal transfer circuit board (4) are connected via metal pins.

3. The micro-volume pressure sensor based on a sputtered thin film core according to claim 2, characterized in that: A housing (6) is mounted on the top of the pressure interface seat (1) by laser welding, and an outlet port (7) is provided on the top of the housing (6).

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