Single crystal furnace filtering tank and single crystal furnace

Abstract

The utility model relates to the technical field of silicon single crystals, and provides a single crystal furnace filtering tank and a single crystal furnace, and the filtering tank comprises a filtering tank body and a gas guide pipeline, the filtering tank body is provided with an air inlet; the outlet end of the gas guide pipeline is connected to the gas inlet, the inlet end of the gas guide pipeline is used for being connected to a gas guide opening of the furnace body, and the gas guide pipeline is provided with a heat preservation structure. According to the single crystal furnace filtering tank and the single crystal furnace provided by the utility model, the heat preservation structure is designed on the gas guide pipeline connected to the filtering tank body, so that the condensation of volatile matters in the gas guide pipeline is reduced, the volatile matters are prevented from depositing in the gas guide pipeline to block the pipeline, frequent shutdown for maintenance is avoided, and the production efficiency is improved; the problem that a pipeline is prone to being blocked in the prior art is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon single crystals, in particular to a single crystal furnace filter tank and a single crystal furnace. Background Art

[0002] With the continuous advancement of modern science and technology, the demand for semiconductor devices is growing, especially the demand for high-performance, high-quality single-crystal silicon materials. As one of the important raw materials in the semiconductor industry, single-crystal silicon is widely used in high-tech fields such as integrated circuit manufacturing and the photovoltaic industry. The preparation technology of single-crystal silicon directly affects the performance and reliability of the final product. Therefore, the production process of single-crystal silicon has always been the focus of research and optimization. In the preparation process of single-crystal silicon, one of the most commonly used methods is the Czochralski method. This method heats high-purity polycrystalline silicon raw materials to a molten state, then contacts the surface of the molten silicon with a seed crystal rod and slowly pulls it upward while rotating the seed crystal rod so that the silicon liquid solidifies under the seed crystal rod to form a single-crystal silicon rod.

[0003] In existing technology, the single crystal pulling process requires an inert gas atmosphere (such as argon) for protection. Argon is introduced from the top of the furnace and discharged through air guide holes at the bottom of the furnace. The argon, carrying volatile substances, is then directed through a pipeline to a filter tank for filtration. However, these pipelines are prone to clogging, requiring frequent maintenance shutdowns, which reduces production efficiency. Utility Model Content

[0004] The utility model provides a single crystal furnace filter tank and a single crystal furnace, which are used to solve the defect in the prior art that pipelines are easily blocked and the production efficiency is reduced.

[0005] The utility model provides a single crystal furnace filter tank, comprising:

[0006] A filter tank body, wherein the filter tank body has an air inlet;

[0007] An air guide duct, wherein the outlet end of the air guide duct is connected to the air inlet, the inlet end of the air guide duct is used to be connected to the air guide port of the furnace body, and the air guide duct has a heat insulation structure.

[0008] According to a single crystal furnace filter tank provided by the utility model, the heat-insulating structure includes a heat-insulating layer arranged on the air-guiding duct.

[0009] According to a single crystal furnace filter tank provided by the utility model, the air guide duct includes an inner tube and an outer tube, and the thermal insulation layer is arranged between the inner tube and the outer tube.

[0010] According to a single crystal furnace filter tank provided by the utility model, a cooling structure is provided on a side of the filter tank body away from the air inlet.

[0011] According to a single crystal furnace filter tank provided by the present invention, the cooling structure is arranged on the side of the filter tank body away from the air inlet and / or the bottom of the filter tank body away from the air inlet.

[0012] According to a single crystal furnace filter tank provided by the utility model, the filter tank body includes an inner wall and an outer wall;

[0013] The cooling structure includes a cooling channel constructed between the inner wall and the outer wall.

[0014] According to a single crystal furnace filter tank provided by the utility model, the cooling flow channel includes a plurality of main body segments connected in sequence; the plurality of main body segments are arranged in parallel and spaced apart, and the plurality of main body segments are connected by arc-shaped connecting segments and / or straight connecting segments.

[0015] According to the single crystal furnace filter tank provided by the utility model, at least part of the main body sections are arranged at equal intervals.

[0016] According to the single crystal furnace filter tank provided by the utility model, the distance between two adjacent main body sections is 30 mm to 70 mm.

[0017] The utility model also provides a single crystal furnace, comprising a furnace body and any one of the single crystal furnace filter tanks described above, wherein the inlet end of the air guide pipe is connected to the air guide port of the furnace body.

[0018] The single crystal furnace filter tank and single crystal furnace provided by the utility model are designed with a heat-insulating structure in the air guide duct connected to the filter tank body to reduce the condensation of volatiles in the air guide duct, thereby preventing the volatiles from being deposited inside the air guide duct and clogging the duct, thereby avoiding frequent shutdowns for maintenance and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 This is one of the structural schematic diagrams of the single crystal furnace filter tank provided by the utility model.

[0021] Figure 2 This is the second structural schematic diagram of the single crystal furnace filter tank provided by the utility model.

[0022] Figure 3 It is a structural schematic diagram of the filter tank body provided by the utility model.

[0023] Figure 4 It is a schematic cross-sectional structural diagram of the filter tank body provided by the utility model.

[0024] Figure 5 yes Figure 4 Schematic diagram of the locally enlarged structure at point A in the middle.

[0025] Figure 6 yes Figure 4 Schematic diagram of the locally enlarged structure at point B in the middle.

[0026] Figure 7 This is one of the structural schematic diagrams of the air guide duct provided by the utility model.

[0027] Figure 8 This is the second structural diagram of the air guide duct provided by the utility model.

[0028] Figure 9 This is the third structural diagram of the air guide duct provided by the utility model.

[0029] Figure 10 It is a schematic cross-sectional structural diagram of the air guide duct provided by the utility model.

[0030] Reference numerals:

[0031] 100, filter tank body; 110, inner wall; 120, outer wall;

[0032] 200, air guide duct; 210, thermal insulation structure; 220, inner tube; 230, outer tube; 240, outlet; 250, inlet;

[0033] 300. Cooling channel; 310. Main body section. DETAILED DESCRIPTION

[0034] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0035] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0036] In the description of the embodiments of the present invention, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present invention based on specific circumstances.

[0037] In the embodiments of the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, a first feature being "above," "above," or "above" a second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below," "below," or "below" a second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0038] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples without contradiction.

[0039] The following combination Figures 1-10 The invention describes a single crystal furnace filter tank according to an embodiment of the present invention.

[0040] The embodiment of the first aspect of the present utility model provides a single crystal furnace filter tank, such as Figures 1 to 3 、 Figure 10 As shown, the single crystal furnace filter tank includes a filter tank body 100 and an air guide duct 200; the filter tank body 100 has an air inlet; the outlet end 240 of the air guide duct 200 is connected to the air inlet, and the inlet end 250 of the air guide duct 200 is used to connect to the air guide port of the furnace body, and the air guide duct 200 has an insulation structure 210.

[0041] It can be understood that the furnace body is connected to the filter tank body 100 through the gas guide pipe 200. The argon gas carrying volatiles in the furnace body enters the filter tank body 100 through the gas guide pipe 200 for filtration. As the operating time increases, the volatiles are easily deposited in the gas guide pipe 200 and cause the pipe to be blocked. Therefore, this embodiment adds an insulation structure 210 to the gas guide pipe 200 to reduce the deposition of volatiles in the gas guide pipe 200 during operation.

[0042] The single crystal furnace filter tank provided in the embodiment of the present invention is designed with an insulation structure 210 in the air duct 200 connected to the filter tank body 100 to reduce the condensation of volatiles in the air duct 200, thereby preventing the volatiles from being deposited inside the air duct 200 and clogging the pipeline, thereby avoiding frequent shutdowns for maintenance and improving production efficiency.

[0043] In one embodiment of the present invention, the thermal insulation structure 210 includes a thermal insulation layer disposed on the air duct 200 .

[0044] It is understandable that the insulation layer can be provided on the inner wall of the air duct 200 or on the outer wall of the air duct 200 ; of course, the insulation layer can also be provided on both the inner wall and the outer wall of the air duct 200 .

[0045] In an optional embodiment, if Figures 7 to 10 As shown, the air duct 200 includes an inner tube 220 and an outer tube 230 disposed on the outer periphery of the inner tube 220 , and a thermal insulation layer is disposed between the inner tube 220 and the outer tube 230 .

[0046] It can be understood that the outer tube 230 is sleeved on the outer circumference of the inner tube 220, and there is a distance between the inner tube 220 and the outer tube 230, so an annular placement cavity is formed between the inner tube 220 and the outer tube 230, and the insulation layer is annular and arranged in the annular placement cavity.

[0047] Optionally, the insulation layer uses insulation materials, which can effectively prevent heat transfer. The insulation materials can be rock wool (asbestos substitute), glass wool, polyurethane foam (PUF), foam rubber and other materials.

[0048] In a preferred embodiment of the present invention, a cooling structure is provided on a side of the filter tank body 100 away from the air inlet.

[0049] It should be noted that due to the very high melt temperature during the silicon single crystal pulling process, the molten silicon reacts with the quartz crucible, generating a large amount of volatiles such as silicon oxide within the furnace body. The vacuum pump then extracts the argon gas containing silicon oxide from the single crystal furnace body. A single crystal furnace filter tank is provided between the single crystal furnace body and the vacuum pump to filter out volatiles such as silicon oxide from the argon gas flow, thereby preventing gas particles such as silicon oxide from entering the vacuum pump cavity and causing damage to the vacuum pump. However, existing single crystal furnace filter tanks utilize natural cooling. Since the filter tank remains at a high temperature for a long time, the natural cooling process is time-consuming. Furthermore, if the lid is opened for cleaning without sufficient cooling, burns and dust storms can easily occur, threatening human safety.

[0050] It can be understood that an insulation layer is added to the air duct 200 to reduce the deposition of volatiles in the duct during operation; at the same time, a cooling structure is provided on the side of the filter tank body 100 away from the air inlet to accelerate the cooling and deposition of volatiles in the filter tank body 100, reduce the cooling time, avoid burns and dust storm safety accidents, and improve the safety of the filter tank; and the volatiles are deposited on the side away from the air duct 200.

[0051] It should be noted that in the prior art, volatiles are easily carried back into the furnace during return air and ash. However, this embodiment provides a cooling structure on the side of the filter tank body 100 away from the air inlet, which allows volatiles to be deposited on the side away from the air guide duct 200, preventing them from being carried back into the furnace during return air and ash.

[0052] It should be noted that, to increase the cooling and deposition rate of volatiles passing through the canister body 100, designing a cooling structure throughout the canister body 100 would easily carry volatiles back into the furnace during return air and ash. Therefore, this embodiment incorporates a cooling structure on the side of the canister body 100 away from the air inlet. This accelerates the deposition of volatiles while preventing them from entering the furnace during return air and ash.

[0053] Furthermore, the cooling structure is provided on the side of the filter tank body 100 away from the air inlet and / or on the bottom of the filter tank body 100 away from the air inlet.

[0054] It is understandable that a cooling structure can be provided on the side of the filter tank body 100 away from the air inlet, or on the bottom of the filter tank body 100 away from the air inlet; of course, a cooling structure can also be provided on both the side of the filter tank body 100 away from the air inlet and the bottom of the filter tank body 100 away from the air inlet.

[0055] Optionally, the cooling structure adopts a cooling channel 300 constructed on the filter tank body 100 .

[0056] It can be understood that the filter tank body 100 includes an inner wall 110 and an outer wall 120, and the cooling structure includes a cooling channel 300 constructed between the inner wall 110 and the outer wall 120. The cooling channel 300 has an inlet and an outlet, and the inlet and the outlet are connected to the external cooling equipment. The inlet, the cooling channel 300, the outlet and the external cooling equipment are connected in sequence to form a cooling circulation loop to cool the side of the filter tank body 100 away from the air inlet, so as to achieve the purpose of sufficient cooling and shortening the cooling time.

[0057] It is understandable that the filter tank body 100 is cooled by circulating cooling water between the inner wall 110 and the outer wall 120 of the filter tank body 100, so as to achieve the purpose of sufficient cooling and shortening the cooling time when the furnace is shut down to clean the filter tank.

[0058] In an optional embodiment of the present invention, the cooling channel 300 includes a plurality of main body segments 310 that are connected in sequence. The plurality of main body segments 310 are arranged in parallel and spaced apart, and the plurality of main body segments 310 are connected by arc-shaped connecting segments.

[0059] Optional, such as Figure 2 、 Figures 4 to 6 As shown, the main body segments 310 are arranged horizontally, with multiple main body segments 310 spaced parallel to each other in the height direction. Adjacent main body segments 310 are connected by an arc-shaped connecting segment, resulting in the cooling channel 300 forming an S-shape in the height direction. Alternatively, several main body segments 310 may be connected by a straight connecting segment. It should be noted that the shape of the main body segments 310 matches the shape of the canister body 100. For example, if the cross-section of the canister body 100 is circular, the main body segments 310 will have an arc shape that matches the canister body 100.

[0060] In other embodiments, the main body segments 310 may also be arranged vertically, with multiple main body segments 310 arranged at intervals in the horizontal direction, and one end of two adjacent main body segments 310 connected by an arc-shaped connecting segment, so that the cooling channel 300 is S-shaped in the horizontal direction; of course, several main body segments 310 may also be connected by a straight connecting segment.

[0061] Furthermore, at least some of the main body segments 310 are arranged at equal intervals.

[0062] It is understandable that when a cooling structure is provided on the side of the filter tank body 100 away from the air inlet, all the main sections 310 on the side of the filter tank body 100 may be arranged at equal intervals, or some of the main sections 310 may be arranged at equal intervals. When a cooling structure is provided on the bottom of the filter tank body 100 away from the air inlet, all the main sections 310 on the bottom of the filter tank body 100 may be arranged at equal intervals, or some of the main sections 310 may be arranged at equal intervals. When cooling structures are provided on both the side and bottom of the filter tank body 100 away from the air inlet, all the main sections 310 on the side of the filter tank body 100 may be arranged at equal intervals, or some of the main sections 310 may be arranged at equal intervals; and all the main sections 310 on the bottom of the filter tank body 100 may be arranged at equal intervals, or some of the main sections 310 may be arranged at equal intervals.

[0063] Optionally, the cross section of the main body section 310 is circular, and the aperture of the main body section 310 may be between 20 mm and 50 mm.

[0064] It is understood that when the aperture of the cooling channel 300 is too small, the water flow rate is low and the water inlet time is long; when the aperture of the cooling channel 300 is too large, the water flow rate is slow, and the water inlet time is increased. Therefore, preferably, the aperture of the main section 310 is between 30 mm and 40 mm, so that the water inlet flow rate meets the cooling requirements of the filter tank body 100. It should be noted that the aperture of the cooling channel 300 can be any value within the above range and is not specifically limited here.

[0065] In one embodiment of the present invention, the distance between two adjacent main body segments 310 is 30 mm to 70 mm.

[0066] It is understood that when the distance between two adjacent main segments 310 is too narrow, an excessive number of main segments 310 are required, increasing manufacturing costs. When the distance between two adjacent main segments 310 is too wide, the water flow rate in the cooling channel 300 is slow, increasing the cooling time of the cooling channel 300. Therefore, preferably, the distance between two adjacent main segments 310 is between 40 mm and 60 mm, which neither increases cooling time nor costs. It should be noted that the distance between two adjacent main segments 310 can be any value within the above range and is not specifically limited here.

[0067] In an optional embodiment of the present invention, Figures 4 to 6 As shown, the filter tank body 100 includes a tank cover, a tank bottom, and a tank body connecting the tank cover and the tank bottom; an air inlet is set at the lower part of one side of the tank body, the lower end of the air guide duct 200 serves as the outlet end 240, and the upper end of the air guide duct 200 serves as the outlet end 240, then the upper end of the air guide duct 200 is connected to the air guide port at the bottom of the furnace body, and the lower end of the air guide duct 200 is connected to the air inlet of the tank body.

[0068] A cooling structure is provided on the side of the tank body away from the air inlet. The cooling structure includes a plurality of main body sections 310 connected in sequence. The plurality of main body sections 310 are arranged in parallel and spaced apart in the height direction. Preferably, all the main body sections 310 are arranged at equal intervals.

[0069] A cooling structure is provided on the side of the tank bottom away from the air inlet. The cooling structure includes a first cooling portion and a second cooling portion. The first cooling portion includes a plurality of main segments 310 arranged parallel to and spaced apart from each other along the height direction on the tank bottom sidewall. Preferably, the plurality of main segments 310 on the tank bottom sidewall are arranged at equal intervals. The second cooling portion includes a plurality of main segments 310 arranged horizontally and spaced apart from each other on the tank bottom wall. Preferably, the plurality of main segments 310 on the tank bottom wall are arranged at equal intervals. It should be noted that the cooling structure on the tank body, the first cooling portion on the tank bottom sidewall, and the second cooling portion on the tank bottom wall are sequentially connected.

[0070] It is understandable that the cooling structure is provided on one side and the bottom of the canister body 100 to improve the cooling and deposition of volatiles on the side of the canister body 100 away from the air duct 200 .

[0071] It should be noted that the filter tank body 100 of this embodiment is a single-stage filter, which does not require the introduction of other graded filtering mechanisms, has a simple structure, and reduces the difficulty of maintenance.

[0072] Preferably, a cooling structure is provided in half of the tank body and the tank bottom, and the cooling channel 300 of the cooling structure is cooled by water.

[0073] The embodiment of the second aspect of the present invention proposes a single crystal furnace, which includes a furnace body and a filter tank. The filter tank adopts the single crystal furnace filter tank provided by any of the above embodiments, and the inlet end 250 of the air guide pipe 200 is connected to the air guide port of the furnace body.

[0074] It should be noted that, due to the very high melt temperature during the silicon single crystal pulling process, the molten silicon will react with the quartz crucible to generate a large amount of volatiles such as silicon oxide in the furnace body. The vacuum pump draws the argon gas containing silicon oxide out of the furnace body. A filter tank is set between the furnace body of the single crystal furnace and the vacuum pump to filter out volatiles such as silicon oxide in the argon gas flow, thereby preventing gas particles such as silicon oxide from entering the pump cavity of the vacuum pump and causing damage to the vacuum pump.

[0075] Specifically, the furnace body is connected to the filter tank body 100 through the gas guide pipe 200. The argon gas carrying volatiles in the furnace body enters the filter tank body 100 through the gas guide pipe 200 for filtration. As the operating time increases, the volatiles are easily deposited in the gas guide pipe 200 and cause the pipe to be blocked. Therefore, this embodiment adds an insulation structure 210 to the gas guide pipe 200 to reduce the deposition of volatiles in the gas guide pipe 200 during operation.

[0076] Furthermore, an insulation layer is added to the air guide duct 200 to reduce the deposition of volatiles in the duct during operation; at the same time, a cooling flow channel 300 is constructed on the side of the filter tank body 100 away from the air inlet to accelerate the deposition of volatiles on the side of the filter tank body 100 away from the air guide duct 200, thereby preventing volatiles from entering the furnace body during return air.

[0077] The single crystal furnace provided in the embodiment of the present invention is designed with an insulation structure 210 in the air duct 200 connected to the filter tank body 100 to reduce the condensation of volatiles in the air duct 200, thereby preventing the volatiles from being deposited inside the air duct 200 and clogging the pipeline, thereby avoiding frequent shutdowns for maintenance and improving production efficiency.

[0078] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A single crystal furnace filter tank, characterized in that: include: A filter tank body, wherein the filter tank body has an air inlet; An air guide duct, wherein the outlet end of the air guide duct is connected to the air inlet, the inlet end of the air guide duct is used to be connected to the air guide port of the furnace body, and the air guide duct has a heat insulation structure.

2. The single crystal furnace filter tank according to claim 1, characterized in that: The heat-insulating structure includes a heat-insulating layer arranged on the air-guiding duct.

3. The single crystal furnace filter tank according to claim 2, characterized in that: The air guide duct includes an inner tube and an outer tube, and the heat insulation layer is arranged between the inner tube and the outer tube.

4. The single crystal furnace filter tank according to any one of claims 1 to 3, characterized in that: A cooling structure is provided on a side of the filter tank body away from the air inlet.

5. The single crystal furnace filter tank according to claim 4, characterized in that: The cooling structure is arranged on the side of the filter tank body away from the air inlet and / or on the bottom of the filter tank body away from the air inlet.

6. The single crystal furnace filter tank according to claim 4, characterized in that: The filter tank body includes an inner wall and an outer wall; The cooling structure includes a cooling channel constructed between the inner wall and the outer wall.

7. The single crystal furnace filter tank according to claim 6, characterized in that: The cooling channel includes a plurality of main body segments that are connected in sequence; the plurality of main body segments are arranged in parallel and spaced apart, and the plurality of main body segments are connected by arc-shaped connecting segments and / or straight-line connecting segments.

8. The single crystal furnace filter tank according to claim 7, characterized in that: At least some of the main body segments are arranged at equal intervals.

9. The single crystal furnace filter tank according to claim 7, characterized in that: The distance between two adjacent main body segments is 30 mm to 70 mm.

10. A single crystal furnace, characterized in that: It comprises a furnace body and the single crystal furnace filter tank according to any one of claims 1 to 9, wherein the inlet end of the gas guide pipe is connected to the gas guide port of the furnace body.

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