Carrier protection device for CVD (Chemical Vapor Deposition) reaction furnace

Abstract

The utility model discloses a carrier protection device for a CVD reaction furnace, which comprises a protection cover and a circular ring, the surface of the protection cover is provided with a folding edge, the surface of the folding edge is fixedly provided with a first sliding rail, the surface of the circular ring is fixedly provided with a second sliding rail, and the surface of the first sliding rail is slidably connected with a plurality of first sliding blocks. A plurality of second sliding blocks are slidably connected to the surface of the second sliding rail, a first side plate is fixed to the surface of the first sliding block, a first rotating shaft is fixed to the surface of the first side plate, a sleeve shell is slidably connected to the surface of the first rotating shaft, an extending plate is slidably connected to the inner wall of the sleeve shell, and a second side plate is fixed to the surface of the second sliding block; and a second rotating shaft is fixed to the surface of the second side plate and penetrates through the extension plate, the extension plate is slidably connected with the surface of the second rotating shaft, and a mounting groove is formed in the surface of the second rotating shaft. The utility model has the advantages that the position of the round hole can be changed as required, so as to adapt to the protection requirements of more models of carriers and pull rods.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor device processing, in particular to a carrier protection device for a CVD reactor. Background Art

[0002] Diodes are the most commonly used basic electronic components. In the process of diode chip manufacturing, in order to improve the high-temperature performance of the chip, the CVD thin film passivation process is widely used to passivate and protect the PN junction to eliminate the silicon-oxygen interface effect, thereby improving the reliability of the chip.

[0003] During the diode chip manufacturing process, the carrier used to transfer the wafer into and out of the CVD deposition reactor is usually made of quartz to avoid metal contamination, and a push hole is reserved at the tail end. A pull rod is used to push the material into or out of the reactor. During use, the pull rod and the carrier are prone to collision, causing damage to the carrier and shortening the service life of the carrier. Each quartz carrier costs 3,000 yuan, which will lead to excessively high usage costs and cause trouble.

[0004] A search of a Chinese patent with publication number CN213752651U disclosed a carrier protection device for a CVD reactor.

[0005] The utility model includes a protective cover; the end surface of the protective cover is provided with a hollow plate with a circular hole, the side of the protective cover is provided with a folded edge, and the outer wall of the protective cover is movably provided with a clamp. The utility model protects the carrier by installing a protective device at the rear end of the carrier. The circular hole in the protective cover cooperates with the pull rod to push the carrier into or out of the reactor, making it less susceptible to damage in the event of a collision with the pull rod. At the same time, it does not obstruct the view of chips when entering and exiting the reactor, thereby extending the service life of the carrier and reducing its use cost. The device is simple to design and manufacture and easy to operate.

[0006] However, this patent still has the following problems: the device protects the rear end of the vehicle through a protective cover and a circular hole, but since the position of the circular hole is fixed after the protective cover is produced, it is difficult to adjust according to different situations, so the factory also needs to process and produce protective covers with circular holes in different positions, which reduces the practicality of the device. Utility Model Content

[0007] The purpose of the utility model is to provide a carrier protection device for a CVD reactor, which has the advantage of being able to change the position of the circular hole as needed, thereby adapting to the protection requirements of more types of carriers and pull rods.

[0008] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: a carrier protection device for a CVD reactor, comprising a protective cover and a circular ring, the surface of the protective cover is provided with a folded edge, the surface of the folded edge is fixed with a first slide rail, the surface of the circular ring is fixed with a second slide rail, the surface of the first slide rail is slidably connected to a plurality of first sliders, the surface of the second slide rail is slidably connected to a plurality of second sliders, the surface of the first slider is fixed with a first side plate, the surface of the first side plate is fixed with a first rotating shaft, the surface of the first rotating shaft is slidably connected to a sleeve, the inner wall of the sleeve is slidably connected to an extension plate, the surface of the second slider is fixed with a second side plate, the surface of the second side plate is fixed with a second rotating shaft, the second rotating shaft passes through the extension plate, the extension plate is slidably connected to the surface of the second rotating shaft, the surface of the second rotating shaft is provided with a mounting groove, the inner wall of the mounting groove is fixed with a spring, the surface of the spring is fixed with a U-shaped plate, and the surface of the U-shaped plate is rotatably connected to a roller.

[0009] As a preferred carrier protection device for a CVD reactor of the present invention, the cross-sections of the first slide rail and the second slide rail are both T-shaped structures.

[0010] As a preferred embodiment of the carrier protection device for a CVD reactor of the present invention, fastening bolts are threadedly passed through the surface of the first sliding block and the shell.

[0011] As a preferred embodiment of the carrier protection device for a CVD reactor of the present invention, fastening bolts are threadedly passed through the surface of the first sliding block and the shell.

[0012] As a preferred embodiment of the carrier protection device for a CVD reactor of the present invention, a friction pad is fixed to the surface of the roller, and the friction pad is made of rubber.

[0013] As a preferred embodiment of the carrier protection device for a CVD reactor of the present invention, the ring, the casing and the extension plate are all made of stainless steel.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0015] When the position of the circular ring needs to be adjusted according to the pull rod conditions suitable for different carriers, the utility model directly moves the circular ring to the adapted position. At this time, multiple extension plates will slide on the inner wall of the shell, and the extension plates will rotate on the second rotating shaft surface, and the shell will also rotate on the first rotating shaft surface, thereby ensuring that the circular ring can move normally. At the same time, the first slider can also slide on the first slide rail surface, and the second rotating shaft can slide on the second slide rail surface, thereby expanding the movement range of the circular ring, so that the circular ring can move freely in a large range on the inner side of the folded edge, thereby making the circular ring able to adapt to the use requirements of pull rods in different positions, and when the pull rod passes through the circular ring, the pull rod surface can come into contact with the roller, and the roller can also rotate, so that the pull rod surface is not easily damaged by friction. In this process, the spring is compressed by pressure, so that the roller surface can fit closely with the pull rod surface, thereby increasing the resistance when the pull rod is pushed and pulled, slowing down the pull rod movement speed, thereby avoiding damage to the carrier caused by excessively fast pull rod operation, thereby further improving the safety of the carrier when in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the three-dimensional structure of the utility model from another perspective;

[0018] Figure 3 It is a schematic diagram of the local structure of the utility model;

[0019] Figure 4 It is a schematic diagram of the local structure of the utility model;

[0020] Figure 5 For this utility model Figure 3 A in the figure is an enlarged structural diagram.

[0021] In the figure: 1. Protective cover; 2. Folding edge; 3. First slide rail; 4. First slider; 5. First side plate; 6. First rotating shaft; 7. Housing; 8. Extension plate; 9. Second side plate; 10. Second rotating shaft; 11. Second slider; 12. Second slide rail; 13. Ring; 14. Spring; 15. U-shaped plate; 16. Roller; 17. Friction pad; 18. Telescopic rod; 19. Fastening bolt. DETAILED DESCRIPTION

[0022] See also Figure 1-5A carrier protection device for a CVD reactor includes a protective cover 1 and a circular ring 13. The surface of the protective cover 1 is provided with a folding edge 2, the surface of the folding edge 2 is fixed with a first slide rail 3, the surface of the circular ring 13 is fixed with a second slide rail 12, the surface of the first slide rail 3 is slidably connected with a plurality of first sliders 4, the surface of the second slide rail 12 is slidably connected with a plurality of second sliders 11, the surface of the first slider 4 is fixed with a first side plate 5, the surface of the first side plate 5 is fixed with a first rotating shaft 6, the surface of the first rotating shaft 6 is slidably connected with a sleeve 7, the inner wall of the sleeve 7 is slidably connected with an extension plate 8, the surface of the second slider 11 is fixed with a second side plate 9, the surface of the second side plate 9 is fixed with a second rotating shaft 10, the second rotating shaft 10 passes through the extension plate 8, and the extension plate 8 is slidably connected to the surface of the second rotating shaft 10, the surface of the second rotating shaft 10 is opened with a mounting groove, the inner wall of the mounting groove is fixed with a spring 14, the surface of the spring 14 is fixed with a U-shaped plate 15, and the surface of the U-shaped plate 15 is rotatably connected with a roller 16;

[0023] The protective cover 1 is fixed to the rear end of the carrier and is clamped to the carrier by installing a clamp. The ring 13 cooperates with the pull rod to push the carrier into or pull out of the reactor, so that it is not easily damaged when it collides with the pull rod, and the multiple extension plates 8 and the shell 7 have a small blocking range, so that the user can observe the status of the chip when it enters and exits the furnace without blocking the line of sight, thereby extending the service life of the carrier. When it is necessary to adjust the position of the ring 13 according to the pull rod conditions suitable for different carriers, the ring 13 is directly moved to the adapted position. At this time, the multiple extension plates 8 will slide on the inner wall of the shell 7, and the extension plates 8 will rotate on the surface of the second shaft 10, and the shell 7 will also rotate on the surface of the first shaft 6, so as to ensure that the ring 13 can move normally. At the same time, the first slider 4 can also be moved on the first The surface of the slide rail 3 slides, and the second rotating shaft 10 can slide on the surface of the second slide rail 12, thereby expanding the moving range of the ring 13, so that the ring 13 can move freely in a large range inside the folded edge 2, so that the ring 13 can adapt to the use requirements of the pull rod in different positions, and when the pull rod passes through the ring 13, the pull rod surface can come into contact with the roller 16, and the roller 16 can also rotate, so that the pull rod surface is not easily damaged by friction. In this process, the spring 14 is compressed by pressure, so that the surface of the roller 16 can fit closely to the pull rod surface, thereby increasing the resistance when the pull rod is pushed and pulled, slowing down the movement speed of the pull rod, thereby avoiding damage to the vehicle caused by excessive operation of the pull rod, thereby further improving the safety of the vehicle when in use.

[0024] Furthermore, the cross sections of the first slide rail 3 and the second slide rail 12 are both T-shaped structures;

[0025] This design prevents the first slider 4 and the second slider 11 from falling off the surfaces of the first slide rail 3 and the second slide rail 12 .

[0026] Furthermore, fastening bolts 19 are threadedly passed through the surfaces of the first slider 4 and the housing 7;

[0027] After the extension plate 8 is adjusted to be located inside the housing 7 and the first slider 4 is adjusted to be located on the surface of the first slide rail 3, a bolt can be passed through the extension plate 8 and the first slider 4 to limit the extension plate 8 and the first slider 4 by friction.

[0028] Furthermore, a telescopic rod 18 is fixed to one end of the U-shaped plate 15, and one end of the telescopic rod 18 is fixedly connected to the inner wall of the ring 13;

[0029] The telescopic rod 18 can limit the moving direction of the U-shaped plate 15 to prevent the spring 14 from bending.

[0030] Furthermore, a friction pad 17 is fixed on the surface of the roller 16, and the friction pad 17 is made of rubber;

[0031] The friction pad 17 can increase the friction force after contacting the pull rod surface, thereby further slowing down the movement speed of the pull rod. The friction pad 17 can also be compressed and deformed to cushion the collision effect when the pull rod moves left and right, making the pull rod surface less susceptible to damage.

[0032] Furthermore, the ring 13, the housing 7 and the extension plate 8 are all made of stainless steel;

[0033] Stainless steel has good impact resistance and corrosion resistance, especially in semiconductor manufacturing environments where corrosive chemicals or gases may be present. Stainless steel can resist the erosion of these substances and extend its service life.

[0034] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A carrier protection device for a CVD reactor, comprising a protective cover (1) and a ring (13), characterized in that: The surface of the protective cover (1) is provided with a folding edge (2), a first slide rail (3) is fixed on the surface of the folding edge (2), a second slide rail (12) is fixed on the surface of the ring (13), a plurality of first sliders (4) are slidably connected to the surface of the first slide rail (3), a plurality of second sliders (11) are slidably connected to the surface of the second slide rail (12), a first side plate (5) is fixed on the surface of the first side plate (5), a first rotating shaft (6) is fixed on the surface of the first rotating shaft (6), a sleeve shell (7) is slidably connected to the surface of the sleeve An extension plate (8) is slidably connected to the inner wall of the shell (7); a second side plate (9) is fixed to the surface of the second slider (11); a second rotating shaft (10) is fixed to the surface of the second side plate (9); the second rotating shaft (10) passes through the extension plate (8); the extension plate (8) is slidably connected to the surface of the second rotating shaft (10); a mounting groove is provided on the surface of the second rotating shaft (10); a spring (14) is fixed to the inner wall of the mounting groove; a U-shaped plate (15) is fixed to the surface of the spring (14); and a roller (16) is rotatably connected to the surface of the U-shaped plate (15).

2. The carrier protection device for a CVD reactor according to claim 1, characterized in that: The cross sections of the first slide rail (3) and the second slide rail (12) are both T-shaped structures.

3. The carrier protection device for a CVD reactor according to claim 1, characterized in that: The surfaces of the first sliding block (4) and the sleeve (7) are both threadedly penetrated by fastening bolts (19).

4. The carrier protection device for a CVD reactor according to claim 1, characterized in that: A telescopic rod (18) is fixed to one end of the U-shaped plate (15), and one end of the telescopic rod (18) is fixedly connected to the inner wall of the ring (13).

5. The carrier protection device for a CVD reactor according to claim 1, characterized in that: A friction pad (17) is fixed on the surface of the rotating roller (16), and the friction pad (17) is made of rubber.

6. The carrier protection device for a CVD reactor according to claim 1, characterized in that: The circular ring (13), the casing (7) and the extension plate (8) are all made of stainless steel.

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