Suction rod assembly and silicon wafer suction device

Abstract

The utility model provides a suction rod assembly and a silicon wafer suction device. The suction rod assembly comprises a suction rod and a suction cup which are connected with each other, the suction rod assembly further comprises a first sleeve and a second sleeve, the first sleeve is arranged on the outer side of the top of the suction rod in a sleeving mode, the second sleeve is arranged on the outer side of the top of the first sleeve in a sleeving mode, and the top of the suction rod comprises a positioning protruding block. The top of the first sleeve comprises a positioning groove which is matched with the positioning protruding block and limits the movement of the positioning protruding block. According to the utility model, suction nozzle marks can be prevented from appearing in the silicon wafer suction process, and the problem of difficult debugging can be effectively solved.

Description

Technical Field

[0001] The utility model relates to the field of photovoltaic manufacturing, in particular to a suction rod assembly and a silicon wafer suction device. Background Art

[0002] Photovoltaic production equipment (such as PECVD and PVD) typically uses a suction rod to transfer silicon wafers. The suction rod assembly used in existing photovoltaic production equipment typically consists of a suction cup, a suction rod, a sleeve, and a spring. The sleeve and spring are sequentially sleeved around the outside of the suction rod. The suction cup is connected to the bottom of the suction rod and pushes the spring against the sleeve. Threaded holes are required on the mounting plate to secure the suction rod to the mounting plate via nuts. This existing installation method has the following problems:

[0003] First, the verticality of the threaded holes on the mounting plate is difficult to ensure, which may cause the suction rod to tilt after installation, resulting in uneven contact between the suction cup and the silicon wafer, and ultimately causing nozzle marks;

[0004] Second, when using a suction rod to suck up a large number of silicon wafers, the nozzle height needs to be manually adjusted, which is complicated to operate and easily leads to position deviation when tightening the nut;

[0005] Third, since the suction rod can rotate freely, when multiple suction rods suck and transport silicon wafers, the rotation may cause suction nozzle marks to appear on the surface of the silicon wafer.

[0006] Therefore, how to provide a suction rod assembly and a silicon wafer suction device to prevent nozzle marks from appearing during the silicon wafer suction process and effectively solve the problem of debugging difficulties has become a technical problem that needs to be solved urgently in the industry. Summary of the Invention

[0007] In response to the above-mentioned problems in the prior art, the utility model proposes a suction rod assembly, comprising a suction rod and a suction cup connected to each other, the suction rod assembly also comprising a first sleeve and a second sleeve, the first sleeve being sleeved on the outside of the top of the suction rod, the second sleeve being sleeved on the outside of the top of the first sleeve, the top of the suction rod comprising a positioning protrusion, the top of the first sleeve comprising a positioning groove that matches the positioning protrusion and limits its movement.

[0008] In one embodiment, the positioning groove is surrounded by two flat-bottomed arc columns arranged opposite to each other, and the positioning protrusion is a suction rod head, whose two sides are adjacent to the flat bottoms of the two flat-bottomed arc columns respectively, and the bottom edge of the positioning protrusion is pressed against the top wall of the first sleeve between the two flat-bottomed arc columns.

[0009] In one embodiment, the top of the suction rod includes a suction rod head with a diameter larger than the inner diameter of the first sleeve, the positioning protrusion is arranged on the side wall of the suction rod head, and the positioning groove is opened on the side wall of the top of the first sleeve.

[0010] In one embodiment, a first external thread is provided on the outer side wall of the first sleeve near the top, and a matching first internal thread is provided on the inner side wall of the upper part of the second sleeve. The first sleeve is fixed in the second sleeve by combining the first internal thread and the first external thread, and the bottom of the first sleeve is a hexagonal stud for easy rotation.

[0011] In one embodiment, the first sleeve and the suction rod are clearance-fitted, and the first sleeve and the second sleeve are clearance-fitted except for the combined first internal thread and first external thread.

[0012] In one embodiment, a second external thread is provided on the outer wall of the bottom of the suction rod, and a matching second internal thread is provided on the inner wall of the suction cup. The suction rod assembly also includes an elastic member sleeved on the outer side of the bottom of the suction rod. The elastic member is arranged between the bottom end of the first sleeve and the top end of the suction cup and is compressed by the two to generate elastic force.

[0013] In one embodiment, a hole with a third internal thread is formed through the wall of the second sleeve, and a fixing member with a third external thread matching the third internal thread extends out to push the first sleeve through the combination of the third external thread and the third internal thread.

[0014] In one embodiment, the middle part of the suction rod has an air passage running through it, and a fourth internal thread is provided on the air passage wall at the top of the suction rod. A negative pressure gas rod with a fourth external thread matching the fourth internal thread provides negative pressure to the suction rod through the combination of the fourth internal thread and the fourth external thread.

[0015] The utility model also discloses a silicon wafer suction device, comprising a bracket, a plurality of negative pressure gas rods arranged on the bracket, and a plurality of suction rod assemblies connected to the plurality of negative pressure gas rods, wherein the plurality of suction rod assemblies are all the suction rod assemblies described in any one of the above items.

[0016] In one embodiment, the multiple negative pressure gas rods are fixed on the bracket corresponding to the positions of the silicon wafers carried by the carrier plate, and the multiple suction rod assemblies are connected to the multiple negative pressure gas rods in a vertical direction with the suction cup openings facing downward.

[0017] Compared to prior art suction rod assemblies that lack rotational limits and are prone to producing nozzle marks when installed at an angle, the suction rod assembly of the present invention includes an interconnected suction rod and a suction cup. The suction rod assembly also includes a first sleeve and a second sleeve. The first sleeve is mounted on the top outside of the suction rod, and the second sleeve is mounted on the top outside of the first sleeve. The top of the suction rod includes a positioning bump, and the top of the first sleeve includes a positioning groove that mates with the positioning bump and restricts its movement. The present invention prevents nozzle marks during wafer suction and effectively resolves debugging difficulties. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above features and advantages of the present invention can be better understood after reading the detailed description of the embodiments of the present disclosure in conjunction with the following drawings. In the drawings, the components are not necessarily drawn to scale, and components with similar related properties or characteristics may have the same or similar reference numerals.

[0019] Figure 1 This is a front view schematic diagram of the composition structure of an embodiment of the suction rod assembly of the present utility model;

[0020] Figure 2 for Figure 1 A schematic cross-sectional view of an embodiment of the suction rod assembly; and

[0021] Figure 3 for Figure 1 Schematic diagram of the exploded structure of the suction rod assembly embodiment. DETAILED DESCRIPTION

[0022] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and functions of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this implementation. On the contrary, the purpose of introducing the invention in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present invention. In order to provide an in-depth understanding of the present invention, the following description will contain many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description.

[0023] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0024] Furthermore, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," and "vertical" used in the following description should be understood to refer to the orientations depicted in that section and the accompanying drawings. These relative terms are used solely for convenience of description and do not necessarily imply that the devices described herein must be manufactured or operated in a specific orientation. Therefore, they should not be construed as limiting the present invention.

[0025] It is understood that although the terms "first," "second," "third," etc. may be used herein to describe various components, regions, layers, and / or portions, these components, regions, layers, and / or portions should not be limited by these terms, and these terms are merely used to distinguish different components, regions, layers, and / or portions. Thus, a first component, region, layer, and / or portion discussed below may be referred to as a second component, region, layer, and / or portion without departing from some embodiments of the present invention.

[0026] See Figures 1 to 3 , Figure 1 This is a front view structural diagram of the suction rod assembly 1 embodiment of the present invention. Figure 2 and Figure 3 They are Figure 1 The cross-sectional structure and exploded structure diagram of the embodiment of the suction rod assembly 1 are shown in FIG. Figures 1 to 3 As shown, the suction rod assembly 1 of the present invention includes a suction rod 10 , a first sleeve 11 , a second sleeve 12 , a suction cup 13 and an elastic member 14 .

[0027] The suction rod 10 and the suction cup 13 are connected to each other, the first sleeve 11 is sleeved on the outside of the top of the suction rod 10, the second sleeve 12 is sleeved on the outside of the top of the first sleeve 11, the top of the suction rod 10 includes a positioning protrusion 100, and the top of the first sleeve 11 includes a positioning groove 112 that matches the positioning protrusion 100 and limits its movement. The elastic member 14 is sleeved on the outside of the bottom of the suction rod 10 and its two ends are compressed by the suction cup 13 and the bottom of the first sleeve 11.

[0028] A first external thread 110 is provided on the outer side wall near the top of the first sleeve 11, and a matching first internal thread 120 is provided on the inner side wall of the upper part of the second sleeve 12. The first sleeve 11 is fixed in the second sleeve 12 by combining the first internal thread 120 and the first external thread 110. The height of the first external thread 110 on the first sleeve 11 is greater than the height of the first internal thread 120 on the second sleeve 12. The bottom of the first sleeve 11 is a hexagonal stud 116 for easy rotation.

[0029] The suction rod 10 has an air passage 106 extending through its center. A second external thread 102 is defined on the bottom outer wall of the suction rod 10, and a matching second internal thread 130 is defined on the inner wall of the suction cup 13. An elastic member 14 is sleeved over the bottom outer wall of the suction rod 10. The elastic member 14 is positioned between the bottom end of the first sleeve 11 and the top end of the suction cup 13, and compression between the two generates an elastic force. The elastic member 14 can be a spring or a leaf spring.

[0030] As shown in the figure, in this embodiment, the positioning groove 112 is surrounded by two flat-bottomed arc columns 114 arranged opposite to each other, and the positioning protrusion 100 is a suction rod head, and its two sides are adjacent to the flat bottoms of the two flat-bottomed arc columns 114 respectively, and the bottom edge 1000 of the positioning protrusion 100 is pressed against the top wall 116 of the first sleeve 11 between the two flat-bottomed arc columns 114.

[0031] In other embodiments, the top of the suction rod 10 includes a suction rod head having a diameter greater than the inner diameter of the first sleeve 11, a positioning protrusion is arranged on the side wall of the suction rod head, and a positioning groove is opened on the side wall of the top of the first sleeve. The positioning protrusion is similar to a key used for mechanical transmission, and the positioning groove is similar to a corresponding keyway.

[0032] Continue to see Figure 3 A threaded hole with a third internal thread 122 is formed through the wall of the second sleeve 12. The fixing member 15 has a third external thread 150 that matches the third internal thread 122. The fixing member 15 extends out through the third external thread 150 and the third internal thread 122 to push the first sleeve 11. A mounting threaded hole 124 is also provided at the top of the second sleeve 12, which can be used to conveniently secure the suction rod assembly 1 to a bracket such as a silicon wafer suction device by screwing in a screw or bolt.

[0033] The first sleeve 11 is clearance-fitted with the suction rod 10 . The first sleeve 11 and the second sleeve 12 are clearance-fitted except for the first internal thread 114 and the first external thread 110 . The clearance fit may be specifically H7 / g6 clearance fit or the like.

[0034] A fourth internal thread 104 is provided on the wall of the air passage 106 at the top of the suction rod 10 , and a negative pressure gas rod (not shown) with a fourth external thread matching the fourth internal thread 104 provides negative pressure to the suction rod through the combination of the fourth internal thread 104 and the fourth external thread.

[0035] When using the suction rod assembly 1 of the present invention, first provide its various separate components, namely the suction rod 10, the first sleeve 11, the second sleeve 12, the suction cup 13, the elastic member 14 and the fixing member 15, and then pass the bottom of the suction rod 10 with the second external thread 102 through the top of the first sleeve 11 and make the bottom edge 1000 of the positioning protrusion 100 press against the top wall 116 of the first sleeve 11, and the two sides of the positioning protrusion 100 are adjacent to the flat bottoms of the two flat-bottomed arc columns 114 forming the positioning groove 112, that is, the positioning protrusion 100 is set in the positioning groove 112 and is restricted by it. Then, the elastic member 14 is put on the outside of the bottom of the suction rod 10 with the second external thread 102, and then the second internal thread 130 is connected with the second external thread 102. The suction rod 10 is connected to the suction cup 13 and the elastic part 14 is pressed between the hexagonal stud 116 and the top of the suction cup 13. Then, the first sleeve 11 with the suction rod 10 is inserted from the bottom of the second sleeve 12, and the first sleeve 11 is fixed in the second sleeve 12 by the combination of the first internal thread 120 and the first external thread 110, and the fixing height can be adjusted. Then, the fixing part 15 is inserted into the threaded hole of the second sleeve 12 and the first sleeve 11 is pushed and fixed by the combination of the third external thread 150 and the third internal thread 122. Finally, a plurality of negative pressure gas rods arranged in an array on the bracket are provided, and the fourth external thread of the negative pressure gas rod is combined with the fourth internal thread 104 on the wall of the airway 106 at the top of the suction rod 10 to provide negative pressure to the suction rod 10.

[0036] The utility model also provides a silicon wafer suction device, which includes a bracket, a plurality of negative pressure gas rods arranged on the bracket, and a plurality of suction rod assemblies connected to the plurality of negative pressure gas rods, wherein the plurality of suction rod assemblies are as follows: Figures 1 to 3 The suction rod assembly 1 shown and described above.

[0037] The multiple negative pressure gas rods are fixed on the bracket corresponding to the positions of the silicon wafers carried by the carrier plate, and the multiple suction rod assemblies are connected to the multiple negative pressure gas rods in a vertical direction with the suction cup openings facing downward.

[0038] In summary, the suction rod assembly of the present invention includes an interconnected suction rod and a suction cup, and further includes a first sleeve and a second sleeve. The first sleeve is mounted on the top outside of the suction rod, and the second sleeve is mounted on the top outside of the first sleeve. The top of the suction rod includes a positioning bump, and the top of the first sleeve includes a positioning groove that matches the positioning bump and restricts its movement. The present invention can prevent nozzle marks during the silicon wafer suction process and effectively solve the problem of debugging difficulties.

[0039] The previous description of the disclosure is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be apparent to those skilled in the art, and the universal principles defined herein may be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein, but should be granted the widest scope consistent with the principles and novel features disclosed herein. The above embodiments are provided for persons familiar with the art to implement or use the utility model, and persons familiar with the art may make various modifications or changes to the above embodiments without departing from the inventive concept of the utility model, and therefore the scope of protection of the utility model is not limited by the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. A suction rod assembly, comprising a suction rod and a suction cup connected to each other, characterized in that: The suction rod assembly also includes a first sleeve and a second sleeve. The first sleeve is sleeved on the outside of the top of the suction rod, and the second sleeve is sleeved on the outside of the top of the first sleeve. The top of the suction rod includes a positioning protrusion, and the top of the first sleeve includes a positioning groove that matches the positioning protrusion and limits its movement.

2. The suction rod assembly according to claim 1, characterized in that The positioning groove is surrounded by two flat-bottomed arc columns arranged opposite to each other. The positioning protrusion is a suction rod head, and its two sides are adjacent to the flat bottoms of the two flat-bottomed arc columns respectively. The bottom edge of the positioning protrusion is pressed against the top wall of the first sleeve between the two flat-bottomed arc columns.

3. The suction rod assembly according to claim 1, characterized in that The top of the suction rod comprises a suction rod head with a diameter greater than the inner diameter of the first sleeve. The positioning protrusion is arranged on the side wall of the suction rod head. The positioning groove is opened on the side wall of the top of the first sleeve.

4. The suction rod assembly according to claim 1, characterized in that A first external thread is provided on the outer side wall of the first sleeve near the top, and a matching first internal thread is provided on the inner side wall of the upper part of the second sleeve. The first sleeve is fixed in the second sleeve by combining the first internal thread and the first external thread. The bottom of the first sleeve is a hexagonal stud for easy rotation.

5. The suction rod assembly according to claim 4, characterized in that The first sleeve is clearance-fitted with the suction rod, and the first sleeve and the second sleeve are clearance-fitted except for the combined first internal thread and first external thread.

6. The suction rod assembly according to claim 1, characterized in that A second external thread is provided on the outer wall of the bottom of the suction rod, and a matching second internal thread is provided on the inner wall of the suction cup. The suction rod assembly also includes an elastic member sleeved on the outer side of the bottom of the suction rod. The elastic member is arranged between the bottom end of the first sleeve and the top end of the suction cup and generates elastic force by compression of the two.

7. The suction rod assembly according to claim 1, characterized in that A hole with a third internal thread is formed through the wall of the second sleeve, and a fixing member with a third external thread matching the third internal thread extends out to push the first sleeve through the combination of the third external thread and the third internal thread.

8. The suction rod assembly according to claim 1, characterized in that The middle part of the suction rod has an air passage running through it, and the air passage wall at the top of the suction rod is provided with a fourth internal thread. A negative pressure gas rod with a fourth external thread matching the fourth internal thread provides negative pressure to the suction rod through the combination of the fourth internal thread and the fourth external thread.

9. A silicon wafer suction device, comprising a bracket, a plurality of negative pressure gas rods arranged on the bracket, and a plurality of suction rod assemblies connected to the plurality of negative pressure gas rods, characterized in that: The plurality of suction rod assemblies are all the suction rod assemblies according to any one of claims 1 to 8.

10. The silicon wafer suction device according to claim 9, characterized in that: The multiple negative pressure gas rods are fixed on the bracket corresponding to the positions of the silicon wafers carried by the carrier plate, and the multiple suction rod assemblies are connected to the multiple negative pressure gas rods in a vertical direction with the suction cup openings facing downward.

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