CVD (Chemical Vapor Deposition) coating high-temperature cavity muffle tank

Abstract

The utility model relates to the technical field of manufacturing of Marff tanks, and discloses a CVD (chemical vapor deposition) coating high-temperature cavity Marff tank which comprises a plurality of first splice plates, a plurality of first lock catches are arranged at two ends of the inner side of each first splice plate, two second lock catches are arranged in the middle of the inner side of each first splice plate, a second splice plate is arranged on the outer sides of the two second lock catches, and a plurality of second lock catches are arranged on the outer sides of the second splice plates. A plurality of threaded holes are formed in the outer portions of the first splice plates and the outer portions of the second splice plates, heat dissipation holes are formed in the outer portions of the two first splice plates and the outer portions of the two second splice plates, and coating assemblies used for improving the performance of the Marff tank are arranged on the surfaces of the first splice plates and the surfaces of the second splice plates. The two-section type design of the first splice plate and the second splice plate is adopted, the first lock catch and the second lock catch are modified into short and small styles, the thermal expansion scale is effectively reduced through combination of the first lock catch and the second lock catch, expansion joints are increased, and therefore the sealing effect is guaranteed, and potential safety hazards during equipment operation are effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of muffler pot manufacturing, in particular to a CVD coating high-temperature cavity muffler pot. Background Art

[0002] Semiconductor integrated circuit manufacturing processes are complex and numerous, with photolithography, etching, and thin-film deposition being the three core steps in semiconductor manufacturing. Silicon carbide coating is a crucial technology in chip manufacturing that requires the use of raw materials and has a complex operational process. Therefore, the quality of the coating equipment and the system's auxiliary parameters directly determine the performance of the final device. During the wafer coating process, wafers operate at 1200°C in a vacuum furnace. The muffler directly affects the vacuum state within the cavity, resulting in product failure. MTS gas flows through the cracked opening into the heating electrode, corroding it. To reduce the frequency of muffler replacement and cracking, the muffler structure is improved to withstand compression within the thermal expansion coefficient and reduce the risk of failure.

[0003] In the existing technology, some muffler tanks are designed by simply assembling a whole piece into a muffler tank. During the production process, after being cooled at high temperature, the parts of the muffler tank are frequently subjected to thermal expansion and contraction, and the parts will be directly deformed and broken, making it impossible to seal the cavity, and the vacuum cannot reach -2*10 cubed, and the process conditions cannot be met. Therefore, a CVD-coated high-temperature cavity muffler tank is proposed to solve the above problems. Utility Model Content

[0004] In order to make up for the above shortcomings, the utility model provides a CVD coated high-temperature cavity muffle tank, which aims to improve the problem in the existing technology that the muffle tank is frequently subjected to thermal expansion and contraction, and the parts assembled into the muffle tank will directly deform and break, thus making it impossible to seal the cavity.

[0005] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0006] A CVD-coated high-temperature cavity muffle tank, comprising a plurality of splicing plates (I), wherein a plurality of lock buckles (I) are provided at both ends of the inner side of the splicing plates (I), two lock buckles (II) are provided at the middle portion of the inner side of the splicing plates (I), and a splicing plate (II) is provided on the outer sides of the two lock buckles (II). The exteriors of the splicing plates (I) and (II) are both provided with a plurality of threaded holes, wherein the exteriors of two of the splicing plates (I) and two of the splicing plates (II) are both provided with heat dissipation holes, and the surfaces of the splicing plates (I) and (II) are both provided with a coating component for improving the performance of the muffle tank;

[0007] As a further description of the above technical solution:

[0008] The coating assembly includes a spray coating, and the spray coating is sprayed on the surfaces of the first splicing plate and the second splicing plate;

[0009] As a further description of the above technical solution:

[0010] The lock buckle 1 is fixedly connected to the outside of the splicing plate 1 by screws, and the lock buckle 1 is fixedly connected to the outside of the splicing plate 2 by screws;

[0011] As a further description of the above technical solution:

[0012] The second lock buckle is fixedly connected to the adjacent sides of the first splicing plate and the second splicing plate by screws, and the adjacent sides of the first splicing plate and the second lock buckle are both cut out;

[0013] As a further description of the above technical solution:

[0014] The heat dissipation holes are used to provide heat dissipation for the muffle tank, and the material of the spray coating is silicon carbide.

[0015] The utility model has the following beneficial effects:

[0016] In the utility model, a two-section design of splicing plate 1 and splicing plate 2 is adopted to replace the whole design in the prior art, and lock buckle 1 and lock buckle 2 are modified into a short style. The combination of the two effectively reduces the thermal expansion scale and increases the expansion joint, thereby ensuring the sealing effect, so that the muffler tank can achieve a balanced stability under high temperature conditions, effectively reducing the safety hazards during equipment operation, while ensuring product quality and improving the service life of the muffler tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a three-dimensional schematic diagram of a CVD-coated high-temperature cavity muffle tank proposed in the present invention;

[0018] Figure 2 This is a structural explosion diagram of a splicing plate 1 of a CVD-coated high-temperature cavity muffle tank proposed in the present invention;

[0019] Figure 3 for Figure 2 A magnified view of point A in the figure;

[0020] Figure 4 This is a structural schematic diagram of a lock buckle 1 of a CVD-coated high-temperature cavity muffle tank proposed in the present invention.

[0021] Legend:

[0022] 1. Splicing plate 1; 2. Lock buckle 1; 3. Lock buckle 2; 4. Splicing plate 2; 5. Threaded hole; 6. Heat dissipation hole; 7. Spray coating. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] Reference Figures 1 to 3 The utility model provides an embodiment of a CVD coating high-temperature cavity muffle tank, comprising a plurality of splicing plates 1, wherein the inner ends of the splicing plate 1 are provided with a plurality of lock buckles 2, wherein the lock buckles 2 here adopt a short design, and the lock buckles 2 are fixedly connected to the outside of the splicing plate 1 by screws, and two lock buckles 2 3 are provided at the middle part of the inner side of the splicing plate 1, and the lock buckles 2 3 here also adopt a short design, and together with the lock buckles 2, the problem of cracking and deformation of the lock buckle plate body is solved, and the splicing plate 1 and the lock buckle 2 3 are both cut out on the side close to the splicing plate 1 and the lock buckle 2 3, and the cutout design here is matched, and at the same time, there is an expansion joint in the middle, which fully adapts to the change coefficient of the muffle tank during expansion, and a splicing plate 2 4 is provided on the outside of the two lock buckles 2 3, and the lock buckle 2 is fixedly connected to the outside of the splicing plate 2 4 by screws, and the lock buckle 2 3 is fixedly connected to the side close to the splicing plate 1 and the splicing plate 2 4 by screws;

[0025] Reference Figures 2 to 4 , multiple threaded holes 5 are provided on the outside of the splicing plate 1 and the splicing plate 2 4. Screws can be used to pass through the threaded holes 5, the lock buckle 1 2 and the lock buckle 2 3 to connect multiple splicing plates 1 and splicing plates 2 4 together. Two of the splicing plates 1 and two of the splicing plates 2 4 are provided with heat dissipation holes 6 on their outsides. The function of the heat dissipation holes 6 is to provide heat dissipation for the muffle tank. During the wafer coating manufacturing process, the wafer is operated at a high temperature of 1200°C in a vacuum furnace. The heat dissipation holes 6 here can be used to dissipate heat while reducing the cavity. The surface of the splicing plate 1 and the splicing plate 2 4 are provided with a coating component for improving the performance of the muffle tank, and the coating component includes a spray layer 7, which is sprayed on the surface of the splicing plate 1 and the splicing plate 2 4. The material of the spray layer 7 is silicon carbide. The spray layer 7 (silicon carbide) here has excellent corrosion resistance, high thermal conductivity, and an expansion coefficient matching that of graphite, which makes the bonding between the spray layer 7 and the base tighter, reducing the risk of cracking or peeling of the spray layer 7 due to thermal expansion differences.

[0026] Working principle: First, the splicing plate 1 and the splicing plate 2 4 are fixed together through the lock buckle 1 2 and the lock buckle 2 3 and screws to form a complete muffle tank structure. Then, the wafer is placed inside the muffle tank and the vacuum furnace is started for high-temperature treatment. During the operation at a high temperature of 1200°C, the required coating will gradually form on the surface of the wafer. At the same time, the heat dissipation holes 6 on the surface of the muffle tank will dissipate heat, reduce the pressure in the cavity, and ensure the stability and uniformity of the coating manufacturing process. In addition, the spray coating 7 (silicon carbide) on the surface of the muffle tank has excellent corrosion resistance, high thermal conductivity and an expansion coefficient that matches graphite, which makes the bonding between the spray coating 7 and the base tighter, reduces the risk of cracking or peeling due to thermal expansion differences, and increases the service life of the muffle tank.

[0027] In the entire workflow, a two-section design of splicing plate 1 and splicing plate 2 4 is adopted, replacing the whole design in the existing technology, and lock buckle 1 2 and lock buckle 2 3 are modified into a short style. The combination of the two effectively reduces the thermal expansion scale and increases the expansion joint, thereby ensuring the sealing effect, so that the muffle tank can achieve a balanced stability under high temperature conditions, effectively reducing the safety hazards during equipment operation, and at the same time ensuring product quality and improving the service life of the muffle tank, providing reliable support for wafer coating manufacturing.

[0028] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A CVD coated high temperature cavity muffle tank, comprising a plurality of splicing plates (1), characterized in that: A plurality of lock buckles (2) are provided at both ends of the inner side of the splicing plate (1), two lock buckles (3) are provided at the middle part of the inner side of the splicing plate (1), and a splicing plate (4) is provided on the outer sides of the two lock buckles (3). The outer sides of the splicing plate (1) and the splicing plate (4) are provided with a plurality of threaded holes (5), wherein the outer sides of the two splicing plates (1) and the two splicing plates (4) are provided with heat dissipation holes (6), and the surfaces of the splicing plate (1) and the splicing plate (4) are provided with a coating component for improving the performance of the muffle tank.

2. The CVD-coated high-temperature cavity muffle tank according to claim 1, characterized in that: The coating assembly comprises a spray coating (7), and the spray coating (7) is sprayed on the surfaces of the first splicing plate (1) and the second splicing plate (4).

3. The CVD-coated high-temperature cavity muffle tank according to claim 1, characterized in that: The lock buckle 1 (2) is fixedly connected to the outside of the splicing plate 1 (1) by screws, and the lock buckle 1 (2) is fixedly connected to the outside of the splicing plate 2 (4) by screws.

4. The CVD-coated high-temperature cavity muffle tank according to claim 1, characterized in that: The lock buckle 2 (3) is fixedly connected to the adjacent side of the splicing plate 1 (1) and the splicing plate 2 (4) by screws, and the adjacent sides of the splicing plate 1 (1) and the lock buckle 2 (3) are both cut out.

5. The CVD-coated high-temperature cavity muffle tank according to claim 2, characterized in that: The heat dissipation holes (6) are used to provide heat dissipation for the muffle tank, and the material of the spray coating (7) is silicon carbide.

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