Purification device for high-purity hexachlorodisilane

Abstract

The high-purity hexachlorodisilane purification device comprises a raw material tank, a first rectifying tower, a first buffer tank, a second rectifying tower, a second buffer tank and a finished product tank, the raw material tank is connected with the first rectifying tower through a pipeline; the top of the first rectifying tower is connected with a first condenser; one end of the first condenser is connected with the first rectifying tower through a pipeline, and the other end is connected with the first buffer tank through a pipeline; the first buffer tank is connected with the second rectifying tower through a pipeline; the top of the second rectifying tower is connected with a second condenser; one end of the second condenser is connected with the second rectifying tower through a pipeline, and the other end is connected with the second buffer tank through a pipeline; the second buffer tank is connected back to the second rectifying tower through a pipeline; the bottom of the second rectifying tower is connected with a finished product tank; the device is simple in structure, the preparation process is convenient, and high-purity hexachlorodisilane can be effectively obtained; and meanwhile, the operation energy consumption is low, the purification cost is reduced, tank explosion accidents are prevented, and the safety is high.

Description

Technical Field

[0001] The utility model relates to the technical field of equipment related to material purification, and in particular to a purification device for high-purity hexachlorodisilane. Background Art

[0002] In the field of semiconductor chips, hexachlorodisilane is a key raw material. Since it contains chlorine as much as 3 / 4, which is highly corrosive, it is widely used as an etching gas in the etching process steps of chip manufacturing. For example, it can etch metal electrode layers. It can also be used to etch aluminum oxide in patterned sapphire substrates. Usually, the chemical properties of aluminum oxide are very stable and not easy to etch.

[0003] As chip size continues to shrink, the control over chip process conditions has become increasingly refined, placing higher requirements on the purity of hexachlorodisilane, and the upper limit on the impurity content has become increasingly stringent. Only by using high-purity hexachlorodisilane, that is, requiring the purity of hexachlorodisilane to reach 4N or above, can the controllable chip process be guaranteed. To ensure that hexachlorodisilane reaches sufficient purity, the most critical thing is to remove the harmful and most difficult-to-remove impurities.

[0004] Currently, in the prior art, the purification device for hexachlorodisilane has a complex structure and a cumbersome process flow.

[0005] Based on the above situation, our company proposed a high-purity hexachlorodisilane purification device after sufficient comparison and demonstration. Utility Model Content

[0006] The purpose of the utility model is to provide a purification device for high-purity hexachlorodisilane to solve the problems in the prior art.

[0007] To achieve the above object, the technical solution adopted by the utility model is: a purification device for high-purity hexachlorodisilane, comprising a raw material tank, a first distillation tower, a first buffer tank, a second distillation tower, a second buffer tank and a finished product tank;

[0008] The raw material tank is connected to the first distillation tower through a pipeline;

[0009] A first condenser is connected to the top of the first distillation tower;

[0010] One end of the first condenser is connected to the first distillation tower through a pipeline, and the other end is connected to the first buffer tank through a pipeline;

[0011] The first buffer tank is connected to the second distillation tower via a pipeline;

[0012] A second condenser is connected to the top of the second distillation tower;

[0013] One end of the second condenser is connected to the second distillation tower through a pipeline, and the other end is connected to the second buffer tank through a pipeline;

[0014] The second buffer tank is connected back to the second distillation tower via a pipeline;

[0015] The bottom of the second distillation tower is connected to the finished product tank through a pipeline.

[0016] Preferably, a filter is provided on the pipeline connecting the raw material tank and the first distillation tower.

[0017] Preferably, a flow meter is provided on the pipeline connecting the raw material tank and the first distillation tower.

[0018] In a preferred embodiment, a regulating valve is provided on the pipeline connecting the second distillation tower and the first buffer tank.

[0019] In a preferred embodiment, the first distillation tower and the second distillation tower both include a tower kettle and a tower body; the tower kettle is arranged at the bottom of the tower body; and a reboiler is provided on one side of the tower kettle via a pipeline connection.

[0020] In a preferred embodiment, both the first distillation tower and the second distillation tower are packed towers, and structured packing trays are provided in the tower bodies.

[0021] In a preferred embodiment, the number of structured packing trays in the tower body of the first distillation tower is 50.

[0022] In a preferred embodiment, the number of structured packing trays in the tower body of the second distillation tower is 60.

[0023] Preferably, the raw material tank and the finished product tank are both T-type steel cylinders.

[0024] Due to the application of the above technical solution, the beneficial effects of this application compared with the prior art are:

[0025] The present invention discloses a high-purity hexachlorodisilane purification device, which comprises a raw material tank, a first distillation tower, a first buffer tank, a second distillation tower, a second buffer tank, and a finished product tank. The device has a simple structure, a convenient preparation process, high operability in actual production, and a good purification effect, and can effectively obtain high-purity hexachlorodisilane. At the same time, the operation of the double distillation towers has low energy consumption, effectively saving resources and reducing purification costs. Moreover, the provision of the first buffer tank and the second buffer tank better alleviates the problem of excessive pressure in the tank body, prevents the occurrence of tank explosion accidents, and has high safety, thereby playing a role in safety protection. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific implementation methods or the description of the prior art. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0027] Attachment Figure 1 This is a schematic structural diagram of a purification device for high-purity hexachlorodisilane according to the present invention;

[0028] Among them: 1. Raw material tank; 2. First distillation tower; 3. First buffer tank; 4. Second distillation tower; 5. Second buffer tank; 6. Finished product tank; 7. First condenser; 8. Second condenser; 9. Filter; 10. Flow meter; 11. Regulating valve; 12. Tower bottom; 13. Tower body; 14. Reboiler. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this application.

[0030] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequential order. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0031] In this application, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "center," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe the present invention and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0032] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0033] Furthermore, the terms "installed," "disposed," "provided with," "connected," "connected," and "socketed" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0034] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0035] Example 1

[0036] Attachment Figure 1 The utility model is a high-purity hexachlorodisilane purification device, comprising a raw material tank 1, a first distillation tower 2, a first buffer tank 3, a second distillation tower 4, a second buffer tank 5 and a finished product tank 6;

[0037] The raw material tank 1 is connected to the first distillation tower 2 through a pipeline; the raw material tank 1 is used to store the raw material, i.e., low-purity hexachlorodisilane;

[0038] The top of the first distillation tower 2 is connected to a first condenser 7;

[0039] One end of the first condenser 7 is connected to the first distillation tower 2 through a pipeline, and the other end is connected to the first buffer tank 3 through a pipeline;

[0040] The first buffer tank 3 is connected to the second distillation tower 4 through a pipeline;

[0041] The top of the second distillation tower 4 is connected to a second condenser 8;

[0042] One end of the second condenser 8 is connected to the second distillation tower 4 through a pipeline, and the other end is connected to the second buffer tank 5 through a pipeline;

[0043] The second buffer tank 5 is connected back to the second distillation tower 4 through a pipeline;

[0044] The bottom of the second distillation tower 4 is connected to the finished product tank 6 through a pipeline, and the finished product tank 6 is used to store the purified hexachlorodisilane.

[0045] In order to better improve the purity of the low-purity hexachlorodisilane in the raw material tank 1 entering the first distillation tower 2, a filter 9 is provided on the pipeline connecting the raw material tank 1 and the first distillation tower 2 to filter out particles in the low-purity hexachlorodisilane.

[0046] A flow meter 10 is provided on the pipeline connecting the raw material tank 1 and the first distillation tower 2, which can accurately control the flow rate of hexachlorodisilane.

[0047] In order to better control the flow rate and speed of the hexachlorodisilane in the first buffer tank 3 entering the second distillation tower 4 , a regulating valve 11 is provided on the pipeline connecting the second distillation tower 4 and the first buffer tank 3 .

[0048] The first distillation tower 2 and the second distillation tower 4 both include a tower bottom 12 and a tower body 13; the tower bottom 12 is arranged at the bottom of the tower body 13; a reboiler 14 is provided on one side of the tower bottom 12 via a pipeline.

[0049] The first distillation tower 2 and the second distillation tower 4 are both packed towers, and structured packing trays are arranged in their tower bodies 13; the number of structured packing trays in the tower body 13 of the first distillation tower 2 is 50; the number of structured packing trays in the tower body 13 of the second distillation tower 4 is 60.

[0050] In order to better store raw materials and products, the raw material tank 1 and the finished product tank 6 are both T-type steel cylinders.

[0051] During specific use, the low-purity hexachlorodisilane in the raw material tank 1 is first filtered through the filter 9 to remove the particles contained therein, and then the raw material tank 1 is passed into the first distillation tower 2; the hexachlorodisilane is pressed into the first distillation tower 2, and the hexachlorodisilane is distilled in the first distillation tower 2 to remove the heavy components in the hexachlorodisilane; the hexachlorodisilane from which the heavy components have been removed is passed into the second distillation tower 4 for distillation to remove the light components in the hexachlorodisilane; after completion, the obtained hexachlorodisilane is passed into the finished product tank 6.

[0052] The present application discloses a high-purity hexachlorodisilane purification device, which comprises a raw material tank 1, a first distillation tower 2, a first buffer tank 3, a second distillation tower 4, a second buffer tank 5, and a finished product tank 6. The device has a simple structure, a convenient preparation process, high operability in actual production, and a good purification effect, and can effectively obtain high-purity hexachlorodisilane. At the same time, the operation of the double distillation towers has low energy consumption, effectively saving resources and reducing purification costs. Moreover, the provision of the first buffer tank 3 and the second buffer tank 5 better alleviates the problem of excessive pressure in the tank body, prevents the occurrence of tank explosion accidents, and plays a role in safety protection.

[0053] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A purification device for high-purity hexachlorodisilane, characterized in that: It includes a raw material tank, a first distillation tower, a first buffer tank, a second distillation tower, a second buffer tank and a finished product tank; The raw material tank is connected to the first distillation tower through a pipeline; A first condenser is connected to the top of the first distillation tower; One end of the first condenser is connected to the first distillation tower through a pipeline, and the other end is connected to the first buffer tank through a pipeline; The first buffer tank is connected to the second distillation tower via a pipeline; A second condenser is connected to the top of the second distillation tower; One end of the second condenser is connected to the second distillation tower through a pipeline, and the other end is connected to the second buffer tank through a pipeline; The second buffer tank is connected back to the second distillation tower via a pipeline; The bottom of the second distillation tower is connected to the finished product tank through a pipeline.

2. The purification device for high-purity hexachlorodisilane according to claim 1, characterized in that: A filter is provided on the pipeline connecting the raw material tank and the first distillation tower.

3. The purification device for high-purity hexachlorodisilane according to claim 1, characterized in that: A flow meter is provided on the pipeline connecting the raw material tank and the first distillation tower.

4. The purification device for high-purity hexachlorodisilane according to claim 1, characterized in that: A regulating valve is provided on the pipeline connecting the second distillation tower and the first buffer tank.

5. A purification device for high-purity hexachlorodisilane according to any one of claims 1 to 4, characterized in that: The first distillation tower and the second distillation tower both include a tower kettle and a tower body; the tower kettle is arranged at the bottom of the tower body; a reboiler is provided on one side of the tower kettle via a pipeline.

6. The purification device for high-purity hexachlorodisilane according to claim 5, characterized in that: The first distillation tower and the second distillation tower are both packed towers, and structured packing trays are arranged in the tower bodies.

7. The purification device for high-purity hexachlorodisilane according to claim 6, characterized in that: The number of structured packing trays in the tower body of the first distillation tower is 50.

8. The device for purifying high-purity hexachlorodisilane according to claim 6, wherein: The number of structured packing trays in the tower body of the second distillation tower is 60.

9. The purification device for high-purity hexachlorodisilane according to claim 1, characterized in that: The raw material tank and finished product tank are both T-type steel cylinders.

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