Scribing saw main shaft sealing ring and scribing saw main shaft sealing structure

Abstract

The utility model discloses a dicing saw main shaft sealing ring which comprises a ring body made of engineering plastics, the section shape of an inner ring of the ring body is the same as the section shape of a dicing saw main shaft, and the ring body is provided with a notch. The utility model further discloses a dicing saw main shaft sealing structure which comprises the dicing saw main shaft sealing circular ring, a sliding plate and a clamping plate, when the dicing saw main shaft sealing structure is used, the dicing saw main shaft moves in the vertical direction to drive the sliding plate to move in the vertical direction along the clamping plate, and the dicing saw main shaft moves in a reciprocating telescopic mode. The circular ring body completely scrapes water drops on the scribing machine main shaft, the sliding plate can be matched with the scribing machine main shaft to move in the vertical direction, the circular ring body can be fixed, and it is guaranteed that the scribing machine main shaft is always in close fit with the circular ring body in the moving process; therefore, the sealing structure of the main shaft of the scribing machine can effectively improve the sealing effect on the main shaft.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing equipment, in particular to a dicing machine main shaft sealing ring and a dicing machine main shaft sealing structure. Background Art

[0002] For semi-automatic single-axis wafer saws with a horizontal layout, the electric spindle undergoes both reciprocating and telescopic motion, as well as vertical movement relative to the cutting chamber. Sealing this system has long been a challenge in the industry. Traditional sealed wall accordion covers are bulky and unsuitable for the miniaturization requirements of current semi-automatic single-axis wafer saws, so they have not been adopted by the industry. While the sealing structures of existing solutions are compact, their sealing effectiveness and service life are generally poor. Traditional sealing methods use soft materials such as rubber sheets with an orifice machined to match the cross-sectional shape of the spindle. A rubber band around the orifice contacts the outer periphery of the spindle, scraping away water as the spindle moves.

[0003] However, this method has the following disadvantages: 1. Machining a contoured cross-section on a soft material is difficult, dimensional accuracy cannot be guaranteed, and sealing effectiveness is generally poor. 2. It has a short service life. The rubber sheet and the spindle will wear out after prolonged reciprocating friction. Once worn, the initial interference fit required to ensure the seal is reduced, and the seal will fail.

[0004] Therefore, how to improve the sealing effect of the main shaft is a technical problem that those skilled in the art currently need to solve. Utility Model Content

[0005] In view of this, the first object of the present invention is to provide a dicing machine spindle sealing ring to improve the sealing effect of the spindle;

[0006] The second purpose of the present invention is to provide a spindle structure for a dicing machine.

[0007] In order to achieve the above first purpose, the present invention provides the following technical solutions:

[0008] A dicing machine spindle sealing ring comprises a ring body, the ring body is made of engineering plastic, the inner ring cross-section of the ring body is the same as the cross-section of the dicing machine spindle, and the ring body is provided with a cutout.

[0009] Optionally, in the above-mentioned dicing machine spindle sealing ring, the inner ring diameter of the ring body is smaller than the diameter of the dicing machine spindle.

[0010] The utility model provides a dicing machine spindle sealing ring. When in use, the dicing machine spindle is inserted into the interior of the ring body, and the outer periphery of the dicing machine spindle cooperates with the inner ring of the ring body to achieve sealing of the dicing machine spindle. Because the ring body is engineering plastic, the processing difficulty of the inner ring of the ring body is reduced, and its size is more precise. Compared with traditional rubber materials, engineering plastics are harder in texture, so under the premise of achieving the same sealing effect, the thickness can be made thinner. At the same time, the incision of the dicing machine spindle sealing ring makes the ring body elastic, and the ring body changes from a closed structure to an open structure. It can still maintain sufficient holding force under long-term wear and tear, and the sealing life is longer. Furthermore, compared with traditional rubber materials, engineering plastics have a smaller friction coefficient and smaller reciprocating resistance, which ensures the moving efficiency of the dicing machine spindle. Therefore, the dicing machine spindle sealing ring provided by the utility model can effectively improve the sealing effect on the spindle.

[0011] In order to achieve the above second purpose, the present invention provides the following technical solutions:

[0012] A dicing machine spindle sealing structure includes the dicing machine spindle sealing ring described in any one of the above items, and also includes a sliding plate and a clamping plate. The sliding plate is provided with an installation ring groove, and the installation ring groove cooperates with the outer ring of the ring body of the dicing machine spindle sealing ring. The sliding plate is connected to the clamping plate and can move in a vertical direction relative to the clamping plate.

[0013] Optionally, in the above-mentioned dicing machine spindle sealing structure, the groove width of the mounting ring groove is an integer multiple of the thickness of the circular ring body.

[0014] Optionally, in the above-mentioned dicing machine spindle sealing structure, a plurality of bosses are arranged on the groove wall of the mounting ring groove extending along the center direction of the mounting ring groove, and the bosses are used to shield the circular ring body.

[0015] Optionally, in the above-mentioned dicing machine spindle sealing structure, the outer ring diameter of the annular body is smaller than the inner diameter of the groove bottom of the mounting ring groove.

[0016] Optionally, in the above-mentioned dicing machine spindle sealing structure, when the number of the dicing machine spindle sealing rings is more than two, the cutouts of two adjacent ring bodies are staggered.

[0017] Optionally, in the above-mentioned dicing machine spindle sealing structure, the clamping plate includes a first connecting plate, an upper baffle and a second connecting plate, the first connecting plate, the upper baffle and the second connecting plate are connected in sequence in an "n" shape, the first connecting plate is provided with a first slide groove, the second connecting plate is provided with a second slide groove, the first slide groove and the second slide groove are arranged opposite to each other, and are respectively used to clamp the two sides of the sliding plate, and the upper baffle is used to limit the top of the sliding plate.

[0018] Optionally, in the above-mentioned sawing machine spindle sealing structure, the first slide groove and the second slide groove are stepped slide grooves, and the sawing machine spindle sealing structure also includes a front baffle, which is arranged close to the first slide groove and the second slide groove and is fixedly connected to the clamping plate.

[0019] Optionally, in the above-mentioned dicing machine spindle sealing structure, the front baffle is provided with a accommodating hole, the top of the accommodating hole is arched, the bottom of the accommodating hole is square, and the cross-sectional shape of the accommodating hole is the same as the cross-sectional shape of the moving trajectory of the dicing machine spindle along the vertical direction.

[0020] The utility model provides a dicing machine spindle sealing structure. When in use, the annular body is clamped in the inside of the mounting ring groove, the sliding plate is connected to the clamping plate, and the dicing machine spindle is extended into the inside of the annular body. The outer periphery of the dicing machine spindle cooperates with the inner ring of the annular body. The dicing machine spindle moves in the vertical direction, driving the sliding plate to move in the vertical direction along the clamping plate. The dicing machine spindle moves back and forth, and the annular body scrapes off the water droplets on the dicing machine spindle. The sliding plate can cooperate with the dicing machine spindle to move in the vertical direction and can fix the annular body, ensuring that the dicing machine spindle is always closely matched with the annular body during the movement, so that the dicing machine spindle sealing structure provided by the utility model can effectively improve the sealing effect of the spindle. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 This is an overall structural diagram of the dicing machine spindle sealing structure disclosed in an embodiment of the present utility model;

[0023] Figure 2 This is a schematic structural diagram of a dicing machine spindle sealing ring disclosed in an embodiment of the present utility model;

[0024] Figure 3This is a schematic structural diagram of a sliding plate disclosed in an embodiment of the present utility model;

[0025] Figure 4 A side view of the dicing machine spindle sealing structure disclosed in an embodiment of the present utility model;

[0026] in:

[0027] Slicer spindle sealing ring 100, ring body 101, cutout 102;

[0028] Sliding plate 200, mounting ring groove 201, boss 202;

[0029] Snap-on plate 300, first connecting plate 301, upper blocking bar 302, second connecting plate 303, first sliding groove 304, second sliding groove 305;

[0030] Front baffle 400 , receiving hole 401 . DETAILED DESCRIPTION

[0031] The following will be combined with the accompanying drawings of the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any novel efforts shall fall within the scope of protection of the present invention.

[0032] In the description of this utility model, it should be understood that the terms "upper," "lower," "top," and "bottom" and the like, indicating positions or positional relationships, are based on the positions or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They are not intended to indicate or imply that the positions or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] like Figure 2As shown, the dicing machine spindle sealing ring 100 disclosed in the present invention includes a ring body 101. The ring body 101 is made of engineering plastic, and the inner ring cross-sectional shape of the ring body 101 is the same as the cross-sectional shape of the dicing machine spindle. The ring body 101 is provided with a cutout 102. Specifically, the ring body 101 is an elastic plastic ring to hold the dicing machine spindle tightly, but it also has a certain hardness to facilitate processing and cutting. When the dicing machine spindle sealing ring 100 provided by the present invention is used, the dicing machine spindle is inserted into the interior of the ring body 101, and the outer periphery of the dicing machine spindle cooperates with the inner ring of the ring body 101 to achieve sealing of the dicing machine spindle. Because the annular body 101 is made of engineering plastic, the difficulty of processing the inner ring of the annular body 101 is reduced, making its size more precise. Compared with traditional rubber materials, engineering plastics are harder in texture, so under the premise of achieving the same sealing effect, the thickness can be made thinner. At the same time, the cutout 102 of the dicing machine spindle sealing ring 100 makes the annular body 101 elastic, and the annular body 101 changes from a closed structure to an open structure. It can still maintain sufficient holding force under long-term wear and tear, and the sealing life is longer. Furthermore, compared with traditional rubber materials, engineering plastics have a smaller friction coefficient and smaller reciprocating resistance, which ensures the moving efficiency of the dicing machine spindle. Therefore, the dicing machine spindle sealing ring 100 provided by the utility model can effectively improve the sealing effect on the spindle.

[0034] To optimize the above technical solution, the inner diameter of the annular body 101 is smaller than the diameter of the dicing machine spindle. Specifically, the inner ring shape of the annular body 101 mimics the shape of the dicing machine spindle, but its size is smaller than the size of the dicing machine spindle. When the annular body 101 is clamped onto the outer circumference of the dicing machine spindle, the annular body 101 elastically tightens around the dicing machine spindle, thereby effectively sealing the spindle.

[0035] like Figure 1 、 Figure 3 and Figure 4As shown, the dicing machine spindle sealing structure disclosed in the present invention includes any of the above-mentioned dicing machine spindle sealing rings 100, and also includes a sliding plate 200 and a clamping plate 300. The sliding plate 200 is provided with a mounting ring groove 201, and the mounting ring groove 201 cooperates with the outer ring of the ring body 101 of the dicing machine spindle sealing ring 100. The sliding plate 200 is connected to the clamping plate 300 and can move in the vertical direction relative to the clamping plate 300. Specifically, the clamping plate 300 is fixed together with the sheet metal of the cutting chamber of the dicing machine, so that the sliding plate 200 can be connected to the dicing machine. The utility model provides a dicing machine spindle sealing structure. When in use, the annular body 101 is clamped in the inside of the mounting ring groove 201, and the sliding plate 200 is connected to the clamping plate 300, and the dicing machine spindle is extended into the inside of the annular body 101. The outer periphery of the dicing machine spindle cooperates with the inner ring of the annular body 101, and the dicing machine spindle moves in the vertical direction, driving the sliding plate 200 to move in the vertical direction along the clamping plate 300. The dicing machine spindle moves back and forth, and the annular body 101 scrapes off the water droplets on the dicing machine spindle. The sliding plate 200 can cooperate with the dicing machine spindle to move in the vertical direction and can fix the annular body 101, ensuring that the dicing machine spindle is always closely matched with the annular body 101 during the movement, so that the dicing machine spindle sealing structure provided by the utility model can effectively improve the sealing effect of the spindle.

[0036] In order to optimize the above technical solution, the groove width of the mounting ring groove 201 is an integer multiple of the thickness of the circular ring body 101. Specifically, one or more circular ring bodies 101 can be installed inside the mounting ring groove 201 at the same time, and the operator can adjust the number of circular ring bodies 101 according to the needs of use to form different degrees of sealing on the dicing machine spindle. Specifically, the mounting ring groove 201 can be a groove body for installing multiple circular ring bodies 101 at the same time, and the groove width of the mounting ring groove 201 is slightly smaller than the thickness of the multiple circular ring bodies 101. Such an arrangement allows multiple circular ring bodies 101 to be squeezed into the same groove body, which can increase the clamping force between the multiple circular ring bodies 101, thereby effectively improving the sealing effect on the spindle. Specifically, the mounting ring groove 201 can also be composed of multiple single grooves, and a circular ring body 101 is arranged inside a single groove. The groove width of a single groove is slightly less than or equal to the thickness of the circular ring body 101. Such an arrangement allows the operator to freely increase or decrease the number of circular ring bodies 101 without being affected by the groove width of the mounting ring groove 201. At the same time, it is convenient to replace the circular ring body 101, thereby improving the flexibility of use of the spindle sealing structure of the dicing machine.

[0037] In order to optimize the above technical solution, the groove wall of the mounting ring groove 201 is extended along the center direction of the mounting ring groove 201 and is provided with a plurality of bosses 202, and the bosses 202 are used to shield the annular body 101. Specifically, the bosses 202 are evenly arranged on one side or both sides of the groove wall of the mounting ring groove 201. When the bosses 202 are arranged on one side of the groove wall, the annular body 101 can be clamped into the mounting ring groove 201 from the other side of the groove wall, which is convenient for installation. At the same time, the bosses 202 can shield the annular body 101 to prevent it from sliding along the reciprocating extension direction of the dicing machine main shaft, thereby ensuring the installation stability of the annular body 101. When the bosses 202 are arranged on both sides of the groove wall, the bosses 202 on both sides are arranged relative to each other or staggered to form a multi-point limit for the annular body 101, further ensuring the installation stability of the annular body 101. It should be noted that when the annular body 101 is installed, the cutout 102 can be arranged between the oppositely arranged bosses 202 to form a seal at the position of the cutout 102, thereby further improving the sealing effect on the main shaft.

[0038] To optimize the above technical solution, the outer diameter of the annular body 101 is smaller than the inner diameter of the bottom of the mounting groove 201. During use, because the annular body 101 is smaller than the mounting groove 201, when the annular body 101 is installed inside the mounting groove 201, the elastic annular body 101 has room to expand freely, thus tightly engaging the interior of the mounting groove 201 and further ensuring the installation stability of the annular body 101.

[0039] In order to optimize the above technical solution, when the number of the dicing machine spindle sealing rings 100 is more than two, the cutouts 102 of the two adjacent circular bodies 101 are staggered. Specifically, when the positions of the cutouts 102 of the circular bodies 101 are the same during production, the two adjacent circular bodies 101 can be placed forward and backward to achieve the staggered cutouts 102; the positions of the cutouts 102 of the circular bodies 101 during production can also be changed to achieve the staggered cutouts 102 of the two adjacent circular bodies 101 after installation. Staggering the cutouts 102 of the two adjacent circular bodies 101 can form a seal between the circular bodies 101, prevent water droplets from flowing out from the position of the cutouts 102, and further ensure the sealing effect of the circular body 101 on the dicing machine spindle.

[0040] To optimize the above technical solution, the clamping plate 300 includes a first connecting plate 301, an upper stop bar 302, and a second connecting plate 303. The first connecting plate 301, the upper stop bar 302, and the second connecting plate 303 are sequentially connected in an "n" shape. The first connecting plate 301 defines a first slide groove 304, and the second connecting plate 303 defines a second slide groove 305. The first slide groove 304 and the second slide groove 305 are arranged opposite each other and are respectively used to clamp the two sides of the sliding plate 200. The upper stop bar 302 is used to limit the top of the sliding plate 200. Specifically, the sliding plate 200 is clamped to the first slide groove 304 and the second slide groove 305 and can move up and down along the first slide groove 304 and the second slide groove 305. The bottom of the clamping plate 300 is designed to accommodate the downward movement of the clamping plate 300. The first slide groove 304 and the second slide groove 305 can be U-shaped grooves. When installed, the sliding plate 200 can be slidably connected to the inside of the first slide groove 304 and the second slide groove 305 from bottom to top. When in use, the dicing machine spindle moves in the vertical direction, driving the sliding plate 200 to slide inside the first slide groove 304 and the second slide groove 305. When the dicing machine spindle performs reciprocating telescopic motion, the sliding plate 200 and the clamping plate 300 fix the annular body 101 so that the annular body 101 can fit tightly with the dicing machine spindle. The upper stop bar 302 is used to limit the top of the sliding plate 200 and can connect the first connecting plate 301 and the second connecting plate 303. By arranging the clamping plate 300, the structural stability and reliability of the dicing machine spindle sealing structure are improved.

[0041] In order to optimize the above technical solution, the first slide groove 304 and the second slide groove 305 are stepped slide grooves, and the dicing machine spindle sealing structure also includes a front baffle 400, which is arranged near the first slide groove 304 and the second slide groove 305 and is fixedly connected to the clamping plate 300. Specifically, the two sides of the sliding plate 200 are stepped slide grooves that match the above-mentioned stepped slide grooves. When the sliding plate 200 is matched with the clamping plate 300, the stepped slide grooves on both sides fit tightly, and the sliding plate 200 can move relative to the clamping plate 300. Specifically, the front baffle 400 is fixedly connected to the first connecting plate 301, the upper baffle 302 and the second connecting plate 303 by screws. At the same time, the front baffle 400 is installed together with the sheet metal of the cutting chamber of the dicing machine to form a fixed connection, thereby achieving a stable connection between the clamping plate 300 and the dicing machine. During use, the annular body 101 is first fixed to the sliding plate 200, and then the sliding plate 200 is slidably connected to the clamping plate 300, and the clamping plate 300 is fixedly connected to the front baffle 400, so that the sliding plate 200 is enclosed between the clamping plate 300 and the front baffle 400, forming a dicing machine spindle sealing structure. Finally, the dicing machine spindle sealing structure is fixed to the dicing machine, participating in the sealing of the dicing machine spindle. By arranging the front baffle 400, the sliding plate 200 is limited, and both sides of the sliding plate 200 are sealed, further effectively improving the sealing effect on the spindle.

[0042] In order to optimize the above technical solution, the front baffle 400 is provided with a receiving hole 401. The top of the receiving hole 401 is arched, the bottom of the receiving hole 401 is square, and the cross-sectional shape of the receiving hole 401 is the same as the cross-sectional shape of the movement trajectory of the dicing machine spindle in the vertical direction. During use, when the dicing machine spindle moves in the vertical direction, the front baffle 400 is fixed and the dicing machine spindle moves inside the receiving hole 401. Because the cross-sectional shape of the receiving hole 401 is the same as the cross-sectional shape of the movement trajectory of the dicing machine spindle in the vertical direction, the sliding plate 200 is limited, so that the sliding plate 200 and the annular body 101 can cooperate with the movement of the dicing machine spindle while having a high displacement accuracy, thereby improving the structural stability and practicality of the dicing machine spindle sealing structure.

[0043] The advantages of the utility model are:

[0044] (1) Improved the sealing effect on the main shaft;

[0045] (2) High structural stability and reliability;

[0046] (3) High flexibility and practicality.

[0047] It should be noted that the dicing machine spindle sealing ring and dicing machine spindle sealing structure provided by the present invention can be used in the field of wafer processing equipment technology or other fields. Other fields are any fields other than the field of wafer processing equipment technology. The above is only an example and does not limit the application field of the dicing machine spindle sealing ring and dicing machine spindle sealing structure provided by the present invention.

[0048] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0049] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

[0050] Throughout this specification, references to terms such as "one embodiment," "example," or "specific example" indicate that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0051] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the present invention to specific embodiments. Obviously, numerous modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A dicing machine spindle sealing ring, characterized in that: It includes a circular ring body, which is made of engineering plastic material. The inner ring cross-section shape of the circular ring body is the same as the cross-section shape of the dicing machine spindle, and the circular ring body is provided with a cut.

2. The dicing machine spindle sealing ring according to claim 1, characterized in that: The inner ring diameter of the annular body is smaller than the diameter of the dicing machine spindle.

3. A dicing machine spindle sealing structure, characterized in that: It includes the dicing machine spindle sealing ring as described in any one of claims 1-2, and also includes a sliding plate and a clamping plate, the sliding plate is provided with an installation ring groove, the installation ring groove cooperates with the outer ring of the ring body of the dicing machine spindle sealing ring, the sliding plate is connected to the clamping plate, and can move in the vertical direction relative to the clamping plate.

4. The dicing machine spindle sealing structure according to claim 3, wherein: The width of the mounting ring groove is an integral multiple of the thickness of the annular body.

5. The dicing machine spindle sealing structure according to claim 3, wherein: A plurality of bosses are arranged on the groove wall of the mounting ring groove along the center direction of the mounting ring groove, and the bosses are used to cover the annular body.

6. The dicing machine spindle sealing structure according to claim 3, wherein: The outer ring diameter of the annular body is smaller than the inner diameter of the groove bottom of the mounting ring groove.

7. The dicing machine spindle sealing structure according to claim 3, wherein: When the number of the dicing machine spindle sealing rings is more than two, the cutouts of two adjacent ring bodies are staggered.

8. The dicing machine spindle sealing structure according to claim 3, wherein: The clamping plate includes a first connecting plate, an upper baffle and a second connecting plate. The first connecting plate, the upper baffle and the second connecting plate are connected in sequence in an "n" shape. The first connecting plate is provided with a first sliding groove, and the second connecting plate is provided with a second sliding groove. The first sliding groove and the second sliding groove are arranged opposite to each other and are respectively used to clamp the two sides of the sliding plate. The upper baffle is used to limit the top of the sliding plate.

9. The dicing machine spindle sealing structure according to claim 8, wherein: The first chute and the second chute are stepped chute, and the dicing machine spindle sealing structure further includes a front baffle, which is arranged close to the first chute and the second chute and fixedly connected to the clamping plate.

10. The dicing machine spindle sealing structure according to claim 9, wherein: The front baffle is provided with a receiving hole, the top of the receiving hole is arched, the bottom of the receiving hole is square, and the cross-sectional shape of the receiving hole is the same as the cross-sectional shape of the moving track of the dicing machine spindle along the vertical direction.

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