Loading device and vacuum treatment equipment

Abstract

The utility model relates to the technical field of vacuum treatment, and particularly discloses a loading device and vacuum treatment equipment, the loading device comprises a support frame, a loading assembly, a linkage assembly and a transmission mechanism; the multiple loading assemblies are parallel to one another and are obliquely arranged at intervals in the first direction, and any two adjacent loading assemblies are in linkage connection through the linkage assembly. The transmission mechanism comprises a transmission assembly and a universal joint set, and the driving end is in transmission connection with the universal joint set through the transmission assembly. One of the loading assemblies on the outermost side is connected to the output end of the universal joint set, and the other loading assembly is rotationally connected to the supporting frame. According to the utility model, the loading assembly can be additionally arranged under the condition that the distance between the adjacent pieces to be processed is ensured, so that the loading capacity is improved, and therefore, the loading capacity of the vacuum processing equipment is improved under the condition of the vacuum processing chamber with limited specification and volume, and the requirement of a terminal on the loading capacity of single equipment is met.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum processing, in particular to a loading device and vacuum processing equipment. Background Art

[0002] Vacuum processing equipment refers to equipment used for vacuum coating, etching, and other processing operations within a vacuum environment. Its primary function is to process, treat, or experiment with workpieces in a vacuum environment to achieve specific process requirements. The tilting loading mechanism is a key feature of vacuum processing equipment. It positions and positions workpieces for loading, tilting and rotating them at a preset angle, thereby achieving technical benefits such as uniform vacuum processing and improving both processing efficiency and quality.

[0003] In the existing technology, in order to increase the loading capacity of vacuum processing, the vacuum processing chamber can be enlarged, but this method easily leads to an increase in the material and floor space costs of the vacuum processing equipment; when the vacuum processing chamber is fixed, the loading capacity can also be increased by reducing the distance between workpieces, but this method will cause interference between workpieces and affect the processing quality of the workpieces. Therefore, the existing vacuum processing equipment sometimes cannot meet terminal requirements in terms of loading capacity. Utility Model Content

[0004] The purpose of the present invention is to provide a loading device and a vacuum processing device to solve the problem in the prior art that under chamber conditions with limited specifications and volume, the loading capacity of the vacuum processing equipment is small and cannot meet the terminal's requirements for the loading capacity of a single device.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] On the one hand, the utility model provides a loading device connected to the driving end head for loading the workpiece to be processed, the loading device comprising:

[0007] Support frame;

[0008] A loading assembly and a linkage assembly, wherein a plurality of loading assemblies are provided, wherein the plurality of loading assemblies are parallel to each other and arranged at intervals along a first direction, and any two adjacent loading assemblies are linked to each other via the linkage assembly; the loading assemblies are used to load the workpiece to be processed;

[0009] The transmission mechanism includes a transmission assembly and a universal joint group. The driving end is connected to the universal joint group through the transmission assembly, and is used to drive the universal joint group to rotate; one of the outermost ones of the several loading assemblies is connected to the output end of the universal joint group, and the other is rotatably connected to the support frame; the universal joint group can drive several of the loading assemblies to rotate along the same tilt direction; the transmission assembly is used to adjust the spatial position of the universal joint group relative to the loading assembly.

[0010] As an optional solution to the above-mentioned loading device, the transmission assembly includes a shell and a first transmission gear and a second transmission gear rotatably arranged in the shell, the first transmission gear is meshedly connected to the second transmission gear, the driving end is connected to the rotating shaft of the first transmission gear, and the rotating shaft of the second transmission gear is connected to the universal joint group.

[0011] As an optional solution of the above-mentioned loading device, the first transmission gear and the second transmission gear are both elliptical gears.

[0012] As an optional solution of the above-mentioned loading device, the linkage assembly includes a first swing arm and a first transmission shaft, the first swing arm is located between two adjacent loading assemblies, the first transmission shaft passes through the loading assemblies and the workpiece to be processed, and is rotatably connected to the loading assemblies, and the end of the first transmission shaft can be connected to the first swing arm; and / or

[0013] The linkage assembly includes a second swing arm and a second transmission shaft, the second swing arm is located between two adjacent loading assemblies, the second transmission shaft includes at least two, at least two second transmission shafts are respectively connected to the opposite ends of the second swing arm, and at least two second transmission shafts are respectively rotatably connected to two adjacent loading assemblies.

[0014] As an optional solution for the above-mentioned loading device, the first swing arm and / or the second swing arm is provided with a clamping groove, the first transmission shaft and / or the second transmission shaft has a portion to be clamped that cooperates with the clamping groove, and the portion to be clamped can be inserted into the clamping groove; the linkage assembly also includes a connecting piece, which is used to drive the clamping groove to lock the portion to be clamped.

[0015] As an optional solution of the above-mentioned loading device, at least two linkage assemblies are arranged between two adjacent loading assemblies.

[0016] As an optional solution of the above-mentioned loading device, the first swing arm is arranged at an obtuse angle to the first transmission shaft, and / or the second swing arm is arranged at an obtuse angle to the second transmission shaft.

[0017] As an optional solution of the above-mentioned loading device, the loading assembly includes a first loading plate and a second loading plate, and the first loading plate is detachably connected to the second loading plate, and is used to be close to each other to clamp the workpiece to be processed.

[0018] As an optional solution of the above-mentioned loading device, an angle seat is provided on a side of the support frame away from the transmission mechanism, the angle seat has an inclined surface, and the loading assembly is rotatably connected to the inclined surface.

[0019] As an optional solution of the above-mentioned loading device, a fixed end is further provided on a side of the support frame away from the transmission mechanism, and a line connecting the fixed end and the driving end is parallel to the first direction.

[0020] On the other hand, the present invention provides a vacuum processing equipment, including the loading device as described above, the vacuum processing equipment also including a driving end head and a vacuum processing chamber, the driving end head and the loading device are both arranged in the vacuum processing chamber, and the driving end head is connected to the transmission assembly.

[0021] The beneficial effects of the utility model are:

[0022] The loading device includes a support frame, a loading assembly, a linkage assembly, and a transmission mechanism. A plurality of loading assemblies are provided, and the plurality of loading assemblies are parallel to each other and arranged at an inclined interval along a first direction. Any two adjacent loading assemblies are linked by a linkage assembly, so that the plurality of loading assemblies can be synchronously linked by the linkage assembly. The loading assemblies are used to load the workpieces to be processed, so that the plurality of workpieces to be processed corresponding to the loading assemblies can also be synchronously linked. The transmission mechanism includes a transmission assembly and a universal joint group. The driving end is connected to the universal joint group through the transmission assembly and is used to drive the universal joint group to rotate. One of the outermost of the plurality of loading assemblies is connected to the output end of the universal joint group, and the other is rotatably connected to the support frame. The universal joint group can drive the plurality of loading assemblies to rotate along the same inclined direction, thereby ensuring the uniformity of vacuum treatment of the plurality of workpieces to be processed at a certain inclined angle. Among them, the transmission assembly is used to adjust the spatial position of the universal joint group relative to the loading assembly, so that the universal joint group can be directly connected to the loading assembly without the use of additional mechanisms for transmission connection. While ensuring the spacing between adjacent workpieces to be processed, loading assemblies can be added to increase the loading capacity. Therefore, under the conditions of vacuum processing chambers with limited specifications and volumes, the loading capacity of the vacuum processing equipment is improved, meeting the terminal's requirements for the loading capacity of a single device. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic structural diagram of a loading device provided in an embodiment of the present utility model;

[0024] Figure 2 A first side view of the loading device provided by an embodiment of the present utility model;

[0025] Figure 3 A second side view of the loading device provided by an embodiment of the present utility model;

[0026] Figure 4 A schematic structural diagram of a transmission assembly provided in an embodiment of the present utility model;

[0027] Figure 5 A partial structural diagram of another transmission assembly provided by an embodiment of the present utility model;

[0028] Figure 6 A first cross-sectional view of the loading assembly and the linkage assembly provided in an embodiment of the present utility model in cooperation with each other;

[0029] Figure 7 A second cross-sectional view of the loading assembly and the linkage assembly provided in an embodiment of the present utility model in cooperation with each other;

[0030] Figure 8 A disassembled schematic diagram of the linkage assembly provided in an embodiment of the present utility model;

[0031] Figure 9 A schematic structural diagram of another linkage assembly provided by an embodiment of the present utility model;

[0032] Figure 10 This is a structural diagram of the assembly of a loading assembly, a linkage assembly and a workpiece to be processed provided in an embodiment of the present utility model.

[0033] In the picture:

[0034] 1. Support frame; 11. Angle seat; 12. Fixed end; 2. Loading assembly; 21. First loading plate; 22. Second loading plate; 3. Linkage assembly; 31. First swing arm; 32. First transmission shaft; 33. Second swing arm; 34. Second transmission shaft; 35. Clamping groove; 36. Part to be clamped; 37. Connecting piece; 4. Transmission mechanism; 41. Transmission assembly; 411. Housing; 412. First transmission gear; 413. Second transmission gear; 42. Universal joint assembly; 5. Driving end; 6. Part to be processed. DETAILED DESCRIPTION

[0035] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0036] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the devices or elements referred to must have a specific position, be constructed and operated in a specific position, and therefore should not be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature being "above", "above" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is at a higher level than the second feature. The first feature being "below", "below" and "below" the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0037] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0038] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0039] like Figures 1 to 10 As shown, this embodiment provides a loading device connected to the driving end head 5 for loading the workpiece 6 to be processed.

[0040] The loading device includes a support frame 1, a loading assembly 2, a linkage assembly 3, and a transmission mechanism 4. A plurality of loading assemblies 2 are provided, and the plurality of loading assemblies 2 are arranged parallel to each other and spaced apart at an angle along a first direction (i.e., the X direction in the drawings). Any two adjacent loading assemblies 2 are linked by the linkage assembly 3, so that the plurality of loading assemblies 2 can be synchronously linked by the linkage assembly 3. The loading assemblies 2 are used to load workpieces 6 to be processed, so that the plurality of workpieces 6 corresponding to the loading assemblies 2 can also be synchronously linked.

[0041] The transmission mechanism 4 includes a transmission assembly 41 and a universal joint assembly 42. The drive end 5 is connected to the universal joint assembly 42 via the transmission assembly 41, driving the universal joint assembly 42 for rotation. One of the outermost of the multiple loading assemblies 2 is connected to the output end of the universal joint assembly 42, and the other is rotatably connected to the support frame 1. The universal joint assembly 42 can drive the multiple loading assemblies 2 to rotate along the same tilt direction, thereby ensuring uniform vacuum treatment of multiple workpieces 6 during processing at a certain tilt angle. Specifically, the vacuum treatment source can vacuum treat the workpieces 6 along two sides perpendicular to the first direction.

[0042] Among them, the transmission component 41 is used to adjust the spatial position of the universal joint group 42 relative to the loading component 2, so that the universal joint group 42 can be directly connected to the loading component 2 without the use of an additional mechanism for transmission connection. While ensuring the spacing between adjacent workpieces 6 to be processed, the loading component 2 can be added to increase the loading capacity. Therefore, under the conditions of a vacuum processing chamber with limited specifications and volume, the loading capacity of the vacuum processing equipment is improved, and the terminal's requirements for the loading capacity of a single device are met.

[0043] like Figure 1 、 Figure 4 and Figure 5 The transmission assembly 41 includes a shell 411 and a first transmission gear 412 and a second transmission gear 413 rotatably arranged in the shell 411. The first transmission gear 412 is meshedly connected to the second transmission gear 413. The driving end head 5 is connected to the rotating shaft of the first transmission gear 412, and the rotating shaft of the second transmission gear 413 is connected to the universal joint group 42, so that torque can be transmitted through gear transmission to facilitate the adjustment of the position of the universal joint group 42 relative to the loading assembly 2. The first transmission gear 412 and the second transmission gear 413 can be replaced to adjust the gear ratio between the two, so that the process speed of the workpiece 6 to be processed can be adjusted according to needs. Optionally, both the first transmission gear 412 and the second transmission gear 413 are elliptical gears, so that the loading assembly 2 can drive the workpiece 6 to rotate at a non-uniform speed, thereby ensuring the uniformity of the vacuum treatment of the workpiece 6. That is, when the long side of the workpiece 6 faces the vacuum treatment source, the workpiece 6 rotates slower, and when the short side of the workpiece 6 faces the vacuum treatment source, the workpiece 6 rotates faster. By adjusting the speed of the workpiece 6 during rotation, the uniformity of the vacuum treatment of the long and short sides of the workpiece 6 can be adjusted, thereby improving the treatment quality. Specifically, the first transmission gear 412 and the second transmission gear 413 are rotatably disposed within the housing 411 via bearings.

[0044] In one embodiment, if Figure 1 and Figure 6As shown, the linkage assembly 3 includes a first swing arm 31 and a first transmission shaft 32. The first swing arm 31 is located between two adjacent loading assemblies 2. The first transmission shaft 32 passes through the loading assembly 2 and the workpiece 6 to be processed and is rotatably connected to the loading assembly 2. The end of the first transmission shaft 32 can be connected to the first swing arm 31. Therefore, through the cooperation of the first swing arm 31 and the first transmission shaft 32, the transmission of the two adjacent loading assemblies 2 can be realized, so that the two adjacent loading assemblies 2 rotate synchronously, and then the synchronous rotation of several loading assemblies 2 is realized, wherein the first transmission shaft 32 is a long axis and can pass through the through hole on the workpiece 6 to be processed to position the workpiece 6. In another embodiment, as Figure 1 and Figure 7 As shown, the linkage assembly 3 includes a second swing arm 33 and a second transmission shaft 34, the second swing arm 33 is located between two adjacent loading assemblies 2, and the second transmission shaft 34 includes at least two, at least two second transmission shafts 34 are respectively connected to the opposite ends of the second swing arm 33, and at least two second transmission shafts 34 are respectively rotatably connected to two adjacent loading assemblies 2, so that through the cooperation of the second swing arm 33 and the two second transmission shafts 34, the transmission of the two adjacent loading assemblies 2 can be achieved, so that the two adjacent loading assemblies 2 rotate synchronously, and then the synchronous rotation of several loading assemblies 2 is achieved, wherein the second transmission shaft 34 is a short shaft and will not pass through the workpiece 6 to be processed, so that the loading assembly 2 can load the workpiece 6 to be processed that does not have the long axis penetration condition. In other embodiments, the linkage assembly 3 includes a first swing arm 31, a first transmission shaft 32, a second swing arm 33 and a second transmission shaft 34 to meet the positioning requirements of the workpiece 6 to be processed.

[0045] like Figure 1 、 Figure 6 、 Figure 7 and Figure 8 As shown, the first swing arm 31 and / or the second swing arm 33 are provided with a clamping groove 35, and the first transmission shaft 32 and / or the second transmission shaft 34 have a to-be-clamped portion 36 that cooperates with the clamping groove 35. The to-be-clamped portion 36 can be inserted into the clamping groove 35, so that through the cooperation between the clamping groove 35 and the to-be-clamped portion 36, the first swing arm 31 and the first transmission shaft 32 can be quickly positioned and assembled, and the second swing arm 33 and the second transmission shaft 34 can be quickly positioned and assembled. At the same time, the linkage assembly 3 also includes a connecting member 37, which is used to drive the clamping groove 35 to lock the to-be-clamped portion 36, thereby achieving locking between the clamping groove 35 and the to-be-clamped portion 36. Optionally, the clamping groove 35 and the to-be-clamped portion 36 are both polygonal structures or other shapes with positioning functions, thereby facilitating rapid positioning and installation between the clamping groove 35 and the to-be-clamped portion 36.

[0046] Among them, at least two linkage components 3 are set between two adjacent loading components 2, so that the loading components 2 can be limited by the two linkage components 3 cooperating with each other to achieve the synchronous rotation of several loading components 2. Of course, more than two linkage components 3 can also be set between two adjacent loading components 2, which is not specifically limited in this embodiment. Optionally, as Figure 9 As shown, the first swing arm 31 is set at an obtuse angle to the first transmission shaft 32, and / or the second swing arm 33 is set at an obtuse angle to the second transmission shaft 34, so that the first swing arms 31 and the first swing arms 31 are tilted and staggered, or the second swing arms 33 and the second swing arms 33 are tilted and staggered, or the first swing arm 31 and the second swing arm 33 are tilted and staggered, so that the distance between the linkage components 3 and the linkage components 3 can be reduced and interference between them can be avoided.

[0047] Furthermore, the loading assembly 2 includes a first loading plate 21 and a second loading plate 22. The first loading plate 21 is detachably connected to the second loading plate 22, and is used to approach each other to clamp the workpiece 6 to be processed, thereby achieving the installation and positioning of the workpiece 6 to be processed, improving the quality of vacuum processing, and facilitating the adjustment and replacement of the workpiece 6 to be processed. Figure 10 As shown, after the second loading plate 22 is installed with the first transmission shaft 32 with the first swing arm 31 and / or the second transmission shaft 34 with the second swing arm 33, a lower assembly plate can be formed, and the first loading plate 21 is installed with or without the second transmission shaft 34 corresponding to the lower assembly plate to form an upper assembly plate, so that when facing a number of parts to be processed 6, a number of lower assembly plates and a number of upper assembly plates can clamp a number of parts to be processed 6 one by one, and the adjacent upper assembly plates and lower assembly plates can be quickly connected to achieve rapid assembly, wherein the upper assembly plate and the lower assembly plate at the edge can adjust the structure according to actual installation requirements.

[0048] Furthermore, an angle seat 11 is provided on the side of the support frame 1 away from the transmission mechanism 4. The angle seat 11 has an inclined surface, and the loading assembly 2 is rotatably connected to the inclined surface. Therefore, by replacing the angle seats 11 with different inclined angles, the inclined angles of several loading assemblies 2 can be adjusted, thereby adjusting the vacuum processing process angle of the workpiece 6 to be processed.

[0049] Furthermore, a fixed end 12 is provided on the side of the support frame 1 away from the transmission mechanism 4, and the connecting line between the fixed end 12 and the driving end 5 is parallel to the first direction, so that the positions of the two ends of the loading device can be limited by the fixed end 12 and the driving end 5, and the installation of the loading device in the vacuum processing equipment is facilitated.

[0050] This embodiment also provides a vacuum processing equipment, including the loading device as described above. The vacuum processing equipment also includes a driving end head 5 and a vacuum processing chamber. The driving end head 5 and the loading device are both arranged in the vacuum processing chamber. The driving end head 5 is connected to the transmission assembly 41. By using the loading device as described above, the vacuum processing equipment can increase the loading capacity by adding a loading assembly 2 while ensuring the spacing between adjacent workpieces 6 to be processed. Therefore, under the conditions of a vacuum processing chamber with limited specifications and volume, the loading capacity of the vacuum processing equipment is improved, and the terminal's requirements for the loading capacity of a single device are met.

[0051] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A loading device connected to a driving end (5) for loading a workpiece (6) to be processed, characterized in that: The loading device comprises: Support frame (1); A loading assembly (2) and a linkage assembly (3), wherein a plurality of the loading assemblies (2) are provided, wherein the plurality of the loading assemblies (2) are parallel to each other and arranged at intervals along a first direction, and any two adjacent loading assemblies (2) are linked and connected via the linkage assembly (3); the loading assembly (2) is used for loading the workpiece (6) to be processed; A transmission mechanism (4), the transmission mechanism (4) includes a transmission assembly (41) and a universal joint group (42), the driving end head (5) is connected to the universal joint group (42) through the transmission assembly (41), and is used to drive the universal joint group (42) to rotate; one of the outermost ones of the plurality of loading assemblies (2) is connected to the output end of the universal joint group (42), and the other is rotatably connected to the support frame (1); the universal joint group (42) can drive the plurality of loading assemblies (2) to rotate along the same tilting direction; the transmission assembly (41) is used to adjust the spatial position of the universal joint group (42) relative to the loading assembly (2).

2. The loading device according to claim 1, characterized in that The transmission assembly (41) includes a housing (411) and a first transmission gear (412) and a second transmission gear (413) rotatably arranged in the housing (411), the first transmission gear (412) being meshedly connected to the second transmission gear (413), the driving end head (5) being connected to the rotating shaft of the first transmission gear (412), and the rotating shaft of the second transmission gear (413) being connected to the universal joint assembly (42).

3. The loading device according to claim 2, characterized in that: The first transmission gear (412) and the second transmission gear (413) are both elliptical gears.

4. The loading device according to claim 1, characterized in that The linkage assembly (3) comprises a first swing arm (31) and a first transmission shaft (32); the first swing arm (31) is located between two adjacent loading assemblies (2); the first transmission shaft (32) passes through the loading assemblies (2) and the workpiece (6) to be processed and is rotatably connected to the loading assemblies (2); and the end of the first transmission shaft (32) can be connected to the first swing arm (31); and / or The linkage assembly (3) comprises a second swing arm (33) and a second transmission shaft (34), wherein the second swing arm (33) is located between two adjacent loading assemblies (2), and the second transmission shaft (34) comprises at least two, wherein at least two second transmission shafts (34) are respectively connected to opposite ends of the second swing arm (33), and at least two second transmission shafts (34) are respectively rotatably connected to the two adjacent loading assemblies (2).

5. The loading device according to claim 4, characterized in that: The first swing arm (31) and / or the second swing arm (33) is provided with a clamping groove (35); the first transmission shaft (32) and / or the second transmission shaft (34) has a to-be-clamped portion (36) that matches the to-be-clamped portion (36) and is capable of being inserted into the to-be-clamped portion (35); the linkage assembly (3) further includes a connecting member (37) for driving the to-be-clamped portion (36) to lock the to-be-clamped portion (36) in the to-be-clamped portion (35).

6. The loading device according to claim 4, characterized in that At least two linkage assemblies (3) are arranged between two adjacent loading assemblies (2).

7. The loading device according to claim 5, characterized in that: The first swing arm (31) and the first transmission shaft (32) are arranged at an obtuse angle, and / or the second swing arm (33) and the second transmission shaft (34) are arranged at an obtuse angle.

8. The loading device according to claim 1, characterized in that The loading assembly (2) comprises a first loading plate (21) and a second loading plate (22), wherein the first loading plate (21) is detachably connected to the second loading plate (22) and is used to be close to each other to clamp the workpiece (6) to be processed.

9. The loading device according to claim 1, characterized in that: An angle seat (11) is provided on a side of the support frame (1) away from the transmission mechanism (4); the angle seat (11) has an inclined surface, and the loading assembly (2) is rotatably connected to the inclined surface.

10. The loading device according to any one of claims 1 to 9, characterized in that: A fixed end (12) is further provided on a side of the support frame (1) away from the transmission mechanism (4), and a line connecting the fixed end (12) and the driving end (5) is parallel to the first direction.

11. A vacuum processing device, characterized in that: The vacuum processing equipment comprises a loading device as described in any one of claims 1 to 10, and the vacuum processing equipment further comprises a driving end head (5) and a vacuum processing chamber, the driving end head (5) and the loading device are both arranged in the vacuum processing chamber, and the driving end head (5) is connected to the transmission assembly (41).

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