Micro-hemispherical harmonic oscillator coating clamp

Abstract

The utility model discloses a micro hemispherical harmonic oscillator coating clamp which comprises a cylindrical supporting rod and a positioner, a counter bore is formed in the top surface of the positioner, a mounting hole is formed in the bottom surface of the positioner, the mounting hole extends upwards to be communicated with the counter bore, and the upper portion of the cylindrical supporting rod penetrates through the mounting hole and then extends into the counter bore. The hemispherical harmonic oscillator is arranged in the counter bore and is supported on the cylindrical supporting rod; the lower part of the cylindrical supporting rod is detachably connected with a clamp in the coating cavity; the lower part of the positioner is detachably connected with the cylindrical supporting rod, and the positioner can move up and down relative to the cylindrical supporting rod until the lip edge surface of the hemispherical harmonic oscillator is flush with the top surface of the positioner, or the part, needing to be coated, of the outer surface of the micro-hemispherical harmonic oscillator is exposed out of the counter bore. According to the device, the preparation position of the metal film can be adjusted according to different electrode excitation modes required by the micro-hemispherical resonator gyroscope, so that the optimal performance of the metalized film on the surface of the micro-hemispherical resonator is effectively ensured, and the device is suitable for mass production of magnetron sputtering coating of the micro-hemispherical resonator.

Description

Technical Field

[0001] The utility model relates to the technical field of hemispherical resonator gyroscope preparation, in particular to a micro-hemispherical resonator coating fixture. Background Art

[0002] The micro-hemispherical resonator gyroscope (MHRG) is the primary inertial sensor element in wearable attitude measurement systems. Compared to traditional MEMS gyroscopes, it can achieve inertial navigation-level attitude measurement accuracy, making it more suitable for high-precision scenarios such as small drones and intelligent robots. The core component of a MHRG is the MHR. This bowl-shaped solid-state resonator with an anchor column is made of quartz glass through a blowtorch or hot pressing process. It operates by forming a capacitor with electrodes to detect electrical signals and sense attitude angles. Quartz is an insulator, so a metal conductive film must be deposited on its surface to generate electrostatic force through the capacitor formed with the electrodes for excitation and sensing.

[0003] Micro-hemispherical resonator excitation methods can be divided into planar electrode excitation and 3D electrode excitation. Planar electrode excitation mainly resonates and measures by forming capacitance between the equatorial plane of the micro-hemispherical resonator and the planar electrode, while 3D electrode excitation resonates and measures by forming capacitance between the outer surface arc of the micro-hemispherical resonator and the 3D excitation electrode. Therefore, for different excitation and measurement methods, the metallized film on the surface of the micro-hemispherical resonator is prepared at different positions to better ensure high quality factor and long decay time, which is also a necessary condition for ensuring high precision of navigation-grade gyroscopes. For planar electrodes, the coating only needs to extend from the top of the middle column to the equatorial edge, while for 3D electrodes, it needs to extend from the top of the middle column to the outer arc surface. The height of the outer arc coating is determined by the height of the 3D electrode. Currently, there is a lack of clamping mask fixtures that are compatible with the coating of micro-hemispherical resonators with planar electrodes and 3D electrodes. In addition, due to processing errors, it is difficult to achieve consistency in the outer diameter and height of the micro-hemispherical resonator, which results in excessive size variations. This requires the clamping mask fixture to flexibly change with the size and height of the micro-hemispherical resonator. The current clamping mask fixture is difficult to meet the above requirements.

[0004] Therefore, it is very necessary to develop a clamping fixture that is compatible with the coating of planar electrodes and 3D electrode micro-hemispherical resonators, is simple and easy to operate, reusable, low-cost, and can adjust the height and outer diameter of the micro-hemispherical resonator. Utility Model Content

[0005] In response to the problems in the background technology, the utility model proposes a micro-hemispherical resonator coating fixture. The device can adjust the metal film preparation position according to the different electrode excitation methods required by the micro-hemispherical resonator gyroscope, so as to effectively ensure the optimal performance of the metalized film on the surface of the micro-hemispherical resonator, and is suitable for mass production of micro-hemispherical resonator magnetron sputtering coating.

[0006] The utility model adopts the following technical solutions:

[0007] A micro-hemispherical resonator coating fixture includes a cylindrical support rod and a positioner. The top surface of the positioner is provided with a sink hole, and the bottom surface thereof is provided with a mounting hole. The mounting hole extends upward to communicate with the sink hole.

[0008] The upper part of the cylindrical support rod passes through the mounting hole and extends into the sink hole. The hemispherical resonator to be coated is placed in the sink hole and supported on the top surface of the cylindrical support rod. The lower part of the cylindrical support rod is used to be detachably connected to the clamp in the coating cavity; the lower part of the positioner is detachably connected to the cylindrical support rod, and the positioner can be moved up and down relative to the cylindrical support rod until the lip surface of the hemispherical resonator is flush with the top surface of the locator, or the part of the outer surface of the micro-hemispherical resonator to be coated is exposed outside the sink hole.

[0009] Optionally, a diameter-changing cylinder is further included, which is sleeved in the sink hole, with its outer circumferential wall matching the side wall of the sink hole and its inner diameter matching the outer diameter of the lip edge of the hemispherical resonator to be coated.

[0010] The upper part of the cylindrical support rod passes through the mounting hole and extends into the variable diameter cylinder. The hemispherical resonator to be coated is placed in the variable diameter cylinder and supported on the top surface of the cylindrical support rod.

[0011] The positioner can move up and down relative to the cylindrical support rod until the lip edge surface of the hemispherical resonator is flush with the top surface of the variable diameter cylinder, or the outer surface of the micro hemispherical resonator that needs to be coated is exposed outside the variable diameter cylinder.

[0012] Optionally, a jackscrew bolt is provided between the positioner and the variable diameter cylinder for fastening the two together.

[0013] Optionally, the lower portion of the positioner is detachably connected to the cylindrical support rod via a sinking platform limiting bolt, and the upper portion of the stud of the sinking platform limiting bolt extends into the mounting hole of the positioner and is threadedly connected thereto;

[0014] The top surface of the stud of the sinking platform limiting bolt is provided with an accommodating hole with a diameter larger than the diameter of the cylindrical support rod, and the lower part of the cylindrical support rod is placed in the accommodating hole.

[0015] Optionally, a spring is further included, which is passed through the lower part of the stud of the sinking platform limiting bolt and is compressed between the top surface of the nut of the sinking platform limiting bolt and the bottom surface of the locator.

[0016] Optionally, the top surface of the nut of the sink limit bolt and the bottom surface of the positioner are both provided with annular grooves for accommodating corresponding ends of the spring.

[0017] Optionally, a connecting piece is further included, the upper part of which is detachably connected to the cylindrical support rod after passing through the sinking platform limit bolt, and the lower part is used to be detachably connected to the clamp in the coating cavity.

[0018] Optionally, the connecting member is a bolt structure, wherein the stud passes through the sinking platform limiting bolt and is threadedly connected to the cylindrical support rod, and the nut is used to be detachably connected to the fixture in the coating cavity.

[0019] Compared with the prior art, the advantages of the present invention are:

[0020] The micro-hemispherical resonator coating fixture of the present invention includes a cylindrical support rod and a positioner, wherein the top surface of the positioner is provided with a countersunk hole, and the bottom surface thereof is provided with a mounting hole, the mounting hole extending upward to communicate with the countersunk hole, the upper portion of the cylindrical support rod passing through the mounting hole and extending into the countersunk hole, the hemispherical resonator to be coated is placed in the countersunk hole and supported on the cylindrical support rod, the lower portion of the cylindrical support rod is used to be detachably connected to the fixture in the coating cavity; the lower portion of the positioner is detachably connected to the cylindrical support rod, and the positioner can be moved up and down relative to the cylindrical support rod until the lip edge of the hemispherical resonator is flush with the top surface of the positioner, or the portion of the outer surface of the micro-hemispherical resonator to be coated is exposed outside the countersunk hole. Thus, the present invention can adjust the metal film preparation position according to the different electrode excitation methods required by the micro-hemispherical resonator, so as to effectively ensure the optimal performance of the metalized film on the surface of the micro-hemispherical resonator, and is suitable for mass production of magnetron sputtering coating of micro-hemispherical resonators. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to make the present invention more easily understood, the present invention will be described in more detail with reference to the specific embodiments shown in the accompanying drawings. These drawings only depict typical embodiments of the present invention and should not be considered as limiting the scope of protection of the present invention.

[0022] Figure 1 This is a schematic diagram of the main structure of the micro-hemispherical resonator coating fixture according to an embodiment of the present invention.

[0023] Figure 2 This is a schematic diagram of the three-dimensional structure of the micro-hemispherical resonator coating fixture of an embodiment of the present invention for clamping a planar electrode micro-hemispherical resonator for coating.

[0024] Figure 3 This is a schematic cross-sectional view of the micro-hemispherical resonator coating fixture of an embodiment of the present invention for clamping a planar electrode micro-hemispherical resonator for coating.

[0025] Figure 4 Schematic diagram of the planar electrode micro-hemispherical resonator after coating.

[0026] Figure 5 This is a schematic diagram of the three-dimensional structure of the micro-hemispherical resonator coating fixture of an embodiment of the present invention for clamping 3D electrode micro-hemispherical resonator coating.

[0027] Figure 6 Schematic diagram of the 3D electrode micro-hemispherical resonator after coating.

[0028] Reference numerals:

[0029] 1. Connector; 2. Countersunk limit bolt; 21. Accommodation hole; 3. Spring; 4. Cylindrical support rod; 5. Positioner; 51. Countersunk hole; 52. Mounting hole; 6. Variable diameter cylinder; 7. Jackscrew bolt; 8. Hemispherical resonator. DETAILED DESCRIPTION

[0030] The following describes the implementation methods of the present invention with reference to the accompanying drawings so that those skilled in the art can better understand the present invention and implement it. However, the enumerated embodiments are not intended to limit the present invention. Unless there is a conflict, the following embodiments and the technical features in the embodiments can be combined with each other, and the same components are represented by the same figure marks.

[0031] like Figures 1-6 As shown, the micro-hemispherical resonator coating fixture of this embodiment includes a cylindrical support rod 4 and a positioner 5. The top surface of the positioner 5 is provided with a sink hole 51, and the bottom surface thereof is provided with a mounting hole 52. The mounting hole 52 extends upward to communicate with the sink hole 51.

[0032] The upper part of the cylindrical support rod 4 passes through the mounting hole 52 and extends into the sink hole 51. The hemispherical resonator 8 to be coated is placed in the sink hole 51 and supported on the top surface of the cylindrical support rod 4. The lower part of the cylindrical support rod 4 is used to be detachably connected to the clamp in the coating cavity; the lower part of the positioner 5 is detachably connected to the cylindrical support rod 4, and the positioner 5 can move up and down relative to the cylindrical support rod 4 until the lip surface of the hemispherical resonator is flush with the top surface of the positioner 5, or the part of the outer surface of the micro-hemispherical resonator to be coated is exposed outside the sink hole 51.

[0033] Therefore, the micro-hemispherical resonator coating fixture of the present invention can adjust the metal film preparation position according to the different electrode excitation methods required by the micro-hemispherical resonator gyroscope, so as to effectively ensure the optimal performance of the metalized film on the surface of the micro-hemispherical resonator, and is suitable for mass production of micro-hemispherical resonator magnetron sputtering coating.

[0034] In this embodiment, a variable diameter cylinder 6 is further included. The variable diameter cylinder 6 is sleeved in the sink hole 51. The outer circumferential wall of the variable diameter cylinder 6 matches the side wall of the sink hole 51, and the inner diameter of the variable diameter cylinder 6 matches the outer diameter of the lip edge surface of the hemispherical resonator 8 to be coated.

[0035] The upper portion of the cylindrical support rod 4 passes through the mounting hole 52 and extends into the variable diameter cylinder 6. The hemispherical resonator 8 to be coated is placed in the variable diameter cylinder 6 and supported on the top surface of the cylindrical support rod 4.

[0036] The positioner 5 can move up and down relative to the cylindrical support rod 4 until the lip edge of the hemispherical resonator is flush with the top surface of the variable diameter cylinder, or the outer surface of the micro-hemispherical resonator that needs to be coated is exposed outside the variable diameter cylinder.

[0037] The variable diameter cylinder 6 is mainly used to solve the problem of mismatch of the clamping mask fixture caused by the uncertainty of the outer diameter and height of the micro-hemispherical resonator.

[0038] In this embodiment, a jackscrew bolt 7 is provided between the positioner 5 and the diameter-changing cylinder 6 for fastening the two together.

[0039] In this embodiment, the lower portion of the positioner 5 is detachably connected to the cylindrical support rod 4 via the sinking platform limiting bolt 2, and the upper portion of the stud of the sinking platform limiting bolt 2 extends into the mounting hole 52 of the positioner 5 and is threadedly connected thereto;

[0040] The top surface of the stud of the sink platform limiting bolt 2 is provided with an accommodating hole 21 with a diameter larger than the diameter of the cylindrical support rod 4 , and the lower part of the cylindrical support rod 4 is placed in the accommodating hole 21 .

[0041] In this embodiment, a spring 3 is further included. The spring 3 is passed through the lower part of the stud of the sinking platform limiting bolt 2 and is compressed between the top surface of the nut of the sinking platform limiting bolt 2 and the bottom surface of the positioner 5.

[0042] In this embodiment, annular grooves for accommodating corresponding ends of the spring 3 are formed on the top surface of the nut of the sinking platform limiting bolt 2 and the bottom surface of the positioner 5 .

[0043] This embodiment further includes a connecting member 1, the upper portion of which passes through the sinking platform limit bolt 2 and is detachably connected to the cylindrical support rod 4, and the lower portion is used to be detachably connected to the fixture in the coating cavity.

[0044] In this embodiment, the connecting member 1 is a cylindrical bolt structure, the stud thereof passes through the sinking platform limiting bolt 2 and is threadedly connected to the cylindrical support rod 4, and the nut thereof is used to be detachably connected to the fixture in the coating chamber.

[0045] Specifically, the cylindrical bolt (i.e., the connector 1) is made of copper, aluminum, stainless steel, etc., with an external thread processed on the upper end and the lower end matched to the size of the fixture in the coating cavity;

[0046] Specifically, the sinking platform limit bolt 2 is made of copper, aluminum, stainless steel, polytetrafluoroethylene and other materials. The center part of the cylinder is opened in two sections. The lower end is opened according to the outer diameter of the external thread on the upper end of the cylindrical bolt, and the upper end is opened according to the outer diameter of the lower end of the cylindrical support rod 4 and is larger than the outer diameter. The sinking platform limit bolt 2 is fixed through the upper end external thread of the connector 1 through the lower end hole, and the outer wall of the upper end is processed with external threads, and the sinking platform surface is grooved;

[0047] Specifically, select a spring 3 with the same size as the slotted hole on the sinking table surface of the sinking table limit bolt, and install the spring 3 into the annular slot for limiting and fixing;

[0048] Specifically, the cylindrical support rod 4 is made of copper, aluminum, stainless steel, polytetrafluoroethylene and other materials. The middle of the lower end of the cylinder is processed with an internal thread matching the external thread processed on the upper end of the cylindrical bolt, and is locked by the thread;

[0049] Specifically, the cylindrical positioner 5 is made of copper, aluminum, stainless steel, polytetrafluoroethylene and other materials. The upper end of the center of the cylinder is opened with a sinking hole according to the maximum height and maximum outer diameter of the micro-hemispherical resonator, and the middle is processed with an internal thread according to the external thread size of the sinking limit bolt 2 and penetrated. The upper end is penetrated by a side threaded hole at half the position of the maximum height of the micro-hemispherical resonator, and the bottom of the lower end surface is slotted according to the outer diameter size of the spring. The cylindrical positioner and the sinking limit bolt are installed through threads and are limited and fixed by a spring.

[0050] Specifically, the variable diameter cylinder 6 is made of copper, aluminum, stainless steel, polytetrafluoroethylene and other materials, and is processed according to the inner diameter of the countersink hole of the positioner 5 and the outer diameter of the micro-hemispherical resonator. This part is batch processed within a certain range of the micro-hemispherical resonator size specification. The variable diameter cylinder is selected according to the equatorial size of the micro-hemispherical resonator and is tightened from the threaded hole on the side of the cylinder positioner through a jackscrew bolt;

[0051] As described above, the present invention provides the following gain effects: the structure and device are simple, and the variable diameter cylinder can be replaced to adapt to micro-hemispherical resonators of various outer diameters. The rotary adjustment of the cylinder positioner can adapt to different heights of the micro-hemispherical resonator. At the same time, the planar electrode and the 3D electrode can be masked according to the required coverage position of the micro-hemispherical resonator film;

[0052] For the planar electrode excitation condition, Figure 2 and Figure 3 As shown, rotate and adjust the cylinder positioner until the lip edge of the micro-hemispherical resonator is flush with the top surface of the variable diameter cylinder, and then the inner surface and lip edge of the micro-hemispherical resonator can be coated; the schematic diagram of the effect of the micro-hemispherical resonator after coating is shown in Figure 4 shown.

[0053] For 3D electrode excitation conditions, Figure 5As shown, rotate and adjust the cylindrical positioner until the outer surface of the micro-hemispherical resonator to be coated is exposed outside the sink hole, and then the inner surface, lip edge surface, and outer surface exposed inside the sink hole of the micro-hemispherical resonator can be coated; the effect of the micro-hemispherical resonator after coating is shown in the schematic diagram. Figure 6 shown.

[0054] The coating and clamping process of the planar electrode micro-hemispherical resonator is as follows:

[0055] 1) The threaded end of the connector 1 passes through the center hole at the bottom of the sinking platform limit bolt 2;

[0056] 2) The threaded end of the sinking platform limit bolt 2 passes through the spring 3, and one end of the spring 3 is installed into the sinking platform limit bolt 2 sinking platform groove to fix it;

[0057] 3) The internal threaded end of the cylindrical support rod 4 passes through the center hole of the threaded end of the sinking platform limit bolt 2, and the cylindrical support rod 4 and the connecting piece 1 are rotated and locked;

[0058] 4) The threaded end of the cylinder positioner 5 is matched with the threaded end of the sinking platform limit bolt 2, and one end of the spring 3 is inserted into the notch of the cylinder positioner 5 for fixation. The height can be adjusted by rotation, and the spring 3 can be pre-tightened at the same time;

[0059] 5) The reducing cylinder 6 is polished in the middle according to the maximum outer diameter of the micro-hemispherical resonator, and the outer diameter of the reducing cylinder 6 is opened according to the inner diameter of the countersunk hole end of the cylinder positioner 5. The reducing cylinder 6 is installed in the countersunk hole end of the cylinder positioner 5 and locked by the top screw bolt 7;

[0060] 6) Rotate the cylinder positioner 5 so that it is flush with the top of the cylindrical support rod 4, and wipe a thin layer of silicone on the top of the cylindrical support rod 4;

[0061] 7) Rotate the cylindrical positioner 5 to raise it to the height required for the electroplating film to cover the micro-hemispherical resonator;

[0062] 8) The micro-hemispherical resonator 8 is placed in the limited position by the variable diameter cylinder 6, and the micro-hemispherical resonator 8 is fixed to the thin layer of silicone on the top of the cylindrical support rod 4 by bonding. Then, magnetron sputtering coating can be performed. The effect after coating is shown in the schematic diagram. Figure 4 shown.

[0063] The coating and clamping process of 3D electrode micro-hemispherical resonator is roughly the same as that of planar electrode micro-hemispherical resonator. The difference is that in step 6, the cylindrical positioner 5 is rotated to lower the micro-hemispherical resonator to the set height outside the sink hole. The effect after coating is shown in the figure. Figure 6 shown.

[0064] The embodiments described above are only preferred specific implementation methods of the present invention. Common changes and substitutions made by those skilled in the art within the scope of the technical solution of the present invention should be included in the protection scope of the present invention.

Claims

1. A micro-hemispherical resonator coating fixture, characterized in that: The utility model comprises a cylindrical support rod (4) and a positioner (5), wherein the top surface of the positioner (5) is provided with a sinking hole (51), and the bottom surface thereof is provided with a mounting hole (52), and the mounting hole (52) extends upward to communicate with the sinking hole (51). The upper portion of the cylindrical support rod (4) passes through the mounting hole (52) and extends into the sink hole (51); the hemispherical resonator (8) to be coated is placed in the sink hole (51) and supported on the top surface of the cylindrical support rod (4); the lower portion of the cylindrical support rod (4) is used to be detachably connected to a clamp in the coating cavity; the lower portion of the positioner (5) is detachably connected to the cylindrical support rod (4), and the positioner 5 can move up and down relative to the cylindrical support rod (4) until the lip edge surface of the hemispherical resonator is flush with the top surface of the positioner (5), or the portion of the outer surface of the micro-hemispherical resonator to be coated is exposed outside the sink hole (51).

2. The micro-hemispherical resonator coating fixture according to claim 1, characterized in that: It also includes a diameter-changing cylinder (6), which is sleeved in the sinking hole (51), and its outer circumferential wall matches the side wall of the sinking hole (51), and its inner diameter matches the outer diameter of the lip edge surface of the hemispherical resonator (8) to be plated. The upper portion of the cylindrical support rod (4) passes through the mounting hole (52) and extends into the variable diameter cylinder (6). The hemispherical resonator (8) to be plated is placed in the variable diameter cylinder (6) and supported on the top surface of the cylindrical support rod (4). The positioner (5) can move up and down relative to the cylindrical support rod (4) until the lip edge of the hemispherical resonator is flush with the top surface of the variable diameter cylinder, or the outer surface of the micro-hemispherical resonator that needs to be coated is exposed outside the variable diameter cylinder.

3. The micro-hemispherical resonator coating fixture according to claim 2, characterized in that: A top screw bolt (7) for fastening the positioner (5) and the diameter-changing cylinder (6) is provided between the positioner (5) and the diameter-changing cylinder (6).

4. The micro-hemispherical resonator coating fixture according to any one of claims 1 to 3, characterized in that: The lower part of the positioner (5) is detachably connected to the cylindrical support rod (4) through the sinking platform limiting bolt (2), and the upper part of the stud of the sinking platform limiting bolt (2) extends into the mounting hole (52) of the positioner (5) and is threadedly connected thereto; The top surface of the stud of the sinking platform limiting bolt (2) is provided with a receiving hole (21) having a diameter larger than the rod diameter of the cylindrical support rod (4), and the lower part of the cylindrical support rod (4) is placed in the receiving hole (21).

5. The micro-hemispherical resonator coating fixture according to claim 4, characterized in that: It also includes a spring (3), which is passed through the lower part of the stud of the sinking platform limiting bolt (2) and compressed between the top surface of the nut of the sinking platform limiting bolt (2) and the bottom surface of the positioner (5).

6. The micro-hemispherical resonator coating fixture according to claim 5, characterized in that: The top surface of the nut of the sinking platform limiting bolt (2) and the bottom surface of the positioner (5) are both provided with an annular groove for accommodating the corresponding end of the spring (3).

7. The micro-hemispherical resonator coating fixture according to claim 4, characterized in that: It also includes a connecting piece (1), the upper part of which passes through the sinking platform limit bolt (2) and is detachably connected to the cylindrical support rod (4), and the lower part of which is used to be detachably connected to the clamp in the coating cavity.

8. The micro-hemispherical resonator coating fixture according to claim 7, characterized in that: The connecting piece (1) is a bolt structure, wherein the stud passes through the sinking platform limit bolt (2) and is threadedly connected to the cylindrical support rod (4), and the nut is used for detachably connecting to the clamp in the coating cavity.

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