Chassis and reduction furnace

Abstract

The utility model provides a chassis and a reduction furnace, and belongs to the technical field of polycrystalline silicon production. The chassis comprises a chassis body; the first electrode group is provided with at least 14 pairs of first electrodes, and the at least 14 pairs of first electrodes are arranged at intervals along the first annular ring located on the disc body; the second electrode group is provided with at least 14 pairs of second electrodes, at least 2 pairs of second electrodes are arranged on the first annular ring at intervals, and at least 12 pairs of second electrodes are arranged along the second annular ring located on the disc body at intervals; the third electrode group is provided with at least 12 pairs of third electrodes, at least 4 pairs of third electrodes are arranged at intervals along a third annular ring located on the disc body, and at least 8 pairs of third electrodes are arranged at intervals along a fourth annular ring located on the disc body; and the inner diameters of the first annular ring, the second annular ring, the third annular ring and the fourth annular ring are sequentially reduced. The electrode power supply layout on the chassis is reduced from 6 phases to 3 phases, so that the investment of a power adjusting cabinet and matched power supply auxiliary materials is reduced, and the cost is saved.

Description

Technical Field

[0001] The utility model belongs to the technical field of polysilicon production, and in particular relates to a chassis and a reduction furnace. Background Art

[0002] At present, with the development of polysilicon reduction furnaces, reduction furnaces of different sizes have gradually emerged, including 9 pairs of rods, 12 pairs of rods, 24 pairs of rods, 36 pairs of rods, 40 pairs of rods, 48 ​​pairs of rods, 56 pairs of rods, 60 pairs of rods, 72 pairs of rods, and 108 pairs of rods. The most widely used reduction furnace in the industry should be the 40-pair-rod reduction furnace.

[0003] The power supply electrode layouts for a 40-pair rod reduction furnace generally come in two types: a ring layout and a diamond layout. The ring layout, due to its uniform silicon rod layout and relatively uniform internal temperature and gas fields, is arranged in four layers on the reduction furnace chassis, from the inside out. The chassis typically has 20-30 air inlet holes, arranged in a four-layer ring pattern: one in the center and three outer layers, located between each ring layer of electrodes, to ensure uniform air intake. The 40-pair rod reduction furnace uses a six-phase power supply structure, supplying six phases to the reduction furnace. The transformer connects six power control cabinets via copper busbars, one for each phase, and a control cabinet is provided to control the operation of the six control cabinets. The reduction equipment accounts for a significant portion of the overall polysilicon system construction investment, resulting in high manufacturing costs and high prices for the reduction furnace (including the accompanying air inlet and outlet skids) and its accompanying power supply. Utility Model Content

[0004] In view of the above problems in the prior art, the present invention aims to provide a chassis and a reduction furnace. The chassis reduces the electrode power supply layout from 6 phases to 3 phases, thereby reducing the investment in power control cabinets and supporting power supply auxiliary materials and saving costs.

[0005] The technical solution adopted in the embodiment of the utility model is:

[0006] A chassis, used in a reduction furnace, comprising:

[0007] disc body;

[0008] a first electrode group having at least 14 pairs of first electrodes, wherein at least the 14 pairs of first electrodes are spaced apart along a first annular ring located on the disk;

[0009] a second electrode group having at least 14 pairs of second electrodes, at least 2 pairs of second electrodes being spaced apart on the first annular ring, and at least 12 pairs of second electrodes being spaced apart along the second annular ring on the disk;

[0010] a third electrode group comprising at least 12 pairs of third electrodes, at least 8 pairs of third electrodes being spaced apart along a third annular ring on the disk, and at least 4 pairs of third electrodes being spaced apart along a fourth annular ring on the disk;

[0011] The first annular ring, the second annular ring, the third annular ring and the fourth annular ring are concentrically arranged, and the inner diameters of the first annular ring, the second annular ring, the third annular ring and the fourth annular ring decrease in sequence.

[0012] Furthermore, the chassis further comprises:

[0013] an air outlet group, provided on a fifth annular ring located on the disc body;

[0014] a first air inlet group, provided on a sixth annular ring located on the disc body;

[0015] a second air inlet group, provided on a seventh annular ring located on the disc body;

[0016] a third air inlet hole group, provided on an eighth annular ring located on the disc body;

[0017] The fifth annular ring is located outside the first annular ring, the sixth annular ring is located between the first annular ring and the second annular ring, the seventh annular ring is located between the second annular ring and the third annular ring, and the eighth annular ring is located between the third annular ring and the fourth annular ring.

[0018] Furthermore, the number of air inlet holes in the first air inlet hole group and the number of air inlet holes in the second air inlet hole group are both 12, and the number of air inlet holes in the third air inlet hole group is 4.

[0019] Furthermore, the number of the first air inlet hole groups and the number of the second air inlet hole groups are at least 3, and the first air inlet hole groups and the second air inlet hole groups are staggered.

[0020] Furthermore, the apertures of the air inlet holes of the first air inlet hole group, the apertures of the air inlet holes of the second air inlet hole group, and the apertures of the air inlet holes of the third air inlet hole group are all between 50 mm and 60 mm, and the apertures of the air outlet holes in the air outlet hole group are between 150 mm and 200 mm.

[0021] Furthermore, the disc body is a circular structure, and the outer diameter of the disc body is between 3500mm and 3600mm.

[0022] Furthermore, the center distance between two adjacent first electrodes, the center distance between two adjacent second electrodes, and the center distance between two adjacent third electrodes are all 240 mm-260 mm.

[0023] Furthermore, the first annular ring, the second annular ring, the third annular ring, the fourth annular ring, the fifth annular ring, the sixth annular ring, the seventh annular ring and the eighth annular ring are all circular coils.

[0024] A reduction furnace comprises a chassis as described in any one of the above embodiments.

[0025] Furthermore, the reduction furnace also includes a power supply system and a control cabinet, the power supply system is connected to the control cabinet, the control cabinet includes an A-phase power tuning cabinet, a B-phase power tuning cabinet and a C-phase power tuning cabinet, the A-phase power tuning cabinet is electrically connected to the first electrode group, the B-phase power tuning cabinet is electrically connected to the second electrode group, and the C-phase power tuning cabinet is electrically connected to the third electrode group.

[0026] Compared with the prior art, the beneficial effects of the embodiments of the present invention are:

[0027] On the chassis of the present invention, the first electrode group is connected to the A-phase power supply, the second electrode group is connected to the B-phase power supply, and the third electrode group is connected to the C-phase power supply. In this way, the electrode power supply layout on the disk can be reduced from 6 phases to 3 phases, effectively ensuring the ABC three-phase, thereby reducing the investment in the additional 3 power control cabinets and supporting power supply auxiliary materials, reducing costs, and the silicon rods of each phase are basically located in the same temperature gradient layer, which can effectively ensure the regulation of the current and uniform temperature control of the silicon rods of each phase during the reduction furnace control process.

[0028] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present invention.

[0029] The overview of various implementations or examples of the technology described in this utility model is not a comprehensive disclosure of the entire scope or all features of the disclosed technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In the drawings, which are not necessarily drawn to scale, the same reference numerals may describe similar components in different views. The drawings illustrate various embodiments generally by way of example and not limitation, and together with the description and claims, serve to illustrate the embodiments of the invention. Where appropriate, the same reference numerals are used throughout the drawings to refer to the same or similar parts.

[0031] Figure 1 This is a schematic structural diagram of the chassis of an embodiment of the utility model;

[0032] Figure 2 This is a schematic structural diagram of a reduction furnace according to an embodiment of the present utility model.

[0033] In the figure: 1. disk; 101. first annular ring; 102. second annular ring; 103. third annular ring; 104. fourth annular ring; 105. fifth annular ring; 106. sixth annular ring; 107. seventh annular ring; 108. eighth annular ring; 2. first electrode group; 3. second electrode group; 4. third electrode group; 5. air outlet group; 6. first air inlet group; 7. second air inlet group; 8. third air inlet group; 9. control cabinet; 91. A-phase power adjustment cabinet; 92. B-phase power adjustment cabinet; 93. C-phase power adjustment cabinet; 10. transformer; 11. power supply system; 12. furnace body. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the described embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] Unless otherwise defined, the technical or scientific terms used in this utility model should have the usual meanings understood by people with ordinary skills in the field to which this utility model belongs. The "first", "second" and similar words used in this utility model do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly. In order to keep the following description of the embodiments of the utility model clear and concise, the utility model omits detailed descriptions of known functions and known components.

[0036] The present invention provides a chassis for a reduction furnace, such as Figure 1 As shown, the chassis includes a chassis body 1 and a first electrode group 2, a second electrode group 3, and a third electrode group 4, respectively, disposed on the chassis body 1. The electrode power supply circuit has a three-phase layout, divided into three phases, A, B, and C. Phase A is connected to the first electrode group 2, phase B is connected to the second electrode group 3, and phase C is connected to the third electrode group 4.

[0037] The first electrode group 2 has at least 14 pairs of first electrodes, and the at least 14 pairs of first electrodes are spaced apart along the first annular ring 101 on the disk 1, so as to ensure that the outer ring of the disk 1 as a whole is in a lower temperature gradient range.

[0038] The second electrode group 3 also has at least 14 pairs of second electrodes, and at least two pairs of second electrodes are adjacently arranged on the first annular ring 101 , wherein adjacent arrangement can be understood as that there are no other electrodes before the two pairs of second electrodes.

[0039] In addition, at least 12 pairs of second electrodes are spaced apart along the second annular ring 102 on the disk 1, so as to be substantially in a relatively high second temperature gradient range.

[0040] The third electrode group 4 has at least 12 pairs of third electrodes, at least 8 pairs of third electrodes are arranged at intervals along the third annular ring 103 located on the disk body 1, and at least 4 pairs of third electrodes are arranged at intervals along the fourth annular ring 104 located on the disk body 1, so that the entire furnace is in the highest third temperature gradient range in the center.

[0041] like Figure 1 As shown, in this embodiment, the first annular ring 101, the second annular ring 102, the third annular ring 103 and the fourth annular ring 104 are concentrically arranged on the disc body 1. The inner diameters of the first annular ring 101, the second annular ring 102, the third annular ring 103 and the fourth annular ring 104 decrease in sequence.

[0042] On the chassis of this embodiment, the first electrode group 2 is connected to the A-phase power supply, the second electrode group 3 is connected to the B-phase power supply, and the third electrode group 4 is connected to the C-phase power supply. In this way, the electrode power supply layout on the disk body 1 can be reduced from 6 phases to 3 phases, effectively ensuring the ABC three-phase, thereby reducing the investment in the additional 3 power control cabinets and supporting power supply auxiliary materials, reducing costs, and the silicon rods of each phase are basically located in the same temperature gradient layer, which can effectively ensure the regulation of the current and uniform temperature control of the silicon rods of each phase during the reduction furnace control process.

[0043] In the embodiment of the present application, the first electrode group 2 having 14 pairs of first electrodes, the second electrode group 3 having 14 pairs of second electrodes, and the third electrode group 4 having 12 pairs of third electrodes are used as an example for description, that is, the disk 1 has 40 pairs of electrodes.

[0044] like Figure 1 As shown, in some embodiments, the chassis further includes an air outlet hole group 5 , a first air inlet hole group 6 , a second air inlet hole group 7 and a third air inlet hole group 8 .

[0045] The air outlet hole group 5 is provided on the fifth annular ring 105 located on the disc body 1, the first air inlet hole group 6 is provided on the sixth annular ring 106 located on the disc body 1, the second air inlet hole group 7 is provided on the seventh annular ring 107 located on the disc body 1, and the third air inlet hole group 8 is provided on the eighth annular ring 108 located on the disc body 1.

[0046] Among them, the fifth annular ring 105 on the disk body 1 is located outside the first annular ring 101, the sixth annular ring 106 is located between the first annular ring 101 and the second annular ring 102, the seventh annular ring 107 is located between the second annular ring 102 and the third annular ring 103, and the eighth annular ring 108 is located between the third annular ring 103 and the fourth annular ring 104.

[0047] like Figure 1 As shown, the number of the air inlet holes in the third air inlet hole group 8 is 4, and the third air inlet hole group 8 is evenly distributed on the eighth annular ring 108 on the disc body 1, which can ensure uniform feeding inside the reduction furnace.

[0048] Furthermore, the number of the air inlet holes in the first air inlet hole group 6 and the number of the air inlet holes in the second air inlet hole group 7 are both 12, thereby ensuring uniform feeding in the area.

[0049] In some embodiments, the number of first air inlet hole groups 6 and second air inlet hole groups 7 is at least three, and the first air inlet hole groups 6 and second air inlet hole groups 7 are staggered circumferentially. This maximizes the uniformity of the feeding of the electrode silicon rods on the sixth annular ring 106 and the seventh annular ring 107. During operation, the temperature gradient of the reduction furnace is highest towards the center due to heat radiation and convection. In current high-volume, high-temperature processes, this is done to minimize the risk of atomization in the reduction furnace during late operation and ensure stable operation.

[0050] In some embodiments, the apertures of the air inlet holes of the first air inlet hole group 6, the apertures of the air inlet holes of the second air inlet hole group 7, and the apertures of the air inlet holes of the third air inlet hole group 8 are all between 50 mm and 60 mm, and various types of air inlet nozzles are installed later.

[0051] The diameter of the vent holes in the vent hole group 5 is between 150 mm and 200 mm. The vent hole group 5 is located outside the first annular ring 101 to be away from the air inlet, which can prevent the feed from short-circuiting and escaping directly from the vent holes.

[0052] In some embodiments, the disc body 1 may be a circular structure, with an outer diameter of the disc body 1 between 3500 mm and 3600 mm. A chassis water jacket may also be provided inside the disc body 1 .

[0053] The centers of the first to eighth annular rings 101 to 108 share the same center as the disk body 1. The first annular ring 101, the second annular ring 102, the third annular ring 103, the fourth annular ring 104, the fifth annular ring 105, the sixth annular ring 106, the seventh annular ring 107 and the eighth annular ring 108 are all circular coils.

[0054] In some embodiments, the center distance between two adjacent first electrodes, the center distance between two adjacent second electrodes, and the center distance between two adjacent third electrodes are all 240mm-260mm. Such uniform distribution can ensure that the silicon rods have sufficient growth space during growth, and the diameter of the product silicon rods can grow to more than 180mm.

[0055] An embodiment of the present invention further provides a reduction furnace, which includes a furnace body 12 and a chassis according to any one of the above embodiments, wherein the chassis is fixed to the bottom of the furnace body 12 .

[0056] like Figure 2 As shown, the original furnace also includes a power supply system 11 and a control cabinet 9. The power supply system 11 is connected to the control cabinet 9 through a transformer 10. The control cabinet 9 includes an A-phase power regulating cabinet 91, a B-phase power regulating cabinet 92 and a C-phase power regulating cabinet 93.

[0057] The A-phase power tuning cabinet 91 is electrically connected to the first electrode group 2 , the B-phase power tuning cabinet 92 is electrically connected to the second electrode group 3 , and the C-phase power tuning cabinet 93 is electrically connected to the third electrode group 4 .

[0058] In some embodiments, the power supply system 11 may be a 10KV or 20KV power supply connected to a 220KV or 110KV main substation switch cabinet.

[0059] Transformer 10, made of copper and capable of 9,000-11,000 kVA, supplies power to three corresponding power control cabinets (three-phase A, B, and C). The input and output circuits of these three power control cabinets, A, B, and C, are connected to the power supply circuits of the first electrode group 2 through the third electrode group 4 on the chassis via copper plates, ensuring stable power supply to at least 40 pairs of rod reduction furnaces.

[0060] The above description is intended to be illustrative rather than restrictive, and those skilled in the art may make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present disclosure. Furthermore, the above examples (or one or more of them) may be used in combination with each other, and it is contemplated that these embodiments may be combined with each other in various combinations or permutations.

Claims

1. A chassis used in a reduction furnace, characterized in that: include: disc body; a first electrode group having at least 14 pairs of first electrodes, wherein at least the 14 pairs of first electrodes are spaced apart along a first annular ring located on the disk; a second electrode group having at least 14 pairs of second electrodes, at least 2 pairs of second electrodes being spaced apart on the first annular ring, and at least 12 pairs of second electrodes being spaced apart along the second annular ring on the disk; a third electrode group comprising at least 12 pairs of third electrodes, at least 8 pairs of third electrodes being spaced apart along a third annular ring on the disk, and at least 4 pairs of third electrodes being spaced apart along a fourth annular ring on the disk; The first annular ring, the second annular ring, the third annular ring and the fourth annular ring are concentrically arranged, and the inner diameters of the first annular ring, the second annular ring, the third annular ring and the fourth annular ring decrease in sequence.

2. A chassis according to claim 1, characterized in that: The chassis also includes: an air outlet group, provided on a fifth annular ring located on the disc body; a first air inlet group, provided on a sixth annular ring located on the disc body; a second air inlet group, provided on a seventh annular ring located on the disc body; a third air inlet hole group, provided on an eighth annular ring located on the disc body; The fifth annular ring is located outside the first annular ring, the sixth annular ring is located between the first annular ring and the second annular ring, the seventh annular ring is located between the second annular ring and the third annular ring, and the eighth annular ring is located between the third annular ring and the fourth annular ring.

3. A chassis as claimed in claim 2, characterized in that: The number of air inlet holes in the first air inlet hole group and the number of air inlet holes in the second air inlet hole group are both 12, and the number of air inlet holes in the third air inlet hole group is 4.

4. A chassis as claimed in claim 2, characterized in that: The number of the first air inlet hole groups and the number of the second air inlet hole groups are at least 3, and the first air inlet hole groups and the second air inlet hole groups are staggered.

5. A chassis as claimed in claim 2, characterized in that: The apertures of the air inlet holes of the first air inlet hole group, the apertures of the air inlet holes of the second air inlet hole group, and the apertures of the air inlet holes of the third air inlet hole group are all between 50 mm and 60 mm, and the apertures of the air outlet holes in the air outlet hole group are between 150 mm and 200 mm.

6. A chassis as claimed in claim 1, characterized in that: The disc body is a circular structure, and the outer diameter of the disc body is between 3500mm and 3600mm.

7. A chassis as claimed in claim 1, characterized in that: The center distance between two adjacent first electrodes, the center distance between two adjacent second electrodes, and the center distance between two adjacent third electrodes are all 240 mm-260 mm.

8. A chassis as claimed in claim 2, characterized in that: The first annular ring, the second annular ring, the third annular ring, the fourth annular ring, the fifth annular ring, the sixth annular ring, the seventh annular ring, and the eighth annular ring are all circular coils.

9. A reduction furnace, characterized in that: A chassis comprising any one of claims 1-8.

10. The reduction furnace according to claim 9, characterized in that The reduction furnace also includes a power supply system and a control cabinet, the power supply system is connected to the control cabinet, the control cabinet includes an A-phase power tuning cabinet, a B-phase power tuning cabinet and a C-phase power tuning cabinet, the A-phase power tuning cabinet is electrically connected to the first electrode group, the B-phase power tuning cabinet is electrically connected to the second electrode group, and the C-phase power tuning cabinet is electrically connected to the third electrode group.

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