Ceramic electrostatic chuck

Abstract

The utility model discloses a ceramic electrostatic chuck, which relates to the technical field of semiconductor processing and comprises a chuck body, a dielectric adsorption layer is arranged on the lower end face of the chuck body, an electrode layer is arranged between the upper end face of the dielectric adsorption layer and the chuck body, and a containing groove and a limiting groove are formed in the inner wall of the chuck body. The ceramic electrostatic chuck comprises a chuck body, a frame is fixedly connected to the inner wall of the chuck body, a plurality of reinforcing frames are fixedly connected to the outer side wall of the frame, and the outer side walls of the reinforcing frames are matched with the inner wall of the chuck body. The method is suitable for occasions with high requirements on workpiece surfaces, such as precision machining and semiconductor manufacturing.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a ceramic electrostatic chuck. Background Art

[0002] Electrostatic chucks are used in semiconductor manufacturing. As a technology that uses electrostatic force to adsorb objects, electrostatic chucks avoid physical damage because they do not directly contact the surface of the workpiece, while providing stable fixing force.

[0003] Traditional electrostatic chucks typically rely on metal electrodes to generate an electrostatic field, which not only limits their application in specific environments, but also the durability and corrosion resistance of the metal electrodes affect the lifespan and reliability of the chuck. Secondly, in order to improve the adsorption force, a higher voltage is often required, which increases energy consumption and may pose a safety hazard. Utility Model Content

[0004] In view of the deficiencies in the prior art, the present invention provides a ceramic electrostatic chuck to solve the above-mentioned problems.

[0005] The utility model also provides the above-mentioned ceramic electrostatic chuck, comprising: a chuck body, wherein the lower end surface of the chuck body is provided with a dielectric adsorption layer, and an electrode layer is provided between the upper end surface of the dielectric adsorption layer and the chuck body;

[0006] The inner wall of the suction cup body is provided with a receiving groove, the inner wall of the suction cup body is fixedly connected to a frame, the outer side wall of the frame is fixedly connected to a plurality of reinforcing frames, and the outer side walls of the plurality of reinforcing frames are adapted to the inner wall of the suction cup body.

[0007] According to the ceramic electrostatic chuck, the lower end surface of the dielectric adsorption layer is a smooth surface, and the upper end surface of the dielectric adsorption layer is adapted to the inner wall of the accommodating groove.

[0008] According to the ceramic electrostatic chuck, the electrode layer is composed of a positive electrode layer and a negative electrode layer, and the positive electrode layer and the negative electrode layer generate a positive voltage or a negative voltage respectively.

[0009] According to the ceramic electrostatic chuck, the positive electrode layer and the negative electrode layer are arranged in a staggered manner, and the positive electrode layer and the negative electrode layer are formed by bonding.

[0010] According to the ceramic electrostatic chuck, the chuck body and the dielectric adsorption layer are both made of ceramic material.

[0011] According to the ceramic electrostatic chuck, a plurality of symmetrically arranged air holes are provided on the lower end surface of the dielectric adsorption layer, and the air holes are connected to the inner wall of the chuck body.

[0012] According to the ceramic electrostatic chuck, a power supply assembly is provided on one side of the chuck body, and the positive and negative electrodes of the power supply assembly are connected to the positive electrode layer and the negative electrode layer respectively.

[0013] According to the ceramic electrostatic chuck, the plurality of reinforcing frames are arranged crosswise with the frame.

[0014] The utility model has the following beneficial effects:

[0015] In the present invention, the workpiece is adsorbed by the electrostatic field generated by the dielectric adsorption layer 2, thereby avoiding physical damage or contamination to the workpiece caused by the traditional mechanical clamping method; the staggered distribution of the positive and negative electrode layers helps to form a uniform electrostatic field on the surface of the dielectric adsorption layer, thereby improving the stability and uniformity of adsorption.

[0016] In the utility model, the structural strength and durability of the suction cup body can be improved by providing the frame and the reinforcement frame.

[0017] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0019] Figure 1 This is a three-dimensional diagram of the bottom of the chuck body of the ceramic electrostatic chuck of the present invention;

[0020] Figure 2 This is a diagram showing the internal structure of the chuck body of the ceramic electrostatic chuck of the present invention;

[0021] Figure 3 This is a top-down structural diagram of the electrode layer of the ceramic electrostatic chuck of the present invention;

[0022] Figure 4 This is a schematic structural diagram of the ceramic electrostatic chuck of the present invention.

[0023] Legend:

[0024] 1. Suction cup body; 101. Receiving groove; 102. Frame; 103. Reinforcement frame; 2. Dielectric adsorption layer; 201. Air vent; 3. Electrode layer; 301. Positive electrode layer; 302. Negative electrode layer; 4. Power supply assembly. DETAILED DESCRIPTION

[0025] This section will describe in detail the specific embodiments of the present invention. The preferred embodiments of the present invention are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and overall technical solution of the present invention, but it cannot be understood as a limitation on the scope of protection of the present invention.

[0026] Reference Figure 1-4 The ceramic electrostatic chuck of the present invention comprises: a chuck body 1, a dielectric adsorption layer 2 is provided on the lower end surface of the chuck body 1, and an electrode layer 3 is provided between the upper end surface of the dielectric adsorption layer 2 and the chuck body 1;

[0027] The inner wall of the suction cup body 1 is provided with a receiving groove 101 , the inner wall of the suction cup body 1 is fixedly connected to a frame 102 , the outer side wall of the frame 102 is fixedly connected to multiple reinforcement frames 103 , and the outer side walls of the multiple reinforcement frames 103 are adapted to the inner wall of the suction cup body 1 .

[0028] The lower end surface of the dielectric adsorption layer 2 is a smooth surface, and the upper end surface of the dielectric adsorption layer 2 is adapted to the inner wall of the receiving groove 101 .

[0029] The electrode layer 3 is composed of a positive electrode layer 301 and a negative electrode layer 302 , and the positive electrode layer 301 and the negative electrode layer 302 generate a positive voltage or a negative voltage, respectively.

[0030] The positive electrode layer 301 and the negative electrode layer 302 are arranged in an alternating manner and bonded together to form a uniform electrostatic field on the surface of the dielectric adsorption layer 2 .

[0031] The sucker body 1 and the dielectric adsorption layer 2 are both made of ceramic material. Ceramics have good insulation properties and also make the dishwashing body 1 have a certain corrosion resistance.

[0032] The lower end surface of the dielectric adsorption layer 2 is provided with a plurality of symmetrically arranged air holes 201, which are connected to the inner wall of the suction cup body 1. The air holes 201 help balance the internal and external air pressures and prevent unstable adsorption caused by excessive negative pressure.

[0033] A power supply assembly 4 is provided on one side of the suction cup body 1, and the positive and negative electrodes of the power supply assembly 4 are respectively connected to the positive electrode layer 301 and the negative electrode layer 302. The power supply assembly 4 provides power to the positive electrode layer 301 and the negative electrode layer 302.

[0034] The plurality of reinforcing frames 103 are arranged crosswise with the frame 102. The reinforcing frames 103 and the frame 102 improve the structural stability of the suction cup body 1.

[0035] Working principle: When in use, start the power supply component 4 to provide electrical energy to the positive electrode layer 301 and the negative electrode layer 302. When the positive electrode layer 301 and the negative electrode layer 302 are energized, the positive electrode layer 301 and the negative electrode layer 302 respectively generate positive voltage and negative voltage to form a stable electric field. At the same time, the dielectric adsorption layer 2 will form an electrostatic field on its surface. When the workpiece to be adsorbed contacts the dielectric adsorption layer 2, due to the effect of the electrostatic field, the workpiece will be firmly adsorbed on the suction cup body. This adsorption method is non-contact, which avoids physical damage to the surface of the workpiece.

[0036] The embodiments of the present invention are described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. Ceramic electrostatic chuck, including: A suction cup body (1), characterized in that a dielectric adsorption layer (2) is provided on the lower end surface of the suction cup body (1), and an electrode layer (3) is provided between the upper end surface of the dielectric adsorption layer (2) and the suction cup body (1); The inner wall of the suction cup body (1) is provided with a receiving groove (101), the inner wall of the suction cup body (1) is fixedly connected to a frame (102), the outer side wall of the frame (102) is fixedly connected to a plurality of reinforcing frames (103), and the outer side walls of the plurality of reinforcing frames (103) are adapted to the inner wall of the suction cup body (1).

2. The ceramic electrostatic chuck according to claim 1, wherein: The lower end surface of the dielectric adsorption layer (2) is a smooth surface, and the upper end surface of the dielectric adsorption layer (2) is adapted to the inner wall of the accommodating groove (101).

3. The ceramic electrostatic chuck according to claim 1, wherein: The electrode layer (3) consists of a positive electrode layer (301) and a negative electrode layer (302), and the positive electrode layer (301) and the negative electrode layer (302) respectively generate a positive voltage or a negative voltage.

4. The ceramic electrostatic chuck according to claim 3, wherein: The positive electrode layer (301) and the negative electrode layer (302) are arranged in an alternating manner, and the positive electrode layer (301) and the negative electrode layer (302) are formed by bonding.

5. The ceramic electrostatic chuck according to claim 1, wherein: The suction cup body (1) and the dielectric adsorption layer (2) are both made of ceramic material.

6. The ceramic electrostatic chuck according to claim 1, wherein: The lower end surface of the dielectric adsorption layer (2) is provided with a plurality of symmetrically arranged air holes (201), and the air holes (201) are connected to the inner wall of the suction cup body (1).

7. The ceramic electrostatic chuck according to claim 1, wherein: A power supply component (4) is provided on one side of the suction cup body (1), and the positive and negative electrodes of the power supply component (4) are connected to the positive electrode layer (301) and the negative electrode layer (302) respectively.

8. The ceramic electrostatic chuck according to claim 1, wherein: The plurality of reinforcing frames (103) are arranged crosswise with the frame (102).

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