Batch vacuum standard device

Abstract

The utility model provides a batch vacuum standard device which comprises a standard chamber used for providing standard air pressure; the plurality of sample chambers are respectively connected with the standard chamber through sealing valves, one end of each sample chamber is provided with a movable valve, and each sample chamber is used for accommodating a plurality of samples to be detected for standard detection; the air exhaust system is used for vacuumizing the standard chamber and the sample chamber; and the gas supply system is used for supplying gas to the standard chamber and the sample chamber for pressure regulation. The batch vacuum standard device provided by the utility model can be used for performing batch detection standard on samples to be detected through a static expansion method.

Description

Technical Field

[0001] The utility model relates to the field of vacuum standard devices, in particular to a batch vacuum standard device. Background Art

[0002] Vacuum calibration technology is a key technology for ensuring accurate vacuum measurements and product quality. Currently, the static expansion method is the primary method used in vacuum calibration to verify the accuracy of vacuum gauge pressure detection. A vacuum gauge is an instrument used to measure gas pressure and vacuum level. The static expansion method is a widely used, precise method for generating standard pressures within low, medium, and high vacuum ranges. In the high vacuum range, it can be used to calibrate vacuum gauges such as magnetic levitation gauges, while in the low vacuum range, it can be used to calibrate vacuum gauges such as capacitance film gauges.

[0003] When the existing vacuum standard device performs static expansion method testing, it is necessary to manually connect the vacuum gauges to be tested to the standard chamber one by one through the interface for testing. This makes the standard efficiency very low, and it is difficult to quickly and efficiently output a large number of vacuum gauges after testing standards to meet the large-scale demand for vacuum gauges in the semiconductor, aviation and other fields.

[0004] The purpose of this utility model is to design a batch vacuum standard device to solve the problems existing in the above-mentioned prior art. Utility Model Content

[0005] In view of the problems existing in the above-mentioned prior art, the present invention provides a batch vacuum standard device, which can effectively solve the problems existing in the above-mentioned prior art.

[0006] The technical solution of the utility model is:

[0007] A batch vacuum standard device, comprising:

[0008] Standard chamber, used to provide standard air pressure;

[0009] A plurality of sample chambers are connected to the standard chambers through sealing valves respectively, and a movable valve is provided at one end of the plurality of sample chambers. Each of the sample chambers is used to accommodate a plurality of samples to be tested for testing the standard;

[0010] An exhaust system, used for evacuating the standard chamber and the sample chamber;

[0011] The gas supply system is used for supplying gas and regulating the pressure of the standard chamber and the sample chamber.

[0012] Furthermore, it also includes a plurality of accommodating parts corresponding to the plurality of sample chambers, each of the accommodating parts is used to assemble a plurality of samples to be tested and then feed them into the corresponding sample chamber for testing standards.

[0013] Furthermore, several of the sample chambers extend laterally and are laterally recessed at the inner bottom to provide several limiting grooves. The bottom of each of the accommodating parts is movably provided with several rows of rolling parts corresponding to the several limiting grooves, and the top recess is provided with several accommodating areas for accommodating several samples to be tested; the accommodating part slides into the sample chamber through the cooperation and limitation between the several rows of rolling parts and the several limiting grooves.

[0014] Furthermore, the inner top of one end of the sample chamber is concave to form a limit area, and a limit portion corresponding to the limit area is convexly provided on one end of the accommodating member; after the accommodating member is fed into the corresponding sample chamber, the limit portion is laterally limited between the movable valve and the limit area.

[0015] Furthermore, the bottom depression of each of the accommodating parts is provided with a de-weighting groove extending along its length direction, and a number of air holes connected to the de-weighting groove are horizontally penetrated through the surrounding side walls, and a number of de-weighting holes are penetrated through the middle of the several accommodating areas. The number of limiting parts of each of the accommodating parts is set to two and is spaced apart on both sides of one end, and a pull ring is rotatably connected between the two limiting parts. An end of the sample chamber away from the movable valve is penetrated by an air inlet hole connected to the air supply system and corresponding to the air hole. After the accommodating part is fed into the sample chamber, the four ends of the front, back, left and right are respectively provided with gaps with the inner wall of the sample chamber.

[0016] Furthermore, it also includes a body, the number of the standard chambers is set to two and they are symmetrically distributed in the upper part of the body, and the left and right sides of the top of the body are respectively provided with a plurality of sample chambers arranged side by side on the top of the corresponding standard chambers, the far ends of the two standard chambers are respectively connected to the corresponding plurality of sample chambers, the two standard chambers are respectively connected to a vacuum sensing device, and the air supply system is respectively connected to the plurality of sample chambers and the two standard chambers on the left and right sides through a plurality of re-pressure valves.

[0017] Furthermore, it also includes two transport racks that are symmetrical on the left and right and correspond to the several sample chambers on the left and right sides respectively. The transport rack includes a feeding layer with a height corresponding to the several sample chambers, several preparation layers with a height lower than the feeding layer, and a handle rack connected to the feeding layer. The bottom of the transport rack is rotatably provided with several walking wheels.

[0018] Furthermore, it also includes a baking system for heating the standard chamber and the sample chamber.

[0019] Therefore, the present invention provides the following effects and / or advantages:

[0020] 1. By adding a sample chamber, several samples can be placed in the chamber at once for batch standard testing. After the standard is completed, the sealing valve is closed, and after the air supply system re-pressurizes the sample chamber, the movable valve is opened to discharge the samples. This allows batch standard testing of samples using the static expansion method. Furthermore, by directly re-pressurizing the sample chamber with the sealing valve and air supply system, the vacuum in the standard chamber can be avoided during the discharge of the samples from the sample chamber, reducing the overall vacuum volume of the standard device. This improves the efficiency of re-evacuating the sample chamber after the second batch of samples is added, thereby improving the overall efficiency of standard testing of the samples.

[0021] 2. By adding accommodating parts, the efficiency of batch entry and exit of a number of sample chambers for a number of samples to be tested is improved, thereby improving the overall efficiency of the testing standard. By cooperating between a number of rows of rolling parts and a number of limit grooves, the front and rear limit settings of the accommodating parts after sliding into the sample chamber are realized. At the same time, the limit parts are limited to the left and right by the movable valve and the limit area, and together the accommodating parts fed into the sample chamber are limited in four directions, front, back, left and right, so as to improve the stability of the accommodating parts in the sample chamber, thereby improving the stability of the samples to be tested accommodated in the several accommodating areas of the accommodating parts, avoiding the situation in which the samples to be tested collide with the accommodating parts or even fall off when the sample chamber is evacuated or inflated during the static expansion method test, thereby improving the stability and accuracy of the batch testing standards for the samples to be tested.

[0022] 3. By setting up the deweighting groove and deweighting hole, the dead weight of the container is reduced, so as to reduce the handling efficiency of several containers containing a large number of samples to be tested after being stacked, thereby improving the feeding and unloading efficiency of the container and improving the efficiency of batch testing standards. In addition, by setting up the air vents to further reduce the dead weight of the container, and setting them corresponding to the air inlet holes, the air supply system can stably fill the entire cavity of the sample chamber with air, ensuring the accuracy of the testing standards.

[0023] 4. Through the setting of the transport rack, several batches of samples to be tested can be placed on the feeding layer and several layers of preparation layers. When the samples to be tested on the feeding layer are fed into the sample chamber for standard testing, the samples to be tested on the next level of preparation layer are moved to the feeding layer to wait for feeding, so as to improve the handling efficiency and loading and unloading efficiency of the samples to be tested.

[0024] It is to be understood that both the foregoing general description and the following detailed description of the present invention are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a front view structural diagram of a batch vacuum standard device.

[0026] Figure 2 for Figure 1 Schematic diagram of the three-dimensional structure after removing the transport frame.

[0027] Figure 3 for Figure 2 Schematic diagram of the side section structure of the sample chamber on the middle left.

[0028] Figure 4 for Figure 2 Schematic diagram of the front cross-section of the sample chamber on the middle left.

[0029] Figure 5 for Figure 4 Schematic diagram of the local structure.

[0030] Figure 6 It is a schematic diagram of the three-dimensional structure of the container after accommodating the sample to be tested.

[0031] Figure 7 It is a schematic diagram of the three-dimensional structure of the accommodating component.

[0032] Figure 8 It is a bottom view of the structure of the accommodating component.

[0033] Figure 9 This is a schematic diagram of the module connections of a batch vacuum standard device. DETAILED DESCRIPTION

[0034] In order to facilitate understanding by those skilled in the art, the structure of the present invention is further described in detail with reference to the following embodiments and accompanying drawings:

[0035] refer to Figure 1-9 , a batch vacuum standard device, comprising:

[0036] Standard chamber 2, used to provide standard air pressure;

[0037] Several sample chambers 3 are connected to the standard chamber 2 via sealing valves 31, and one end of each of the sample chambers 3 is provided with a movable valve 32. Each of the sample chambers 3 is used to accommodate several test samples 9 for standard detection. Specifically, in this embodiment, each sample chamber 3 can hold 10 test samples 9, and the volume of each sample chamber 3 is about 1.5L. The sealing valve 31 is a vacuum valve 43, and the movable valve 32 can be an automatic valve or a manual valve driven by a motor, a cylinder, etc. The test sample 9 is a pressure sensor for measuring gas pressure and vacuum degree.

[0038] An exhaust system 4, used for evacuating the standard chamber 2 and the sample chamber 3;

[0039] The gas supply system 5 is used to supply gas and regulate the pressure to the standard chamber 2 and the sample chamber 3 .

[0040] Specifically, in this embodiment, the vacuum standard device adopts the static expansion method to test the standard of the sample 9 to be tested. Therefore, the gas supply system 5 is connected to the pressure stabilizing chamber 51 through the air inlet valve 52, and the pressure stabilizing chamber 51 is connected to the sampling chamber 1 through the air inlet valve 52. The sampling chamber 1 is connected to the standard chamber 2. The sampling chamber 1 belongs to the low vacuum and small volume side during the static expansion method test. In order to make the test accuracy of the sampling sensor device 511 in the pressure stabilizing chamber 51 within its optimal range, the volume of the sampling chamber 1 is designed to be 12mL or 120mL. The standard chamber 2 is an expansion chamber, which belongs to the high vacuum and large volume side during the static expansion method test. Its volume is designed to be 100L. The pressure stabilizing chamber 51 is connected to a number of sampling sensors 511. Specifically, the sampling sensors 511 are thin film gauges for detecting the volume of gas taken away by the sampling chamber 1 and Air pressure has the characteristics of high detection accuracy, thereby ensuring the accuracy of the static expansion method detection results; the exhaust system 4 includes a primary vacuum pump 41 and a secondary vacuum pump 42 connected by a vacuum valve 43, the primary vacuum pump 41 and the secondary vacuum pump 42 are connected to the standard chamber 2 through an exhaust valve 44 respectively, the pressure stabilizing chamber 51 is connected to the primary vacuum pump 41 through an exhaust valve 53, and the sampling chamber 1 is connected to the standard chamber 2 through an exhaust valve 54 and an intake valve 52 in turn. Specifically, the primary vacuum pump 41 is a roughing pump, the secondary vacuum pump 42 is a molecular pump, the intake valve 52, the exhaust valve 54, and the exhaust valve 53 are all stop valves, the vacuum valve 43 is a pneumatic baffle valve, the exhaust valve 44 between the primary vacuum pump 41 and the standard chamber 2 is a stop valve, and the exhaust valve 44 between the secondary vacuum pump 42 and the standard chamber 2 is a pneumatic plug-in valve.

[0041] The static expansion vacuum method is a method for obtaining the gas pressure after expansion based on Boyle's law. The formula for obtaining the equilibrium pressure P after expansion is:

[0042]

[0043] Among them, P0 is the pressure inside the small volume (Pa), which is specifically measured by the diaphragm gauge connected to the pressure stabilizing chamber 51, v is the capacity of the small volume (L), specifically the volume of the sampling chamber 1, and V is the capacity of the large volume (L), specifically the volume of the standard chamber 2.

[0044] The above-mentioned structure, through the addition of the sample chamber 3, allows several samples 9 to be tested to enter the sample chamber 3 at one time for batch standard testing. After the standard is completed, the sealing valve 31 is closed, and after the gas supply system 5 supplies air to and re-pressurizes the sample chamber 3, the movable valve 32 is opened to discharge the several samples 9 to be tested. This makes it possible to perform batch standard testing on the samples 9 to be tested by the static expansion method. Moreover, by directly supplying and re-pressurizing the sample chamber 3 with the sealing valve 31 and the gas supply system 5, the vacuum of the standard chamber 2 can be avoided during the discharge of the several samples 9 to be tested from the sample chamber 3, reducing the vacuum breaking volume of the entire standard device, improving the efficiency of re-evacuating the sample chamber 3 after the second batch of samples 9 to be tested is fed, and thereby improving the overall efficiency of standard testing on the samples 9 to be tested.

[0045] To improve the efficiency of loading and unloading the plurality of test samples 9, the standard device also includes a plurality of accommodating members 6 corresponding to the plurality of sample chambers 3. Each accommodating member 6 is used to hold a plurality of test samples 9 and then feed them into the corresponding sample chamber 3 for standard testing. The addition of accommodating members 6 improves the efficiency of batch loading and unloading of the plurality of test samples 9 into and out of the plurality of sample chambers 3, thereby improving the overall efficiency of standard testing.

[0046] In order to improve the stability of the accommodating member 6 after feeding, several sample chambers 3 are extended laterally and the inner bottom is laterally recessed to provide several limiting grooves 33. The bottom of each accommodating member 6 is movably provided with several rows of rolling members 62 corresponding to the several limiting grooves 33, and the top is recessed to provide several accommodating areas 61 for accommodating several samples 9 to be tested. Specifically, the rolling members 62 are ball bearings, and the shape of the accommodating area 61 can be adaptively changed according to the shape of the sample 9 to be tested; the accommodating member 6 slides into the sample chamber 3 through the cooperation and limitation between the several rows of rolling members 62 and the several limiting grooves 33; the inner top of one end of the sample chamber 3 is recessed to form a limiting area 34, and a limiting portion 63 corresponding to the limiting area 34 is convex on one end of the accommodating member 6; after the accommodating member 6 is fed into the corresponding sample chamber 3, the limiting portion 63 is laterally limited and provided between the movable valve 32 and the limiting area 34. Thus, through the cooperation between the rows of rolling elements 62 and the limiting grooves 33, the front and rear limiting setting of the accommodating element 6 after it slides into the sample chamber 3 is realized. At the same time, the limiting portion 63 is limited to the left and right by the movable valve 32 and the limiting area 34, and together the accommodating element 6 fed into the sample chamber 3 is limited in four directions, front, back, left and right, so as to improve the stability of the accommodating element 6 in the sample chamber 3, and further improve the stability of the sample 9 to be tested accommodated in the several accommodating areas 61 of the accommodating element 6, and avoid the situation in which the sample 9 to be tested collides with the accommodating element 6 or even falls off when the sample chamber 3 is evacuated or inflated during the static expansion method test, thereby improving the stability and accuracy of the batch testing standard for the sample 9 to be tested.

[0047] In order to improve the handling efficiency of the accommodating parts 6 and improve the efficiency of loading and unloading, the bottom recess of each accommodating part 6 is provided with a deweighting groove 64 extending along its length direction, and a number of air holes 67 connected to the deweighting groove 64 are horizontally penetrated through the surrounding side walls, and a number of deweighting holes 65 are penetrated through the middle of the accommodating areas 61. The number of limiting parts 63 of each accommodating part 6 is set to two and spaced apart on both sides of one end. A pull ring 66 is rotatably connected between the two limiting parts 63. The end of the sample chamber 3 away from the movable valve 32 is penetrated by an air inlet 35 connected to the air supply system 5 and corresponding to the air hole 67. After the accommodating part 6 is fed into the sample chamber 3, the four ends of the front, back, left and right are respectively set with gaps from the inner wall of the sample chamber 3. Thus, by setting the deweighting groove 64 and the deweighting hole 65, the dead weight of the container 6 is reduced, so as to reduce the handling efficiency of several containers 6 containing a large number of samples to be tested 9 after stacking, thereby improving the feeding and unloading efficiency of the container 6, and improving the efficiency of batch detection standards. In addition, by setting the air hole 67 to further reduce the dead weight of the container 6, it is set corresponding to the air inlet hole 35, so that the air supply of the air supply system 5 can stably fill the entire cavity of the sample chamber 3, thereby ensuring the accuracy of the detection standard.

[0048] In order to improve the overall structural compactness of the standard device, the standard device also includes a body 8, the number of the standard chambers 2 is set to two and they are symmetrically distributed in the upper part of the body 8, and the left and right sides of the top of the body 8 are respectively provided with a plurality of sample chambers 3 arranged side by side on the top of the corresponding standard chamber 2. The far ends of the two standard chambers 2 are respectively connected to the corresponding plurality of sample chambers 3, and the two standard chambers 2 are respectively connected to a vacuum sensing device 21. Specifically, the vacuum sensing device 21 is a re-pressure compliance device for detecting the vacuum degree of the standard chamber 2. The re-pressure valve 55 is set as a stop valve, and the air supply system 5 is respectively connected to the plurality of sample chambers 3 and the two standard chambers 2 on the left and right sides through a plurality of re-pressure valves 55. Specifically, three sample chambers 3 are respectively provided on the left and right sides, so that the standard device can provide 30 samples 9 to be tested for standard testing at a time. The standard device has a 10 -2 -10 -1 Pa, 10 -1 -1Pa, 1-10Pa, 10-100Pa four vacuum ranges with an accuracy requirement of 10% standard function, the test time of 10 samples in each sample chamber 3 is 30min, the working pressure is 2×10 -2 Pa, the lower standard deviation is allowed to be 10%, that is, the absolute pressure rise within 30 minutes shall not exceed 2×10 -3 Pa.

[0049] To further improve the loading and unloading efficiency of the container 6, the standard device also includes two symmetrical transport racks 7 corresponding to the sample chambers 3 on the left and right sides, respectively. The transport racks 7 include a feed layer 71 with a height corresponding to the sample chambers 3, a plurality of preparation layers 72 with a height lower than the feed layer 71, and a handle rack 73 connected to the feed layer 71. The bottom of the transport rack 7 is provided with a plurality of running wheels 74 for rotation. Therefore, through the arrangement of the transport rack 7, a plurality of batches of samples to be tested can be placed on the feed layer 71 and the plurality of preparation layers 72. When the sample 9 to be tested in the feed layer 71 is fed into the sample chamber 3 for standard testing, the sample 9 to be tested in the next preparation layer 72 is moved to the feed layer 71 to wait for feeding, thereby improving the handling efficiency and loading and unloading efficiency of the sample 9 to be tested.

[0050] In order to achieve the heating and exhaust effect, a baking system for heating the standard chamber 2, the pressure-stabilizing chamber 51, and the sample chamber 3 is also included. Specifically, the baking system can bake the standard chamber 2, the pressure-stabilizing chamber 51, and the sample chamber 3 to 150°C. The baking system includes a baking jacket and a baking control system, wherein the baking jacket is sewn together by a nickel-chromium wire heater and a glass fiber insulation layer, and its shape and size are sewn according to the shape of the constant volume chamber. The heating wire is evenly distributed in the heating jacket according to the required power, which can ensure uniform temperature distribution on the wall of the entire constant volume chamber, with a baking temperature range of 25°C to 200°C, an overshoot temperature of no more than 10°C during heating, and a control accuracy of ±5°C after stabilization. The specific structure of the baking system is prior art and is not the main invention of this application, so it will not be described here.

[0051] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A batch vacuum standard device, characterized in that: include: A standard chamber (2), for providing standard air pressure; A plurality of sample chambers (3) are connected to the standard chamber (2) through sealing valves (31), one end of each of the sample chambers (3) is provided with a movable valve (32), and each of the sample chambers (3) is used to accommodate a plurality of samples to be tested (9) for testing the standard; an exhaust system (4) for evacuating the standard chamber (2) and the sample chamber (3); The gas supply system (5) is used for supplying gas and regulating the pressure of the standard chamber (2) and the sample chamber (3).

2. A batch vacuum standard device according to claim 1, characterized in that: It also includes a plurality of accommodating parts (6) corresponding to the plurality of sample chambers (3), each of the accommodating parts (6) being used to assemble a plurality of samples (9) to be tested and then feed them into the corresponding sample chamber (3) for testing standards.

3. A batch vacuum standard device according to claim 2, characterized in that: The sample chambers (3) extend transversely and are laterally recessed at the bottom thereof to provide a plurality of limiting grooves (33). The bottom of each accommodating member (6) is movably provided with a plurality of rows of rolling members (62) corresponding to the plurality of limiting grooves (33), and the top is recessed to provide a plurality of accommodating areas (61) for accommodating a plurality of samples (9) to be tested. The accommodating member (6) slides into the sample chamber (3) through the cooperation and limiting between the plurality of rows of rolling members (62) and the plurality of limiting grooves (33).

4. A batch vacuum standard device according to claim 2, characterized in that: The inner top of one end of the sample chamber (3) is concave to form a limiting area (34), and a limiting portion (63) corresponding to the limiting area (34) is convexly provided on one end of the accommodating member (6); after the accommodating member (6) is fed into the corresponding sample chamber (3), the limiting portion (63) is laterally limited and arranged between the movable valve (32) and the limiting area (34).

5. A batch vacuum standard device according to claim 3, characterized in that: The bottom recess of each of the accommodating parts (6) is provided with a de-weighting groove (64) extending along its length direction, and a plurality of air holes (67) are provided transversely through the surrounding side walls and connected to the de-weighting groove (64). A plurality of de-weighting holes (65) are provided through the middle of the plurality of accommodating areas (61). The number of the limiting parts (63) of each of the accommodating parts (6) is set to two and spaced apart on both sides of one end. A pull ring (66) is rotatably connected between the two limiting parts (63). An air inlet (35) connected to the air supply system (5) and corresponding to the air hole (67) is provided through the end of the sample chamber (3) away from the movable valve (32). After the accommodating part (6) is fed into the sample chamber (3), the four ends, front, back, left and right, are respectively provided with gaps with the inner wall of the sample chamber (3).

6. A batch vacuum standard device according to claim 1, characterized in that: It also includes a body (8), the number of the standard chambers (2) is set to two and is symmetrically distributed in the upper part of the body (8), and a plurality of sample chambers (3) are respectively arranged on the top of the corresponding standard chambers (2) on the left and right sides of the top of the body (8), and the sample chambers (3) are arranged side by side on the top of the corresponding standard chambers (2). The far ends of the two standard chambers (2) are respectively connected to the corresponding plurality of sample chambers (3), and the two standard chambers (2) are respectively connected to a vacuum sensor device (21), and the gas supply system (5) is respectively connected to the plurality of sample chambers (3) on the left and right sides and the two standard chambers (2) through a plurality of re-pressure valves (55).

7. A batch vacuum standard device according to claim 6, characterized in that: The invention also includes two symmetrical transport racks (7) for the sample chambers (3) on the left and right sides, respectively. The transport rack (7) includes a feed layer (71) with a height corresponding to the sample chambers (3), a plurality of preparation layers (72) with a height lower than the feed layer (71), and a handle rack (73) connected to the feed layer (71). The bottom of the transport rack (7) is provided with a plurality of running wheels (74) for rotation.

8. The batch vacuum standard device according to claim 1, characterized in that: It also includes a baking system for heating the standard chamber (2) and the sample chamber (3).

Images