Heating and baking equipment for exhaust of vacuum system

Abstract

The utility model provides heating and baking equipment for exhaust of a vacuum system, which belongs to the technical field of vacuum auxiliary equipment and comprises a bearing mechanism and a hydraulic telescopic rod. The angle can be flexibly adjusted through the combination mode of the first baking plate and the second baking plate, the relative position and the combination mode of the two baking plates can be adjusted according to the shape and size requirements of different vacuum systems, and for some vacuum system parts with irregular shapes, the angle can be adjusted. The surface of a component can be better attached by adjusting the clamping state of the first baking plate and the second baking plate, so that the more uniform heating effect is achieved, the temperature uniformity of the whole baked surface is improved through cooperative work, the temperature gradient is reduced, and the baking efficiency is improved. The heating uniformity is improved, the baking angle is accurately adjusted to adapt to the shapes and installation positions of different vacuum system components, and the optimal baking distance and angle relation between the baking plate and the baked surface can be guaranteed in different working scenes.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum auxiliary equipment, and in particular relates to a heating and baking device used for exhausting a vacuum system. Background Art

[0002] Residual gas molecules inside the vacuum system can have many adverse effects on related process flows. For example, in the semiconductor chip manufacturing process, trace amounts of gas impurities may cause chip performance degradation or even failure. In order to obtain a high vacuum degree and reduce these adverse effects, the vacuum system needs to be exhausted. Heating and baking equipment has emerged as a result. It heats the components of the vacuum system so that the gas molecules adsorbed on the walls and internal component surfaces gain enough energy to desorb, and then the desorbed gases are discharged from the system through a vacuum pump.

[0003] The Chinese patent, issued under the publication number CN 209672809 U, discloses a machine frame equipped with an ultra-vacuum degassing device. Four exhaust pipes are located in the center of the frame's support plate, which is equipped with a heating system comprising four downwardly opening heating hoods. Each heating hood is equipped with a lifting mechanism that drives it upward and downward, and each heating hood corresponds to a corresponding exhaust pipe. This utility model can meet the ultra-vacuum degassing and heating needs of multiple stations, occupies a small space, has high efficiency, reduces labor intensity, is easy to use, and has a high degree of automation.

[0004] Although the above technical solution can meet the ultra-vacuum degassing heating needs of multiple stations, occupy a small space, have high work efficiency, reduce labor intensity, be easy to use, and have a high degree of automation, it is currently difficult to ensure uniform surface temperature of the entire heated component during the heating and baking process of the vacuum equipment. Due to the layout limitations of the heating source, the edges and corners of the container may not receive the same heat supply as the central area, resulting in local overheating or overcooling, which will affect the exhaust effect because the desorption efficiency of gas molecules in the local overcooling area is low, and local overheating may cause damage to some precision components.

[0005] Therefore, those skilled in the art provide a heating and baking device for exhausting a vacuum system to solve the problems raised in the above background technology. Utility Model Content

[0006] The purpose of the utility model is to provide a heating and baking device for exhausting a vacuum system, aiming to solve the problems raised in the above background technology.

[0007] To achieve the above objectives, the present invention provides the following technical solutions:

[0008] A heating and baking device for exhausting a vacuum system, comprising:

[0009] The bearing mechanism includes a hydraulic telescopic rod, a mobile base fixedly mounted at the bottom of the hydraulic telescopic rod, and a supporting assembly fixedly mounted on the top of the mobile base;

[0010] The baking assembly includes a first baking plate, a driving shaft hinged at the end of the hydraulic telescopic rod, a support rod sleeved on the outer surface of the driving shaft, and an adjustment limit rod hinged at the outer side of the support rod.

[0011] As a preferred solution of the present invention, the baking assembly also includes a second baking plate movably connected to the first baking plate, a plurality of arc-shaped grooves opened on the inner surface of the second baking plate, a heating tube clamped in the inner cavity of the arc-shaped groove, a slot opened on the inner surface of the arc-shaped groove, a block fixedly installed at the end of the heating tube, and a spring fixedly installed at the end of the heating tube and located on the outside of the block.

[0012] As a preferred solution of the present invention, the clamping block is movably clamped in the inner cavity of the clamping slot, and the inner cavity of the spring is provided with a telescopic block.

[0013] As a preferred solution of the present invention, the support assembly includes an axle seat fixedly mounted on the top of the movable base, an adjusting rod hinged to the inner cavity of the axle seat through an axis, an adjusting plate clamped on the outside of the adjusting rod, a limiting slider movably mounted in the inner cavity of the adjusting rod, and a damping return spring fixedly mounted on the outside of the limiting slider.

[0014] As a preferred solution of the present invention, the end of the adjusting rod is fixedly connected to the outer surface of the first baking plate via a shaft, and the outer side of the limiting slider is fixedly connected to the inner surface of the adjusting plate via a connecting block.

[0015] As a preferred solution of the present invention, the supporting mechanism further includes a power supply fixedly mounted on the top of the mobile base, and a power cord fixedly mounted on the outside of the power supply.

[0016] As a preferred solution of the present invention, the end of the power cord is fixedly connected to the outer side of the first baking plate and is electrically connected.

[0017] Compared with the prior art, the beneficial effects of the present invention are: the angle can be flexibly adjusted through the combination of the first baking plate and the second baking plate, and the relative position and combination of the two baking plates can be adjusted according to the shape and size requirements of different vacuum systems. For some irregularly shaped vacuum system components, by adjusting the clamping state of the first baking plate and the second baking plate, the surface of the component can be better fitted, thereby achieving a more uniform heating effect, and working together to improve the temperature uniformity of the entire baked surface, reduce temperature gradients, and improve the uniformity of heating. The baking angle can be precisely adjusted to adapt to the shape and installation position of different vacuum system components, and the optimal baking distance and angle relationship between the baking plate and the baked surface can be ensured in different working scenarios, thereby achieving uniform and effective heating and baking. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without inventive work. Among them:

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 This is a bottom view of the overall structure of the utility model;

[0021] Figure 3 This is a partial cross-sectional view of the support assembly structure of the present utility model;

[0022] Figure 4 This is a partial cross-sectional view of the first baking plate structure of the present invention.

[0023] In the figure: 100, bearing mechanism; 101, hydraulic telescopic rod; 102, movable base; 103, supporting assembly; 103a, shaft seat; 103b, adjusting rod; 103c, adjusting plate; 103d, limiting slider; 103e, damping return spring; 104, power supply; 105, power cord; 200, baking assembly; 201, first baking plate; 202, driving shaft; 203, supporting rod; 204, adjusting limiting rod; 205, second baking plate; 206, arc groove; 207, heating tube; 208, slot; 209, block; 210, spring. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

[0025] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0026] Secondly, the term "one embodiment" or "embodiment" herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in various places throughout this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments.

[0027] Example 1

[0028] Reference Figures 1 to 4 , which is the first embodiment of the present utility model, provides a heating and baking device for exhausting a vacuum system, comprising:

[0029] The carrying mechanism 100 includes a hydraulic telescopic rod 101, a mobile base 102 fixedly mounted on the bottom of the hydraulic telescopic rod 101, and a support assembly 103 fixedly mounted on the top of the mobile base 102;

[0030] The baking assembly 200 includes a first baking plate 201 , a driving shaft 202 hinged to the end of the hydraulic telescopic rod 101 , a support rod 203 sleeved on the outer surface of the driving shaft 202 , and an adjustment limit rod 204 hinged to the outside of the support rod 203 .

[0031] Among them, the combination of the first baking plate 201 and the second baking plate 205 can flexibly adjust the angle, and the relative position and combination of the two baking plates can be adjusted according to the shape and size requirements of different vacuum systems. For some irregularly shaped vacuum system components, by adjusting the clamping state of the first baking plate 201 and the second baking plate 205, they can better fit the surface of the component, thereby achieving a more uniform heating effect. When the two baking plates are combined together, they can bake the vacuum system from different angles and positions. The first baking plate 201 and the second baking plate 205 can be set with different heating areas or heating parameters respectively, and work together to improve the temperature uniformity of the entire baked surface. Through this division of labor and cooperation, the temperature gradient is reduced and the heating uniformity is improved.

[0032] Specifically, the baking assembly 200 also includes a second baking plate 205 movably connected to the first baking plate 201, a plurality of arc-shaped grooves 206 opened on the inner surface of the second baking plate 205, a heating tube 207 engaged in the inner cavity of the arc-shaped groove 206, a slot 208 opened on the inner surface of the arc-shaped groove 206, a block 209 fixedly installed at the end of the heating tube 207, and a spring 210 fixedly installed at the end of the heating tube 207 and located on the outside of the block 209.

[0033] The heating tube 207 is installed in the arc-shaped channel 206 through the cooperation of the clamping block 209 and the clamping slot 208, and the spring 210 provides a certain elastic support, making it more convenient to replace or repair the heating tube 207.

[0034] Furthermore, the clamping block 209 is movably clamped in the inner cavity of the clamping slot 208 , and the inner cavity of the spring 210 is provided with a telescopic block.

[0035] The operator only needs to overcome the elastic force of the spring 210 and pull the block 209 out of the slot 208 to easily remove the heating tube 207 for replacement without the need for complicated disassembly tools or procedures.

[0036] Preferably, the support assembly 103 includes an axle seat 103a fixedly mounted on the top of the movable base 102, an adjusting rod 103b hinged to the inner cavity of the axle seat 103a through an axis, an adjusting plate 103c clamped on the outside of the adjusting rod 103b, a limiting slider 103d movably mounted in the inner cavity of the adjusting rod 103b, and a damping return spring 103e fixedly mounted on the outside of the limiting slider 103d.

[0037] Among them, the support assembly 103 provides stable support for the baking assembly 200. During the baking process, the adjustment rod 103b, adjustment plate 103c, limit slider 103d and damping return spring 103e and other components in the support assembly 103 work together to ensure that the baking assembly 200 can remain stable under different working conditions. When the angle of the baking assembly 200 is adjusted, the support assembly 103 can adapt to such changes and provide stable supporting force to prevent the baking assembly 200 from shaking, thereby ensuring the uniformity and stability of heating and baking.

[0038] It should be noted that the end of the adjusting rod 103b is fixedly connected to the outer surface of the first baking plate 201 through an axis, and the outer side of the limiting slider 103d is fixedly connected to the inner surface of the adjusting plate 103c through a connecting block. The supporting mechanism 100 also includes a power supply 104 fixedly mounted on the top of the movable base 102, and a power cord 105 fixedly mounted on the outer side of the power supply 104. The end of the power cord 105 is fixedly connected to the outer side of the first baking plate 201 and is electrically connected.

[0039] Among them, the hydraulic telescopic rod 101 can adjust the height of the baking component 200, the movable base 102 can change the horizontal position of the baking component 200, the power supply 104 and the power cord 105 provide a convenient power supply method for the baking component 200, and the power cord 105 electrically connects the power supply to the first baking plate 201 to ensure that the heating tube 207 can work normally.

[0040] During use, the hydraulic telescopic rod 101 can adjust the height of the baking assembly 200, and the movable base 102 can change the horizontal position of the baking assembly 200. When heating and baking according to the shape and size requirements of different vacuum systems, the combination of the first baking plate 201 and the second baking plate 205 can flexibly adjust the angle. The adjustment limit rod 204 is hinged to the outside of the support rod 203. By adjusting the angle of the adjustment limit rod 204, the angle of the baking assembly 200 relative to the vacuum system being baked can be precisely controlled.

[0041] The heating tube 207 is installed in the arc-shaped groove 206 through the cooperation of the block 209 and the slot 208, and a spring 210 provides a certain elastic support. The operator only needs to overcome the elastic force of the spring 210 and pull the block 209 out of the slot 208 to take out the heating tube 207 for replacement. During the baking process, the adjustment rod 103b, adjustment plate 103c, limit slider 103d and damping return spring 103e in the support assembly 103 work together to ensure that the baking assembly 200 can remain stable in different working conditions. When the angle of the baking assembly 200 is adjusted, the support assembly 103 can adapt to this change and provide stable supporting force to prevent the baking assembly 200 from shaking, thereby ensuring the uniformity and stability of heating and baking.

[0042] In summary, the combination of the first baking plate 201 and the second baking plate 205 can flexibly adjust the angle, and the relative position and combination of the two baking plates can be adjusted according to the shape and size requirements of different vacuum systems. For some irregularly shaped vacuum system components, by adjusting the clamping state of the first baking plate 201 and the second baking plate 205, it can better fit the surface of the component, thereby achieving a more uniform heating effect, and working together to improve the temperature uniformity of the entire baked surface, reduce temperature gradients, and improve the uniformity of heating. The baking angle can be precisely adjusted to adapt to the shape and installation position of different vacuum system components, and the optimal baking distance and angle relationship between the baking plate and the baked surface can be ensured in different working scenarios, thereby achieving uniform and effective heating and baking.

[0043] It is important to note that the construction and arrangement of the present application shown in a number of different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, it should be readily understood by those who refer to this disclosure that many modifications are possible (e.g., the size, scale, structure, shape and proportion of various elements, and parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, colors, directional changes, etc.) without departing substantially from the novel teachings and advantages of the subject matter described in this application. For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of the element may be inverted or otherwise changed, and the nature or number or position of the discrete elements may be altered or changed. Therefore, all such modifications are intended to be included within the scope of the present invention. The order or sequence of any process or method steps may be changed or reordered according to alternative embodiments. In the claims, any "means plus function" clause is intended to cover the structure of performing the function described herein, and is not only structurally equivalent but also an equivalent structure. Without departing from the scope of the present invention, other substitutions, modifications, changes and omissions may be made in the design, operating conditions and arrangement of the exemplary embodiments. Therefore, the present invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0044] Additionally, in order to provide a concise description of example embodiments, all features of an actual embodiment (ie, those features that are not relevant to the best mode presently contemplated for carrying out the invention or those that are not relevant to implementing the invention) may not be described.

[0045] It will be appreciated that in the development of any actual embodiment, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will, for those of ordinary skill having the benefit of this disclosure, be a routine undertaking of design, fabrication, and production without undue experimentation.

[0046] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, and all of these should be included in the scope of the claims of the present invention.

Claims

1. A heating and baking device for exhausting a vacuum system, characterized in that: include, The bearing mechanism (100) comprises a hydraulic telescopic rod (101), a movable base (102) fixedly mounted on the bottom of the hydraulic telescopic rod (101), and a supporting assembly (103) fixedly mounted on the top of the movable base (102); The baking assembly (200) comprises a first baking plate (201), a driving shaft (202) hinged to the end of the hydraulic telescopic rod (101), a support rod (203) sleeved on the outer surface of the driving shaft (202), and an adjustment limit rod (204) hinged to the outside of the support rod (203).

2. The heating and baking equipment for exhausting a vacuum system according to claim 1, characterized in that: The baking assembly (200) further includes a second baking plate (205) movably engaged with the first baking plate (201), a plurality of arcuate grooves (206) provided on the inner surface of the second baking plate (205), a heating tube (207) engaged in the inner cavity of the arcuate groove (206), a clamping groove (208) provided on the inner surface of the arcuate groove (206), a clamping block (209) fixedly mounted on the end of the heating tube (207), and a spring (210) fixedly mounted on the end of the heating tube (207) and located outside the clamping block (209).

3. The heating and baking equipment for exhausting a vacuum system according to claim 2, characterized in that: The clamping block (209) is movably clamped in the inner cavity of the clamping slot (208), and the inner cavity of the spring (210) is provided with a telescopic block.

4. The heating and baking equipment for exhausting a vacuum system according to claim 3, characterized in that: The support assembly (103) includes an axle seat (103a) fixedly mounted on the top of the movable base (102), an adjustment rod (103b) hinged to the inner cavity of the axle seat (103a) through an axle body, an adjustment plate (103c) clamped on the outside of the adjustment rod (103b), a limiting slider (103d) movably mounted in the inner cavity of the adjustment rod (103b), and a damping return spring (103e) fixedly mounted on the outside of the limiting slider (103d).

5. The heating and baking equipment for exhausting a vacuum system according to claim 4, characterized in that: The end of the regulating rod (103b) is fixedly connected to the outer surface of the first baking plate (201) via a shaft, and the outer side of the limiting slider (103d) is fixedly connected to the inner surface of the regulating plate (103c) via a connecting block.

6. The heating and baking equipment for exhausting a vacuum system according to claim 5, characterized in that: The supporting mechanism (100) further comprises a power supply (104) fixedly mounted on the top of the mobile base (102), and a power line (105) fixedly mounted on the outside of the power supply (104).

7. The heating and baking equipment for exhausting a vacuum system according to claim 6, characterized in that: The end of the power line (105) is fixedly connected to the outer side of the first baking plate (201) and is electrically connected.

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