Cleaning device and cleaning line for parts with holes

Abstract

The utility model discloses a cleaning device and a cleaning line for parts with holes. The cleaning device comprises a solution tank body, a solution circulating part, a clamping part and an air inlet part, the solution tank body is used for bearing a cleaning solution; the solution circulating part is connected with the solution tank body and is used for circularly conveying a cleaning solution into the solution tank body; the clamping piece is used for clamping a to-be-cleaned part with a hole and transferring the to-be-cleaned part with the hole to the solution tank body, and the clamping piece can be driven to rotate; the gas inlet piece is connected with the solution tank body and used for inputting gas pressure into the solution tank body. When parts with holes are cleaned, the problem that static cleaning fluidity is poor is solved through work cooperation of the solution tank body, the solution circulating piece, the clamping piece and the air inlet piece, and the uniformity degree of cleaning and the overall cleanliness are effectively improved; particularly, when the composite material is applied to parts with small holes, the content of particles and metal elements in the holes can be greatly reduced; and the cleaning effect is good.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor parts cleaning, in particular to a cleaning device for parts with holes and a cleaning line. Background Art

[0002] Currently, the SHD parts or nozzles used in existing PECVD, PEALD, and HDP equipment all feature small holes. These parts are typically cleaned using high-pressure water and static chemical immersion. Common issues include the uncontrollable spray angle of the water gun, the distance from the nozzle to the small hole, and the cleaning time for each small hole. This affects the uniformity of cleaning and overall cleanliness of the parts. Furthermore, the static immersion method suffers from poor permeability and flowability of the cleaning solution within the small holes, resulting in excessive amounts of residual metal elements on the surface of the cleaned parts and on the inner walls of the holes. Utility Model Content

[0003] The utility model aims to provide a cleaning device for parts with holes and a cleaning line, aiming to solve the problem that the existing cleaning devices have poor cleaning effects on parts with holes.

[0004] In order to solve the above technical problems, the purpose of the present utility model is achieved through the following technical solutions: providing a cleaning device for parts with holes, including a solution tank, a solution circulation part, a clamping part and an air intake part;

[0005] The solution tank is used to carry the cleaning solution;

[0006] The solution circulation member is connected to the solution tank body and is used for circulating the cleaning solution into the solution tank body;

[0007] The clamping member is used to clamp the porous component to be cleaned and transfer it to the solution tank, and can drive the porous component to rotate;

[0008] The gas inlet is connected to the solution tank and is used to input gas pressure into the solution tank.

[0009] Furthermore, the solution tank body includes a first tank body and a second tank body;

[0010] The second tank body is arranged in the first tank body and an overflow interlayer is provided between the second tank body and the first tank body;

[0011] The top opening height of the second trough body is lower than the top opening height of the first trough body.

[0012] Furthermore, the solution circulation component includes a liquid inlet, a liquid outlet and a circulation filter;

[0013] The liquid inlet end is connected to the solution tank;

[0014] The liquid outlet is connected to the solution tank;

[0015] The circulation filter is located between the liquid inlet and the liquid outlet;

[0016] Wherein, the liquid inlet end is connected to the inside of the second tank body, and the liquid outlet end is connected to the overflow interlayer.

[0017] Furthermore, the clamping member includes a clamping arm, a rotating portion and a moving portion;

[0018] The clamping arm is used to clamp the parts with holes to be cleaned;

[0019] The rotating portion is connected to the clamping arm and is used to drive the clamping arm to rotate;

[0020] The moving part is connected to the rotating part and is used to drive the rotating part to move, so as to link the clamping arm to drive the hole component to move downward into or upward out of the second slot.

[0021] Furthermore, one end of the air inlet member is inserted into the second slot body, and the other end of the air inlet member extends out of the first slot body and is used to be connected to an external air source.

[0022] Furthermore, one end of the air inlet member is located at the bottom of the second tank body and is provided with a plurality of upward-facing air outlet holes.

[0023] Furthermore, the pressure range of the gas input by the air inlet member is 5 to 6 kilograms.

[0024] Furthermore, when the clamping member drives the porous component to be cleaned to be transferred to the second tank body, the liquid level line of the second tank body is 4 to 6 cm higher than the upper surface of the porous component.

[0025] Furthermore, the cleaning solution includes one of a pure water solution, an acid solution and an alkaline solution.

[0026] An embodiment of the present invention further provides a cleaning line, which includes the perforated parts cleaning device as described above.

[0027] The beneficial effects of the embodiments of the present utility model are as follows: when cleaning parts with holes, new or filtered cleaning solution is circulated into the solution tank body through the solution circulation part to ensure the cleaning effect of the cleaning solution. Gas is input into the solution tank body through the air inlet part so that the gas pressure acts on the cleaning solution and forms a disturbance. Through the rotation function of the clamping part, the parts with holes are driven to rotate forward and reverse and turbulence is formed when the cleaning solution hits the inner wall of the solution tank body. The turbulence has the effect of flushing the parts with holes. Based on this, when cleaning parts with holes, the problem of poor static cleaning fluidity is solved through the cooperation of the solution tank body, the solution circulation part, the clamping part and the air inlet part, and the cleaning uniformity and overall cleanliness are effectively improved; especially when applied to parts with holes with small holes, the content of particles and metal elements in the holes can be greatly reduced; it has the advantage of good cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 This is a schematic structural diagram of a device for cleaning parts with holes provided in an embodiment of the utility model.

[0030] Description of the symbols in the figure:

[0031] 1. Solution tank; 11. First tank; 12. Second tank; 13. Liquid level line;

[0032] 2. Solution circulation parts; 21. Liquid inlet; 22. Liquid outlet; 23. Circulation filter;

[0033] 3. Clamping parts;

[0034] 4. Air intake parts;

[0035] 5. Parts with holes. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0037] It will be understood that when used in this specification and the appended claims, the terms “comprises” and “comprising” indicate the presence of described features, integers, steps, operations, elements and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups thereof.

[0038] It should also be understood that the terms used in this utility model specification are only for the purpose of describing specific embodiments and are not intended to limit the utility model. As used in this utility model specification and the appended claims, the singular forms "a", "an" and "the" are intended to include plural forms unless the context clearly indicates otherwise.

[0039] It should be further understood that the term “and / or” used in the present specification and the appended claims refers to any and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0040] See also Figure 1 , Figure 1 A schematic structural diagram of a perforated parts cleaning device provided by an embodiment of the present invention; the perforated parts cleaning device of the present invention embodiment comprises a solution tank 1, a solution circulation member 2, a clamping member 3 and an air intake member 4;

[0041] The solution tank 1 is used to carry the cleaning solution;

[0042] The solution circulation member 2 is connected to the solution tank body 1 and is used to circulate the cleaning solution into the solution tank body 1;

[0043] The clamping member 3 is used to clamp the hole component 5 to be cleaned and transfer it to the solution tank 1, and can drive the hole component 5 to rotate;

[0044] The gas inlet 4 is connected to the solution tank 1 and is used to input gas pressure into the solution tank 1 .

[0045] In this embodiment, the solution tank 1 is a barrel-shaped structure with an open top, which can be round or square. The solution circulation unit 2 is used to supply and recover cleaning solution to the solution tank 1, achieving a circulation effect. The clamping unit 3 is a mechanical motion mechanism that stably clamps the perforated component 5 to drive the perforated component 5 in motion. The cleaning solution includes one of a pure water solution, an acid solution, and an alkaline solution. Different cleaning solutions have different cleaning times, and the specific cleaning time can be selected according to specific needs.

[0046] In this embodiment, the solution circulation part 2 is used to circulate new or filtered cleaning solution into the solution tank body 1 to ensure the cleaning effect of the cleaning solution; the air inlet part 4 is used to input gas into the solution tank body 1 so that the gas pressure acts on the cleaning solution and forms a disturbance; the rotation function of the clamping part 3 drives the perforated component 5 to rotate forward and reverse and causes turbulence to form when the cleaning solution hits the inner wall of the solution tank body 1. The turbulence has the effect of flushing the perforated component 5. Based on this, when cleaning the perforated component 5, the solution tank body 1, the solution circulation part 2, the clamping part 3 and the air inlet part 4 work together to solve the problem of poor static cleaning fluidity, effectively improving the uniformity of cleaning and the overall cleanliness; especially when applied to the perforated component 5 with small holes, it can greatly reduce the content of particles and metal elements in the hole; it has the advantage of good cleaning effect.

[0047] In one embodiment, the solution tank body 1 includes a first tank body 11 and a second tank body 12;

[0048] The second tank body 12 is disposed in the first tank body 11 and an overflow interlayer is provided between the second tank body 12 and the first tank body 11;

[0049] The top opening height of the second trough body 12 is lower than the top opening height of the first trough body 11 .

[0050] In this embodiment, the first trough body 11 and the second trough body 12 have the same shape. The first trough body 11 is larger than the second trough body 12 as a whole. The second trough body 12 can be fixed inside the first trough body 11 by using a fixed frame or a support rod or other structure. A gap is left between the outer wall of the second trough body 12 and the inner wall of the first trough body 11 to form an overflow interlayer. The top opening height of the second trough body 12 is designed to be lower than the top opening height of the first trough body 11. It can be understood that the second trough body 12 serves as a cleaning tank for cleaning the perforated parts 5. The cleaning solution is input into the second trough body 12 through the solution circulation part 2 and the input is maintained continuously. The clamping part 3 drives the perforated parts 5 into the second trough body 12 for cleaning. As the cleaning solution is continuously input, the used cleaning solution will overflow from the top of the second trough body 12 to the overflow interlayer for subsequent recovery.

[0051] In one embodiment, the solution circulation member 2 includes a liquid inlet 21, a liquid outlet 22 and a circulation filter 23;

[0052] The liquid inlet end 21 is connected to the solution tank 1;

[0053] The liquid outlet 22 is connected to the solution tank 1;

[0054] The circulation filter 23 is located between the liquid inlet end 21 and the liquid outlet end 22;

[0055] The liquid inlet end 21 is connected to the interior of the second tank body 12 , and the liquid outlet end 22 is connected to the overflow interlayer.

[0056] In this embodiment, both the liquid inlet 21 and the liquid outlet 22 are constructed as pipes. One end of the liquid inlet 21 passes through the first tank body 11 and connects to the interior of the second tank body 12. One end of the liquid outlet 22 is connected to the bottom of the first tank body 11 and communicates with the overflow interlayer. The other ends of the liquid inlet 21 and the liquid outlet 22 are both connected to a circulation filter 23. As will be appreciated, a liquid pump is provided within the circulation filter 23. The pump extracts the used cleaning solution from the overflow interlayer through the liquid outlet 22. The used cleaning solution is then filtered through the circulation filter 23 and then fed into the interior of the second tank body 12 through the liquid inlet 21, thereby forming a circulation system and ensuring a clean supply of cleaning solution.

[0057] In one embodiment, the clamping member 3 includes a clamping arm, a rotating portion, and a moving portion;

[0058] The clamping arm is used to clamp the holed parts 5 to be cleaned;

[0059] The rotating portion is connected to the clamping arm and is used to drive the clamping arm to rotate;

[0060] The moving portion is connected to the rotating portion and is used to drive the rotating portion to move, so as to link the clamping arm to drive the hole component 5 to move downward into or upward out of the second slot 12.

[0061] In this embodiment, the hole component 5 is usually flat, and the clamping arm can be clamped on the side of the hole component 5. Multiple clamping arms can be provided to clamp multiple sides of the hole component 5 to ensure the stability of clamping; the rotating part can be a rotating motor, and the clamping arm is connected to the output shaft of the rotating motor to drive the clamping arm to rotate; the moving part can be a lifting mechanism, and the rotating part is installed on the moving part to drive the rotating part to perform lifting and lowering movements; thus, the hole component 5 can be driven to rotate and lift through the clamping part 3, thereby realizing the hole component 5 moving down into or up out of the second trough 12, and driving the hole component 5 to rotate and clean.

[0062] In one embodiment, one end of the air inlet member 4 is inserted into the second slot body 12 , and the other end of the air inlet member 4 extends out of the first slot body 11 and is used to connect to an external air source.

[0063] In this embodiment, the air inlet member 4 can adopt a pipe structure, one end of the air inlet member 4 is set at the bottom of the second trough body 12, and a plurality of upward air outlet holes are set at one end of the air inlet member 4; the air is supplied to the air inlet member 4 through an external air source, and the gas enters the second trough body 12 from one end of the air inlet member 4 and applies gas pressure to the cleaning solution, thereby forming rising bubbles, so that the cleaning solution presents a boiling-like state, which can improve the cleaning effect of the perforated component 5.

[0064] Preferably, the pressure range of the gas input by the air inlet 4 is 5 to 6 kg, which has a better cleaning effect.

[0065] In one embodiment, when the fixture 3 moves the perforated component 5 to be cleaned into the second tank 12, the liquid level 13 of the second tank 12 is 4 to 6 cm above the upper surface of the perforated component 5. Experimental analysis has shown that this position of the perforated component 5 results in greater turbulence during rotary cleaning, resulting in a more effective flushing effect, improved cleaning uniformity, and enhanced overall cleanliness.

[0066] In this embodiment, the liquid level line 13 can be the highest liquid level of the second tank body 12. After the solution circulation component 2 inputs the cleaning liquid level into the second tank body 12 and reaches the liquid level line 13, it directly overflows into the first tank body 11. At the same time as the overflow, it is recovered and filtered from the first tank body 11 through the solution circulation component 2, and then continues to be input into the second tank body 12, thus forming a continuous circulation supply of cleaning solution.

[0067] In this embodiment, the liquid level line 13 can also be a higher liquid level of the second tank body 12. At this time, the solution circulation part 2 can adopt an intermittent supply circulation method. The cleaning solution in the second tank body 12 becomes cleaning waste liquid after being used for a period of time, and then the cleaning waste liquid in the second tank body 12 flows to the first tank body 11 for recycling and reuse. The way for the cleaning waste liquid to flow to the first tank body 11 can be to set a circulation pipe between the second tank body 12 and the first tank body 11 for recycling, or the solution circulation part 2 can input new cleaning solution to make the old cleaning waste liquid overflow to the first tank body 11; then the new cleaning solution can continue to participate in the cleaning work.

[0068] Based on the aforementioned cleaning device for the perforated parts 5, the specific working process is described below:

[0069] S1, clamping the component 5 with a hole to the clamping member 3;

[0070] S2. A cleaning solution selected from the group consisting of a pure water solution, an acid solution, and an alkaline solution is introduced into the second tank 12 through the liquid inlet end 21 of the solution circulation member 2. The water flow rate is controlled to maintain the liquid level at the liquid level line 13, which is 4 to 6 cm above the surface of the perforated component 5.

[0071] S3, open the air inlet 4 and input 5 to 6 kg of gas pressure;

[0072] S4. The fixture 3 drives the component with holes 5 to rotate and clean it in the cleaning solution. The cleaning time is 120s to 600s when using pure water solution for cleaning, and the cleaning time is 10s to 300s when using acid solution or alkaline solution for cleaning.

[0073] In order to facilitate an intuitive understanding of the effect gain of the present application relative to the prior art, the cleaning tests were carried out on the same parts with small holes using the prior art and the solutions of the present application, and the comparative data shown in Table 1 below were obtained.

[0074] Table 1

[0075]

[0076] It can be seen that compared with the cleaning solutions of the prior art, the cleaning solution of the present application significantly reduces the content of metal elements in the holes of parts with small holes, and the cleaning effect is better.

[0077] An embodiment of the present invention further provides a cleaning line, which includes the above-mentioned perforated parts cleaning device.

[0078] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and such modifications or substitutions are intended to be within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of protection of the claims.

Claims

1. A cleaning device for parts with holes, characterized in that: include: A solution tank body, used for carrying a cleaning solution; a solution circulation member connected to the solution tank body and used for circulating the cleaning solution into the solution tank body; A clamping member, used for clamping the porous component to be cleaned and transferring it to the solution tank, and capable of driving the porous component to rotate; The gas inlet is connected to the solution tank body and is used to input gas pressure into the solution tank body.

2. The perforated parts cleaning device according to claim 1, characterized in that: The solution tank comprises: a first tank body; a second tank body, disposed in the first tank body and having an overflow interlayer between the second tank body and the first tank body; Wherein, the top opening height of the second trough body is lower than the top opening height of the first trough body.

3. The perforated parts cleaning device according to claim 2, characterized in that: The solution circulation part includes: A liquid inlet end connected to the solution tank; A liquid outlet end connected to the solution tank; A circulation filter is located between the liquid inlet and the liquid outlet; Wherein, the liquid inlet end is connected to the inside of the second tank body, and the liquid outlet end is connected to the overflow interlayer.

4. The perforated parts cleaning device according to claim 2, characterized in that: The clamping member comprises: Clamping arm, used to clamp the parts with holes to be cleaned; a rotating portion connected to the clamping arm and used to drive the clamping arm to rotate; The moving part is connected to the rotating part and is used to drive the rotating part to move, so as to link the clamping arm to drive the hole component to move downward into or upward out of the second slot.

5. The perforated parts cleaning device according to claim 2, characterized in that: One end of the air inlet member is inserted into the second slot body, and the other end of the air inlet member extends out of the first slot body and is used to be connected to an external air source.

6. The perforated parts cleaning device according to claim 2, characterized in that: One end of the air inlet member is located at the bottom of the second tank body and is provided with a plurality of upward-facing air outlet holes.

7. The perforated parts cleaning device according to claim 1, characterized in that: The gas pressure input by the air inlet member ranges from 5 to 6 kilograms.

8. The perforated parts cleaning device according to claim 2, characterized in that: When the clamping member drives the porous component to be cleaned to be transferred to the second tank body, the liquid level line of the second tank body is 4 to 6 cm higher than the upper surface of the porous component.

9. The perforated parts cleaning device according to claim 1, characterized in that: The cleaning solution includes one of a pure water solution, an acid solution and an alkaline solution.

10. A cleaning line, characterized in that: The invention comprises the perforated parts cleaning device according to any one of claims 1 to 9.

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