Multi-furnace-platform special gas comprehensive utilization equipment

Abstract

The utility model belongs to the technical field of silicon carbide powder synthesis, and particularly relates to multi-furnace-platform special gas comprehensive utilization equipment. The multi-coil-base special gas comprehensive utilization equipment comprises a gas storage device and a plurality of coil bases, the gas storage device is connected with each coil base through a special gas pipeline, the gas storage device is provided with a pressure detection device, a vacuumizing connector and a special gas connector, and the special gas pipeline is provided with a two-way valve. According to the multi-coil-stage special gas comprehensive utilization equipment, the gas storage device is arranged to be connected with the multiple coil stages, special gas in one or more coil stages is recycled and reused through the pressure difference, the special gas in different coil stages can be distributed and utilized, the special gas utilization rate is increased, the production cost is saved, and emission of the special gas to the atmospheric environment is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon carbide powder synthesis, and in particular relates to multi-furnace special gas comprehensive utilization equipment. Background Art

[0002] The information disclosed in this background technology section is only intended to increase understanding of the overall background of the present invention, and is not necessarily regarded as an admission or any form of suggestion that the information constitutes the prior art already known to those skilled in the art.

[0003] As a key member of the third-generation semiconductor materials, silicon carbide (SiC) is widely used due to its wide bandgap, high saturated electron mobility, high breakdown strength, and high thermal conductivity. As the core raw material for growing SiC crystals, the preparation of SiC powder has become a key area of ​​research in the industry. Currently, SiC powder is primarily prepared using high-temperature self-propagating synthesis, where carbon powder and silicon powder react directly in contact to form SiC powder. This method uses high temperatures to generate initial heat in the reactants, initiating a chemical reaction. As the reaction proceeds, unreacted materials continue to react under the exothermic conditions. The synthesis of SiC powder requires the use of special gases (e.g., inert gases) to remove impurities, create a protective atmosphere, and regulate the internal pressure of the furnace. The synthesis of SiC powder requires high temperature and low pressure. After the reaction is complete, the furnace interior must be cooled to room temperature and pressurized for operation. Therefore, the addition of special gases during the cooling process assists in cooling and pressurizing the furnace. When the furnace is started, if the special gas in the furnace is not recovered, it will be directly discharged into the atmosphere, which not only causes a waste of special gas resources, but also affects the atmospheric environment.

[0004] Although installing a special gas recovery device at each furnace station can avoid directly discharging special gases into the atmosphere, there are multiple furnace stations on the silicon carbide powder synthesis process line. Installing a separate recovery device on each furnace station will increase the cost of the device. The furnace station is connected to the special gas main pipeline to introduce special gases. Since the requirements for the purity of special gases in different synthesis stages are different, the special gases collected after cooling need to be purified if they are to be used through the special gas pipeline to avoid contaminating the special gases in the pipeline. The existing special gas recovery and utilization method requires that the special gases be recovered first and then the recovered special gases be reintroduced into the furnace station. When there is a furnace station that needs to recover special gases and another furnace station that introduces special gases at the same time, the special gases can only be recovered and purified before being distributed. The efficiency of special gas recovery and utilization is poor and the cost is high. Summary of the Invention

[0005] To address the shortcomings of the prior art, the present invention provides a multi-furnace special gas comprehensive utilization device. The multi-furnace special gas comprehensive utilization device is equipped with a gas storage device connected to multiple furnaces. The device recovers, distributes, and reuses the special gas within the furnaces through pressure differentials, thereby improving the utilization rate of the special gas, saving production costs, and reducing the emission of special gas into the atmosphere.

[0006] The reaction phase of the high-temperature self-propagating synthesis method requires high temperature and extremely low pressure conditions, while the cooling phase requires the pressure inside the furnace to be raised to normal pressure or slightly positive pressure. Therefore, when the furnace needs to be opened after cooling, most of the special gases inside the furnace are the special gases introduced during the cooling phase. No reaction will occur during the cooling phase, and even if trace impurities are present in the special gases used, the powder quality will not be affected. Therefore, the multi-furnace special gas comprehensive utilization equipment provided by the utility model will recover the special gases inside the furnace before the furnace is opened through the pressure difference, reuse the recovered special gases for cooling, and distribute the special gases to furnaces with different working conditions.

[0007] In order to achieve the above purpose, the present invention is implemented through the following technical solutions:

[0008] In the first aspect, a multi-furnace special gas comprehensive utilization equipment includes a gas storage device and multiple furnaces, the gas storage device is connected to each furnace through a special gas pipeline, the gas storage device is provided with a pressure detection device, a vacuum joint and a special gas joint, and the special gas pipeline is provided with a two-way valve.

[0009] When the specialty gas in the furnace needs to be recovered, the gas storage device is set to a vacuum state, and the two-way valve connecting the corresponding furnace to the gas storage device is opened. The pressure difference between the gas storage device and the furnace is used to transfer the specialty gas from the furnace to the gas storage device. Conversely, when the furnace needs to be supplied with specialty gas, the specialty gas is transferred from the gas storage device to the furnace using the pressure difference. The gas storage device can also connect multiple furnaces by simultaneously opening multiple two-way valves, distributing the specialty gas from the cooled high-pressure furnace to the low-pressure furnace that needs cooling.

[0010] Preferably, the gas storage device is connected to an external special gas pipeline via a special gas connector.

[0011] When the special gas pressure in the gas storage device cannot meet the needs of the furnace, you can first input special gas into the gas storage device through an external special gas pipeline to increase the pressure and then open the two-way valve to input special gas to the furnace, or you can first open the two-way valve and input special gas into the gas storage device and the furnace through an external special gas pipeline at the same time.

[0012] Preferably, the gas storage device is connected to an external vacuum pump via a vacuum joint.

[0013] The special gas can be extracted through a vacuum pump to reduce the pressure in the gas storage device, increase the pressure difference and improve the special gas recovery efficiency.

[0014] Preferably, a flow meter is provided on the special gas pipeline.

[0015] Preferably, it further comprises an early warning unit, which is electrically connected to the flow meter and the two-way valve.

[0016] The early warning unit monitors the flow meter flow and the two-way valve switch status, adjusts the two-way valve switch in time, and warns of any leaks in the pipeline.

[0017] Preferably, it further comprises a control unit, which is electrically connected to the pressure detection device, the two-way valve and the furnace table.

[0018] The control unit receives the pressure from the pressure detection device and the working condition information of the furnace, judges the working condition of the furnace and the storage status of the special gas inside the gas storage device, controls the switch of the two-way valve, and automatically realizes the recovery and reuse of the special gas.

[0019] Further preferably, a temperature detection device is provided in the furnace, and the control unit is electrically connected to the temperature detection device.

[0020] The temperature inside the furnace can be used to determine whether the furnace needs to introduce or recycle special gases.

[0021] Preferably, the furnace table is provided with a quick-fill valve, and the quick-fill valve is connected to the atmosphere.

[0022] When the pressure inside the furnace cannot reach the requirements for starting the furnace after recovering the special gas, the quick charging valve can be opened to allow air to be introduced so that the pressure inside the furnace reaches the conditions for starting the furnace.

[0023] Preferably, the furnace table is connected to an external special gas pipeline.

[0024] Preferably, the two-way valve is a pneumatic valve.

[0025] The beneficial effects achieved by one or more technical solutions of the above utility model are as follows:

[0026] The multi-furnace special gas comprehensive utilization equipment is connected to multiple furnaces by setting up a gas storage device, and uses the pressure difference to realize the recovery and reuse of special gases inside a single or multiple furnaces. It can also allocate and utilize the special gases in different furnaces, thereby improving the utilization rate of special gases, saving production costs, and reducing the emission of special gases into the atmospheric environment.

[0027] The special gases inside the multi-furnace special gas comprehensive utilization equipment can be uniformly discharged and introduced through the gas storage device, which reduces the transmission distance of the special gases. The efficiency of special gas recovery and utilization can be further improved with the increase in the number of furnaces, and the overall cost can be further reduced.

[0028] Multi-furnace special gas comprehensive utilization equipment can be applied to the coordinated use of different furnaces under different working conditions, and can further realize automatic logic control through the control unit.

[0029] The design of the multi-furnace special gas comprehensive utilization equipment does not conflict with the existing furnaces and special gas main pipelines, and can be used to upgrade and improve existing technologies. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The drawings in the specification, which constitute a part of the present invention, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention.

[0031] Figure 1 This is a schematic structural diagram of the multi-furnace special gas comprehensive utilization equipment in Example 1;

[0032] In the figure, 1 is a gas storage device, 2 is a furnace table, 3 is a special gas pipeline, 4 is a pressure detection device, 5 is a vacuum connector, 6 is a special gas connector, 7 is a two-way valve, 8 is a flow meter, 9 is a temperature detection device, and 10 is a quick charging valve. DETAILED DESCRIPTION

[0033] In order to enable those skilled in the art to more clearly understand the technical solution of the present invention, the technical solution of the present invention will be described in detail below in combination with specific embodiments and comparative examples.

[0034] Example 1

[0035] like Figure 1As shown, a multi-furnace special gas comprehensive utilization device includes a gas storage device 1 and eight furnaces 2. The gas storage device 1 is connected to each furnace 2 via a special gas pipeline 3. The gas storage device 1 is equipped with a pressure detection device 4, a vacuum connection 5, and a special gas connection 6. The special gas pipeline 3 is equipped with a two-way valve 7 and a flowmeter 8. The two-way valve 7 is a pneumatic valve. The furnace 2 is equipped with a temperature detection device 9 and a fast filling valve 10. The gas storage device 1 is connected to an external vacuum pump via the vacuum connection 5 and to an external special gas pipeline via the special gas connection 6. The furnace 2 is connected to the external special gas pipeline via a pipeline. The pressure detection device 4, two-way valve 7, and temperature detection device 9 are electrically connected to a control unit (not shown in the figure), and the two-way valve 7 and flowmeter 8 are electrically connected to an early warning unit (not shown in the figure). The gas storage device 1 is connected to an external vacuum pump via the vacuum connection 5 to evacuate the gas. The two-way valve 7 is then opened in sequence to connect to each furnace 2, and the special gas within the furnace is recovered through the pressure difference. When the internal pressure of each furnace 2 is the same, after recovering the special gas from each furnace 2, the pressure inside the gas storage device 1 is nearly equal to the initial pressure inside the furnace 2. According to the ideal gas state equation, the internal pressures of the gas storage device 1 and furnace 2 at equilibrium depend on their respective volumes. When the volume of the gas storage device 1 is greater than that of the furnace 2, the equilibrium pressure decreases, allowing more special gas to be recovered. The specific volume setting can be adjusted based on site conditions and operating costs.

[0036] When a furnace 2 enters the cooling stage and needs to be fed with special gas, the corresponding two-way valve 7 is opened to allow the special gas to be passed from the gas storage device 1 into the furnace 2. Since the furnace 2 is initially in a vacuum state, after the special gas is passed into it, its internal pressure is, under ideal conditions, V1 / (V1+V2) times the internal pressure of the gas storage device 1 (V1 represents the volume of the gas storage device 1, and V2 represents the volume of the furnace 2). When the internal pressure of the gas storage device cannot meet the requirements of the furnace 2 to start the furnace, the gas storage device 1 can be connected to the external special gas pipeline through the special gas connector 6. The special gas is first passed into the gas storage device 1 and then passed into the furnace 2 through the gas storage device 1, or the special gas is simultaneously passed into the gas storage device 1 and the furnace 2 with the two-way valve 7 open, so that the internal pressure of the furnace 2 meets the requirements. At the same time, the furnace 2 can be fed with special gas through the external special gas pipeline.

[0037] When one furnace 2 is in the cooling completion stage and another furnace 2 enters the cooling stage and needs to be fed with special gas, the two-way valves 7 on the special gas pipelines connected to the above two furnaces 2 can be opened simultaneously, and the two furnaces 2 and the gas storage device 1 are connected until the pressures of the three reach the same equilibrium point. When the other furnaces 2 are waiting to start the furnace, the corresponding two-way valve 7 is opened to input the recovered special gas into the gas storage device 1, so that it can obtain more gas, which will eventually meet the operating pressure of the furnace 2 that needs to be cooled. When the furnace 2 is in the waiting stage to start the furnace, it serves as a gas supply source to transport gas into the gas storage device 1. Through the changes and coordination of the working conditions of different furnaces 2, the opening and closing of the two-way valve 7 are adjusted to form a recycling of special gases, and the special gases are distributed according to different pressure requirements.

[0038] When recycling special gas, if the pressure in the furnace table 2 after recycling cannot meet the furnace opening requirements, the fast filling valve 10 is opened to connect the furnace table 2 with the atmosphere, and air is introduced to meet the furnace opening requirements.

[0039] The above situations can all be automatically adjusted through the control unit and the early warning unit.

[0040] Example 2

[0041] The multi-furnace special gas comprehensive utilization equipment includes a gas storage device 1 and six furnaces 2. The gas storage device 1 is connected to each furnace 2 through a special gas pipeline 3. The gas storage device 1 is provided with a pressure detection device 4, a vacuum joint 5 and a special gas joint 6. The special gas pipeline 3 is provided with a two-way valve 7 and a flow meter 8. The two-way valve 7 is a pneumatic valve. The furnace 2 is provided with a temperature detection device 9 and a fast filling valve 10. The gas storage device 1 is connected to the external vacuum pump through the vacuum joint 5, and is connected to the external special gas pipeline through the special gas joint 6. The furnace 2 is connected to the external special gas pipeline through the pipeline. The pressure detection device 4, the two-way valve 7 and the temperature detection device 9 are electrically connected to the control unit, and the two-way valve 7 and the flow meter 8 are electrically connected to the early warning unit.

[0042] Example 3

[0043] The multi-furnace special gas comprehensive utilization equipment includes a gas storage device 1 and ten furnaces 2. The gas storage device 1 is connected to each furnace 2 through a special gas pipeline 3. The gas storage device 1 is provided with a pressure detection device 4, a vacuum joint 5 and a special gas joint 6. The special gas pipeline 3 is provided with a two-way valve 7 and a flow meter 8. The two-way valve 7 is a pneumatic valve. The furnace 2 is provided with a temperature detection device 9 and a fast filling valve 10. The gas storage device 1 is connected to the external vacuum pump through the vacuum joint 5, and is connected to the external special gas pipeline through the special gas joint 6. The furnace 2 is connected to the external special gas pipeline through the pipeline. The pressure detection device 4, the two-way valve 7 and the temperature detection device 9 are electrically connected to the control unit, and the two-way valve 7 and the flow meter 8 are electrically connected to the early warning unit.

[0044] Example 4

[0045] Multi-furnace special gas comprehensive utilization equipment includes a gas storage device 1 and eight furnaces 2. The gas storage device 1 is connected to each furnace 2 via a special gas pipeline 3. The gas storage device 1 is equipped with a pressure detection device 4, a vacuum connector 5, and a special gas connector 6. The special gas pipeline 3 is equipped with a two-way valve 7 and a flow meter 8. The two-way valve 7 is a pneumatic valve. The furnace 2 is equipped with a temperature detection device 9 and a fast filling valve 10. The gas storage device 1 is connected to an external vacuum pump via the vacuum connector 5 and to an external special gas pipeline via the special gas connector 6. The furnace 2 is connected to the external special gas pipeline via a pipeline.

[0046] Example 5

[0047] This multi-furnace special gas comprehensive utilization equipment includes a gas storage device 1 and eight furnaces 2. The gas storage device 1 is connected to each furnace 2 via a special gas pipeline 3. The gas storage device 1 is equipped with a pressure detection device 4, a vacuum connector 5, and a special gas connector 6. The special gas pipeline 3 is equipped with a two-way valve 7 and a flowmeter 8. The two-way valve 7 is a pneumatic valve. The gas storage device 1 is connected to an external vacuum pump via the vacuum connector 5 and to an external special gas pipeline via the special gas connector 6. The furnaces 2 are connected to the external special gas pipeline via pipelines.

[0048] Example 6

[0049] This multi-furnace special gas comprehensive utilization equipment includes a gas storage device 1 and eight furnaces 2. The gas storage device 1 is connected to each furnace 2 via a special gas pipeline 3. The gas storage device 1 is equipped with a pressure detection device 4, a vacuum connector 5, and a special gas connector 6. The special gas pipeline 3 is equipped with a two-way valve 7, which is a pneumatic valve. The furnaces 2 are equipped with a temperature detection device 9 and a fast-fill valve 10. The gas storage device 1 is connected to an external vacuum pump via the vacuum connector 5 and to an external special gas pipeline via the special gas connector 6. The furnaces 2 are connected to the external special gas pipeline via a pipeline.

[0050] Example 7

[0051] This multi-furnace special gas comprehensive utilization equipment includes a gas storage device 1 and eight furnaces 2. The gas storage device 1 is connected to each furnace 2 via a special gas pipeline 3. The gas storage device 1 is equipped with a pressure detection device 4, a vacuum connector 5, and a special gas connector 6. The special gas pipeline 3 is equipped with a two-way valve 7. The gas storage device 1 is connected to an external vacuum pump via the vacuum connector 5 and to an external special gas pipeline via the special gas connector 6.

[0052] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A multi-furnace special gas comprehensive utilization equipment, characterized in that: It includes a gas storage device and multiple furnaces. The gas storage device is connected to each furnace through a special gas pipeline. The gas storage device is provided with a pressure detection device, a vacuum joint and a special gas joint. The special gas pipeline is provided with a two-way valve.

2. The multi-furnace special gas comprehensive utilization equipment according to claim 1, characterized in that: The gas storage device is connected to an external special gas pipeline via a special gas joint.

3. The multi-furnace special gas comprehensive utilization equipment according to claim 1, characterized in that: The gas storage device is connected to an external vacuum pump via a vacuum joint.

4. The multi-furnace special gas comprehensive utilization equipment according to claim 1, characterized in that: A flow meter is provided on the special gas pipeline.

5. The multi-furnace special gas comprehensive utilization equipment according to claim 4, characterized in that: It also includes an early warning unit, which is electrically connected to the flow meter and the two-way valve.

6. The multi-furnace special gas comprehensive utilization equipment according to claim 1, characterized in that: The device also includes a control unit, which is electrically connected to the pressure detection device, the two-way valve and the furnace table.

7. The multi-furnace special gas comprehensive utilization equipment according to claim 6, characterized in that: A temperature detection device is provided in the furnace, and the control unit is electrically connected to the temperature detection device.

8. The multi-furnace special gas comprehensive utilization equipment according to claim 1, characterized in that: The furnace table is provided with a quick-fill valve, which is communicated with the atmosphere.

9. The multi-furnace special gas comprehensive utilization equipment according to claim 1, characterized in that: The furnace table is connected to an external special gas pipeline.

10. The multi-furnace special gas comprehensive utilization equipment according to claim 1, characterized in that: The two-way valve is a pneumatic valve.

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