Box opening device and sinking type box opening system

Abstract

The utility model discloses a box opening device and a sinking type box opening system, and relates to the technical field of semiconductor transmission, the box opening device comprises a console, and the console comprises a lifting plate, a central turntable, an unlocking piece and a driving mechanism. The central rotating disc is rotatably installed in the through hole in the lifting plate, and at least one unlocking piece eccentrically arranged with the rotating disc is arranged on the top face of the central rotating disc. The driving mechanism is located on the side, away from the unlocking piece, of the lifting plate and comprises a linear driving piece, a sliding block, a sliding rail, a swing arm, a crank and a limiting piece. The linear driving piece and the sliding rail are fixed to the lifting plate, and the sliding block slides along the sliding rail and is connected with the telescopic end of the linear driving piece. The slider is rotatably connected with a crank through a swing arm, and the other end of the crank is fixed on the central turntable. The limiting piece comprises a starting point limiting block and an end point limiting block and is used for controlling the moving range of the sliding block on the sliding rail. According to the utility model, a set of box opening device is designed, the placing and unlocking process of the transmission box can be accelerated, and the mobility of the wafer processing process is prevented from being influenced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor transmission, in particular to a box opening device and a sinking box opening system. Background Art

[0002] Semiconductor wafers need to be kept in a sealed, dust-free environment during transportation. Some companies place wafers in a SMIF pod transport box to protect them from external environmental contamination. The process of opening the SMIF pod transport box requires the SMIF transport system, which first unlocks the base and cover of the SMIF pod transport box using an opening device, and then removes the wafers through the transport assembly. During unlocking, the opening device inserts an unlocking pin into the unlocking hole of the base and drives the unlocking pin to rotate using a rotary cylinder, causing the base's lock to retract into the base to separate the base from the cover. However, the rotation accuracy of the rotary cylinder is difficult to accurately control, resulting in the unlocking pin not always staying in the preset position. As a result, the unlocking pin cannot be accurately inserted into the unlocking hole, hindering the wafer removal process and ultimately affecting the wafer's production availability.

[0003] In view of this, it is necessary to propose a box opening device and a sunken box opening system to solve or at least alleviate the above technical problems. Utility Model Content

[0004] The main purpose of the utility model is to provide a box opening device and a sinking box opening system, aiming to solve the technical problem that the process of taking wafers out of the SMIF pod transfer box affects the production mobility.

[0005] To achieve the above-mentioned object, the present invention provides a box opening device, comprising a control console, the control console comprising a lifting plate, a central turntable, an unlocking member, and a driving mechanism, wherein a through hole is formed on the lifting plate, the central turntable is rotatably mounted in the through hole, the central turntable is provided with at least one unlocking member, the unlocking member being eccentrically arranged with respect to the central turntable, and the driving mechanism being arranged on a side of the lifting plate away from the unlocking member;

[0006] The driving mechanism includes a linear driving member, a slider, a slide rail, a swing arm, a crank and a limit member, the linear driving member and the slide rail are fixedly mounted on the lifting plate, the slider is slidably connected to the slide rail, the telescopic end of the linear driving member is connected to the slider, the length direction of the slide rail is the same as the movement direction of the telescopic end, the side of the slider away from the lifting plate is rotatably connected to one end of the swing arm, the other end of the swing arm is rotatably connected to one end of the crank, and the other end of the crank is fixedly connected to the center turntable;

[0007] The limiting member includes a starting point limiting block and an end point limiting block, the starting point limiting block and the end point limiting block are installed on the lifting plate, and the sliding block slides between the starting point limiting block and the end point limiting block.

[0008] In one embodiment, the unlocking member is used to unlock the base of the transfer box, and the unlocking member includes a starting position and an end position. When the slider is in contact with the starting limit block, the unlocking member is at the starting position;

[0009] When the slider is in contact with the end stop block, the unlocking member is at the end position;

[0010] When the unlocking member moves from the starting position to the end position, the base is unlocked.

[0011] In one embodiment, the console further includes a first sensor and a second sensor, and the first sensor and the second sensor are arranged on a side of the lifting plate away from the unlocking member. When the slider is in contact with the starting limit block, the first sensor sends an electrical signal; when the slider is in contact with the end limit block, the second sensor sends an electrical signal.

[0012] In one embodiment, the first sensor and the second sensor are both arranged on one side of the slide rail, and a light shielding sheet is installed on the side of the slider close to the first sensor and the second sensor. The first sensor includes a first photoelectric sensor, and the second sensor includes a second photoelectric sensor. When the slider slides on the slide rail, the light shielding sheet can respectively sense and cooperate with the first photoelectric sensor and the second photoelectric sensor.

[0013] In one embodiment, the slider is connected to the swing arm via a first rotation pair, the first rotation pair comprising a first bearing and a first rotating shaft passing through the first bearing, and a first shaft end retaining spring is provided at an end of the first rotating shaft;

[0014] The swing arm is connected to the crank via a second rotation pair, which includes a second bearing and a second rotating shaft passing through the second bearing, and a second shaft end retaining spring is provided at the shaft end of the second rotating shaft.

[0015] In one embodiment, the box opening device also includes a supporting platform, the supporting platform includes a receiving hole and a supporting portion, the console is arranged in the receiving hole, the box opening device is used to unlock the conveying box, the conveying box includes a box cover and a base installed on the inner side of the box cover, the box cover is placed on the supporting portion, and the base is placed on the console.

[0016] In one embodiment, the carrying platform further comprises at least two positioning frames arranged opposite to each other, the positioning frames being mounted on the top surface of the carrying portion, and at least two of the positioning frames being arranged in close contact with the box cover;

[0017] The carrier platform also includes a fixing mechanism, which includes a fixing film and a rotating drive member. The fixing film is installed on the rotating end of the rotating drive member, and the rotating drive member can drive the fixing film to press or move away from the box cover.

[0018] In one embodiment, the console further includes a load sensor, which is disposed on the lifting plate and on the same side as the unlocking member.

[0019] In one embodiment, the console further includes at least one positioning pin, which is mounted on the lifting plate and disposed on the same side as the unlocking member.

[0020] The present invention further provides a sunken box opening system, comprising the box opening device described in any one of the above embodiments, the sunken box opening system further comprising:

[0021] A frame body, the frame body comprising an outer frame and a conveying space arranged inside the outer frame, the box opening device being arranged on the top of the outer frame;

[0022] A lifting mechanism is provided in the conveying space, comprising a lifting platform, a screw and a drive motor. The lifting platform is mounted on the bottom of the lifting plate, and the drive motor drives the lifting platform to move up and down through the screw;

[0023] The control component is electrically connected to the box opening device and the driving motor.

[0024] In the technical solution provided by the utility model, the box opening device includes a console, the console includes a lifting plate, a center turntable, an unlocking member and a driving mechanism, the lifting plate is provided with a through hole, the center turntable is rotatably installed in the through hole, the center turntable is provided with at least one unlocking member, the unlocking member and the center turntable are eccentrically arranged, and the driving mechanism is arranged on the side of the lifting plate away from the unlocking member; wherein the driving mechanism includes a linear driving member, a slider, a slide rail, a swing arm, a crank and a limit member, the linear driving member is fixedly installed on the lifting plate, the slider is slidably connected to the slide rail, the telescopic end of the linear driving member is connected to the slider, the length direction of the slide rail is the same as the movement direction of the telescopic end, the side of the slider away from the lifting plate is rotatably connected to one end of the swing arm, the other end of the swing arm is rotatably connected to one end of the crank, and the other end of the crank is fixedly connected to the center turntable; the limiting member includes a starting point limit block and an end point limit block, the starting point limit block and the end point limit block are installed on the lifting plate, and the slider slides between the starting point limit block and the end point limit block. Through this arrangement, the linear drive can drive the slider to slide on the slide rail, thereby transmitting torque through the swing arm and crank to rotate the center turntable, and then rotate the unlocking member. During the rotation process, starting point limit blocks and end point limit blocks are provided on both sides of the slider, so that the starting position and end point position of the unlocking member can be accurately controlled. Therefore, when the conveying box is placed on the box opening device, the unlocking member can be accurately inserted into the unlocking hole of the conveying box base without adjusting the position of the unlocking member, thereby speeding up the placement and unlocking process of the conveying box, and ultimately improving the wafer removal speed, avoiding affecting the mobility of the wafer processing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0026] Figure 1 This is a structural diagram of an embodiment of a sunken box opening system provided by the utility model;

[0027] Figure 2 This is a structural diagram of an embodiment of a box opening device provided by the present utility model;

[0028] Figure 3 for Figure 2 Schematic diagram of the structure of the central control console;

[0029] Figure 4 for Figure 3 Schematic diagram of the enlarged structure at A in the middle;

[0030] Figure 5for Figure 2 Schematic diagram of the structure of the middle load platform;

[0031] Figure 6 This is a structural diagram of the sunken box opening system provided by the utility model when combined with the transfer box;

[0032] Figure 7 Figure 6 Schematic diagram of some structures in .

[0033] Description of Figure Numbers:

[0034] 1000. Sunken box opening system;

[0035] 100. Box opening device; 1. Control console; 11. Lifting plate; 12. Center turntable; 13. Unlocking member; 14. Driving mechanism; 141. Linear driving member; 142. Slider; 143. Slide rail; 144. Swing arm; 145. Crank; 146. Limiting member; 1461. Starting point limit block; 1462. End point limit block; 147. Shading plate; 148. First rotating pair; 1481. First bearing; 1482. First rotating shaft; 1483. First Shaft end retaining spring; 149, second rotating pair; 1491, second bearing; 1492, second rotating shaft; 1493, second shaft end retaining spring; 15, first sensor; 15a, first photoelectric sensor; 16, second sensor; 16a, second photoelectric sensor; 17, load sensor; 18, positioning pin; 2, supporting platform; 21, supporting portion; 22, receiving hole; 23, positioning frame; 24, fixing mechanism; 241, fixing film; 242, rotating drive member;

[0036] 200, frame body; 210, outer frame; 220, transmission space;

[0037] 300, lifting mechanism; 310, lifting platform; 320, screw rod; 330, driving motor;

[0038] 2000, transport box; 2100, box cover; 2200, base.

[0039] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0040] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0041] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), such directional indications are only used to explain the relative position relationship, movement status, etc. between the various components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0042] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0043] The wafer transfer process generally relies on placing the wafer in a cassette. However, when using a cassette to transfer wafers, the wafers are easily affected by contaminants such as suspended particles and moisture in the surrounding environment, resulting in a decrease in wafer yield. Therefore, more and more wafer transfer processes require the use of SMIF pods (standard mechanical interface wafer pods, hereinafter referred to as transfer pods) to seal and protect the wafers.

[0044] A cassette provides a clean environment for wafer transfer. The cassette typically consists of a base and a cover. The base is hollow and features a latch mechanism inside. This latch mechanism includes a latch for locking the cover, an unlocking hole, and a transmission assembly for connecting the latch and unlocking hole. The unlocking hole is typically located on the underside of the base. Rotating the unlocking hole retracts the latch into the base, separating the cover from the base. Rotating the unlocking hole in the opposite direction causes the latch to extend from the base, locking the two together. After the wafers are transported to a specific production process via the cassette, the base must first be unlocked using an opening mechanism. This allows the external lifting mechanism to lift and lower the base and wafers for removal. The mechanism unlocks the base by installing an unlocking pin corresponding to the unlocking hole. This pin is driven by a rotating cylinder. Inserting the unlocking pin into the unlocking hole and activating the rotating cylinder unlocks the base. The pin rotates a certain angle, unlocking the base.

[0045] However, according to the applicant's research, since the rotating end of the rotary cylinder can rotate cyclically, its rotation accuracy is difficult to accurately control. After starting the rotary cylinder, the rotation position of the unlocking post is often difficult to control. After the rotary cylinder stops rotating, there may be a certain error between the stop position of the unlocking post and the preset starting position. As a result, when the conveyor box is placed on the box opening device, the position of the unlocking post and the unlocking hole do not correspond. As a result, it is necessary to start the rotary cylinder again to adjust the position of the unlocking post before the conveyor box can be successfully placed on the box opening device, thereby affecting the production mobility of the wafer processing process. This situation is not uncommon in actual production, but it is generally solved by installing a limit plate on the base to limit the unlocking post. This solution causes the unlocking post to be subjected to the structural reaction force of the limit plate. Due to the small diameter of the unlocking post itself, if the rotation accuracy of the rotary cylinder is not accurately controlled, the unlocking post will be subjected to cyclic loads, which can easily cause fatigue of the unlocking post and reduce the service life of the unlocking post.

[0046] Therefore, the present invention proposes a box opening device to solve the above technical problems.

[0047] See also Figures 1 to 3 In one embodiment of the present invention, the box opening device 100 includes a console 1, which includes a lifting plate 11, a central turntable 12, an unlocking member 13 and a driving mechanism 14. A through hole is opened on the lifting plate 11, and the central turntable 12 is rotatably installed in the through hole. The central turntable 12 is provided with at least one unlocking member 13, and the unlocking member 13 is eccentrically arranged with respect to the central turntable 12. The driving mechanism 14 is arranged on a side of the lifting plate 11 away from the unlocking member 13; wherein the driving mechanism 14 includes a linear driving member 141, a slider 142, a slide rail 143, a swing arm 144, a crank 145 and a limit member 146, and the linear driving member 141 and the slide rail 143 are fixedly installed on the lifting plate 11. The slider 142 is slidably connected to the slide rail 143, the telescopic end of the linear drive member 141 is connected to the slider 142, the length direction of the slide rail 143 is the same as the movement direction of the telescopic end, the slider 142 is rotatably connected to one end of the swing arm 144 on the side away from the lifting plate 11, the other end of the swing arm 144 is rotatably connected to one end of the crank 145, and the other end of the crank 145 is fixedly connected to the center turntable 12; the limiting member 146 includes a starting point limiting block 1461 and an end point limiting block 1462, the starting point limiting block 1461 and the end point limiting block 1462 are installed on the lifting plate 11, and the slider 142 slides between the starting point limiting block 1461 and the end point limiting block 1462.

[0048] Specifically, the box opening device 100 is part of the sunken box opening system 1000 and is used to unlock the base 2200 of the conveying box 2000. Therefore, the box opening device 100 needs to be in direct contact with the conveying box 2000, wherein the base 2200 of the conveying box 2000 is placed on the control console 1 and is lifted and lowered synchronously with the lifting plate 11. The side of the lifting plate 11 that contacts the base 2200 is provided with an unlocking member 13. In this embodiment, the unlocking member 13 includes an unlocking column. The shape of the unlocking member 13 is designed according to the shape of the unlocking hole of the base 2200 to which it needs to adapt, and the central axis of the unlocking member 13 is not arranged to coincide with the central axis of the center turntable 12, so that the unlocking member 13 can rotate around the central axis of the center turntable 12, so that the unlocking member 13 can transmit eccentric force to the unlocking hole, driving the unlocking hole to rotate to unlock the base 2200. The position of the through hole opened on the lifting plate 11 corresponds to the position of the unlocking hole of the base 2200. The center turntable 12 is installed in the through hole, and the unlocking member 13 is installed on the center turntable 12. The driving mechanism 14 is used to drive the center turntable 12 to rotate. The driving mechanism 14 is installed on the bottom surface of the lifting plate 11, that is, the side of the lifting plate 11 away from the base 2200. This arrangement prevents the driving mechanism 14 from having a position conflict with the base 2200, or avoids increasing the design difficulty. In the driving mechanism 14, the linear driving component 141 is used to provide power. The linear driving component 141 includes one of a linear cylinder and a linear motor. The linear driving component 141 is fixedly installed on the lifting plate 11. The telescopic end of the linear driving component 141 performs telescopic movement, thereby driving the slider 142 to slide on the slide rail 143, thereby driving the swing arm 144 to rotate relative to the slider 142, thereby driving the crank 145 to rotate relative to the swing arm 144, and the crank 145 is fixedly connected to the center turntable 12, so that the crank 145 can drive the center turntable 12 to rotate relative to the swing arm 144. In this embodiment, the connection position between the crank 145 and the center turntable 12 does not coincide with the central axis of the center turntable 12. This arrangement enables the crank 145 to transmit a greater torque to the center turntable 12, thereby making the center turntable 12 more sensitive and responding faster. In another embodiment, the connection position between the crank 145 and the center turntable 12 coincides with the central axis of the center turntable 12. This arrangement is suitable for use in a box opening device 100 that does not require high sensitivity for the center turntable 12. The length direction of the guide rail, that is, the direction of movement of the slider 142, needs to be the same as the direction of movement of the telescopic end of the linear drive member 141. In this embodiment, the slider 142 and the slide rail 143 are arranged on one side of the center turntable 12, and the direction of movement of the slider 142 does not intersect with the outline of the center turntable 12. This arrangement can reduce the space occupied by the drive mechanism 14, reduce the size of the swing arm 144, and save materials.The limit member 146 is arranged on the guide rail or on the side of the guide rail away from the center turntable 12, and is used to limit the movement range of the slider 142, so that the slider 142 can only slide between the starting limit block 1461 and the end limit block 1462, thereby limiting the starting position and end position of the unlocking member 13, and then the unlocking member 13 can accurately stay at the preset starting position before combining with the unlocking hole in the base 2200, so that the unlocking member 13 and the unlocking hole can be smoothly combined, thereby improving the unlocking efficiency between the base 2200 of the conveyor box 2000 and the box cover 2100, thereby avoiding affecting the wafer removal process.

[0049] In the technical solution provided by the present invention, the box opening device 100 includes a console 1, the console 1 includes a lifting plate 11, a central turntable 12, an unlocking member 13 and a driving mechanism 14, the lifting plate 11 is provided with a through hole, the central turntable 12 is rotatably installed in the through hole, the central turntable 12 is provided with at least one unlocking member 13, the unlocking member 13 is eccentrically arranged with respect to the central turntable 12, and the driving mechanism 14 is arranged on the side of the lifting plate 11 away from the unlocking member 13; wherein, the driving mechanism 14 includes a linear driving member 141, a slider 142, a slide rail 143, a swing arm 144, a crank 145 and a limit member 146, the linear driving member 141 and the slide rail 143 are fixed It is fixedly installed on the lifting plate 11, the slider 142 is slidingly connected to the slide rail 143, the telescopic end of the linear drive member 141 is connected to the slider 142, the length direction of the slide rail 143 is the same as the movement direction of the telescopic end, the slider 142 is rotatably connected to one end of the swing arm 144 on the side away from the lifting plate 11, the other end of the swing arm 144 is rotatably connected to one end of the crank 145, and the other end of the crank 145 is fixedly connected to the center turntable 12; the limit member 146 is installed on the lifting plate 11, the limit member 146 includes a starting limit block 1461 and an end limit block 1462, and the slider 142 slides between the starting limit block 1461 and the end limit block 1462. Through this setting, the linear drive member 141 can drive the slider 142 to slide on the slide rail 143, thereby transmitting torque through the swing arm 144 and the crank 145 to rotate the center turntable 12, and then rotate the unlocking member 13. During the rotation process, a starting point limit block 1461 and an end point limit block 1462 are provided on both sides of the slider 142, so that the starting position and the end point position of the unlocking member 13 can be accurately controlled. When the conveying box 2000 is placed on the box opening device 100, the unlocking member 13 can be accurately inserted into the unlocking hole of the base 2200 of the conveying box 2000 without adjusting the position of the unlocking member 13, thereby speeding up the placement and unlocking process of the conveying box 2000, and ultimately improving the wafer removal speed, avoiding affecting the mobility of the wafer processing process.

[0050] It should be noted that the unlocking member 13 is used to unlock the base 2200 of the transport box 2000. The unlocking member 13 has a starting position and an end position. When the slider 142 is in contact with the starting stop block 1461, the unlocking member 13 is in the starting position; when the slider 142 is in contact with the end stop block 1462, the unlocking member 13 is in the end position; when the unlocking member 13 moves from the starting position to the end position, the base 2200 is unlocked. The base 2200 of the transport box 2000 is generally hollow, with an unlocking hole provided on the bottom surface of the base 2200 and a lock buckle provided on the side of the base 2200. The unlocking hole and the lock buckle are connected by a transmission structure. The lock buckle can extend or retract into the base 2200 according to the rotation of the unlocking hole. The unlocking member 13 is inserted into the unlocking hole, so that the unlocking hole can rotate along with the unlocking member 13 around the axis of the central turntable 12, thereby completing the process of unlocking or locking between the base 2200 and the box cover 2100. In this embodiment, the unlocking member 13 has a preset starting position. When the unlocking member 13 is in the starting position, the base 2200 can be placed on the box opening device 100. The unlocking member 13 is then accurately inserted into the unlocking hole. Correspondingly, one side of the slider 142 is in contact with the starting stop 1461. As the linear drive member 141 extends, the slider 142 moves away from the starting stop 1461 and gradually approaches the ending stop 1462, ultimately engaging with the ending stop 1462. Accordingly, the unlocking member 13 is now in the preset ending position, and the unlocking hole rotates with the unlocking member 13, causing the lock catch to retract into the base 2200, effectively unlocking the base 2200 and the box cover 2100. The path that the unlocking member 13 travels from the starting position to the ending position is an arc. The central angle of this arc is determined by the central angle required for the unlocking hole to unlock the base 2200. In this embodiment, the central angle of this arc is set to 90°.

[0051] Also, see Figure 3 In one embodiment of the present invention, the control console 1 further includes a first sensor 15 and a second sensor 16. The first sensor 15 and the second sensor 16 are disposed on a side of the lifting plate 11 away from the unlocking member 13. When the slider 142 engages with the starting stop block 1461, the first sensor 15 emits an electrical signal; when the slider 142 engages with the ending stop block 1462, the second sensor 16 emits an electrical signal. The first sensor 15 and the second sensor 16 include one of an infrared position sensor and a photoelectric sensor. The first sensor 15 and the second sensor 16 can directly detect the movement position of the slider 142, thereby indirectly obtaining the position information of the unlocking member 13. By sending an electrical signal to the indicator light or PLC controller in the sunken box opening system 1000, the operator can intuitively obtain the position information of the unlocking member 13, thereby preventing the operator from placing or taking the transfer box 2000 when the unlocking member 13 has not rotated to the preset position.

[0052] Furthermore, in one embodiment of the present invention, the first sensor 15 and the second sensor 16 are both disposed on one side of the slide rail 143. A light shielding sheet 147 is installed on the side of the slider 142 close to the first sensor 15 and the second sensor 16. The first sensor 15 includes a first photoelectric sensor 15a, and the second sensor 16 includes a second photoelectric sensor 16a. When the slider 142 slides on the slide rail 143, the light shielding sheet 147 can sense and cooperate with the first photoelectric sensor 15a and the second photoelectric sensor 16a respectively. For details, please refer to Figure 3 The shading plate 147 is used to block the transmitting end and the receiving end of the photoelectric sensor. When the shading plate 147 moves to the first photoelectric sensor 15a, the receiving end of the first photoelectric sensor 15a cannot receive the light signal emitted by its transmitting end. At this time, the first photoelectric sensor 15a sends an electrical signal to the controller or indicator light in the sunken box opening system 1000; similarly, when the shading plate 147 moves to the second photoelectric sensor 16a, the receiving end of the second photoelectric sensor 16a cannot receive the light signal emitted by its transmitting end. At this time, the second photoelectric sensor 16a sends an electrical signal to the controller or indicator light in the sunken box opening system 1000. The installation position of the first photoelectric sensor 15a corresponds to the position when the slider 142 is in contact with the starting point limit block 1461, and the installation position of the second photoelectric sensor 16a corresponds to the position when the slider 142 is in contact with the end point limit block 1462. Accordingly, when the slider 142 drives the shading plate 147 to cooperate with the first photoelectric sensor 15a, the unlocking member 13 is located at the starting position, and when the slider 142 drives the shading plate 147 to cooperate with the second photoelectric sensor 16a, the unlocking member 13 is located at the end position.

[0053] In one embodiment of the present invention, the slider 142 is connected to the swing arm 144 via a first rotational pair 148, which includes a first bearing 1481 and a first rotating shaft 1482 passing through the first bearing 1481, and a first shaft end retaining spring 1483 is provided at the shaft end of the first rotating shaft 1482; the swing arm 144 is connected to the crank 145 via a second rotational pair 149, which includes a second bearing 1491 and a second rotating shaft 1492 passing through the second bearing 1491, and a second shaft end retaining spring 1493 is provided at the shaft end of the second rotating shaft 1492. For details, please refer to Figure 4A first bearing 1481 is disposed in a mounting hole at one end of the swing arm 144, and a second bearing 1491 is disposed in a mounting hole at the other end of the swing arm 144. The provision of the first bearing 1481 and the second bearing 1491 at both ends of the swing arm 144 reduces the rotational resistance between the slider 142 and the swing arm 144, and between the swing arm 144 and the crank 145. To prevent the first and second bearings 1481, 1491 from shifting during operation, a first retaining groove is defined at the end of the first rotating shaft 1482, which passes through the first bearing 1481. A first shaft-end retaining spring 1483 is sleeved on the outer side of the first retaining groove. A second shaft-end retaining spring 1493 is sleeved on the outer side of the second retaining groove. The first shaft-end retaining spring 1483 is used to limit the axial displacement of the first bearing 1481, and the second shaft-end retaining spring 1493 is used to limit the axial displacement of the second bearing 1491.

[0054] In one embodiment of the present invention, the box opening device 100 further includes a carrier 2, which includes a receiving hole 22 and a receiving portion 21. The console 1 is disposed in the receiving hole 22. The box opening device 100 is used to unlock the transport box 2000. The transport box 2000 includes a box cover 2100 and a base 2200 mounted on the inner side of the box cover 2100. The box cover 2100 is placed on the receiving portion 21, and the base 2200 is placed on the console 1. Figure 2 and Figure 5 The carrying portion 21 is disposed around the receiving hole 22, which is enclosed by the inner side of the carrying portion 21. The console 1 is entirely disposed within the receiving hole 22. A certain gap exists between the edge of the lifting plate 11 and the inner side of the carrying portion 21, allowing the console 1 to be raised and lowered without restriction. To facilitate unlocking the base 2200 and cover 2100 of the transport box 2000, the base 2200 of the transport box 2000 is placed on the console 1, while the cover 2100 of the transport box 2000 is placed on the top surface of the carrying portion 21. After the base 2200 and cover 2100 are separated, the base 2200 can be raised and lowered along with the console 1.

[0055] Furthermore, in one embodiment of the present invention, the carrier 2 further includes at least two positioning frames 23 arranged opposite to each other, the positioning frames 23 being mounted on the top surface of the carrier portion 21, and at least two positioning frames 23 being arranged in close contact with the box cover 2100; the carrier 2 further includes a fixing mechanism 24, the fixing mechanism 24 including a fixing film 241 and a rotating drive member 242, the fixing film 241 being mounted on the rotating end of the rotating drive member 242, and the rotating drive member 242 being able to drive the fixing film 241 to press against or away from the box cover 2100. For details, please refer to Figure 2 and Figure 5A plurality of positioning frames 23 are provided on the top surface of the supporting portion 21. The inner side surfaces of the positioning frames 23 need to be in contact with the box cover 2100 to limit the planar displacement of the box cover 2100. On this basis, a fixing mechanism 24 is also provided for further pressing the box cover 2100. Specifically, in this embodiment, two of the plurality of positioning frames 23 are provided with cavities and openings communicating with the cavities. The openings are provided on the sides of the positioning frames 23 that are in contact with the box cover 2100. The fixing film 241 can be extended from the openings by rotation or retracted into the cavity by rotation. The size of the openings must meet the requirements of the rotation path of the fixing film 241. The rotating drive member 242 is used to provide power for the rotation of the fixing film 241. The rotating end of the rotating drive member 242 can drive the fixing film 241 to rotate. When the fixing film 241 rotates and extends out of the opening, it presses against the cassette cover 2100, making it difficult to remove. This prevents workers from removing the cassette cover 2100 when it is not yet attached to the base 2200. When the fixing film 241 rotates and retracts into the cavity, the cassette cover 2100 is released, allowing workers to remove the transfer box 2000. This arrangement prevents workers from accidentally operating the cassette cover 2100, thereby preventing the wafer from being transferred to the next process step.

[0056] In another embodiment, the fixed soft film 241 is arranged on the outside of the positioning frame 23, the main body of the rotating driving member 242 is arranged on the bottom surface of the supporting portion 21, and the supporting portion 21 is provided with a circular hole for passing the rotating axis of the rotating driving member 242. The end of the rotating axis is arranged above the supporting portion 21 for connecting with the fixed soft film 241, and is directly pressed against or away from the box cover 2100 by the driving of the rotating driving member 242, so as to achieve the function of fixing the box cover 2100 and loosening the box cover 2100.

[0057] The fixed film 241 includes one of a rubber film, a plastic film and a polymer film, and the rotating driving member 242 includes one of a rotating cylinder and a rotating motor.

[0058] In one embodiment of the present invention, the control console 1 further includes a load sensor 17, which is disposed on the lifting plate 11 and on the same side as the unlocking member 13. Figure 2The load sensor 17 is mounted on the side of the lifting plate 11 facing the base 2200. The load sensor 17 comprises one of an ultra-thin reflective photoelectric sensor and an ultra-thin pressure sensor, preferably an ultra-thin reflective photoelectric sensor. The load sensor 17 is primarily used to detect whether the base 2200 has been placed on the control console 1. It cooperates with the control components of the sunken box opening system 1000 to improve the automation level of the process of opening the transfer box 2000. Multiple load sensors 17 can be provided to prevent a malfunction of one load sensor 17 from preventing the base 2200 from being detected in a timely manner, thereby preventing the unlocking process of the transfer box 2000 from being affected.

[0059] In one embodiment of the present invention, the console 1 further includes a load sensor 17 and at least one positioning pin 18. The at least one positioning pin 18 is mounted on the lifting plate 11 and is disposed on the same side as the unlocking member 13. Figure 2 The positioning pin 18 is installed on the side of the lifting plate 11 facing the base 2200. A positioning hole is provided in the base 2200. The setting position of the positioning pin 18 matches the positioning hole. When the base 2200 is placed on the console 1, the positioning pin 18 is inserted into the positioning hole and the unlocking member 13 is inserted into the unlocking hole to realize the positioning of the installation position of the base 2200, avoiding the incorrect installation direction of the base 2200, which affects the unlocking process, or the unlocking member 13 is incorrectly matched with the unlocking hole, resulting in an inability to unlock.

[0060] The present invention also proposes a sunken box opening system 1000, which includes the box opening device 100 referred to in any one of the above embodiments. The specific structure of the box opening device 100 refers to the above embodiments. Since the sunken box opening system 1000 adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here.

[0061] Among them, see Figure 1 、 Figure 6 and Figure 7The sunken box opening system 1000 also includes a frame body 200, a lifting mechanism 300 and a control unit. Specifically, the frame body 200 includes an outer frame 210 and a transmission space 220 arranged inside the outer frame 210. The box opening device 100 is arranged at the top of the outer frame 210; the lifting mechanism 300 is arranged in the transmission space 220. The lifting mechanism 300 includes a lifting platform 310, screw rods 320320 and a drive motor 330. The lifting platform 310 is installed at the bottom of the lifting plate 11. The drive motor 330 drives the lifting platform 310 to move up and down through the screw rods 320320; the box opening device 100 and the drive motor 330 are both electrically connected to the control unit. It should be noted that the electrical components in the box opening device 100 are all electrically connected to the control unit, that is, the linear drive 141, the first sensor 15, the second sensor 16, the load sensor 17, and the rotary drive 242 are all electrically connected to the control unit.

[0062] See also Figure 6 and Figure 7, the process of unlocking and opening the conveyor box 2000 of the sunken box opening system 1000 is as follows: the linear drive member 141 drives the slider 142 to fit with the starting limit block 1461, the first sensor 15 senses the light-shielding member, and sends a first electrical signal to the control member, so that the control member sends a signal to the outside world indicating that the unlocking member 13 is at the starting position at this time, and the conveyor box 2000 can be placed in the box opening device 100. During the placement process, the positioning hole in the base 2200 of the conveyor box 2000 is aligned with the positioning pin 18 on the console 1, and the unlocking hole is aligned with the unlocking member 13. Then, the conveyor box 2000 is placed as a whole in the box opening device 100. At this time, the bottom surface of the box cover 2100 is placed on the bearing part 21, the side of the box cover 2100 is fitted with the positioning frame 23, and the base 2200 is placed on the console 1. The load sensor 17 in the control console 1 detects that the base 2200 has been placed on the lifting plate 11 and sends a second electrical signal to the control unit. After receiving the second electrical signal, the control unit activates the rotary drive unit 242 to rotate the fixed soft film 241 90 degrees, so that the fixed soft film 241 presses the box cover 2100. At the same time, the control unit activates the linear drive unit 141, causing the linear drive unit 141 to push the slider 142 to slide, thereby driving the unlocking member 13 to rotate. The unlocking member 13 drives the unlocking hole to rotate. When the slider 142 moves to the end stop block 1462, the base 2200 has been unlocked from the box cover 2100. After the second sensor 16 senses the light-shielding member, it sends a third electrical signal to the control member. After receiving the third electrical signal, the control member stops the linear drive member 141 from extending and retracting. At the same time, the control member starts the drive motor 330. The drive motor 330 drives the lead screw 320 to rotate, so that the lifting platform 310 drives the console 1 to descend. At this time, a base 2200 is placed on the top of the console 1, and a wafer box is placed on the base 2200. Wafers are placed in the wafer box. The wafers descend synchronously with the console 1 to the transfer space 220. At this time, the external robot can take away the wafer for processing.

[0063] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A box opening device, characterized in that: The control console includes a lifting plate, a central turntable, an unlocking member, and a driving mechanism. The lifting plate is provided with a through hole, the central turntable is rotatably mounted in the through hole, the central turntable is provided with at least one unlocking member, the unlocking member is eccentrically arranged with respect to the central turntable, and the driving mechanism is provided on a side of the lifting plate away from the unlocking member. The driving mechanism includes a linear driving member, a slider, a slide rail, a swing arm, a crank and a limit member, the linear driving member and the slide rail are fixedly mounted on the lifting plate, the slider is slidably connected to the slide rail, the telescopic end of the linear driving member is connected to the slider, the length direction of the slide rail is the same as the movement direction of the telescopic end, the side of the slider away from the lifting plate is rotatably connected to one end of the swing arm, the other end of the swing arm is rotatably connected to one end of the crank, and the other end of the crank is fixedly connected to the center turntable; The limiting member includes a starting point limiting block and an end point limiting block, the starting point limiting block and the end point limiting block are installed on the lifting plate, and the sliding block slides between the starting point limiting block and the end point limiting block.

2. The box opening device according to claim 1, wherein: The unlocking member is used to unlock the base of the transfer box. The unlocking member includes a starting position and an end position. When the slider is in contact with the starting limit block, the unlocking member is at the starting position. When the slider is in contact with the end stop block, the unlocking member is at the end position; When the unlocking member moves from the starting position to the end position, the base is unlocked.

3. The box opening device according to claim 1, wherein: The console also includes a first sensor and a second sensor, and the first sensor and the second sensor are arranged on a side of the lifting plate away from the unlocking member. When the slider is in contact with the starting limit block, the first sensor sends an electrical signal; when the slider is in contact with the end limit block, the second sensor sends an electrical signal.

4. The box opening device according to claim 3, characterized in that: The first sensor and the second sensor are both arranged on one side of the slide rail, and a light-shielding sheet is installed on the side of the slider close to the first sensor and the second sensor. The first sensor includes a first photoelectric sensor, and the second sensor includes a second photoelectric sensor. When the slider slides on the slide rail, the light-shielding sheet can respectively sense and cooperate with the first photoelectric sensor and the second photoelectric sensor.

5. The box opening device according to claim 1, wherein: The slider is connected to the swing arm via a first rotation pair, the first rotation pair comprising a first bearing and a first rotating shaft passing through the first bearing, and a first shaft end retaining spring is provided at an end of the first rotating shaft; The swing arm is connected to the crank via a second rotation pair, which includes a second bearing and a second rotating shaft passing through the second bearing, and a second shaft end retaining spring is provided at the shaft end of the second rotating shaft.

6. The box opening device according to claim 1, wherein: The box opening device also includes a supporting platform, which includes a receiving hole and a supporting portion. The console is arranged in the receiving hole. The box opening device is used to unlock the conveying box. The conveying box includes a box cover and a base installed on the inner side of the box cover. The box cover is placed on the supporting portion, and the base is placed on the console.

7. The box opening device according to claim 6, characterized in that: The carrying platform further comprises at least two positioning frames arranged opposite to each other, the positioning frames being mounted on the top surface of the carrying portion, and at least two of the positioning frames being fitted to the box cover; The carrier platform also includes a fixing mechanism, which includes a fixing film and a rotating drive member. The fixing film is installed on the rotating end of the rotating drive member, and the rotating drive member can drive the fixing film to press or move away from the box cover.

8. The box opening device according to any one of claims 1 to 7, characterized in that: The console further includes a load sensor, which is disposed on the lifting plate and on the same side as the unlocking member.

9. The box opening device according to any one of claims 1 to 7, characterized in that: The console further includes at least one positioning pin, which is mounted on the lifting plate and disposed on the same side as the unlocking member.

10. A sunken box opening system, characterized in that: The box opening device according to any one of claims 1 to 9, wherein the sunken box opening system further comprises: A frame body, the frame body comprising an outer frame and a conveying space arranged inside the outer frame, the box opening device being arranged on the top of the outer frame; A lifting mechanism is provided in the conveying space, comprising a lifting platform, a screw and a drive motor. The lifting platform is mounted on the bottom of the lifting plate, and the drive motor drives the lifting platform to move up and down through the screw; The control component is electrically connected to the box opening device and the driving motor.

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